Ablation Phenomenon

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Yun Woo Lee - One of the best experts on this subject based on the ideXlab platform.

  • dual line fabrication method in direct laser lithography to reduce the manufacturing time of diffractive optics elements
    Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, 2017
    Co-Authors: Younggwang Kim, Hyuggyo Rhee, Youngsik Ghim, Hosoon Yang, Yun Woo Lee
    Abstract:

    In order to reduce the fabrication time of the diffractive optical elements (DOEs), a new process is proposed by combining the laser Ablation Phenomenon using the laser intensity in the conventional thermochemical process. The basic mechanism of the proposed method and experimental results are also presented. We confirmed the effect of reducing the movement distance of the stage for the production of the overall lithography when we made repetitive square patterns. The time reduction rate is drastically improved when the number of patterns is increased. Various patterns including rectangular, triangular, parallelogram, and diamond shape were fabricated by using the proposed method.

  • dual line fabrication method in direct laser lithography to reduce the manufacturing time of diffractive optics elements
    Optics Express, 2017
    Co-Authors: Younggwang Kim, Hyuggyo Rhee, Youngsik Ghim, Hosoon Yang, Yun Woo Lee
    Abstract:

    To reduce the manufacturing time of DOEs (Diffractive Optics Elements) and POEs (Periodical Optics Elements), a new fabrication method in direct laser lithography is proposed based on the laser Ablation Phenomenon and the thermochemical effect of chrome. The basic mechanism of the proposed method and experimental results are also presented. It was found that when a 3 × 3 rectangular pattern is fabricated, the proposed method can reduce the total lithographic length by approximately 33%. The manufacturing time is reduced by nearly 52%. When fabricating a 1,000 × 1,000 rectangular pattern, the manufacturing time was reduced by more than 90%. The time reduction rate is drastically improved when the number of patterns is increased. Various patterns including rectangular, triangular, parallelogram, and diamond shape were fabricated by using the proposed method.

Younggwang Kim - One of the best experts on this subject based on the ideXlab platform.

  • dual line fabrication method in direct laser lithography to reduce the manufacturing time of diffractive optics elements
    Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, 2017
    Co-Authors: Younggwang Kim, Hyuggyo Rhee, Youngsik Ghim, Hosoon Yang, Yun Woo Lee
    Abstract:

    In order to reduce the fabrication time of the diffractive optical elements (DOEs), a new process is proposed by combining the laser Ablation Phenomenon using the laser intensity in the conventional thermochemical process. The basic mechanism of the proposed method and experimental results are also presented. We confirmed the effect of reducing the movement distance of the stage for the production of the overall lithography when we made repetitive square patterns. The time reduction rate is drastically improved when the number of patterns is increased. Various patterns including rectangular, triangular, parallelogram, and diamond shape were fabricated by using the proposed method.

  • dual line fabrication method in direct laser lithography to reduce the manufacturing time of diffractive optics elements
    Optics Express, 2017
    Co-Authors: Younggwang Kim, Hyuggyo Rhee, Youngsik Ghim, Hosoon Yang, Yun Woo Lee
    Abstract:

    To reduce the manufacturing time of DOEs (Diffractive Optics Elements) and POEs (Periodical Optics Elements), a new fabrication method in direct laser lithography is proposed based on the laser Ablation Phenomenon and the thermochemical effect of chrome. The basic mechanism of the proposed method and experimental results are also presented. It was found that when a 3 × 3 rectangular pattern is fabricated, the proposed method can reduce the total lithographic length by approximately 33%. The manufacturing time is reduced by nearly 52%. When fabricating a 1,000 × 1,000 rectangular pattern, the manufacturing time was reduced by more than 90%. The time reduction rate is drastically improved when the number of patterns is increased. Various patterns including rectangular, triangular, parallelogram, and diamond shape were fabricated by using the proposed method.

Youngsik Ghim - One of the best experts on this subject based on the ideXlab platform.

  • dual line fabrication method in direct laser lithography to reduce the manufacturing time of diffractive optics elements
    Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, 2017
    Co-Authors: Younggwang Kim, Hyuggyo Rhee, Youngsik Ghim, Hosoon Yang, Yun Woo Lee
    Abstract:

    In order to reduce the fabrication time of the diffractive optical elements (DOEs), a new process is proposed by combining the laser Ablation Phenomenon using the laser intensity in the conventional thermochemical process. The basic mechanism of the proposed method and experimental results are also presented. We confirmed the effect of reducing the movement distance of the stage for the production of the overall lithography when we made repetitive square patterns. The time reduction rate is drastically improved when the number of patterns is increased. Various patterns including rectangular, triangular, parallelogram, and diamond shape were fabricated by using the proposed method.

  • dual line fabrication method in direct laser lithography to reduce the manufacturing time of diffractive optics elements
    Optics Express, 2017
    Co-Authors: Younggwang Kim, Hyuggyo Rhee, Youngsik Ghim, Hosoon Yang, Yun Woo Lee
    Abstract:

    To reduce the manufacturing time of DOEs (Diffractive Optics Elements) and POEs (Periodical Optics Elements), a new fabrication method in direct laser lithography is proposed based on the laser Ablation Phenomenon and the thermochemical effect of chrome. The basic mechanism of the proposed method and experimental results are also presented. It was found that when a 3 × 3 rectangular pattern is fabricated, the proposed method can reduce the total lithographic length by approximately 33%. The manufacturing time is reduced by nearly 52%. When fabricating a 1,000 × 1,000 rectangular pattern, the manufacturing time was reduced by more than 90%. The time reduction rate is drastically improved when the number of patterns is increased. Various patterns including rectangular, triangular, parallelogram, and diamond shape were fabricated by using the proposed method.

Hosoon Yang - One of the best experts on this subject based on the ideXlab platform.

  • dual line fabrication method in direct laser lithography to reduce the manufacturing time of diffractive optics elements
    Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, 2017
    Co-Authors: Younggwang Kim, Hyuggyo Rhee, Youngsik Ghim, Hosoon Yang, Yun Woo Lee
    Abstract:

    In order to reduce the fabrication time of the diffractive optical elements (DOEs), a new process is proposed by combining the laser Ablation Phenomenon using the laser intensity in the conventional thermochemical process. The basic mechanism of the proposed method and experimental results are also presented. We confirmed the effect of reducing the movement distance of the stage for the production of the overall lithography when we made repetitive square patterns. The time reduction rate is drastically improved when the number of patterns is increased. Various patterns including rectangular, triangular, parallelogram, and diamond shape were fabricated by using the proposed method.

  • dual line fabrication method in direct laser lithography to reduce the manufacturing time of diffractive optics elements
    Optics Express, 2017
    Co-Authors: Younggwang Kim, Hyuggyo Rhee, Youngsik Ghim, Hosoon Yang, Yun Woo Lee
    Abstract:

    To reduce the manufacturing time of DOEs (Diffractive Optics Elements) and POEs (Periodical Optics Elements), a new fabrication method in direct laser lithography is proposed based on the laser Ablation Phenomenon and the thermochemical effect of chrome. The basic mechanism of the proposed method and experimental results are also presented. It was found that when a 3 × 3 rectangular pattern is fabricated, the proposed method can reduce the total lithographic length by approximately 33%. The manufacturing time is reduced by nearly 52%. When fabricating a 1,000 × 1,000 rectangular pattern, the manufacturing time was reduced by more than 90%. The time reduction rate is drastically improved when the number of patterns is increased. Various patterns including rectangular, triangular, parallelogram, and diamond shape were fabricated by using the proposed method.

Hyuggyo Rhee - One of the best experts on this subject based on the ideXlab platform.

  • dual line fabrication method in direct laser lithography to reduce the manufacturing time of diffractive optics elements
    Society of Photo-Optical Instrumentation Engineers (SPIE) Conference Series, 2017
    Co-Authors: Younggwang Kim, Hyuggyo Rhee, Youngsik Ghim, Hosoon Yang, Yun Woo Lee
    Abstract:

    In order to reduce the fabrication time of the diffractive optical elements (DOEs), a new process is proposed by combining the laser Ablation Phenomenon using the laser intensity in the conventional thermochemical process. The basic mechanism of the proposed method and experimental results are also presented. We confirmed the effect of reducing the movement distance of the stage for the production of the overall lithography when we made repetitive square patterns. The time reduction rate is drastically improved when the number of patterns is increased. Various patterns including rectangular, triangular, parallelogram, and diamond shape were fabricated by using the proposed method.

  • dual line fabrication method in direct laser lithography to reduce the manufacturing time of diffractive optics elements
    Optics Express, 2017
    Co-Authors: Younggwang Kim, Hyuggyo Rhee, Youngsik Ghim, Hosoon Yang, Yun Woo Lee
    Abstract:

    To reduce the manufacturing time of DOEs (Diffractive Optics Elements) and POEs (Periodical Optics Elements), a new fabrication method in direct laser lithography is proposed based on the laser Ablation Phenomenon and the thermochemical effect of chrome. The basic mechanism of the proposed method and experimental results are also presented. It was found that when a 3 × 3 rectangular pattern is fabricated, the proposed method can reduce the total lithographic length by approximately 33%. The manufacturing time is reduced by nearly 52%. When fabricating a 1,000 × 1,000 rectangular pattern, the manufacturing time was reduced by more than 90%. The time reduction rate is drastically improved when the number of patterns is increased. Various patterns including rectangular, triangular, parallelogram, and diamond shape were fabricated by using the proposed method.