The Experts below are selected from a list of 9366 Experts worldwide ranked by ideXlab platform
Sofyan A. Taya - One of the best experts on this subject based on the ideXlab platform.
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Development and construction of rotating polarizer analyzer ellipsometer
Optics and Lasers in Engineering, 2011Co-Authors: Taher M. El-agez, Sofyan A. TayaAbstract:Abstract A detailed mathematical derivation and an experimental characterization of one to two ratio rotating polarizer analyzer ellipsometer (RPAE) are presented. The alignment, calibration, and testing of reference samples are also discussed. The optical properties of some known materials obtained by the proposed ellipsometer will be shown and compared to accepted values. Moreover, the constructed ellipsometer will be tested using two ellipsometry standards with different thicknesses.
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A Fourier Ellipsometer Using Rotating Polarizer and Analyzer at a Speed Ratio 1 : 1
Journal of Sensors, 2010Co-Authors: Taher M. El-agez, Sofyan A. TayaAbstract:We propose theoretically a spectroscopic ellipsometer in which the polarizer and the analyzer are rotating synchronously in the same direction with the same angular speed. The light intensity received by the detector contains four components, one dc and three AC terms, with frequencies of , , and . The main advantage of the proposed ellipsometer is that one can extract the ellipsometric parameters and from the AC Fourier coefficients without relying on the dc component which is considered to be a serious problem in rotating-analyzer or -polarizer Ellipsometers. This allows measurements in a semidark room without worrying about stray light problems, dark currents in detectors, and long-term fluctuations in light sources. The results from the simulated spectra of the complex refractive index of c-Si and Au are presented. The noise effect on the proposed ellipsometer was simulated and plotted for the two samples.
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Rotating polarizer-analyzer scanning ellipsometer
Thin Solid Films, 2010Co-Authors: Taher M. El-agez, Ahmed A. El Tayyan, Sofyan A. TayaAbstract:Abstract A spectroscopic ellipsometer in which the polarizer and the analyzer are rotating synchronously in opposite directions at the same speed is proposed. The light intensity involves four components, one dc and three cosine terms, with frequencies of ω, 2ω, and 3ω. The main advantage of the proposed ellipsometer is that: it is feasible to extract the ellipsometric parameters ψ and Δ from the even Fourier coefficients without relying on the dc component which is considered to be a serious problem in rotating-analyzer or -polarizer ellipsometer. This allows measurements in semi-dark room without worrying about stray light problems, dark currents in detectors, and long term fluctuations in light sources. The calculations of the optical parameters of c-Si, Au, and GaAs are in excellent agreement with the published data.
A. Von Keudell - One of the best experts on this subject based on the ideXlab platform.
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Development of an in situ ellipsometer for deposition and erosion studies at the first wall of a tokamak
Nuclear Fusion, 2009Co-Authors: T. Dittmar, Arkadi Kreter, A. Von KeudellAbstract:An in situ, real-time ellipsometer has been developed to be integrated in the first wall of a tokamak. This ellipsometer allows one to measure deposition and erosion of test surfaces exposed to the tokamak plasma. The design is optimized for resistance against high heat loads and large magnetic fields. The instrument is separated into two compartments, one at atmospheric pressure and water-cooled, housing electronic components and devices to generate and detect polarized light, and one at vacuum, holding the sample to be exposed to the tokamak plasma. The ellipsometer has been calibrated and tested in laboratory plasmas and its integration in the TEXTOR tokamak has been demonstrated.
Broch Laurent - One of the best experts on this subject based on the ideXlab platform.
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Rotating element(s) ellipsometry : impact of random and systematic errors on the ellipsometric parameters
2011Co-Authors: Broch LaurentAbstract:Cette thèse est consacrée à l'influence des erreurs systématiques et aléatoires sur les grandeurs ellipsométriques. Pour chaque type d'erreur, nous proposons des solutions pour limiter et éliminer leur influence sur le résultat final. La première partie expose les principes fondamentaux qui régissent le fonctionnement d'un ellipsomètre et décrit les dispositifs expérimentaux à élément(s) tournant(s) utilisés au LPMD. Pour chaque configuration, les méthodes de mesures et de calibrage y sont exposées. La deuxième partie traite des erreurs aléatoires et présente des procédures originales, dites de tracking, permettant de réduire leurs impacts sur les paramètres ellipsométriques. Les erreurs de mesure et erreurs produites lors de l'étape du calibrage d'un ellipsomètre à polariseur tournant (PRPSE) sont exposées. Une configuration optimisée nommée PRPCSE, permettant la caractérisation de systèmes dont l'angle Delta est voisin de 0° ou 180° est proposée. Les erreurs aléatoires et les méthodes de réduction d'un ellipsomètre à compensateur tournant (RCE) sont également décrites. La troisième partie, traite des erreurs systématiques d'un ellipsomètre à matrice de Mueller à double compensateur tournant. Une procédure de mesure dite 4-zones, qui permet de réduire l'impact des erreurs sur la matrice de réflexion de l'échantillon est proposée. Des exemples numériques et expérimentaux illustrent les méthodes développéesThis thesis is devoted to the influence of systematic and random errors on the ellipsometric parameters. For each error, we propose solutions to reduce and eliminate their influence on the final result. The first part outlines the basic principles of ellipsometry and describes the experimental set-up of rotating element(s) Ellipsometers used in LPMD. For each configuration, the methods of measurement and calibration are presented. The second part deals with random errors and presents an original method, called tracking, to reduce their impact on the ellipsometric parameters. Measurement errors and errors generated during the calibration of a rotating polarizer ellipsometer (PRPSE) are exposed. An optimized configuration called PRPCSE, allowing the characterization of systems when the angle Delta is near 0° or 180° is proposed. Random errors and methods of optimization for a Rotating Compensator Ellipsometer (RCE) are also described. The third part deals with the systematic errors of a Mueller Matrix Ellipsometer (MME) in the dual rotating compensator configuration. A measurement procedure called 4-zones, which reduces the impact of errors on the reflection matrix of the sample is given. Numerical and experimental examples illustrate the developed method
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Ellipsométrie à élément(s) tournant(s) : impact des erreurs aléatoires et sytèmatiques sur les grandeurs ellipsométriques
HAL CCSD, 2011Co-Authors: Broch LaurentAbstract:This thesis is devoted to the influence of systematic and random errors on the ellipsometric parameters. For each error, we propose solutions to reduce and eliminate their influence on the final result. The first part outlines the basic principles of ellipsometry and describes the experimental set-up of rotating element(s) Ellipsometers used in LPMD. For each configuration, the methods of measurement and calibration are presented. The second part deals with random errors and presents an original method, called tracking, to reduce their impact on the ellipsometric parameters. Measurement errors and errors generated during the calibration of a rotating polarizer ellipsometer (PRPSE) are exposed. An optimized configuration called PRPCSE, allowing the characterization of systems when the angle Delta is near 0° or 180° is proposed. Random errors and methods of optimization for a Rotating Compensator Ellipsometer (RCE) are also described. The third part deals with the systematic errors of a Mueller Matrix Ellipsometer (MME) in the dual rotating compensator configuration. A measurement procedure called 4-zones, which reduces the impact of errors on the reflection matrix of the sample is given. Numerical and experimental examples illustrate the developed methodsCette thèse est consacrée à l'influence des erreurs systématiques et aléatoires sur les grandeurs ellipsométriques. Pour chaque type d'erreur, nous proposons des solutions pour limiter et éliminer leur influence sur le résultat final. La première partie expose les principes fondamentaux qui régissent le fonctionnement d'un ellipsomètre et décrit les dispositifs expérimentaux à élément(s) tournant(s) utilisés au LPMD. Pour chaque configuration, les méthodes de mesures et de calibrage y sont exposées. La deuxième partie traite des erreurs aléatoires et présente des procédures originales, dites de tracking, permettant de réduire leurs impacts sur les paramètres ellipsométriques. Les erreurs de mesure et erreurs produites lors de l'étape du calibrage d'un ellipsomètre à polariseur tournant (PRPSE) sont exposées. Une configuration optimisée nommée PRPCSE, permettant la caractérisation de systèmes dont l'angle Delta est voisin de 0° ou 180° est proposée. Les erreurs aléatoires et les méthodes de réduction d'un ellipsomètre à compensateur tournant (RCE) sont également décrites. La troisième partie, traite des erreurs systématiques d'un ellipsomètre à matrice de Mueller à double compensateur tournant. Une procédure de mesure dite 4-zones, qui permet de réduire l'impact des erreurs sur la matrice de réflexion de l'échantillon est proposée. Des exemples numériques et expérimentaux illustrent les méthodes développée
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Ellipsométrie à élément(s) tournant(s) (impact des erreurs aléatoires et sytèmatiques sur les grandeurs ellipsométriques)
2011Co-Authors: Broch Laurent, Johann Luc, En Naciri AotmaneAbstract:Cette thèse est consacrée à l'influence des erreurs systématiques et aléatoires sur les grandeurs ellipsométriques. Pour chaque type d'erreur, nous proposons des solutions pour limiter et éliminer leur influence sur le résultat final. La première partie expose les principes fondamentaux qui régissent le fonctionnement d'un ellipsomètre et décrit les dispositifs expérimentaux à élément(s) tournant(s) utilisés au LPMD. Pour chaque configuration, les méthodes de mesures et de calibrage y sont exposées. La deuxième partie traite des erreurs aléatoires et présente des procédures originales, dites de tracking, permettant de réduire leurs impacts sur les paramètres ellipsométriques. Les erreurs de mesure et erreurs produites lors de l'étape du calibrage d'un ellipsomètre à polariseur tournant (PRPSE) sont exposées. Une configuration optimisée nommée PRPCSE, permettant la caractérisation de systèmes dont l'angle Delta est voisin de 0 ou 180 est proposée. Les erreurs aléatoires et les méthodes de réduction d'un ellipsomètre à compensateur tournant (RCE) sont également décrites. La troisième partie, traite des erreurs systématiques d'un ellipsomètre à matrice de Mueller à double compensateur tournant. Une procédure de mesure dite 4-zones, qui permet de réduire l'impact des erreurs sur la matrice de réflexion de l'échantillon est proposée. Des exemples numériques et expérimentaux illustrent les méthodes développéesThis thesis is devoted to the influence of systematic and random errors on the ellipsometric parameters. For each error, we propose solutions to reduce and eliminate their influence on the final result. The first part outlines the basic principles of ellipsometry and describes the experimental set-up of rotating element(s) Ellipsometers used in LPMD. For each configuration, the methods of measurement and calibration are presented. The second part deals with random errors and presents an original method, called tracking, to reduce their impact on the ellipsometric parameters. Measurement errors and errors generated during the calibration of a rotating polarizer ellipsometer (PRPSE) are exposed. An optimized configuration called PRPCSE, allowing the characterization of systems when the angle Delta is near 0 or 180 is proposed. Random errors and methods of optimization for a Rotating Compensator Ellipsometer (RCE) are also described. The third part deals with the systematic errors of a Mueller Matrix Ellipsometer (MME) in the dual rotating compensator configuration. A measurement procedure called 4-zones, which reduces the impact of errors on the reflection matrix of the sample is given. Numerical and experimental examples illustrate the developed methodsMETZ-SCD (574632105) / SudocSudocFranceF
Taher M. El-agez - One of the best experts on this subject based on the ideXlab platform.
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Development and construction of rotating polarizer analyzer ellipsometer
Optics and Lasers in Engineering, 2011Co-Authors: Taher M. El-agez, Sofyan A. TayaAbstract:Abstract A detailed mathematical derivation and an experimental characterization of one to two ratio rotating polarizer analyzer ellipsometer (RPAE) are presented. The alignment, calibration, and testing of reference samples are also discussed. The optical properties of some known materials obtained by the proposed ellipsometer will be shown and compared to accepted values. Moreover, the constructed ellipsometer will be tested using two ellipsometry standards with different thicknesses.
-
A Fourier Ellipsometer Using Rotating Polarizer and Analyzer at a Speed Ratio 1 : 1
Journal of Sensors, 2010Co-Authors: Taher M. El-agez, Sofyan A. TayaAbstract:We propose theoretically a spectroscopic ellipsometer in which the polarizer and the analyzer are rotating synchronously in the same direction with the same angular speed. The light intensity received by the detector contains four components, one dc and three AC terms, with frequencies of , , and . The main advantage of the proposed ellipsometer is that one can extract the ellipsometric parameters and from the AC Fourier coefficients without relying on the dc component which is considered to be a serious problem in rotating-analyzer or -polarizer Ellipsometers. This allows measurements in a semidark room without worrying about stray light problems, dark currents in detectors, and long-term fluctuations in light sources. The results from the simulated spectra of the complex refractive index of c-Si and Au are presented. The noise effect on the proposed ellipsometer was simulated and plotted for the two samples.
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Rotating polarizer-analyzer scanning ellipsometer
Thin Solid Films, 2010Co-Authors: Taher M. El-agez, Ahmed A. El Tayyan, Sofyan A. TayaAbstract:Abstract A spectroscopic ellipsometer in which the polarizer and the analyzer are rotating synchronously in opposite directions at the same speed is proposed. The light intensity involves four components, one dc and three cosine terms, with frequencies of ω, 2ω, and 3ω. The main advantage of the proposed ellipsometer is that: it is feasible to extract the ellipsometric parameters ψ and Δ from the even Fourier coefficients without relying on the dc component which is considered to be a serious problem in rotating-analyzer or -polarizer ellipsometer. This allows measurements in semi-dark room without worrying about stray light problems, dark currents in detectors, and long term fluctuations in light sources. The calculations of the optical parameters of c-Si, Au, and GaAs are in excellent agreement with the published data.
T. Dittmar - One of the best experts on this subject based on the ideXlab platform.
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Development of an in situ ellipsometer for deposition and erosion studies at the first wall of a tokamak
Nuclear Fusion, 2009Co-Authors: T. Dittmar, Arkadi Kreter, A. Von KeudellAbstract:An in situ, real-time ellipsometer has been developed to be integrated in the first wall of a tokamak. This ellipsometer allows one to measure deposition and erosion of test surfaces exposed to the tokamak plasma. The design is optimized for resistance against high heat loads and large magnetic fields. The instrument is separated into two compartments, one at atmospheric pressure and water-cooled, housing electronic components and devices to generate and detect polarized light, and one at vacuum, holding the sample to be exposed to the tokamak plasma. The ellipsometer has been calibrated and tested in laboratory plasmas and its integration in the TEXTOR tokamak has been demonstrated.