The Experts below are selected from a list of 2271 Experts worldwide ranked by ideXlab platform
Makoto Katsurai - One of the best experts on this subject based on the ideXlab platform.
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control of plasma space potentials and chemical vapor depositIon of nanocrystalline diamond films in surface wave excited low pressure plasmas
Journal of Applied Physics, 2007Co-Authors: Makoto KatsuraiAbstract:A dc biasing method, developed in this work, has been investigated for the control of plasma space potentials and the chemical vapor depositIon of nanocrystalline diamond (NCD) films in a planar surface-wave excited plasma at gas pressures below 100mTorr. A negative dc voltage was applied to a specially shaped thin metal plate attached below the upper dielectric window with respect to the grounded substrate and discharge chamber, instead of the conventIonal positive substrate dc biasing method. Plasma parameters were measured using a single-probe and deposited films were evaluated by scanning electron microscopy, atomic force microscopy, and Raman spectroscopy. The applicatIon of the dc bias voltage (0to−150V) enabled the net dc bias current (−0.46–+0.6A) to be varied and plasma space potentials to be decreased over a wide range (34–7V) in the bulk regIon, resulting in the control of the Bombarding Ion energy on the grounded substrate. The vertical plasma parameter profiles showed the spatial difference i...
B Rauschenbach - One of the best experts on this subject based on the ideXlab platform.
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ripple pattern formatIon on silicon surfaces by low energy Ion beam erosIon experiment and theory
Physical Review B, 2005Co-Authors: B Ziberi, Frank Frost, Th Hoche, B RauschenbachAbstract:The topography evolutIon of Si surfaces during low-energy noble-gas Ion-beam erosIon (Ion energy {<=}2000 eV) at room temperature has been studied. Depending on the Ion-beam parameters, self-organized ripple patterns evolve on the surface with a wavelength {lambda}<100 nm. Ripple patterns were found to occur at near-normal Ion incidence angles (5 deg. -30 deg.) with the wave vector oriented parallel to the Ion-beam directIon. The ordering and homogeneity of these patterns increase with Ion fluence, leading to very-well-ordered ripples. The ripple wavelength remains constant with Ion fluence. Also, the influence of Ion energy on the ripple wavelength is investigated. AdditIonally it is shown that the mass of the Bombarding Ion plays a decisive role in the ripple formatIon process. Ripple patterns evolve for Ar{sup +},Kr{sup +}, and Xe{sup +} Ions, while no ripples are observed using Ne{sup +} Ions. These results are discussed in the context of continuum theories and by using Monte Carlo simulatIons.
Oblique Incidences - One of the best experts on this subject based on the ideXlab platform.
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1 Differential Sputtering Yields of Refractory Metals by Xenon, Krypton, and Argon Ion Bombardment at Normal
2005Co-Authors: Oblique IncidencesAbstract:Abstract: Differential sputter yields are reported for Molybdenum, Tantalum, and Tungsten after exposure to Xenon, Krypton, and Argon Ion bombardment at multiple angles of incidence (0- 60°) and Ion energies (150- 1500 eV). Differential yields were measured by sweeping a Quartz Crystal Microbalance (QCM) in a semi-circular arc over a given target in the plane defined by the target normal and Ion beam axis. Differential yields were integrated to obtain total sputter yields. The measured total yields were generally less than, but comparable to, published values. The dependence of total yield on angle of incidence was also investigated. The total yields were found to be largest for angles of incidence between 45 ° and 60°. The effects of the Bombarding Ion energy and the Ion mass-to-target atom mass ratio on the differential yield distributIons are discussed. In additIon, preliminary measurements of differential sputter yields as a functIon of both polar and azimuthal angles are presented. Nomenclature As = QCM sensor area (cm2) J = current (mA
B Ziberi - One of the best experts on this subject based on the ideXlab platform.
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ripple pattern formatIon on silicon surfaces by low energy Ion beam erosIon experiment and theory
Physical Review B, 2005Co-Authors: B Ziberi, Frank Frost, Th Hoche, B RauschenbachAbstract:The topography evolutIon of Si surfaces during low-energy noble-gas Ion-beam erosIon (Ion energy {<=}2000 eV) at room temperature has been studied. Depending on the Ion-beam parameters, self-organized ripple patterns evolve on the surface with a wavelength {lambda}<100 nm. Ripple patterns were found to occur at near-normal Ion incidence angles (5 deg. -30 deg.) with the wave vector oriented parallel to the Ion-beam directIon. The ordering and homogeneity of these patterns increase with Ion fluence, leading to very-well-ordered ripples. The ripple wavelength remains constant with Ion fluence. Also, the influence of Ion energy on the ripple wavelength is investigated. AdditIonally it is shown that the mass of the Bombarding Ion plays a decisive role in the ripple formatIon process. Ripple patterns evolve for Ar{sup +},Kr{sup +}, and Xe{sup +} Ions, while no ripples are observed using Ne{sup +} Ions. These results are discussed in the context of continuum theories and by using Monte Carlo simulatIons.
Bin Hou - One of the best experts on this subject based on the ideXlab platform.
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phase compositIon and tribological performance of molybdenum nitride coatings synthesized by ibad
Surface & Coatings Technology, 2013Co-Authors: Xiaodong Zhu, Di Yue, Chen Shang, Mingtao Fan, Bin HouAbstract:Abstract Molybdenum nitride coatings were synthesized by Ion-beam-assisted-depositIon (IBAD). The effects of nitrogen partial pressure and Bombarding Ion energy on the phase formatIon were investigated. The coefficient of frictIon and wear resistance of the coatings in different environments were studied. The stoichiometric ratio of nitrogen to Mo of the molybdenum nitride phases increases with the nitrogen partial pressure, and higher Bombarding Ion energy was helpful to form single MoN phase. Mo 2 N, MoN or mixture of the two phases could be prepared by controlling of the ratio of nitrogen/argon and Ion energy. The hardness, coefficient of frictIon, wear and oxidatIon resistance of MoN were superior to that of Mo 2 N coating. The coefficient of frictIon decreased with the increase of testing temperature, yet the wear resistance became lower. The change of frictIon in non-oxidatIon atmosphere was reversed to that in the open air, indicating that the low frictIon of MoN at elevated temperature depends on oxidatIon. The tribological performance of the MoO 3 phase formed by oxidatIon annealing showed much higher coefficient of frictIon than that of as-deposited MoN in all the testing conditIons, and the oxygen deficient oxides were implied to be the lubricious phases.