The Experts below are selected from a list of 312 Experts worldwide ranked by ideXlab platform
Xiaolin Zhao - One of the best experts on this subject based on the ideXlab platform.
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Design, simulation and characterization of a MEMS inertia switch with flexible CNTs/Cu composite array layer between Electrodes for prolonging contact time
Journal of Micromechanics and Microengineering, 2015Co-Authors: Yang Wang, Zhuo Qing Yang, Guifu Ding, Wenguo Chen, Qiu Xu, Xiaolin ZhaoAbstract:This paper reports an inertia switch with a flexible carbon nanotubes/copper (CNTs/Cu) composite array layer between movable and Fixed Electrodes, which achieves a longer contact time compared to the traditional design using rigid-to-rigid impact between Electrodes. The CNTs/Cu layer is fabricated using the composite electroplating method, and the whole device is completed by multi-layer metal electroplating based on the micro-electro-mechanical systems (MEMS) process. The dynamic responses of the designed inertia switch and the contact impact between a single CNT and a Fixed Electrode/another CNT have both been simulated by the ANSYS finite-element-method (FEM). It is shown that the contact time of the designed inertia switch is about 100 µs under the applied 80 g half-sine-shaped acceleration in the sensing direction. Finally, the fabricated MEMS inertia switch with the flexible CNTs/Cu composite array layer between Electrodes has been evaluated by a dropping hammer system. The test contact time is about112 µs, which has a good agreement with the simulation and is much longer than that of the traditional design.
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Design and Simulation of a Novel Horizontal Sensitive Inertial Micro-Switch with Low G Value
Applied Mechanics and Materials, 2013Co-Authors: Yong Liang Wang, Guifu Ding, Wenguo Chen, Zhao Yu Wang, Xiaolin ZhaoAbstract:A novel horizontal sensitive inertial micro-switch with low g value was proposed and simulated in ANSYS, and was fabricated on quartz substrate based on non-silicon surface micromaching technology. Due to this special design, the micro-switch has a very good horizontal unidirectional sensitivity. The contact effect is improved by a modification of the traditional design. The flexible contact between the proof mass Electrode and Fixed Electrode prolongs the contact time and reduces the rebound effect. The contact time is about 100μs under a half-sine wave shock with a12g peak value.
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an inertial micro switch with compliant cantilever Fixed Electrode for prolonging contact time
International Conference on Micro Electro Mechanical Systems, 2013Co-Authors: Yan Wang, Zhuo Qing Yang, Guifu Ding, Wenguo Chen, Hong Wang, Xiaolin ZhaoAbstract:An inertial micro-switch with a compliant cantilever Fixed Electrode has been designed and fabricated by surface micromachining technology in the present work. The micro-switch can sense the applied acceleration in one horizontal direction. The dynamic contact process of the inertial micro-switch was simulated by finite element method (FEM). A compliant cantilever was proposed in the inertial system as Fixed Electrode, which can realize a flexible contact between the Electrodes and eliminate the bouncing phenomenon for prolonging the contact time. A fabricated prototype inertial micro-switch was tested by dropping hammer system. The results demonstrate that the threshold acceleration of the fabricated prototype is ~180g. The test contact time is up to ~1050μs, which is much longer than that (~5μs) of one without the compliant cantilever.
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design and characterisation of an inertial microswitch with electrophoretic polymer metal composite Fixed Electrode for extending contact time
Micro & Nano Letters, 2012Co-Authors: Zhuo Qing Yang, Guifu Ding, Wenguo Chen, Xiaolin ZhaoAbstract:Based on non-silicon surface micromachining, a single sensitive direction (z-axis) inertial microswitch with electrophoretic polymer–metal composite Fixed Electrode has been designed and characterised in the present work. The microswitch mainly consists of two parts: a suspended proof mass as movable Electrode and maple leaf-like top as vertical Electrode. When an acceleration (threshold level or over) is applied to the switch along its sensitive direction, the mass Electrode will rapidly move towards and touch the vertical Fixed Electrode, switching on the external circuit. The vertical composite Fixed Electrode of the microswitch can realise a flexible contact, decrease bounce and extend the contact time between the Electrodes. The fabricated microswitches have been characterised by a standard dropping test. The threshold acceleration of the prototype is about 70 g while the contact time is about 110 µs, longer than that (about 65 µs) without a polymer.
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fabrication and characterization of a multidirectional sensitive contact enhanced inertial microswitch with a electrophoretic flexible composite Fixed Electrode
Journal of Micromechanics and Microengineering, 2012Co-Authors: Zhuo Qing Yang, Guifu Ding, Wenguo Chen, Hong Wang, Xiaolin ZhaoAbstract:A multidirectional-sensitive inertial microswitch with a polymer?metal composite Fixed Electrode has been designed and fabricated based on surface micromachining in this work. The microswitch mainly consists of a suspended proof mass as a movable Electrode and a T-shaped structure on the substrate with maple leaf-like top and cantilevers around the central cylinder as vertical and lateral Fixed Electrodes. It can sense the applied shock accelerations from any radial direction in the xoy plane and z-axis. The new vertical composite Fixed Electrode of the switch is completed by electroplating and electrophoretic deposition, which can realize a flexible contact between the Electrodes and reduce the bounces and prolong the contact time. As a result, the stability and reliability of the inertial switch could be greatly improved. The fabricated microswitches have been tested and characterized by a standard dropping hammer system. It is shown that the threshold acceleration of the prototype is generally uniform in different sensitive directions in the xoy plane and z-axis, which is about 70 g. The contact time of the microswitch with the composite Fixed Electrode is ?110 ?s in the vertical direction, which is longer than that (?65 ?s) without a polymer. The test data are in agreement with dynamic finite-element simulation results.
Zhuo Qing Yang - One of the best experts on this subject based on the ideXlab platform.
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a heterogeneous integrated mems inertial switch with compliant cantilevers Fixed Electrode and electrostatic locking to realize stable on state
IEEE\ ASME Journal of Microelectromechanical Systems, 2019Co-Authors: Xiaojing Zhang, Yipin Wang, Guifu Ding, Xiaojian Xiang, Xiaoxue Xu, Zhuo Qing YangAbstract:A novel heterogeneous integrated inertial micro-switch has been designed with adjustable acceleration threshold and a stable ‘on’-state due to a predefined bias voltage. The bias voltage is applied onto the large-area parallel-plate Electrodes, which endows the movable proof-mass with electrostatic forces. With an external excitation acceleration, the movable Electrode moves to the Fixed Electrode and it can be locked by the electrostatic force onto the compliant electrical contacts, which are composed of micro-cantilever array to eliminate the contact rebound during electrostatic pull-in process. Both the dynamic response of the proof-mass and the relationship between the bias voltage and the inertial excitation acceleration were analyzed using theoretical model and finite element simulation. A unique heterogeneous integration process including both the silicon-based and non-silicon surface micromachining processes was adopted to fabricate the switch. The tests using a standard dropping hammer system demonstrated that the switch could keep a stable switch-on at the 57 g excitation acceleration and 38 V bias voltage. As wide as 52% adjustment range of the acceleration threshold was obtained when the applied bias voltage was from 38 V to 44 V. The tested relationship between the bias voltage and the external acceleration was very consistent with the simulated relationship. [2019-0038]
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Design, simulation and characterization of a MEMS inertia switch with flexible CNTs/Cu composite array layer between Electrodes for prolonging contact time
Journal of Micromechanics and Microengineering, 2015Co-Authors: Yang Wang, Zhuo Qing Yang, Guifu Ding, Wenguo Chen, Qiu Xu, Xiaolin ZhaoAbstract:This paper reports an inertia switch with a flexible carbon nanotubes/copper (CNTs/Cu) composite array layer between movable and Fixed Electrodes, which achieves a longer contact time compared to the traditional design using rigid-to-rigid impact between Electrodes. The CNTs/Cu layer is fabricated using the composite electroplating method, and the whole device is completed by multi-layer metal electroplating based on the micro-electro-mechanical systems (MEMS) process. The dynamic responses of the designed inertia switch and the contact impact between a single CNT and a Fixed Electrode/another CNT have both been simulated by the ANSYS finite-element-method (FEM). It is shown that the contact time of the designed inertia switch is about 100 µs under the applied 80 g half-sine-shaped acceleration in the sensing direction. Finally, the fabricated MEMS inertia switch with the flexible CNTs/Cu composite array layer between Electrodes has been evaluated by a dropping hammer system. The test contact time is about112 µs, which has a good agreement with the simulation and is much longer than that of the traditional design.
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A vertical driven inertial micro-switch with dual spring to prolong holding time
2015 Transducers - 2015 18th International Conference on Solid-State Sensors Actuators and Microsystems (TRANSDUCERS), 2015Co-Authors: Wenshu Chen, Zhuo Qing Yang, Guolian Ding, Huiying Wang, Yipin Wang, Xinzhi ZhaoAbstract:In this paper, a new model has been proposed for the design of inertial micro-switch. Compared with the traditional model consisted by movable-Fixed Electrode, the Electrodes are designed as two movable springs. The dynamic response processes of Electrodes can be controlled via the structure parameters. The simulation results indicated that the elastic contact can effectively prolong the holding time. The fabricated prototypes were tested by drop hammer system. The test results demonstrated that the holding time of improved inertial micro-switch much longer than the traditional designed one with the same threshold acceleration.
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MEMS inertia switch with flexible CNTs/Cu composite array layer between Electrodes for prolonging contact time
2015 Transducers - 2015 18th International Conference on Solid-State Sensors Actuators and Microsystems (TRANSDUCERS), 2015Co-Authors: Yibin Wang, Zhuo Qing Yang, Guifu Ding, Wenshu Chen, Chenping Zhang, Xinzhi ZhaoAbstract:An inertia switch with flexible carbon nanotubes and copper (CNTs/Cu) composite array layer between movable and Fixed Electrodes has been designed, fabricated and characterized, which achieved long contact time compared to the traditional design using rigid-to-rigid impact between Electrodes. The CNTs/Cu layer is fabricated using the composite electroplating method and the whole device is completed by multi-layer metal electroplating based on the micro-electro-mechanical systems (MEMS) process. The dynamic response of the designed inertia switch and the contact impact between single CNT and Fixed Electrode/another CNT have been both simulated by ANSYS finite element method. Finally, the fabricated MEMS inertia switch with flexible CNTs/Cu composite array layer between Electrodes has been evaluated using a dropping hammer system. The test contact time is about 112µs, which has a good agreement with the simulation and is much longer than that of the traditional design.
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an inertial micro switch with compliant cantilever Fixed Electrode for prolonging contact time
International Conference on Micro Electro Mechanical Systems, 2013Co-Authors: Yan Wang, Zhuo Qing Yang, Guifu Ding, Wenguo Chen, Hong Wang, Xiaolin ZhaoAbstract:An inertial micro-switch with a compliant cantilever Fixed Electrode has been designed and fabricated by surface micromachining technology in the present work. The micro-switch can sense the applied acceleration in one horizontal direction. The dynamic contact process of the inertial micro-switch was simulated by finite element method (FEM). A compliant cantilever was proposed in the inertial system as Fixed Electrode, which can realize a flexible contact between the Electrodes and eliminate the bouncing phenomenon for prolonging the contact time. A fabricated prototype inertial micro-switch was tested by dropping hammer system. The results demonstrate that the threshold acceleration of the fabricated prototype is ~180g. The test contact time is up to ~1050μs, which is much longer than that (~5μs) of one without the compliant cantilever.
Guifu Ding - One of the best experts on this subject based on the ideXlab platform.
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a heterogeneous integrated mems inertial switch with compliant cantilevers Fixed Electrode and electrostatic locking to realize stable on state
IEEE\ ASME Journal of Microelectromechanical Systems, 2019Co-Authors: Xiaojing Zhang, Yipin Wang, Guifu Ding, Xiaojian Xiang, Xiaoxue Xu, Zhuo Qing YangAbstract:A novel heterogeneous integrated inertial micro-switch has been designed with adjustable acceleration threshold and a stable ‘on’-state due to a predefined bias voltage. The bias voltage is applied onto the large-area parallel-plate Electrodes, which endows the movable proof-mass with electrostatic forces. With an external excitation acceleration, the movable Electrode moves to the Fixed Electrode and it can be locked by the electrostatic force onto the compliant electrical contacts, which are composed of micro-cantilever array to eliminate the contact rebound during electrostatic pull-in process. Both the dynamic response of the proof-mass and the relationship between the bias voltage and the inertial excitation acceleration were analyzed using theoretical model and finite element simulation. A unique heterogeneous integration process including both the silicon-based and non-silicon surface micromachining processes was adopted to fabricate the switch. The tests using a standard dropping hammer system demonstrated that the switch could keep a stable switch-on at the 57 g excitation acceleration and 38 V bias voltage. As wide as 52% adjustment range of the acceleration threshold was obtained when the applied bias voltage was from 38 V to 44 V. The tested relationship between the bias voltage and the external acceleration was very consistent with the simulated relationship. [2019-0038]
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Design, simulation and characterization of a MEMS inertia switch with flexible CNTs/Cu composite array layer between Electrodes for prolonging contact time
Journal of Micromechanics and Microengineering, 2015Co-Authors: Yang Wang, Zhuo Qing Yang, Guifu Ding, Wenguo Chen, Qiu Xu, Xiaolin ZhaoAbstract:This paper reports an inertia switch with a flexible carbon nanotubes/copper (CNTs/Cu) composite array layer between movable and Fixed Electrodes, which achieves a longer contact time compared to the traditional design using rigid-to-rigid impact between Electrodes. The CNTs/Cu layer is fabricated using the composite electroplating method, and the whole device is completed by multi-layer metal electroplating based on the micro-electro-mechanical systems (MEMS) process. The dynamic responses of the designed inertia switch and the contact impact between a single CNT and a Fixed Electrode/another CNT have both been simulated by the ANSYS finite-element-method (FEM). It is shown that the contact time of the designed inertia switch is about 100 µs under the applied 80 g half-sine-shaped acceleration in the sensing direction. Finally, the fabricated MEMS inertia switch with the flexible CNTs/Cu composite array layer between Electrodes has been evaluated by a dropping hammer system. The test contact time is about112 µs, which has a good agreement with the simulation and is much longer than that of the traditional design.
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MEMS inertia switch with flexible CNTs/Cu composite array layer between Electrodes for prolonging contact time
2015 Transducers - 2015 18th International Conference on Solid-State Sensors Actuators and Microsystems (TRANSDUCERS), 2015Co-Authors: Yibin Wang, Zhuo Qing Yang, Guifu Ding, Wenshu Chen, Chenping Zhang, Xinzhi ZhaoAbstract:An inertia switch with flexible carbon nanotubes and copper (CNTs/Cu) composite array layer between movable and Fixed Electrodes has been designed, fabricated and characterized, which achieved long contact time compared to the traditional design using rigid-to-rigid impact between Electrodes. The CNTs/Cu layer is fabricated using the composite electroplating method and the whole device is completed by multi-layer metal electroplating based on the micro-electro-mechanical systems (MEMS) process. The dynamic response of the designed inertia switch and the contact impact between single CNT and Fixed Electrode/another CNT have been both simulated by ANSYS finite element method. Finally, the fabricated MEMS inertia switch with flexible CNTs/Cu composite array layer between Electrodes has been evaluated using a dropping hammer system. The test contact time is about 112µs, which has a good agreement with the simulation and is much longer than that of the traditional design.
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Design and Simulation of a Novel Horizontal Sensitive Inertial Micro-Switch with Low G Value
Applied Mechanics and Materials, 2013Co-Authors: Yong Liang Wang, Guifu Ding, Wenguo Chen, Zhao Yu Wang, Xiaolin ZhaoAbstract:A novel horizontal sensitive inertial micro-switch with low g value was proposed and simulated in ANSYS, and was fabricated on quartz substrate based on non-silicon surface micromaching technology. Due to this special design, the micro-switch has a very good horizontal unidirectional sensitivity. The contact effect is improved by a modification of the traditional design. The flexible contact between the proof mass Electrode and Fixed Electrode prolongs the contact time and reduces the rebound effect. The contact time is about 100μs under a half-sine wave shock with a12g peak value.
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an inertial micro switch with compliant cantilever Fixed Electrode for prolonging contact time
International Conference on Micro Electro Mechanical Systems, 2013Co-Authors: Yan Wang, Zhuo Qing Yang, Guifu Ding, Wenguo Chen, Hong Wang, Xiaolin ZhaoAbstract:An inertial micro-switch with a compliant cantilever Fixed Electrode has been designed and fabricated by surface micromachining technology in the present work. The micro-switch can sense the applied acceleration in one horizontal direction. The dynamic contact process of the inertial micro-switch was simulated by finite element method (FEM). A compliant cantilever was proposed in the inertial system as Fixed Electrode, which can realize a flexible contact between the Electrodes and eliminate the bouncing phenomenon for prolonging the contact time. A fabricated prototype inertial micro-switch was tested by dropping hammer system. The results demonstrate that the threshold acceleration of the fabricated prototype is ~180g. The test contact time is up to ~1050μs, which is much longer than that (~5μs) of one without the compliant cantilever.
Wenguo Chen - One of the best experts on this subject based on the ideXlab platform.
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The Analysis of the Influence of Threshold on the Dynamic Contact Process of a Fabricated Vertically Driven MEMS Inertial Switch
Micromachines, 2019Co-Authors: Wenguo Chen, Huiying Wang, Rui Wang, Dejian KongAbstract:In this work, to evaluate the influence of the threshold on the dynamic contact process, five models (number 1, 2, 3, 4, 5) with different thresholds were proposed and fabricated with surface micromachining technology. The contact time and response time were used to characterize the dynamic contact performance. The dynamic contact processes of the inertial switches with gradually increasing thresholds were researched using analytical, simulation, and experimental methods. The basic working principle analysis of the inertial switch shows that the contact time of the inertial switch with a low-g value can be extended by using a simply supported beam as the Fixed Electrode, but the high-G inertial needs more elasticity for Fixed Electrode. The simulation results indicate that the response time and contact time decrease with the increment in the designed threshold. Prototypes were tested using a dropping hammer system, and the test result indicates that the contact time of the inertial switch with a Fixed Electrode of the simply supported beam is about 15 and 5 μs when the threshold is about 280 and 580 g, respectively. Meanwhile, the contact time can be extended to 100 μs for the inertial switch using a spring as the Fixed Electrode when the threshold is about 280 and 580 g. These test results not only prove that the spring Fixed Electrode can effectively extend the contact time, but also prove that the style of the Fixed Electrode is the deciding factor affecting the contact time of the high-G inertial switch.
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Design, simulation and characterization of a MEMS inertia switch with flexible CNTs/Cu composite array layer between Electrodes for prolonging contact time
Journal of Micromechanics and Microengineering, 2015Co-Authors: Yang Wang, Zhuo Qing Yang, Guifu Ding, Wenguo Chen, Qiu Xu, Xiaolin ZhaoAbstract:This paper reports an inertia switch with a flexible carbon nanotubes/copper (CNTs/Cu) composite array layer between movable and Fixed Electrodes, which achieves a longer contact time compared to the traditional design using rigid-to-rigid impact between Electrodes. The CNTs/Cu layer is fabricated using the composite electroplating method, and the whole device is completed by multi-layer metal electroplating based on the micro-electro-mechanical systems (MEMS) process. The dynamic responses of the designed inertia switch and the contact impact between a single CNT and a Fixed Electrode/another CNT have both been simulated by the ANSYS finite-element-method (FEM). It is shown that the contact time of the designed inertia switch is about 100 µs under the applied 80 g half-sine-shaped acceleration in the sensing direction. Finally, the fabricated MEMS inertia switch with the flexible CNTs/Cu composite array layer between Electrodes has been evaluated by a dropping hammer system. The test contact time is about112 µs, which has a good agreement with the simulation and is much longer than that of the traditional design.
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Design and Simulation of a Novel Horizontal Sensitive Inertial Micro-Switch with Low G Value
Applied Mechanics and Materials, 2013Co-Authors: Yong Liang Wang, Guifu Ding, Wenguo Chen, Zhao Yu Wang, Xiaolin ZhaoAbstract:A novel horizontal sensitive inertial micro-switch with low g value was proposed and simulated in ANSYS, and was fabricated on quartz substrate based on non-silicon surface micromaching technology. Due to this special design, the micro-switch has a very good horizontal unidirectional sensitivity. The contact effect is improved by a modification of the traditional design. The flexible contact between the proof mass Electrode and Fixed Electrode prolongs the contact time and reduces the rebound effect. The contact time is about 100μs under a half-sine wave shock with a12g peak value.
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an inertial micro switch with compliant cantilever Fixed Electrode for prolonging contact time
International Conference on Micro Electro Mechanical Systems, 2013Co-Authors: Yan Wang, Zhuo Qing Yang, Guifu Ding, Wenguo Chen, Hong Wang, Xiaolin ZhaoAbstract:An inertial micro-switch with a compliant cantilever Fixed Electrode has been designed and fabricated by surface micromachining technology in the present work. The micro-switch can sense the applied acceleration in one horizontal direction. The dynamic contact process of the inertial micro-switch was simulated by finite element method (FEM). A compliant cantilever was proposed in the inertial system as Fixed Electrode, which can realize a flexible contact between the Electrodes and eliminate the bouncing phenomenon for prolonging the contact time. A fabricated prototype inertial micro-switch was tested by dropping hammer system. The results demonstrate that the threshold acceleration of the fabricated prototype is ~180g. The test contact time is up to ~1050μs, which is much longer than that (~5μs) of one without the compliant cantilever.
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design and characterisation of an inertial microswitch with electrophoretic polymer metal composite Fixed Electrode for extending contact time
Micro & Nano Letters, 2012Co-Authors: Zhuo Qing Yang, Guifu Ding, Wenguo Chen, Xiaolin ZhaoAbstract:Based on non-silicon surface micromachining, a single sensitive direction (z-axis) inertial microswitch with electrophoretic polymer–metal composite Fixed Electrode has been designed and characterised in the present work. The microswitch mainly consists of two parts: a suspended proof mass as movable Electrode and maple leaf-like top as vertical Electrode. When an acceleration (threshold level or over) is applied to the switch along its sensitive direction, the mass Electrode will rapidly move towards and touch the vertical Fixed Electrode, switching on the external circuit. The vertical composite Fixed Electrode of the microswitch can realise a flexible contact, decrease bounce and extend the contact time between the Electrodes. The fabricated microswitches have been characterised by a standard dropping test. The threshold acceleration of the prototype is about 70 g while the contact time is about 110 µs, longer than that (about 65 µs) without a polymer.
Xinzhi Zhao - One of the best experts on this subject based on the ideXlab platform.
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MEMS inertia switch with flexible CNTs/Cu composite array layer between Electrodes for prolonging contact time
2015 Transducers - 2015 18th International Conference on Solid-State Sensors Actuators and Microsystems (TRANSDUCERS), 2015Co-Authors: Yibin Wang, Zhuo Qing Yang, Guifu Ding, Wenshu Chen, Chenping Zhang, Xinzhi ZhaoAbstract:An inertia switch with flexible carbon nanotubes and copper (CNTs/Cu) composite array layer between movable and Fixed Electrodes has been designed, fabricated and characterized, which achieved long contact time compared to the traditional design using rigid-to-rigid impact between Electrodes. The CNTs/Cu layer is fabricated using the composite electroplating method and the whole device is completed by multi-layer metal electroplating based on the micro-electro-mechanical systems (MEMS) process. The dynamic response of the designed inertia switch and the contact impact between single CNT and Fixed Electrode/another CNT have been both simulated by ANSYS finite element method. Finally, the fabricated MEMS inertia switch with flexible CNTs/Cu composite array layer between Electrodes has been evaluated using a dropping hammer system. The test contact time is about 112µs, which has a good agreement with the simulation and is much longer than that of the traditional design.
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A vertical driven inertial micro-switch with dual spring to prolong holding time
2015 Transducers - 2015 18th International Conference on Solid-State Sensors Actuators and Microsystems (TRANSDUCERS), 2015Co-Authors: Wenshu Chen, Zhuo Qing Yang, Guolian Ding, Huiying Wang, Yipin Wang, Xinzhi ZhaoAbstract:In this paper, a new model has been proposed for the design of inertial micro-switch. Compared with the traditional model consisted by movable-Fixed Electrode, the Electrodes are designed as two movable springs. The dynamic response processes of Electrodes can be controlled via the structure parameters. The simulation results indicated that the elastic contact can effectively prolong the holding time. The fabricated prototypes were tested by drop hammer system. The test results demonstrated that the holding time of improved inertial micro-switch much longer than the traditional designed one with the same threshold acceleration.
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a multidirectional sensitive inertial microswitch with electrophoretic polymer metal composite Fixed Electrode for flexible contact
International Conference on Micro Electro Mechanical Systems, 2012Co-Authors: Zhuo Qing Yang, Guolian Ding, Huiying Wang, Yipin Wang, Xinzhi ZhaoAbstract:A multidirectional-sensitive inertial microswitch with polymer-metal composite Fixed Electrode has been designed and fabricated based on non-silicon surface micromachining in the present work. The microswitch can sense the applied accelerations from any directions in xoy plane and positive z-axis. Its vertical composite Fixed Electrode is completed by electroplating and electrophoretic deposition, which can realize a flexible contact between the Electrodes and eliminate the bouncing phenomenon and prolong the contact time. As a result, the stability and reliability of the inertial switch could be greatly improved. The test results show that the threshold acceleration of the fabricated prototype is generally uniform (∼70g) in different sensitive directions in xoy plane and z-axis. The contact time of the microswitch with composite Fixed Electrode is ∼110μs in vertical direction, which is longer than that (∼65μs) of one without polymer.