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Argon Ion

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Ian J. Hodgkinson – One of the best experts on this subject based on the ideXlab platform.

  • The influence of Argon Ion bombardment on form birefringence in thin films of titania
    Journal of Applied Physics, 1992
    Co-Authors: R. W. Sprague, Carolyn F. Hickey, Ian J. Hodgkinson

    Abstract:

    Thin films of titanium oxide deposited in the presence of oxygen at oblique incidence under Argon Ion bombardment exhibit birefringence that depends on the energy and relative directIon of the Ion beam and material flux.

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Costas P Grigoropoulos – One of the best experts on this subject based on the ideXlab platform.

  • transient heating and melting transformatIons in Argon Ion laser irradiatIon of polysilicon films
    Journal of Applied Physics, 1993
    Co-Authors: Xianfan Xu, Scott L Taylor, Hee K Park, Costas P Grigoropoulos

    Abstract:

    Undoped, thin silicon films have been deposited at different temperatures on fused quartz substrates by low‐pressure chemical vapor depositIon. The heating of these films by continuous wave, ArgonIon laser beam irradiatIon has been studied. In situ, normal incidence reflectivity measurements have been obtained at specified locatIons in the semiconductor films. Melting and recrystallizatIon phenomena have been probed by transient measurements. The static film reflectivity at elevated temperatures, up to about 1400 K, has also been measured. The temperature field has been analyzed numerically, using a modified enthalpy model. Thin‐film optics were used to calculate the ArgonIon laser light absorptIon in the polysilicon layer and the transient reflectivity response to the probing laser light. The predicted and experimentally measured reflectivity histories have been compared. The initial stages of the phase change process have been captured by high‐speed photography.

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R. W. Sprague – One of the best experts on this subject based on the ideXlab platform.

  • The influence of Argon Ion bombardment on form birefringence in thin films of titania
    Journal of Applied Physics, 1992
    Co-Authors: R. W. Sprague, Carolyn F. Hickey, Ian J. Hodgkinson

    Abstract:

    Thin films of titanium oxide deposited in the presence of oxygen at oblique incidence under Argon Ion bombardment exhibit birefringence that depends on the energy and relative directIon of the Ion beam and material flux.

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