The Experts below are selected from a list of 20736 Experts worldwide ranked by ideXlab platform
Kimberly L. Turner - One of the best experts on this subject based on the ideXlab platform.
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using Parametric Resonance to improve micro gyrsocope robustness
2010Co-Authors: Laura Oropezaramos, Christopher Burgner, Kimberly L. TurnerAbstract:Knowing that mismatching between orthogonal modes is a common problem in micro gyroscopes based on harmonic oscillators, we have explored a different actuation mechanism based on Parametric Resonance, therefore reducing the sensitivity loss due to mismatching in the drive and the sense natural frequencies. We demonstrate experimentally that using a Parametric Resonance-based actuator, the drive-mode signal has rich dynamic behavior with a large response in a large bandwidth. In this way the system is able to induce oscillations in the sense-mode by Coriolis force coupling, despite a clear disparity on their fundamental frequencies. Thus we propose a micro gyroscope that is less sensitive to parameter variations due to its inherent dynamical properties.
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robust micro rate sensor actuated by Parametric Resonance
Sensors and Actuators A-physical, 2009Co-Authors: Laura Oropezaramos, Christopher Burgner, Kimberly L. TurnerAbstract:Abstract Loss in sensitivity, commonly presented in micro-gyroscopes based on harmonic oscillators [N. Yazdi, F. Ayazi, K. Najafi, Micromachined inertial sensors, Proceedings of the IEEE 86 (8)], can be overcome by using Parametric Resonance as an actuation mechanism. We demonstrate experimentally that using a Parametric Resonance based actuator, the drive-mode signal has a rich dynamic behavior with a large response in a large bandwidth (1 kHz). In this way the system is able to induce oscillations in the sense-mode by Coriolis force coupling, despite a clear disparity on their fundamental frequencies. Thus we propose a micro-gyroscope that is less sensitive to parameter variations due to its inherent dynamical properties. The device is fabricated using a single mask SOI process and in this paper we report its complete rate table characterization including off-axis isolation, drift, hysteresis and noise.
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Inherently Robust micro gyroscope actuated by Parametric Resonance
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2008Co-Authors: Laura A. Oropeza-ramos, Christopher B. Burgner, Kimberly L. TurnerAbstract:The sensitivity loss, commonly presented in micro gyroscopes based on harmonic oscillators [1], is overcome by using Parametric Resonance as an actuation mechanism. This operation has been analytically studied in IEEE- Sensors'05 [2] and preliminary dynamical characterization and experimental setup has been presented in IDETC/CIE- ASME'07 [3]. The device is fabricated using SOI process and in this paper we report complete rate table characterization including off-axis isolation, drift, hysteresis and noise of the micro gyroscope with an additional amplification stage.
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electromechanically driven and sensed Parametric Resonance in silicon microcantilevers
Applied Physics Letters, 2006Co-Authors: Michael V Requa, Kimberly L. TurnerAbstract:We report on the design and experimental measurements of an integrated driving and sensing technique in Parametrically excited silicon microcantilevers. The design involves actuation with axial Lorentz forces and sensing with magnetomotive forces, both of which are enabled by a chip-scale permanent magnet. In this demonstration the micromechanical Parametric Resonance is measured electrically. This system has applications to resonant Parametric sensing.
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tunable microelectromechanical filters that exploit Parametric Resonance
Journal of Vibration and Acoustics, 2005Co-Authors: Jeffrey F Rhoads, Kimberly L. Turner, Steven W Shaw, Rajashree BaskaranAbstract:Background: This paper describes an analytical study of a bandpass filter that is based on the dynamic response of electrostatically-driven MEMS oscillators. Method of Approach: Unlike most mechanical and electrical filters that rely on direct linear Resonance for filtering, the MEM filter presented in this work employs Parametric Resonance. Results: While the use of Parametric Resonance improves some filtering characteristics, the
David Mcgloin - One of the best experts on this subject based on the ideXlab platform.
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Parametric Resonance of optically trapped aerosols
Physical Review Letters, 2007Co-Authors: R Di Leonardo, G Ruocco, Jonathan Leach, Miles J Padgett, Amanda J Wright, John M Girkin, Daniel R Burnham, David McgloinAbstract:The Brownian dynamics of an optically trapped water droplet are investigated across the transition from over- to underdamped oscillations. The spectrum of position fluctuations evolves from a Lorentzian shape typical of overdamped systems (beads in liquid solvents) to a damped harmonic oscillator spectrum showing a Resonance peak. In this later underdamped regime, we excite Parametric Resonance by periodically modulating the trapping power at twice the resonant frequency. The power spectra of position fluctuations are in excellent agreement with the obtained analytical solutions of a Parametrically modulated Langevin equation.
Wenhua Zhang - One of the best experts on this subject based on the ideXlab platform.
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application of Parametric Resonance amplification in a single crystal silicon micro oscillator based mass sensor
Sensors and Actuators A-physical, 2005Co-Authors: Wenhua Zhang, Kimberly L. TurnerAbstract:Abstract A mass sensing concept based on Parametric Resonance amplification is proposed and experimentally investigated using a non-interdigitated comb-finger driven micro-oscillator. Mass change can be detected by measuring frequency shift at the boundary of the first order Parametric Resonance ‘tongue’. Both platinum deposition using focused ion beam (FIB) and water vapor desorption and absorption are used to change the mass of a prototype sensor. Due to the sharp transition in amplitude caused by Parametric Resonance, the sensitivity is 1–2 order of magnitude higher than the same oscillator working at Simple Harmonic Resonance (SHR) mode in air. Picogram (10 −12 g) level mass change can be easily detected in the sensor with mass about 30 ng and Resonance frequency less than 100 kHz. Damping effects and noise processes on sensor dynamics and sensing performance are also investigated and damping has no significant effect on sensor noise floor and sensitivity. Higher sensitivity is expected when the oscillator design is optimized and dimensions are scaled.
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Noise Analysis in Parametric Resonance Based Mass Sensing
Microelectromechanical Systems, 2004Co-Authors: Wenhua Zhang, Kimberly L. TurnerAbstract:Mass sensing based on Parametric Resonance has shown high sensitivity and has many potential applications in chemical and biological sensing. We investigate noise effects on the sensitivity of mass sensing using Parametric Resonance. Temperature fluctuation noise, Johnson noise, and Brownian motion noise have been considered. Numerical simulation and experimental results show that noise affects the sensitivity of Parametric Resonance mass sensing in different mechanism from simple harmonic Resonance based mass sensor and Brownian motion noise of the micro-oscillator has the major contribution to the frequency uncertainty at the boundary of Parametric Resonance area and the sensitivity in mass sensing.
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Tuning the dynamic behavior of Parametric Resonance in a micromechanical oscillator
Applied Physics Letters, 2003Co-Authors: Wenhua Zhang, Rajashree Baskaran, Kimberly L. TurnerAbstract:We describe how to significantly change the dynamic behavior of Parametric Resonance in a micromechanical oscillator. By varying the voltage amplitude of applied electrical signal, the frequency response of the first order Parametric Resonance changes dramatically. We attribute this variation to the tuning of effective cubic stiffness of the oscillator, which is a contribution of both structural and electrical cubic stiffness. This phenomenon is well explained by the first-order perturbation analysis of nonlinear Mathieu equation.
Laura Oropezaramos - One of the best experts on this subject based on the ideXlab platform.
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using Parametric Resonance to improve micro gyrsocope robustness
2010Co-Authors: Laura Oropezaramos, Christopher Burgner, Kimberly L. TurnerAbstract:Knowing that mismatching between orthogonal modes is a common problem in micro gyroscopes based on harmonic oscillators, we have explored a different actuation mechanism based on Parametric Resonance, therefore reducing the sensitivity loss due to mismatching in the drive and the sense natural frequencies. We demonstrate experimentally that using a Parametric Resonance-based actuator, the drive-mode signal has rich dynamic behavior with a large response in a large bandwidth. In this way the system is able to induce oscillations in the sense-mode by Coriolis force coupling, despite a clear disparity on their fundamental frequencies. Thus we propose a micro gyroscope that is less sensitive to parameter variations due to its inherent dynamical properties.
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robust micro rate sensor actuated by Parametric Resonance
Sensors and Actuators A-physical, 2009Co-Authors: Laura Oropezaramos, Christopher Burgner, Kimberly L. TurnerAbstract:Abstract Loss in sensitivity, commonly presented in micro-gyroscopes based on harmonic oscillators [N. Yazdi, F. Ayazi, K. Najafi, Micromachined inertial sensors, Proceedings of the IEEE 86 (8)], can be overcome by using Parametric Resonance as an actuation mechanism. We demonstrate experimentally that using a Parametric Resonance based actuator, the drive-mode signal has a rich dynamic behavior with a large response in a large bandwidth (1 kHz). In this way the system is able to induce oscillations in the sense-mode by Coriolis force coupling, despite a clear disparity on their fundamental frequencies. Thus we propose a micro-gyroscope that is less sensitive to parameter variations due to its inherent dynamical properties. The device is fabricated using a single mask SOI process and in this paper we report its complete rate table characterization including off-axis isolation, drift, hysteresis and noise.
Gianluca Mendicino - One of the best experts on this subject based on the ideXlab platform.
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Mode Coupling and Parametric Resonance in Electrostatically Actuated Micromirrors
IEEE Transactions on Industrial Electronics, 2018Co-Authors: Attilio Frangi, Andrea Guerrieri, Nicolo Boni, Roberto Carminati, Marco Soldo, Gianluca MendicinoAbstract:The main torsional mode of electrostatically actuated micromirrors is known to be dominated by Parametric Resonance when the actuation is performed via in-plane comb fingers. Here, we show that, for specific geometrical features of the mirror, Parametric Resonance simultaneously activates a spurious yaw mode. Due to the large torsional rotations, the two modes are nonlinearly coupled, inducing mutual stiffness variations and an unexpected temperature dependence of the main mode. After presenting an experimental evidence of the coupling, we develop and discuss a numerical model capable of capturing the key phenomena and of providing guidelines for a robust design.
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Parametric Resonance in electrostatically actuated micromirrors
IEEE Transactions on Industrial Electronics, 2017Co-Authors: Attilio Frangi, Andrea Guerrieri, Roberto Carminati, Gianluca MendicinoAbstract:We consider an electrostatically actuated torsional micromirror, a key element of recent optical microdevices. The mechanical response is analyzed with specific emphasis on its nonlinear features. We show that the mirror motion is an example of Parametric Resonance, activated when the drive frequency is twice the natural frequency of the system. The numerical model, solved with a continuation approach, is validated with very good accuracy through an extensive experimental campaign.