The Experts below are selected from a list of 475452 Experts worldwide ranked by ideXlab platform
Tadashi Shiraishi - One of the best experts on this subject based on the ideXlab platform.
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open air photoresist Ashing by a cold plasma torch catalytic effect of cathode material
Applied Physics Letters, 1995Co-Authors: Kiyoto Inomata, Hideomi Koinuma, Yoshiyuki Oikawa, Tadashi ShiraishiAbstract:A beam plasma was generated and exhausted into air by applying rf voltage to the atmospheric pressure argon flowing through a cylindrical gap between a needle cathode and a grounded cylindrical anode whose surface was covered with an insulator. This torch‐type plasma with gas and electron temperatures of 240 °C (44.2 meV) and 1.0 eV, respectively, has been verified to be useful for Ashing a photoresist without using a pumping system. High rate (≥1.2 μm/min) photoresist Ashing was achieved by using Ar plasma containing a small amount of oxygen. Also reported are optical emission analysis of plasma and analyses of ashed Si surface by scanning electron microscopy. Fourier transform infrared spectroscopy, electron microprobe analysis, and x‐ray photoelectron spectroscopy. The use of the Pt cathode was found to provide not only a better ashed surface but also a higher Ashing rate than the use of the stainless‐steel cathode.
Guangsuo Yu - One of the best experts on this subject based on the ideXlab platform.
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the physicochemical properties of different biomass ashes at different Ashing temperature
Renewable Energy, 2011Co-Authors: Ruirui Xiao, Xueli Chen, Fuchen Wang, Guangsuo YuAbstract:There are no specific standards for biomass ash analysis in China, so the standards for coal ash analysis are usually used to determine the property of biomass ash. Three kinds of biomass including rice straw, pine sawdust and Chinese Parasol Tree leaf burned at 815 °C, 600 °C and 500 °C respectively corresponding to the temperature required in the standard of GB and ASTM. The ash content and composition were analyzed. Based on the ash composition results, the volatilization of alkali oxides in biomass ash and slagging/fouling problems related to biomass thermochemical conversion were investigated. The alkali metals were relatively more volatile with the increasing of Ashing temperature. The crystalline phase composition and surface morphology characteristics of the ash particles were investigated by XRD and SEM analysis. The increasing Ashing temperature resulted in the decreasing of the diffraction intensities of metal salts and the increasing of the diffraction intensities of silicon compound. Ash fusion temperatures were measured by 5E-AFII Ash Fusion Analyzer. The results indicated that the ash content, composition, crystalline phases composition, surface morphology and ash fusibility were all closely related to Ashing temperatures. The analysis at 600 °C Ashing temperature was regarded as the optimal for an exact determination of ash properties.
John C. Mitchell - One of the best experts on this subject based on the ideXlab platform.
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Cold Plasma Ashing Preparation of Plant Phytolitiths and their Examination with Scanning Electron Microscopy and Energy Dispersive Analisys of X-rays
Journal of Archaeological Science, 1996Co-Authors: Kathryn A Jakes, John C. MitchellAbstract:Revisió bibliogràfica sobre fitòlits Nova tècnica de preparació de mostres: radio frequency Ashing process
Kiwoong Whang - One of the best experts on this subject based on the ideXlab platform.
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low k material damage during photoresist Ashing process
Journal of Applied Physics, 2015Co-Authors: Wanjae Park, Heewoon Cheong, Kiwoong WhangAbstract:The change of –OH and –CH3 component ratios in Fourier transform-infrared analysis of low-k materials during photoresist (PR) Ashing processes were compared to assess the differences in the damages to low-k materials in a reactive ion etch (RIE) chamber and a magnetized-inductively coupled plasma (M-ICP) chamber. In M-ICP, the PR Ashing rate was 28.1% higher than that of RIE, but the low-k material damage in M-ICP decreased when typical Ashing conditions were used in each machine. The dependences of low-k material damage and PR Ashing rate on the pressure, source power, and bias power in the M-ICP chamber were studied. We measured the ion energy distributions using an ion energy analyzer from which the flux could be also obtained. We found that the PR Ashing rate increased as the ion flux increased, while the low-k material damage also increased as the ion flux and the incident ion energy increased. However, as the pressure decreased, the ion flux increased dramatically and the ion energy decreased. As a result, the PR Ashing rate could be high and the low-k material damage low.
William E Boyd - One of the best experts on this subject based on the ideXlab platform.
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a comparative analysis of wet and dry Ashing techniques for the extraction of phytoliths from plant material
Journal of Archaeological Science, 2001Co-Authors: Jeffrey F Parr, Carol J Lentfer, William E BoydAbstract:Abstract Two methods are commonly used for the extraction of phytoliths from plant material to be used as reference in the analysis of archaeological phytolith samples: (1) spodograms or dry Ashings; and (2) acid digestions or wet Ashing. It has been suggested that these techniques may modify the resultant samples in different ways. Dry Ashing, in particular, has been implicated as a cause of shrinkage and warping in phytolith assemblages when incineration occurs at ≥450°C. The results of a morphometric comparative analysis between the dry Ashing and wet Ashing methods do not support these claims. This study establishes that differences in patterns of dimension and curvature of short bilobate phytoliths and of elongate phytoliths both subjected to dry and wet ash preparation are not statistically significant. There is, therefore, no detectable evidence of morphological impact as a result of these methods. This finding implies that any differences that do occur in phytolith size and curvature are typical, possibly random permutation within assemblages, or that they are the result of variation in leaf cell structure rather than the consequence of a particular extraction procedure. This suggests that the practice of using different methods of preparation of reference samples for fossil analysis can be reliably continued.
