The Experts below are selected from a list of 297 Experts worldwide ranked by ideXlab platform
Zhang Jinwe - One of the best experts on this subject based on the ideXlab platform.
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A single crystal silicon micro-Pirani vacuum gauge with high aspect ratio structure
sensors and actuators a physical, 2010Co-Authors: Jiang Wei, Xi Wang, Zhang JinweAbstract:This paper presents a very simple micro-Pirani vacuum gauge made of single crystal silicon. It was fabricated by conventional bulk micromachining technology with only three masks. The gauge has 80 mu m thick bulk silicon as structure layer and dual heat sinks, which is very robust with very little internal stress and also provide large heat transfer area. Highly phosphorus ion doping at bottom of the anchors forms ohmic contact with Cr/Au leads. I-Vcurve shows good linear Resistance Characteristic of the single crystal silicon heater. The dynamic range of the Pirani vacuum gauge is 1-1000 Pa, and the average sensitivity in the dynamic range is 117 K/W/Pa. With an uncertainty of 1%, the resolution of the gauge is 12 Pa at 1000 Pa and 0.2 Pa at 4 Pa. (C) 2010 Elsevier B.V. All rights reserved.http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000283671000023&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701Engineering, Electrical & ElectronicInstruments & InstrumentationSCI(E)EI8ARTICLE1159-16316
Jinwe Zhang - One of the best experts on this subject based on the ideXlab platform.
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a single crystal silicon micro pirani vacuum gauge with high aspect ratio structure
Sensors and Actuators A-physical, 2010Co-Authors: Wei Jiang, Xi Wang, Jinwe ZhangAbstract:Abstract This paper presents a very simple micro-Pirani vacuum gauge made of single crystal silicon. It was fabricated by conventional bulk micromachining technology with only three masks. The gauge has 80 μm thick bulk silicon as structure layer and dual heat sinks, which is very robust with very little internal stress and also provide large heat transfer area. Highly phosphorus ion doping at bottom of the anchors forms ohmic contact with Cr/Au leads. I–V curve shows good linear Resistance Characteristic of the single crystal silicon heater. The dynamic range of the Pirani vacuum gauge is 1–1000 Pa, and the average sensitivity in the dynamic range is 117 K/W/Pa. With an uncertainty of 1%, the resolution of the gauge is 12 Pa at 1000 Pa and 0.2 Pa at 4 Pa.
Xi Wang - One of the best experts on this subject based on the ideXlab platform.
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a single crystal silicon micro pirani vacuum gauge with high aspect ratio structure
Sensors and Actuators A-physical, 2010Co-Authors: Wei Jiang, Xi Wang, Jinwe ZhangAbstract:Abstract This paper presents a very simple micro-Pirani vacuum gauge made of single crystal silicon. It was fabricated by conventional bulk micromachining technology with only three masks. The gauge has 80 μm thick bulk silicon as structure layer and dual heat sinks, which is very robust with very little internal stress and also provide large heat transfer area. Highly phosphorus ion doping at bottom of the anchors forms ohmic contact with Cr/Au leads. I–V curve shows good linear Resistance Characteristic of the single crystal silicon heater. The dynamic range of the Pirani vacuum gauge is 1–1000 Pa, and the average sensitivity in the dynamic range is 117 K/W/Pa. With an uncertainty of 1%, the resolution of the gauge is 12 Pa at 1000 Pa and 0.2 Pa at 4 Pa.
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A single crystal silicon micro-Pirani vacuum gauge with high aspect ratio structure
sensors and actuators a physical, 2010Co-Authors: Jiang Wei, Xi Wang, Zhang JinweAbstract:This paper presents a very simple micro-Pirani vacuum gauge made of single crystal silicon. It was fabricated by conventional bulk micromachining technology with only three masks. The gauge has 80 mu m thick bulk silicon as structure layer and dual heat sinks, which is very robust with very little internal stress and also provide large heat transfer area. Highly phosphorus ion doping at bottom of the anchors forms ohmic contact with Cr/Au leads. I-Vcurve shows good linear Resistance Characteristic of the single crystal silicon heater. The dynamic range of the Pirani vacuum gauge is 1-1000 Pa, and the average sensitivity in the dynamic range is 117 K/W/Pa. With an uncertainty of 1%, the resolution of the gauge is 12 Pa at 1000 Pa and 0.2 Pa at 4 Pa. (C) 2010 Elsevier B.V. All rights reserved.http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000283671000023&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701Engineering, Electrical & ElectronicInstruments & InstrumentationSCI(E)EI8ARTICLE1159-16316
Jiang Wei - One of the best experts on this subject based on the ideXlab platform.
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A single crystal silicon micro-Pirani vacuum gauge with high aspect ratio structure
sensors and actuators a physical, 2010Co-Authors: Jiang Wei, Xi Wang, Zhang JinweAbstract:This paper presents a very simple micro-Pirani vacuum gauge made of single crystal silicon. It was fabricated by conventional bulk micromachining technology with only three masks. The gauge has 80 mu m thick bulk silicon as structure layer and dual heat sinks, which is very robust with very little internal stress and also provide large heat transfer area. Highly phosphorus ion doping at bottom of the anchors forms ohmic contact with Cr/Au leads. I-Vcurve shows good linear Resistance Characteristic of the single crystal silicon heater. The dynamic range of the Pirani vacuum gauge is 1-1000 Pa, and the average sensitivity in the dynamic range is 117 K/W/Pa. With an uncertainty of 1%, the resolution of the gauge is 12 Pa at 1000 Pa and 0.2 Pa at 4 Pa. (C) 2010 Elsevier B.V. All rights reserved.http://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcApp=PARTNER_APP&SrcAuth=LinksAMR&KeyUT=WOS:000283671000023&DestLinkType=FullRecord&DestApp=ALL_WOS&UsrCustomerID=8e1609b174ce4e31116a60747a720701Engineering, Electrical & ElectronicInstruments & InstrumentationSCI(E)EI8ARTICLE1159-16316
Wei Jiang - One of the best experts on this subject based on the ideXlab platform.
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a single crystal silicon micro pirani vacuum gauge with high aspect ratio structure
Sensors and Actuators A-physical, 2010Co-Authors: Wei Jiang, Xi Wang, Jinwe ZhangAbstract:Abstract This paper presents a very simple micro-Pirani vacuum gauge made of single crystal silicon. It was fabricated by conventional bulk micromachining technology with only three masks. The gauge has 80 μm thick bulk silicon as structure layer and dual heat sinks, which is very robust with very little internal stress and also provide large heat transfer area. Highly phosphorus ion doping at bottom of the anchors forms ohmic contact with Cr/Au leads. I–V curve shows good linear Resistance Characteristic of the single crystal silicon heater. The dynamic range of the Pirani vacuum gauge is 1–1000 Pa, and the average sensitivity in the dynamic range is 117 K/W/Pa. With an uncertainty of 1%, the resolution of the gauge is 12 Pa at 1000 Pa and 0.2 Pa at 4 Pa.