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Tadashi Shiraishi – 1st expert on this subject based on the ideXlab platform

  • open air photoresist Ashing by a cold plasma torch catalytic effect of cathode material
    Applied Physics Letters, 1995
    Co-Authors: Kiyoto Inomata, Hideomi Koinuma, Yoshiyuki Oikawa, Tadashi Shiraishi


    A beam plasma was generated and exhausted into air by applying rf voltage to the atmospheric pressure argon flowing through a cylindrical gap between a needle cathode and a grounded cylindrical anode whose surface was covered with an insulator. This torch‐type plasma with gas and electron temperatures of 240 °C (44.2 meV) and 1.0 eV, respectively, has been verified to be useful for Ashing a photoresist without using a pumping system. High rate (≥1.2 μm/min) photoresist Ashing was achieved by using Ar plasma containing a small amount of oxygen. Also reported are optical emission analysis of plasma and analyses of ashed Si surface by scanning electron microscopy. Fourier transform infrared spectroscopy, electron microprobe analysis, and x‐ray photoelectron spectroscopy. The use of the Pt cathode was found to provide not only a better ashed surface but also a higher Ashing rate than the use of the stainless‐steel cathode.

Guangsuo Yu – 2nd expert on this subject based on the ideXlab platform

  • the physicochemical properties of different biomass ashes at different Ashing temperature
    Renewable Energy, 2011
    Co-Authors: Ruirui Xiao, Xueli Chen, Fuchen Wang, Guangsuo Yu


    There are no specific standards for biomass ash analysis in China, so the standards for coal ash analysis are usually used to determine the property of biomass ash. Three kinds of biomass including rice straw, pine sawdust and Chinese Parasol Tree leaf burned at 815 °C, 600 °C and 500 °C respectively corresponding to the temperature required in the standard of GB and ASTM. The ash content and composition were analyzed. Based on the ash composition results, the volatilization of alkali oxides in biomass ash and slagging/fouling problems related to biomass thermochemical conversion were investigated. The alkali metals were relatively more volatile with the increasing of Ashing temperature. The crystalline phase composition and surface morphology characteristics of the ash particles were investigated by XRD and SEM analysis. The increasing Ashing temperature resulted in the decreasing of the diffraction intensities of metal salts and the increasing of the diffraction intensities of silicon compound. Ash fusion temperatures were measured by 5E-AFII Ash Fusion Analyzer. The results indicated that the ash content, composition, crystalline phases composition, surface morphology and ash fusibility were all closely related to Ashing temperatures. The analysis at 600 °C Ashing temperature was regarded as the optimal for an exact determination of ash properties.

John C. Mitchell – 3rd expert on this subject based on the ideXlab platform

  • Cold Plasma Ashing Preparation of Plant Phytolitiths and their Examination with Scanning Electron Microscopy and Energy Dispersive Analisys of X-rays
    Journal of Archaeological Science, 1996
    Co-Authors: Kathryn A Jakes, John C. Mitchell


    Revisió bibliogràfica sobre fitòlits Nova tècnica de preparació de mostres: radio frequency Ashing process