Humidity Measurement

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Roger T Howe - One of the best experts on this subject based on the ideXlab platform.

  • vacuum encapsulated resonators for Humidity Measurement
    Sensors and Actuators B-chemical, 2013
    Co-Authors: R G Hennessy, Matt Messana, Andrew B Graham, Max M. Shulaker, Nathan Klejwa, John Provine, Thomas W Kenny, Roger T Howe
    Abstract:

    Abstract This study uses surface resistance of silicon dioxide and a charge-biased, microshell encapsulated, single-anchored double-ended tuning fork resonator (DETF) to measure relative Humidity (RH). As relative Humidity increases, the surface resistance of silicon dioxide decreases due to increasing amounts of water adsorbed on the surface. This decrease in surface resistance leads to a faster charge decay from a capacitor. The DETF resonator converts the amount of charge on the capacitor to a frequency shift, via the electrostatic spring softening term. This frequency shift can be characterized by either exponential fitting or slope fitting. The hysteresis was shown to be less than 0.15% RH. The relative Humidity is determined from the slope or the decay time constant, with the precision of 1.3 × 10−3% RH for slope fitting and 1.3 × 10−4% RH for exponential fitting.

  • Temperature dependence of vacuum encapsulated resonators for Humidity Measurement
    2011 16th International Solid-State Sensors Actuators and Microsystems Conference, 2011
    Co-Authors: R G Hennessy, Matt Messana, Andrew B Graham, Max M. Shulaker, Nathan Klejwa, John Provine, Thomas W Kenny, Roger T Howe
    Abstract:

    This paper demonstrates the effect of temperature on Humidity Measurements using a charge-biased microshell encapsulated single-anchored double-ended tuning fork resonator (DETF). The resonator is electrically connected to a metal bond pad on the external surface silicon dioxide. Changes in the ambient Humidity alter the charge decay characteristics of the resonator by modifying the surface resistance of the oxide. This change is monitored by measuring the shift in resonant frequency due to electrostatic spring softening. Varying the temperature from 12°C to 32°C and the relative Humidity (RH) from 0 to 60%, the temperature dependence of time decay ranged from -0.05/°C to -0.03/°C and the relative Humidity dependence of time decay ranged from 0/RH to -15/RH.

R G Hennessy - One of the best experts on this subject based on the ideXlab platform.

  • vacuum encapsulated resonators for Humidity Measurement
    Sensors and Actuators B-chemical, 2013
    Co-Authors: R G Hennessy, Matt Messana, Andrew B Graham, Max M. Shulaker, Nathan Klejwa, John Provine, Thomas W Kenny, Roger T Howe
    Abstract:

    Abstract This study uses surface resistance of silicon dioxide and a charge-biased, microshell encapsulated, single-anchored double-ended tuning fork resonator (DETF) to measure relative Humidity (RH). As relative Humidity increases, the surface resistance of silicon dioxide decreases due to increasing amounts of water adsorbed on the surface. This decrease in surface resistance leads to a faster charge decay from a capacitor. The DETF resonator converts the amount of charge on the capacitor to a frequency shift, via the electrostatic spring softening term. This frequency shift can be characterized by either exponential fitting or slope fitting. The hysteresis was shown to be less than 0.15% RH. The relative Humidity is determined from the slope or the decay time constant, with the precision of 1.3 × 10−3% RH for slope fitting and 1.3 × 10−4% RH for exponential fitting.

  • Temperature dependence of vacuum encapsulated resonators for Humidity Measurement
    2011 16th International Solid-State Sensors Actuators and Microsystems Conference, 2011
    Co-Authors: R G Hennessy, Matt Messana, Andrew B Graham, Max M. Shulaker, Nathan Klejwa, John Provine, Thomas W Kenny, Roger T Howe
    Abstract:

    This paper demonstrates the effect of temperature on Humidity Measurements using a charge-biased microshell encapsulated single-anchored double-ended tuning fork resonator (DETF). The resonator is electrically connected to a metal bond pad on the external surface silicon dioxide. Changes in the ambient Humidity alter the charge decay characteristics of the resonator by modifying the surface resistance of the oxide. This change is monitored by measuring the shift in resonant frequency due to electrostatic spring softening. Varying the temperature from 12°C to 32°C and the relative Humidity (RH) from 0 to 60%, the temperature dependence of time decay ranged from -0.05/°C to -0.03/°C and the relative Humidity dependence of time decay ranged from 0/RH to -15/RH.

Guo Yang-ming - One of the best experts on this subject based on the ideXlab platform.

  • Design and Implementation of Temperature and Humidity Measurement System Based on Virtual Instrument
    Computer Simulation, 2008
    Co-Authors: Guo Yang-ming
    Abstract:

    The temperature and Humidity Measurement system is a necessary equipment for special laboratory. The traditional metering equipment of laboratory temperature and Humidity takes the SCM as core, uses digital tube to demonstrate Humidity value, sets different final states according to different Humidity requirements and through hardware, thus adjusting test spatial Humidity to a definite value. In order to analyse well the temperature and Humidity change rule of the special laboratory, the traditional testing device already could not meet the laboratory need. The Virtual Instrument technicis used to design the temperature and Humidity control system, and the LabVIEW and the data acquisition card are adopted in a coordinated fashion to gather the temperature and Humidity signal and outputs the control signal. The result demonstraties that the new installment is more vivid and direct-viewing, and the operation is more convenient, and the function expansion may be easily realized.

Max M. Shulaker - One of the best experts on this subject based on the ideXlab platform.

  • vacuum encapsulated resonators for Humidity Measurement
    Sensors and Actuators B-chemical, 2013
    Co-Authors: R G Hennessy, Matt Messana, Andrew B Graham, Max M. Shulaker, Nathan Klejwa, John Provine, Thomas W Kenny, Roger T Howe
    Abstract:

    Abstract This study uses surface resistance of silicon dioxide and a charge-biased, microshell encapsulated, single-anchored double-ended tuning fork resonator (DETF) to measure relative Humidity (RH). As relative Humidity increases, the surface resistance of silicon dioxide decreases due to increasing amounts of water adsorbed on the surface. This decrease in surface resistance leads to a faster charge decay from a capacitor. The DETF resonator converts the amount of charge on the capacitor to a frequency shift, via the electrostatic spring softening term. This frequency shift can be characterized by either exponential fitting or slope fitting. The hysteresis was shown to be less than 0.15% RH. The relative Humidity is determined from the slope or the decay time constant, with the precision of 1.3 × 10−3% RH for slope fitting and 1.3 × 10−4% RH for exponential fitting.

  • Temperature dependence of vacuum encapsulated resonators for Humidity Measurement
    2011 16th International Solid-State Sensors Actuators and Microsystems Conference, 2011
    Co-Authors: R G Hennessy, Matt Messana, Andrew B Graham, Max M. Shulaker, Nathan Klejwa, John Provine, Thomas W Kenny, Roger T Howe
    Abstract:

    This paper demonstrates the effect of temperature on Humidity Measurements using a charge-biased microshell encapsulated single-anchored double-ended tuning fork resonator (DETF). The resonator is electrically connected to a metal bond pad on the external surface silicon dioxide. Changes in the ambient Humidity alter the charge decay characteristics of the resonator by modifying the surface resistance of the oxide. This change is monitored by measuring the shift in resonant frequency due to electrostatic spring softening. Varying the temperature from 12°C to 32°C and the relative Humidity (RH) from 0 to 60%, the temperature dependence of time decay ranged from -0.05/°C to -0.03/°C and the relative Humidity dependence of time decay ranged from 0/RH to -15/RH.

Matt Messana - One of the best experts on this subject based on the ideXlab platform.

  • vacuum encapsulated resonators for Humidity Measurement
    Sensors and Actuators B-chemical, 2013
    Co-Authors: R G Hennessy, Matt Messana, Andrew B Graham, Max M. Shulaker, Nathan Klejwa, John Provine, Thomas W Kenny, Roger T Howe
    Abstract:

    Abstract This study uses surface resistance of silicon dioxide and a charge-biased, microshell encapsulated, single-anchored double-ended tuning fork resonator (DETF) to measure relative Humidity (RH). As relative Humidity increases, the surface resistance of silicon dioxide decreases due to increasing amounts of water adsorbed on the surface. This decrease in surface resistance leads to a faster charge decay from a capacitor. The DETF resonator converts the amount of charge on the capacitor to a frequency shift, via the electrostatic spring softening term. This frequency shift can be characterized by either exponential fitting or slope fitting. The hysteresis was shown to be less than 0.15% RH. The relative Humidity is determined from the slope or the decay time constant, with the precision of 1.3 × 10−3% RH for slope fitting and 1.3 × 10−4% RH for exponential fitting.

  • Temperature dependence of vacuum encapsulated resonators for Humidity Measurement
    2011 16th International Solid-State Sensors Actuators and Microsystems Conference, 2011
    Co-Authors: R G Hennessy, Matt Messana, Andrew B Graham, Max M. Shulaker, Nathan Klejwa, John Provine, Thomas W Kenny, Roger T Howe
    Abstract:

    This paper demonstrates the effect of temperature on Humidity Measurements using a charge-biased microshell encapsulated single-anchored double-ended tuning fork resonator (DETF). The resonator is electrically connected to a metal bond pad on the external surface silicon dioxide. Changes in the ambient Humidity alter the charge decay characteristics of the resonator by modifying the surface resistance of the oxide. This change is monitored by measuring the shift in resonant frequency due to electrostatic spring softening. Varying the temperature from 12°C to 32°C and the relative Humidity (RH) from 0 to 60%, the temperature dependence of time decay ranged from -0.05/°C to -0.03/°C and the relative Humidity dependence of time decay ranged from 0/RH to -15/RH.