The Experts below are selected from a list of 324 Experts worldwide ranked by ideXlab platform
Kyung Cheol Choi - One of the best experts on this subject based on the ideXlab platform.
-
49.3: Invited Paper: High Efficient Discharge Mode in an AC PDP with an Auxiliary Electrode
SID Symposium Digest of Technical Papers, 2020Co-Authors: Kyung Cheol Choi, Cheol JangAbstract:A high efficacy AC PDP with an Auxiliary Electrode was investigated with the aim of attaining a better understanding of the discharge mechanism in a display cell. There are three types of discharge modes in an AC PDP with an Auxiliary Electrode; however, only two discharge modes that can decrease the discharge current are recommended for use in a high efficacy AC PDP. The discharge current decreased as the Auxiliary pulse voltage increased because the wall charges on the sustain Electrode were erased. However, the IR intensity did not decrease as the Auxiliary pulse was applied. It was also found that the Auxiliary pulse provides priming particles for the following periodic sustain pulse discharge. Consequently, there is a decrease in the discharge current without a reduction of the luminance and priming particles due to the Auxiliary pulse. This can enhance the excitation rate of the discharges generated in the display cell of an AC PDP with an Auxiliary Electrode.
-
Numerical Analysis of Microplasma Generated in the Plasma Display Pixel With an Auxiliary Electrode
IEEE Transactions on Plasma Science, 2011Co-Authors: Kyung Cheol ChoiAbstract:We investigated the microplasma that is generated in a plasma display pixel with an Auxiliary Electrode by using numerical simulation. In particular, the effect of the Auxiliary Electrode on the efficacy of the plasma display was analyzed. The voltage of the sustain Electrode was changed from 190 to 230 V, and the voltage of the Auxiliary Electrode was changed from 0 to 40 V. As the voltage of the Auxiliary Electrode increased at a given sustain voltage, the discharge current decreased, and the delay time of the discharge increased. The average density of the charged particles and the Xe excited species showed a tendency identical to that of the discharge current. The vacuum ultraviolet output and the electrical power decreased, and the luminous efficacy increased as the voltage of the Auxiliary Electrode increased. In the case of Xe excitation efficacy, the peak value in the Auxiliary period increased as the voltage of the Auxiliary Electrode increased, whereas the peak value in the sustain period was shown to be comparable to the variance of the voltage of the Auxiliary Electrode. The infrared intensity increased as the voltages of the sustain and Auxiliary Electrodes increased. In order to verify the effect of the Auxiliary Electrode, the time-spatial distributions of the electrons and excited species were also discussed.
-
P‐92: Analysis of Wall Charge Distribution in an AC PDP with an Auxiliary Electrode Using a Two‐Dimensional Numerical Simulation
SID Symposium Digest of Technical Papers, 2010Co-Authors: Kyung Cheol ChoiAbstract:A two-dimensional simulation code is developed in this study to verify the dynamics of a plasma discharge in an AC PDP with multiple Electrodes. Simulation results showed that a pulse applied to the Auxiliary Electrode contributed to the generation of more excited species as well as increased luminous efficacy. Furthermore, the Xe excitation efficacy and wall charge distribution with and without an Auxiliary Electrode was simulated.
-
Study on Pulse Waveforms for Improving Voltage Margin and Luminous Efficacy in an AC Plasma Display Panel Having Auxiliary Electrodes
IEEE Transactions on Electron Devices, 2010Co-Authors: Chung Sock Choi, Cheol Jang, Kyung Cheol ChoiAbstract:New pulse waveforms applied to an alternating-current plasma display panel (ac PDP) with an Auxiliary Electrode are investigated for the purpose of improving the panel's operating voltage margin and luminous efficacy. In the proposed pulse waveforms with reciprocal sustain pulses, a pair of positive and negative sustain pulses is applied to the sustain Electrodes simultaneously and alternately. A positive Auxiliary pulse is applied to the Auxiliary Electrode immediately after reciprocal sustain pulses. The voltage margin becomes wider, and the luminous efficacy is improved because of the suppression of the discharge toward the address Electrode. In the another proposed pulse waveforms with reciprocal sustain and Auxiliary pulses, a negative pulse, which is the same as the negative pulse of reciprocal sustain pulses, is additionally applied to the Auxiliary Electrode when reciprocal sustain pulses are applied. This negative Auxiliary pulse can maintain a high level of luminous efficacy because it supports the effect of the Auxiliary pulses. The measurement results show that the operating voltage margin is about twice wider than that of the typical pulse waveforms for an ac PDP with an Auxiliary Electrode; furthermore, the maximum luminous efficacy is able to reach 3.14 lm/W in terms of the measurement of the discharge in a 50-in XGA resolution (0.27 mm × 0.81 mm) panel with a white cell and a gas mixture of Ne+20%Xe.
-
An Investigation of the Temporal Dark-Image-Sticking Phenomenon in an AC Plasma Display Panel With an Auxiliary Electrode
IEEE Transactions on Plasma Science, 2010Co-Authors: Cheol Jang, Kyung Cheol ChoiAbstract:In this paper, the temporal dark-image-sticking phenomenon in an AC plasma display panel (PDP) with an Auxiliary Electrode is investigated. To investigate this phenomenon, temporal behaviors of a black background image were observed in accordance with the sustain-discharge time and the relaxation time. Since dark image sticking is related to the reset discharge, our measurements focused on the reset period. In the case of an ac PDP with three Electrodes, iterant sustain discharges induced an increase in black luminance, thereby leaving a residual image. However, in the case of an AC PDP with an Auxiliary Electrode, there was no variation of luminance between the states before and after the iterant sustain discharges. As a result, no residual image remained, and no distortion of the image could be recognized with the human eye, even after iterant sustain discharges.
B.y. Tang - One of the best experts on this subject based on the ideXlab platform.
-
plasma immersion ion implantation of the interior surface of a large cylindrical bore using an Auxiliary Electrode
Journal of Applied Physics, 1998Co-Authors: Xuchu Zeng, T K Kwok, B.y. TangAbstract:A model utilizing cold, unmagnetized, and collisionless fluid ions as well as Boltzmann electrons is used to comprehensively investigate the sheath expansion into a translationally invariant large bore in the presence of an Auxiliary Electrode during plasma immersion ion implantation (PIII) of a cylindrical bore sample. The governing equation of ion continuity, ion motion, and Poisson’s equation are solved by using a numerical finite difference method for different cylindrical bore radii, Auxiliary Electrode radii, and voltage rise times. The ion density and ion impact energy at the cylindrical inner surface, as well as the ion energy distribution, maximum ion impact energy, and average ion impact energy for the various cases are obtained. Our results show a dramatic improvement in the impact energy when an Auxiliary Electrode is used and the recommended normalized Auxiliary Electrode radius is in the range of 0.1–0.3.
-
Pulsed sheath dynamics in a small cylindrical bore with an Auxiliary Electrode for plasma immersion ion implantation
Physics of Plasmas, 1997Co-Authors: X.c. Zeng, T K Kwok, B.y. TangAbstract:The temporal evolution of the plasma sheath in a small cylindrical bore with an Auxiliary Electrode is calculated for zero-rise-time voltage pulses. The ion density, flux, dose, ion energy distribu-tion, and electric field are determined by solving Poisson’s equation and the equations of ion motion and continuity using finite difference methods. Our results indicate that the implantation time is about halved and slightly more than 50% of the ions possess impact energy higher than the maximum achieved when an Auxiliary Electrode is absent. The resulting ion flux, ion current, as well as ion energy distribution, are also determined.
-
effects of the Auxiliary Electrode radius during plasma immersion ion implantation of a small cylindrical bore
Applied Physics Letters, 1997Co-Authors: X.c. Zeng, T K Kwok, B.y. Tang, T E SheridanAbstract:The temporal evolution of the plasma sheath in a small cylindrical bore in the presence of an Auxiliary Electrode is determined for different Electrode radii. The ion density, velocity, flux, dose, ion energy distribution, and average impact energy are calculated by solving Poisson’s Equation and the equations of ion motion and continuity using finite difference methods. The particle-in-cell method is also used to confirm the validity of the data. Our results indicate that more ions will attain high impact energy when the Auxiliary Electrode radius is increased, but the dose will decrease. Our results suggest that the normalized Auxiliary Electrode radius should range from 0.10 to 0.30 in order to maximize the dose and produce a larger number of ions with higher impact energy.
-
Effects of the Auxiliary Electrode radius during plasma immersion ion implantation of a small cylindrical bore
IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science, 1997Co-Authors: X.c. Zeng, T K Kwok, B.y. TangAbstract:Summary form only given, as follows. Plasma immersion ion implantation (PIII) has a number of advantages over conventional beam-line ion implantation techniques. One of them is the ability to implant "interior" surfaces that are not line-of-sight accessible. The inner surfaces of many industrial components, such as dies, bushings, pipes, and so on are difficult to process and inner surface modification using PIII is both interesting scientifically and commercially. We have proposed a method to improve the impact energy of ions implanted into the interior sidewalls of cylindrical specimens by using an Auxiliary Electrode having a zero potential. The ion-matrix sheath and the temporal evolution of the plasma sheath in a small cylindrical bore with an Auxiliary Electrode have been calculated for an Auxiliary Electrode of a regular radius. In this paper, the effects of the Auxiliary Electrode radius are discussed. We compute the critical radius of the cylindrical bore when the ion-matrix sheath just overlaps as well as the number of implanted ions. The ion density, flux, dose, energy, energy distribution, and average impact energy are also determined for different radii of the Auxiliary Electrode by solving Poisson's equation and the equations of ion continuity and motion numerically. Our results provide the theoretical background for the implementation of an Auxiliary Electrode in a PIII instrument.
-
Transient sheath in a small cylindrical bore with an Auxiliary Electrode for finite-rise-time voltage pulses
IEEE Conference Record - Abstracts. 1997 IEEE International Conference on Plasma Science, 1997Co-Authors: X.c. Zeng, T K Kwok, B.y. TangAbstract:Summary form only given. Previous work concentrated on the determination of the ion-matrix sheath and the temporal evolution of the plasma sheath in a small cylindrical bore for zero-rise-time voltage pulses during plasma immersion ion implantation (PIII). Because realistic voltage pulses have a finite rise time, this paper addresses the temporal evolution of the plasma sheath in a small cylindrical bore with an Auxiliary Electrode for different rise times by solving Poisson's equation and the equations of ion continuity and motion numerically using the appropriate boundary conditions. The ion density, flux, dose, energy, energy distribution, and average impact energy on the surface of the target for different rise times are determined and compared to the case when the Auxiliary Electrode is absent. Our results predict a substantial improvement of the impact energy during PIII of a cylindrical bore when an Auxiliary Electrode is employed even for finite-rise-time voltage pulses.
Jingkun Yu - One of the best experts on this subject based on the ideXlab platform.
-
behavior and mechanism of in situ synthesis of Auxiliary Electrode for electrochemical sulfur sensor by calcium aluminate system
Ceramics International, 2020Co-Authors: Jingkun Yu, Lei Yuan, Chen Tian, Yuting ZhouAbstract:Abstract The behavior and mechanism of in-situ synthesis of the Auxiliary Electrode for sulfur sensor were investigated in this work, aiming for better application of calcium aluminate system in synthesizing the Auxiliary Electrode used for sulfur sensor. The in-situ reaction experiment was developed. In addition, the thermodynamic and kinetic calculations were adopted to further study the in-situ reaction possibility and the reaction rate. The results indicated that the value of lg(a[S]/a[O]) should be greater than a particular value to ensure the occurrence of the in-situ reaction. After immersion into the molten iron, the CaS phase was synthesized in the calcium aluminate system. The relationship between the reaction rate and reaction time was exponential, and the initial reaction rate was affected by the CaO content incorporated in the calcium aluminate system and the sulfur content in the molten iron. The initial in-situ reaction rate greatly increased with the increase of the CaO content and sulfur content. For example, the initial reaction rate was as high as 14.87 s-1 when the calcium aluminate system containing 60 wt% of CaO and for a sulfur content of 0.077 wt% in the molten iron. Moreover, the reason that the sulfur sensor fabricated by the ZrO2(MgO) tube with the calcium aluminate coating with different components had the same response time when measuring the different sulfur contents in the molten iron was further explained.
-
synthesis of an Auxiliary Electrode by laser cladding coating for in situ electrochemical sulfur sensing
Materials Letters, 2015Co-Authors: Jingkun Yu, Yifan JiangAbstract:Abstract Compact Auxiliary Electrode layer (MgS+MgO–PSZ) was fabricated on the MgO partially stabilized zirconia (MgO–PSZ) substrates by laser powder cladding (LPC) technique. The microstructure, composition and electrochemical performance of the MgS+MgO–PSZ layer were investigated using X-ray diffraction, scanning electron microscope and electrochemical impedance spectroscopy. The result indicated that the structure of the coating was dense and uniform. Furthermore, the Auxiliary Electrode was found to be efficient for zirconia-based sensor by forming numerous MgS/MgO–PSZ interface that make the S/O equilibrium established effectively.
-
Corrosion of MgO-PSZ in a HF solution and its effect on synthesis of an Auxiliary Electrode for high-temperature sulfur sensors
Measurement Science and Technology, 2012Co-Authors: Lin Li, Jingkun YuAbstract:An Auxiliary Electrode for high-temperature sulfur sensors was synthesized with H2S at the surface of zirconia partially stabilized by magnesia (MgO-PSZ). MgO-PSZ was first corroded in a 40% HF solution under ultrasonic conditions at room temperature for different times. A sulfur sensor, Mo|Mo, Mo2S3|ZrS2 + MgS|ZrO2(MgO)|ZrS2 + MgS|[S]Fe|Mo, was developed and tested in carbon-saturated liquid iron. The results show that a phase transformation from tetragonal to monoclinic takes place on the surface of ZrO2 after MgO-PSZ is exposed to a HF solution. HF treatment of MgO-PSZ can promote formation of the Auxiliary Electrode. The variations of electromotive force versus [wt% S] can be obtained as follows: E = −53.247 ln [wt%S] + 142.86 (r = 0.97).
-
An electrochemical sulfur sensor based on ZrO2(MgO) as solid electrolyte and ZrS2 + MgS as Auxiliary Electrode
Sensors and Actuators B-chemical, 2009Co-Authors: Lin Li, Jingkun YuAbstract:Abstract A sulfur sensor Mo|Mo, Mo2S3|ZrS2 + MgS|ZrO2(MgO)|ZrS2 + MgS|[S]Fe|Mo was developed and tested in carbon-saturated liquid iron. The Auxiliary Electrode was ZrS2 + MgS, which was formed on the surface of ZrO2(MgO) electrolyte by: ZrO2(MgO)(s) + 3H2S(g) = ZrS2(s) + MgS(s) + 3H2O(g). The results indicate that the Auxiliary Electrode is dense, and has a good adhesion to the solid electrolyte. ZrS2 and MgS are stable in the carbon-saturated liquid iron where the aO E = − 65.48 ln [ wt % S ] + 134.42 ( 1550 K ) E = − 81.18 ln [ wt % S ] + 111.66 ( 1600 K )
-
an electrochemical sulfur sensor based on zro2 mgo as solid electrolyte and zrs2 mgs as Auxiliary Electrode
Sensors and Actuators B-chemical, 2009Co-Authors: Lin Li, Jingkun YuAbstract:A sulfur sensor Mo|Mo, Mo2S3|ZrS2 + MgS|ZrO2(MgO)|ZrS2 + MgS|[S]Fe|Mo was developed and tested in carbon-saturated liquid iron. The Auxiliary Electrode was ZrS2 + MgS, which was formed on the surface of ZrO2(MgO) electrolyte by: ZrO2(MgO)(s) + 3H2S(g) = ZrS2(s) + MgS(s) + 3H2O(g). The results indicate that the Auxiliary Electrode is dense, and has a good adhesion to the solid electrolyte. ZrS2 and MgS are stable in the carbon-saturated liquid iron where the aO < 1.25 × 10−7 at 1550 K and aO < 2.10 × 10−7 at 1600 K. The variations of the EMF versus [wt% S] can be obtained as follows: E=−65.48ln[wt%S]+134.42(1550K) E=−81.18ln[wt%S]+111.66(1600K)
T K Kwok - One of the best experts on this subject based on the ideXlab platform.
-
kinetic model for plasma based ion implantation of a short cylindrical tube with Auxiliary Electrode
Applied Physics Letters, 1998Co-Authors: T E Sheridan, T K KwokAbstract:Plasma-based ion implantation of the inner surface of a short, cylindrical tube is modeled using a two-dimensional particle-in-cell simulation. An Auxiliary Electrode, here a coaxial anode, is used to increase the ion impact energy. Initially, ions inside the tube impact the inner surface at approximately normal angles. At later times, ions enter the tube from the exterior plasma and impact predominantly near its center at glancing angles. Ions are found to cross the midplane of the tube and in some cases to pass completely through the tube, in contrast to the predictions of the “collisionless” fluid model. The total incident dose is greatest around the center of the tube, and least at its ends.
-
plasma immersion ion implantation of the interior surface of a large cylindrical bore using an Auxiliary Electrode
Journal of Applied Physics, 1998Co-Authors: Xuchu Zeng, T K Kwok, B.y. TangAbstract:A model utilizing cold, unmagnetized, and collisionless fluid ions as well as Boltzmann electrons is used to comprehensively investigate the sheath expansion into a translationally invariant large bore in the presence of an Auxiliary Electrode during plasma immersion ion implantation (PIII) of a cylindrical bore sample. The governing equation of ion continuity, ion motion, and Poisson’s equation are solved by using a numerical finite difference method for different cylindrical bore radii, Auxiliary Electrode radii, and voltage rise times. The ion density and ion impact energy at the cylindrical inner surface, as well as the ion energy distribution, maximum ion impact energy, and average ion impact energy for the various cases are obtained. Our results show a dramatic improvement in the impact energy when an Auxiliary Electrode is used and the recommended normalized Auxiliary Electrode radius is in the range of 0.1–0.3.
-
Numerical simulation of plasma immersion ion implantation of a finite-length cylindrical bore with Auxiliary Electrode by two-dimensional fluid model
25th Anniversary IEEE Conference Record - Abstracts. 1998 IEEE International Conference on Plasma Science (Cat. No.98CH36221), 1998Co-Authors: T K Kwok, T E Sheridan, X.c. ZengAbstract:Summary form only given. Plasma immersion ion implantation (PIII) of the interior surface of an infinite length cylindrical bore with an Auxiliary Electrode has been studied in some detail. The geometry considered so far is one dimensional with all variables as functions of the radial direction in cylindrical coordinates. If we consider a cylindrical bore with finite length, then the PIII process becomes a two-dimensional case that is a totally different class of problem. All the variables will depend on the radial and longitudinal directions in cylindrical coordinate. In this article, plasma immersion ion implantation (PIII) of the inner surface of a finite length cylindrical bore with a coaxial, grounded Auxiliary Electrode is modeled using a two-dimensional fluid simulation. A thin ring shape cylindrical bore is used in our simulation. It is found that the sheath structure resulting from the Auxiliary Electrode focuses ions from both inside and outside the bore onto the inner surface. To provide uniform implantation of the inner surface, it is recommended that the implantation process ends after the initial charge of ions is emptied from the bore.
-
Studies of the effects of the bore length during plasma immersion ion implantation of a small cylindrical bore with Auxiliary Electrode by two-dimensional fluid model
25th Anniversary IEEE Conference Record - Abstracts. 1998 IEEE International Conference on Plasma Science (Cat. No.98CH36221), 1998Co-Authors: T K Kwok, X.c. ZengAbstract:Summary form only given. The inner surface modification of many industrial components, such as dies, bushings, pipes, etc, using plasma immersion ion implantation (PIII) has grabbed the attention of physicists and materials scientists. One drawback of the PIII modification of inner surface is low ion impact energy. It has been shown that by inserting a zero potential conductive Auxiliary Electrode positioned at the axis of the implanted cylindrical bore, the average ion impact energy can be raised. Plasma immersion ion implantation (PIII) of the inner surface of a finite-length small cylindrical bore with a coaxial, grounded Auxiliary Electrode are calculated using a two-dimensional fluid model. Various ratios of bore diameters against bore lengths are simulated. It is found that the sheath structure resulting from the Auxiliary Electrode focuses ions from both inside and outside the bore onto the inner surface. If the bore length is long enough, the ions from outside the bore cannot be implanted into the deeper region of the inner surface. Therefore, we can simulate the implantation of the deeper region by a one-dimensional fluid model.
-
Pulsed sheath dynamics in a small cylindrical bore with an Auxiliary Electrode for plasma immersion ion implantation
Physics of Plasmas, 1997Co-Authors: X.c. Zeng, T K Kwok, B.y. TangAbstract:The temporal evolution of the plasma sheath in a small cylindrical bore with an Auxiliary Electrode is calculated for zero-rise-time voltage pulses. The ion density, flux, dose, ion energy distribu-tion, and electric field are determined by solving Poisson’s equation and the equations of ion motion and continuity using finite difference methods. Our results indicate that the implantation time is about halved and slightly more than 50% of the ions possess impact energy higher than the maximum achieved when an Auxiliary Electrode is absent. The resulting ion flux, ion current, as well as ion energy distribution, are also determined.
T E Sheridan - One of the best experts on this subject based on the ideXlab platform.
-
Effects of tube length and radius for inner surface plasma immersion ion implantation using an Auxiliary Electrode
IEEE Transactions on Plasma Science, 1999Co-Authors: D.t.-k. Kwok, Xuchu Zeng, Qingchuan Chen, T E SheridanAbstract:Plasma immersion ion implantation of the inner surface of a finite-length small cylindrical tube with a coaxial, grounded Auxiliary Electrode is modeled using a two-dimensional particle-in-cell model. Various ratios of tube lengths against tube diameters are simulated. It is found that a peak in total accumulated dose is observed near the ends of the tube. Provided that it is long enough, the ions that come from the outside of the tube cannot pass through the middle-plane. That is, the tube can be divided conceptually into an "end" and a "middle" region, while the middle remains empty and all the flux goes to the end. In other words, a one-dimensional model can be applied to the "middle" region. The simulation results including the enhanced ion dose agrees with our experimental data.
-
kinetic model for plasma based ion implantation of a short cylindrical tube with Auxiliary Electrode
Applied Physics Letters, 1998Co-Authors: T E Sheridan, T K KwokAbstract:Plasma-based ion implantation of the inner surface of a short, cylindrical tube is modeled using a two-dimensional particle-in-cell simulation. An Auxiliary Electrode, here a coaxial anode, is used to increase the ion impact energy. Initially, ions inside the tube impact the inner surface at approximately normal angles. At later times, ions enter the tube from the exterior plasma and impact predominantly near its center at glancing angles. Ions are found to cross the midplane of the tube and in some cases to pass completely through the tube, in contrast to the predictions of the “collisionless” fluid model. The total incident dose is greatest around the center of the tube, and least at its ends.
-
Numerical simulation of plasma immersion ion implantation of a finite-length cylindrical bore with Auxiliary Electrode by two-dimensional fluid model
25th Anniversary IEEE Conference Record - Abstracts. 1998 IEEE International Conference on Plasma Science (Cat. No.98CH36221), 1998Co-Authors: T K Kwok, T E Sheridan, X.c. ZengAbstract:Summary form only given. Plasma immersion ion implantation (PIII) of the interior surface of an infinite length cylindrical bore with an Auxiliary Electrode has been studied in some detail. The geometry considered so far is one dimensional with all variables as functions of the radial direction in cylindrical coordinates. If we consider a cylindrical bore with finite length, then the PIII process becomes a two-dimensional case that is a totally different class of problem. All the variables will depend on the radial and longitudinal directions in cylindrical coordinate. In this article, plasma immersion ion implantation (PIII) of the inner surface of a finite length cylindrical bore with a coaxial, grounded Auxiliary Electrode is modeled using a two-dimensional fluid simulation. A thin ring shape cylindrical bore is used in our simulation. It is found that the sheath structure resulting from the Auxiliary Electrode focuses ions from both inside and outside the bore onto the inner surface. To provide uniform implantation of the inner surface, it is recommended that the implantation process ends after the initial charge of ions is emptied from the bore.
-
Plasma-immersion ion implantation of the interior surface of a small cylindrical bore using an Auxiliary Electrode for finite rise-time voltage pulses
IEEE Transactions on Plasma Science, 1998Co-Authors: Xuchu Zeng, Tat-kun Kwok, Baoyin Tang, T E SheridanAbstract:Plasma-immersion ion implantation (PIII) can be used to process the interior surfaces of odd-shape specimens such as a cylindrical bore. The temporal evolution of the plasma sheath in a small cylindrical bore in the presence of a grounded coaxial Auxiliary Electrode is derived for voltage pulses of different rise times by solving Poisson's equation and the equations of ion continuity, and motion numerically using the appropriate boundary conditions. It is found that the maximum ion impact energy and the average impact energy are improved for finite rise-time voltage pulses, and shorter rise times yield better results. Our results allow the selection of a suitable Auxiliary Electrode radius to improve the average impact energy for a given rise time.
-
effects of the Auxiliary Electrode radius during plasma immersion ion implantation of a small cylindrical bore
Applied Physics Letters, 1997Co-Authors: X.c. Zeng, T K Kwok, B.y. Tang, T E SheridanAbstract:The temporal evolution of the plasma sheath in a small cylindrical bore in the presence of an Auxiliary Electrode is determined for different Electrode radii. The ion density, velocity, flux, dose, ion energy distribution, and average impact energy are calculated by solving Poisson’s Equation and the equations of ion motion and continuity using finite difference methods. The particle-in-cell method is also used to confirm the validity of the data. Our results indicate that more ions will attain high impact energy when the Auxiliary Electrode radius is increased, but the dose will decrease. Our results suggest that the normalized Auxiliary Electrode radius should range from 0.10 to 0.30 in order to maximize the dose and produce a larger number of ions with higher impact energy.
