The Experts below are selected from a list of 762 Experts worldwide ranked by ideXlab platform
Xiaolin Zhao - One of the best experts on this subject based on the ideXlab platform.
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a surface micromachining based inertial micro switch with compliant cantilever beam as Movable Electrode for enduring high shock and prolonging contact time
Applied Surface Science, 2016Co-Authors: Zhuo Qing Yang, Guifu Ding, Qihuan Zhang, Yunna Sun, Xiaolin ZhaoAbstract:Abstract A novel laterally-driven inertial micro-switch with two L-shaped elastic cantilever beams as the Movable Electrode, which is attached to the proof mass, is proposed in this paper. The advantage of this design is that the contact time of the inertial micro-switch can be prolonged. Meanwhile, the micro-switch can withstand a higher shock than the traditional designs whose cantilever beams are attached to the fixed Electrode. The designed inertial micro-switch was simulated and optimized with ANSYS software and fabricated on a quartz substrate by surface micromachining technology. The simulated result demonstrates that the threshold acceleration (a ths ) under stable switch-on state is about 288 g and the contact time is about 198 μs when the pulse width of acceleration loads is 1 ms. At the same time, it indicates that the threshold acceleration, the response time and the contact time of designed micro-switch all increase with the pulse width of acceleration loads. The simulation of impact process in non-sensitive direction shows that the introduced constraint sleeve structure in the novel inertial micro-switch can lower the off-axis sensitivity. The fabricated micro-switch prototype has been tested by a standard dropping hammer system under shock accelerations with various amplitudes and pulse widths. The experimental measurements show that the contact time is about 150 μs when the threshold acceleration is about 288 g. It also indicates that the response time and the contact time both increase with the pulse width, which is consistent with the simulation ones.
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Simulation and characterization of a laterally-driven inertial micro-switch
AIP Publishing LLC, 2015Co-Authors: Wenguo Chen, Zhuo Qing Yang, Guifu Ding, Hong Wang, Yan Wang, Yang Wang, Huiying Wang, Xiaolin ZhaoAbstract:A laterally-driven inertial micro-switch was designed and fabricated using surface micromachining technology. The dynamic response process was simulated by ANSYS software, which revealed the vibration process of Movable Electrode when the proof mass is shocked by acceleration in sensitive direction. The test results of fabricated inertial micro-switches with and without anti-shock beams indicated that the contact process of micro-switch with anti-shock beams is more reliable than the one without anti-shock beams. The test results indicated that three contact signals had been observed in the contact process of the inertial switch without anti-shock beams, and only one contact signal in the inertial switch with anti-shock beams, which demonstrated that the anti-shock beams can effectively constrain the vibration in non-sensitive direction
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the design simulation and fabrication of a novel horizontal sensitive inertial micro switch with low g value based on mems micromachining technology
Journal of Micromechanics and Microengineering, 2013Co-Authors: Yongliang Wang, Wenguo Chen, Guifu Ding, Qiu Feng, Yan Wang, Zhaoyu Wang, Xiaolin ZhaoAbstract:A horizontal sensitive inertial micro-switch with low g value is proposed in this paper. It was simulated using ANSYS software and fabricated by MEMS micromachining technology. It consists of three parts: a suspended thick proof mass as a Movable Electrode, two novel elastic fixed beams as stationary Electrodes to prolong the contact time and a barrier system, which constrains non-sensitive direction movement and eliminates reverse impact. The relationship between the threshold acceleration ath and the intrinsic frequency ω0 is discussed in a theoretical analysis and finite element simulation. The thickness of the proof mass (H) and the width of the springs (k) were designed to be variable to meet the requirement of the application environment. Two novel elastic stationary Electrodes were designed specially to improve the contact effect. The fabricated micro-switch was characterized by a standard dropping test. The work frequency is about 33.3 Hz and the threshold acceleration of the sample is about 38g, which meet the simulation value very well. The response time was about 10−4 s and the contact time about 200 us.
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design and characterisation of an inertial microswitch with electrophoretic polymer metal composite fixed Electrode for extending contact time
Micro & Nano Letters, 2012Co-Authors: Zhuo Qing Yang, Wenguo Chen, Guifu Ding, Xiaolin ZhaoAbstract:Based on non-silicon surface micromachining, a single sensitive direction (z-axis) inertial microswitch with electrophoretic polymer–metal composite fixed Electrode has been designed and characterised in the present work. The microswitch mainly consists of two parts: a suspended proof mass as Movable Electrode and maple leaf-like top as vertical Electrode. When an acceleration (threshold level or over) is applied to the switch along its sensitive direction, the mass Electrode will rapidly move towards and touch the vertical fixed Electrode, switching on the external circuit. The vertical composite fixed Electrode of the microswitch can realise a flexible contact, decrease bounce and extend the contact time between the Electrodes. The fabricated microswitches have been characterised by a standard dropping test. The threshold acceleration of the prototype is about 70 g while the contact time is about 110 µs, longer than that (about 65 µs) without a polymer.
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fabrication and characterization of a multidirectional sensitive contact enhanced inertial microswitch with a electrophoretic flexible composite fixed Electrode
Journal of Micromechanics and Microengineering, 2012Co-Authors: Zhuo Qing Yang, Wenguo Chen, Guifu Ding, Hong Wang, Xiaolin ZhaoAbstract:A multidirectional-sensitive inertial microswitch with a polymer?metal composite fixed Electrode has been designed and fabricated based on surface micromachining in this work. The microswitch mainly consists of a suspended proof mass as a Movable Electrode and a T-shaped structure on the substrate with maple leaf-like top and cantilevers around the central cylinder as vertical and lateral fixed Electrodes. It can sense the applied shock accelerations from any radial direction in the xoy plane and z-axis. The new vertical composite fixed Electrode of the switch is completed by electroplating and electrophoretic deposition, which can realize a flexible contact between the Electrodes and reduce the bounces and prolong the contact time. As a result, the stability and reliability of the inertial switch could be greatly improved. The fabricated microswitches have been tested and characterized by a standard dropping hammer system. It is shown that the threshold acceleration of the prototype is generally uniform in different sensitive directions in the xoy plane and z-axis, which is about 70 g. The contact time of the microswitch with the composite fixed Electrode is ?110 ?s in the vertical direction, which is longer than that (?65 ?s) without a polymer. The test data are in agreement with dynamic finite-element simulation results.
Zhuo Qing Yang - One of the best experts on this subject based on the ideXlab platform.
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a heterogeneous integrated mems inertial switch with compliant cantilevers fixed Electrode and electrostatic locking to realize stable on state
IEEE\ ASME Journal of Microelectromechanical Systems, 2019Co-Authors: Xiaojing Zhang, Yipin Wang, Xiaojian Xiang, Xiaoxue Xu, Guifu Ding, Zhuo Qing YangAbstract:A novel heterogeneous integrated inertial micro-switch has been designed with adjustable acceleration threshold and a stable ‘on’-state due to a predefined bias voltage. The bias voltage is applied onto the large-area parallel-plate Electrodes, which endows the Movable proof-mass with electrostatic forces. With an external excitation acceleration, the Movable Electrode moves to the fixed Electrode and it can be locked by the electrostatic force onto the compliant electrical contacts, which are composed of micro-cantilever array to eliminate the contact rebound during electrostatic pull-in process. Both the dynamic response of the proof-mass and the relationship between the bias voltage and the inertial excitation acceleration were analyzed using theoretical model and finite element simulation. A unique heterogeneous integration process including both the silicon-based and non-silicon surface micromachining processes was adopted to fabricate the switch. The tests using a standard dropping hammer system demonstrated that the switch could keep a stable switch-on at the 57 g excitation acceleration and 38 V bias voltage. As wide as 52% adjustment range of the acceleration threshold was obtained when the applied bias voltage was from 38 V to 44 V. The tested relationship between the bias voltage and the external acceleration was very consistent with the simulated relationship. [2019-0038]
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a surface micromachining based inertial micro switch with compliant cantilever beam as Movable Electrode for enduring high shock and prolonging contact time
Applied Surface Science, 2016Co-Authors: Zhuo Qing Yang, Guifu Ding, Qihuan Zhang, Yunna Sun, Xiaolin ZhaoAbstract:Abstract A novel laterally-driven inertial micro-switch with two L-shaped elastic cantilever beams as the Movable Electrode, which is attached to the proof mass, is proposed in this paper. The advantage of this design is that the contact time of the inertial micro-switch can be prolonged. Meanwhile, the micro-switch can withstand a higher shock than the traditional designs whose cantilever beams are attached to the fixed Electrode. The designed inertial micro-switch was simulated and optimized with ANSYS software and fabricated on a quartz substrate by surface micromachining technology. The simulated result demonstrates that the threshold acceleration (a ths ) under stable switch-on state is about 288 g and the contact time is about 198 μs when the pulse width of acceleration loads is 1 ms. At the same time, it indicates that the threshold acceleration, the response time and the contact time of designed micro-switch all increase with the pulse width of acceleration loads. The simulation of impact process in non-sensitive direction shows that the introduced constraint sleeve structure in the novel inertial micro-switch can lower the off-axis sensitivity. The fabricated micro-switch prototype has been tested by a standard dropping hammer system under shock accelerations with various amplitudes and pulse widths. The experimental measurements show that the contact time is about 150 μs when the threshold acceleration is about 288 g. It also indicates that the response time and the contact time both increase with the pulse width, which is consistent with the simulation ones.
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Simulation and characterization of a laterally-driven inertial micro-switch
AIP Publishing LLC, 2015Co-Authors: Wenguo Chen, Zhuo Qing Yang, Guifu Ding, Hong Wang, Yan Wang, Yang Wang, Huiying Wang, Xiaolin ZhaoAbstract:A laterally-driven inertial micro-switch was designed and fabricated using surface micromachining technology. The dynamic response process was simulated by ANSYS software, which revealed the vibration process of Movable Electrode when the proof mass is shocked by acceleration in sensitive direction. The test results of fabricated inertial micro-switches with and without anti-shock beams indicated that the contact process of micro-switch with anti-shock beams is more reliable than the one without anti-shock beams. The test results indicated that three contact signals had been observed in the contact process of the inertial switch without anti-shock beams, and only one contact signal in the inertial switch with anti-shock beams, which demonstrated that the anti-shock beams can effectively constrain the vibration in non-sensitive direction
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design and characterisation of an inertial microswitch with electrophoretic polymer metal composite fixed Electrode for extending contact time
Micro & Nano Letters, 2012Co-Authors: Zhuo Qing Yang, Wenguo Chen, Guifu Ding, Xiaolin ZhaoAbstract:Based on non-silicon surface micromachining, a single sensitive direction (z-axis) inertial microswitch with electrophoretic polymer–metal composite fixed Electrode has been designed and characterised in the present work. The microswitch mainly consists of two parts: a suspended proof mass as Movable Electrode and maple leaf-like top as vertical Electrode. When an acceleration (threshold level or over) is applied to the switch along its sensitive direction, the mass Electrode will rapidly move towards and touch the vertical fixed Electrode, switching on the external circuit. The vertical composite fixed Electrode of the microswitch can realise a flexible contact, decrease bounce and extend the contact time between the Electrodes. The fabricated microswitches have been characterised by a standard dropping test. The threshold acceleration of the prototype is about 70 g while the contact time is about 110 µs, longer than that (about 65 µs) without a polymer.
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fabrication and characterization of a multidirectional sensitive contact enhanced inertial microswitch with a electrophoretic flexible composite fixed Electrode
Journal of Micromechanics and Microengineering, 2012Co-Authors: Zhuo Qing Yang, Wenguo Chen, Guifu Ding, Hong Wang, Xiaolin ZhaoAbstract:A multidirectional-sensitive inertial microswitch with a polymer?metal composite fixed Electrode has been designed and fabricated based on surface micromachining in this work. The microswitch mainly consists of a suspended proof mass as a Movable Electrode and a T-shaped structure on the substrate with maple leaf-like top and cantilevers around the central cylinder as vertical and lateral fixed Electrodes. It can sense the applied shock accelerations from any radial direction in the xoy plane and z-axis. The new vertical composite fixed Electrode of the switch is completed by electroplating and electrophoretic deposition, which can realize a flexible contact between the Electrodes and reduce the bounces and prolong the contact time. As a result, the stability and reliability of the inertial switch could be greatly improved. The fabricated microswitches have been tested and characterized by a standard dropping hammer system. It is shown that the threshold acceleration of the prototype is generally uniform in different sensitive directions in the xoy plane and z-axis, which is about 70 g. The contact time of the microswitch with the composite fixed Electrode is ?110 ?s in the vertical direction, which is longer than that (?65 ?s) without a polymer. The test data are in agreement with dynamic finite-element simulation results.
Guifu Ding - One of the best experts on this subject based on the ideXlab platform.
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a heterogeneous integrated mems inertial switch with compliant cantilevers fixed Electrode and electrostatic locking to realize stable on state
IEEE\ ASME Journal of Microelectromechanical Systems, 2019Co-Authors: Xiaojing Zhang, Yipin Wang, Xiaojian Xiang, Xiaoxue Xu, Guifu Ding, Zhuo Qing YangAbstract:A novel heterogeneous integrated inertial micro-switch has been designed with adjustable acceleration threshold and a stable ‘on’-state due to a predefined bias voltage. The bias voltage is applied onto the large-area parallel-plate Electrodes, which endows the Movable proof-mass with electrostatic forces. With an external excitation acceleration, the Movable Electrode moves to the fixed Electrode and it can be locked by the electrostatic force onto the compliant electrical contacts, which are composed of micro-cantilever array to eliminate the contact rebound during electrostatic pull-in process. Both the dynamic response of the proof-mass and the relationship between the bias voltage and the inertial excitation acceleration were analyzed using theoretical model and finite element simulation. A unique heterogeneous integration process including both the silicon-based and non-silicon surface micromachining processes was adopted to fabricate the switch. The tests using a standard dropping hammer system demonstrated that the switch could keep a stable switch-on at the 57 g excitation acceleration and 38 V bias voltage. As wide as 52% adjustment range of the acceleration threshold was obtained when the applied bias voltage was from 38 V to 44 V. The tested relationship between the bias voltage and the external acceleration was very consistent with the simulated relationship. [2019-0038]
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a surface micromachining based inertial micro switch with compliant cantilever beam as Movable Electrode for enduring high shock and prolonging contact time
Applied Surface Science, 2016Co-Authors: Zhuo Qing Yang, Guifu Ding, Qihuan Zhang, Yunna Sun, Xiaolin ZhaoAbstract:Abstract A novel laterally-driven inertial micro-switch with two L-shaped elastic cantilever beams as the Movable Electrode, which is attached to the proof mass, is proposed in this paper. The advantage of this design is that the contact time of the inertial micro-switch can be prolonged. Meanwhile, the micro-switch can withstand a higher shock than the traditional designs whose cantilever beams are attached to the fixed Electrode. The designed inertial micro-switch was simulated and optimized with ANSYS software and fabricated on a quartz substrate by surface micromachining technology. The simulated result demonstrates that the threshold acceleration (a ths ) under stable switch-on state is about 288 g and the contact time is about 198 μs when the pulse width of acceleration loads is 1 ms. At the same time, it indicates that the threshold acceleration, the response time and the contact time of designed micro-switch all increase with the pulse width of acceleration loads. The simulation of impact process in non-sensitive direction shows that the introduced constraint sleeve structure in the novel inertial micro-switch can lower the off-axis sensitivity. The fabricated micro-switch prototype has been tested by a standard dropping hammer system under shock accelerations with various amplitudes and pulse widths. The experimental measurements show that the contact time is about 150 μs when the threshold acceleration is about 288 g. It also indicates that the response time and the contact time both increase with the pulse width, which is consistent with the simulation ones.
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Simulation and characterization of a laterally-driven inertial micro-switch
AIP Publishing LLC, 2015Co-Authors: Wenguo Chen, Zhuo Qing Yang, Guifu Ding, Hong Wang, Yan Wang, Yang Wang, Huiying Wang, Xiaolin ZhaoAbstract:A laterally-driven inertial micro-switch was designed and fabricated using surface micromachining technology. The dynamic response process was simulated by ANSYS software, which revealed the vibration process of Movable Electrode when the proof mass is shocked by acceleration in sensitive direction. The test results of fabricated inertial micro-switches with and without anti-shock beams indicated that the contact process of micro-switch with anti-shock beams is more reliable than the one without anti-shock beams. The test results indicated that three contact signals had been observed in the contact process of the inertial switch without anti-shock beams, and only one contact signal in the inertial switch with anti-shock beams, which demonstrated that the anti-shock beams can effectively constrain the vibration in non-sensitive direction
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the design simulation and fabrication of a novel horizontal sensitive inertial micro switch with low g value based on mems micromachining technology
Journal of Micromechanics and Microengineering, 2013Co-Authors: Yongliang Wang, Wenguo Chen, Guifu Ding, Qiu Feng, Yan Wang, Zhaoyu Wang, Xiaolin ZhaoAbstract:A horizontal sensitive inertial micro-switch with low g value is proposed in this paper. It was simulated using ANSYS software and fabricated by MEMS micromachining technology. It consists of three parts: a suspended thick proof mass as a Movable Electrode, two novel elastic fixed beams as stationary Electrodes to prolong the contact time and a barrier system, which constrains non-sensitive direction movement and eliminates reverse impact. The relationship between the threshold acceleration ath and the intrinsic frequency ω0 is discussed in a theoretical analysis and finite element simulation. The thickness of the proof mass (H) and the width of the springs (k) were designed to be variable to meet the requirement of the application environment. Two novel elastic stationary Electrodes were designed specially to improve the contact effect. The fabricated micro-switch was characterized by a standard dropping test. The work frequency is about 33.3 Hz and the threshold acceleration of the sample is about 38g, which meet the simulation value very well. The response time was about 10−4 s and the contact time about 200 us.
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design and characterisation of an inertial microswitch with electrophoretic polymer metal composite fixed Electrode for extending contact time
Micro & Nano Letters, 2012Co-Authors: Zhuo Qing Yang, Wenguo Chen, Guifu Ding, Xiaolin ZhaoAbstract:Based on non-silicon surface micromachining, a single sensitive direction (z-axis) inertial microswitch with electrophoretic polymer–metal composite fixed Electrode has been designed and characterised in the present work. The microswitch mainly consists of two parts: a suspended proof mass as Movable Electrode and maple leaf-like top as vertical Electrode. When an acceleration (threshold level or over) is applied to the switch along its sensitive direction, the mass Electrode will rapidly move towards and touch the vertical fixed Electrode, switching on the external circuit. The vertical composite fixed Electrode of the microswitch can realise a flexible contact, decrease bounce and extend the contact time between the Electrodes. The fabricated microswitches have been characterised by a standard dropping test. The threshold acceleration of the prototype is about 70 g while the contact time is about 110 µs, longer than that (about 65 µs) without a polymer.
D N Pawaskar - One of the best experts on this subject based on the ideXlab platform.
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estimation of oscillation period switching time for electrostatically actuated microbeam type switches
International Journal of Mechanical Sciences, 2011Co-Authors: M M Joglekar, D N PawaskarAbstract:Abstract The undamped dynamic response of step-voltage driven parallel-plates, cantilever, and fixed–fixed type electromechanical switches is numerically investigated. In each case, application of energy technique yields the threshold values of the amplitude and the applied voltage beyond which the oscillatory motion of the Movable Electrode ceases to exist. These critical values are identified as the dynamic pull-in parameters of the corresponding microactuator model. For all three microactuator configurations, empirical expressions for the switching time and oscillation period are developed. These empirical relations are applicable over a wide range of applied voltage, and the estimates obtained using the proposed empirical relations correlate very well with the previously published results. Furthermore, the phase portraits of these actuators have been thoroughly investigated in order to examine the role of static pull-in point in a dynamic setting and also to propose the design rules to build faster microswitches.
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Estimation of oscillation period/switching time for electrostatically actuated microbeam type switches
'Elsevier BV', 2011Co-Authors: M M Joglekar, D N PawaskarAbstract:The undamped dynamic response of step-voltage driven parallel-plates, cantilever, and fixed-fixed type electromechanical switches is numerically investigated. In each case, application of energy technique yields the threshold values of the amplitude and the applied voltage beyond which the oscillatory motion of the Movable Electrode ceases to exist. These critical values are identified as the dynamic pull-in parameters of the corresponding microactuator model. For all three microactuator configurations, empirical expressions for the switching time and oscillation period are developed. These empirical relations are applicable over a wide range of applied voltage, and the estimates obtained using the proposed empirical relations correlate very well with the previously published results. Furthermore, the phase portraits of these actuators have been thoroughly investigated in order to examine the role of static pull-in point in a dynamic setting and also to propose the design rules to build faster microswitches. (C) 2010 Elsevier Ltd. All rights reserved
Ludovic Noels - One of the best experts on this subject based on the ideXlab platform.
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a micro model for elasto plastic adhesive contact in micro switches application to cyclic loading
Tribology International, 2013Co-Authors: Jeanclaude Golinval, Ludovic NoelsAbstract:Abstract Stiction is a major failure mode in micro-electromechanical systems. In previous works, a statistical rough surfaces interaction model, for which only elastic adhesive–contact has been considered, was developed for multiscale analyzes. However, during the impact between rough surfaces, plastic deformations of asperities cannot always be neglected. In the present work, the adhesion between rough surfaces is studied considering the elasto-plastic deformations of the asperities, and a model predicting the resulting micro-adhesive–contact forces is derived. For illustration purpose, an electrostatic-structural analysis is performed on a micro-switch. To determine the degree of plasticity involved, the impact energy of the Movable Electrode at pull-in is estimated. Thus the maximal adhesive force evolution during cyclic loading is predicted using the developed model.