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Rainer Waser - One of the best experts on this subject based on the ideXlab platform.

  • Effects of ferroelectric switching on the piezoelectric small-Signal response (d33) and electrostriction (M33) of lead zirconate titanate thin films
    Journal of Applied Physics, 2004
    Co-Authors: P. Gerber, C. Kugeler, Ulrich Böttger, Rainer Waser
    Abstract:

    The effects of an increasing small Signal amplitude on the piezoelectric small-Signal response and electrostriction of tetragonal Pb(Zrx, Ti1−x)O3 thin films are investigated. The piezoelectric small-Signal Coefficient d33, piezoelectric large Signal-strain S, and electrostriction Coefficient M33 are measured using a double-beam laser interferometer. A continuously increasing influence of the small Signal amplitude is found starting at very low values. In particular, the impact on the measured coercive field Ec is found to be stronger than the impact of the cycling frequency of the applied bias field. Also, unexpected electrostrictive behavior is investigated and explained by the influence of ferroelectric switching on the intrinsic piezoelectric lattice strain. Furthermore, the influence of an applied small-Signal on the piezoelectric large-Signal response is investigated.

  • Effects of the top-electrode size on the piezoelectric properties (d33 and S) of lead zirconate titanate thin films
    Journal of Applied Physics, 2004
    Co-Authors: P. Gerber, C. Kugeler, A. Roelofs, Ulrich Böttger, Rainer Waser, Klaus Prume
    Abstract:

    The effects of a decreasing top electrode size on the electric and piezoelectric properties of tetragonal Pb(ZrX,Ti1−X)O3 thin films are investigated. The effective piezoelectric small-Signal Coefficient d33,eff and the piezoelectric large Signal-strain S are measured using a double-beam laser interferometer. Both properties are found to decrease rapidly with decreasing size of the used Pt top electrode for the investigated dimensions of 5mmto100μm edge length (square pads). While the loss of d33,eff is as high as 75%, the influence on the relative permittivity is only small. The source of the pad size effect on the measured piezoelectric properties is found to be the mechanics of the layered structure commonly used for piezoelectric measurements (Pt∕PZT∕Pt∕TiO∕SiO2∕Si), [PZT,Pb(Zrx,Ti1−x)O3] which is verified by finite element simulations.The effects of a decreasing top electrode size on the electric and piezoelectric properties of tetragonal Pb(ZrX,Ti1−X)O3 thin films are investigated. The effective piezoelectric small-Signal Coefficient d33,eff and the piezoelectric large Signal-strain S are measured using a double-beam laser interferometer. Both properties are found to decrease rapidly with decreasing size of the used Pt top electrode for the investigated dimensions of 5mmto100μm edge length (square pads). While the loss of d33,eff is as high as 75%, the influence on the relative permittivity is only small. The source of the pad size effect on the measured piezoelectric properties is found to be the mechanics of the layered structure commonly used for piezoelectric measurements (Pt∕PZT∕Pt∕TiO∕SiO2∕Si), [PZT,Pb(Zrx,Ti1−x)O3] which is verified by finite element simulations.

  • Simulation and measurements of the piezoelectric properties response (d/sub 33/) of piezoelectric layered thin film structures influenced by the top-electrode size
    14th IEEE International Symposium on Applications of Ferroelectrics 2004. ISAF-04. 2004, 1
    Co-Authors: Klaus Prume, P. Gerber, C. Kugeler, A. Roelofs, Ulrich Böttger, Rainer Waser, Thorsten Schmitz-kempen, S. Tiedke
    Abstract:

    The properties of piezoelectric thin film layered structures are in the focus of many investigations. Significant decreasing piezoelectric properties have been observed with decreasing top-electrode size. These results are obtained by measurements of the effective piezoelectric small-Signal Coefficient d/sub 33,eff/ and the piezoelectric large Signal-strain S using a double-beam laser interferometer. Samples are investigated with squared top-electrodes with dimensions of 0.1 mm to 1 mm edge length. The loss of d/sub 33,eff/ is as high as 50 %, whereas the influence on the relative permittivity is only small. This work investigates this behaviour by calculating the influence of varying elastic and geometrical properties of substrate, electrodes, and piezoelectric thin film on the effective piezoelectric small-Signal Coefficient d/sub 33,eff/ by means of finite element simulations. Beside the clamping effect of the substrate under electrical operating conditions also the influence of thermally induced mechanical stresses after cooling from 4000/spl deg/C to room temperature is calculated. From measurements and simulations it can be concluded that the source of the pad size effect on the measured piezoelectric properties can he attributed to the mechanics of the layered structure.

P. Gerber - One of the best experts on this subject based on the ideXlab platform.

  • Effects of ferroelectric switching on the piezoelectric small-Signal response (d33) and electrostriction (M33) of lead zirconate titanate thin films
    Journal of Applied Physics, 2004
    Co-Authors: P. Gerber, C. Kugeler, Ulrich Böttger, Rainer Waser
    Abstract:

    The effects of an increasing small Signal amplitude on the piezoelectric small-Signal response and electrostriction of tetragonal Pb(Zrx, Ti1−x)O3 thin films are investigated. The piezoelectric small-Signal Coefficient d33, piezoelectric large Signal-strain S, and electrostriction Coefficient M33 are measured using a double-beam laser interferometer. A continuously increasing influence of the small Signal amplitude is found starting at very low values. In particular, the impact on the measured coercive field Ec is found to be stronger than the impact of the cycling frequency of the applied bias field. Also, unexpected electrostrictive behavior is investigated and explained by the influence of ferroelectric switching on the intrinsic piezoelectric lattice strain. Furthermore, the influence of an applied small-Signal on the piezoelectric large-Signal response is investigated.

  • Effects of the top-electrode size on the piezoelectric properties (d33 and S) of lead zirconate titanate thin films
    Journal of Applied Physics, 2004
    Co-Authors: P. Gerber, C. Kugeler, A. Roelofs, Ulrich Böttger, Rainer Waser, Klaus Prume
    Abstract:

    The effects of a decreasing top electrode size on the electric and piezoelectric properties of tetragonal Pb(ZrX,Ti1−X)O3 thin films are investigated. The effective piezoelectric small-Signal Coefficient d33,eff and the piezoelectric large Signal-strain S are measured using a double-beam laser interferometer. Both properties are found to decrease rapidly with decreasing size of the used Pt top electrode for the investigated dimensions of 5mmto100μm edge length (square pads). While the loss of d33,eff is as high as 75%, the influence on the relative permittivity is only small. The source of the pad size effect on the measured piezoelectric properties is found to be the mechanics of the layered structure commonly used for piezoelectric measurements (Pt∕PZT∕Pt∕TiO∕SiO2∕Si), [PZT,Pb(Zrx,Ti1−x)O3] which is verified by finite element simulations.The effects of a decreasing top electrode size on the electric and piezoelectric properties of tetragonal Pb(ZrX,Ti1−X)O3 thin films are investigated. The effective piezoelectric small-Signal Coefficient d33,eff and the piezoelectric large Signal-strain S are measured using a double-beam laser interferometer. Both properties are found to decrease rapidly with decreasing size of the used Pt top electrode for the investigated dimensions of 5mmto100μm edge length (square pads). While the loss of d33,eff is as high as 75%, the influence on the relative permittivity is only small. The source of the pad size effect on the measured piezoelectric properties is found to be the mechanics of the layered structure commonly used for piezoelectric measurements (Pt∕PZT∕Pt∕TiO∕SiO2∕Si), [PZT,Pb(Zrx,Ti1−x)O3] which is verified by finite element simulations.

  • Simulation and measurements of the piezoelectric properties response (d/sub 33/) of piezoelectric layered thin film structures influenced by the top-electrode size
    14th IEEE International Symposium on Applications of Ferroelectrics 2004. ISAF-04. 2004, 1
    Co-Authors: Klaus Prume, P. Gerber, C. Kugeler, A. Roelofs, Ulrich Böttger, Rainer Waser, Thorsten Schmitz-kempen, S. Tiedke
    Abstract:

    The properties of piezoelectric thin film layered structures are in the focus of many investigations. Significant decreasing piezoelectric properties have been observed with decreasing top-electrode size. These results are obtained by measurements of the effective piezoelectric small-Signal Coefficient d/sub 33,eff/ and the piezoelectric large Signal-strain S using a double-beam laser interferometer. Samples are investigated with squared top-electrodes with dimensions of 0.1 mm to 1 mm edge length. The loss of d/sub 33,eff/ is as high as 50 %, whereas the influence on the relative permittivity is only small. This work investigates this behaviour by calculating the influence of varying elastic and geometrical properties of substrate, electrodes, and piezoelectric thin film on the effective piezoelectric small-Signal Coefficient d/sub 33,eff/ by means of finite element simulations. Beside the clamping effect of the substrate under electrical operating conditions also the influence of thermally induced mechanical stresses after cooling from 4000/spl deg/C to room temperature is calculated. From measurements and simulations it can be concluded that the source of the pad size effect on the measured piezoelectric properties can he attributed to the mechanics of the layered structure.

Klaus Prume - One of the best experts on this subject based on the ideXlab platform.

  • Effects of the top-electrode size on the piezoelectric properties (d33 and S) of lead zirconate titanate thin films
    Journal of Applied Physics, 2004
    Co-Authors: P. Gerber, C. Kugeler, A. Roelofs, Ulrich Böttger, Rainer Waser, Klaus Prume
    Abstract:

    The effects of a decreasing top electrode size on the electric and piezoelectric properties of tetragonal Pb(ZrX,Ti1−X)O3 thin films are investigated. The effective piezoelectric small-Signal Coefficient d33,eff and the piezoelectric large Signal-strain S are measured using a double-beam laser interferometer. Both properties are found to decrease rapidly with decreasing size of the used Pt top electrode for the investigated dimensions of 5mmto100μm edge length (square pads). While the loss of d33,eff is as high as 75%, the influence on the relative permittivity is only small. The source of the pad size effect on the measured piezoelectric properties is found to be the mechanics of the layered structure commonly used for piezoelectric measurements (Pt∕PZT∕Pt∕TiO∕SiO2∕Si), [PZT,Pb(Zrx,Ti1−x)O3] which is verified by finite element simulations.The effects of a decreasing top electrode size on the electric and piezoelectric properties of tetragonal Pb(ZrX,Ti1−X)O3 thin films are investigated. The effective piezoelectric small-Signal Coefficient d33,eff and the piezoelectric large Signal-strain S are measured using a double-beam laser interferometer. Both properties are found to decrease rapidly with decreasing size of the used Pt top electrode for the investigated dimensions of 5mmto100μm edge length (square pads). While the loss of d33,eff is as high as 75%, the influence on the relative permittivity is only small. The source of the pad size effect on the measured piezoelectric properties is found to be the mechanics of the layered structure commonly used for piezoelectric measurements (Pt∕PZT∕Pt∕TiO∕SiO2∕Si), [PZT,Pb(Zrx,Ti1−x)O3] which is verified by finite element simulations.

  • Simulation and measurements of the piezoelectric properties response (d/sub 33/) of piezoelectric layered thin film structures influenced by the top-electrode size
    14th IEEE International Symposium on Applications of Ferroelectrics 2004. ISAF-04. 2004, 1
    Co-Authors: Klaus Prume, P. Gerber, C. Kugeler, A. Roelofs, Ulrich Böttger, Rainer Waser, Thorsten Schmitz-kempen, S. Tiedke
    Abstract:

    The properties of piezoelectric thin film layered structures are in the focus of many investigations. Significant decreasing piezoelectric properties have been observed with decreasing top-electrode size. These results are obtained by measurements of the effective piezoelectric small-Signal Coefficient d/sub 33,eff/ and the piezoelectric large Signal-strain S using a double-beam laser interferometer. Samples are investigated with squared top-electrodes with dimensions of 0.1 mm to 1 mm edge length. The loss of d/sub 33,eff/ is as high as 50 %, whereas the influence on the relative permittivity is only small. This work investigates this behaviour by calculating the influence of varying elastic and geometrical properties of substrate, electrodes, and piezoelectric thin film on the effective piezoelectric small-Signal Coefficient d/sub 33,eff/ by means of finite element simulations. Beside the clamping effect of the substrate under electrical operating conditions also the influence of thermally induced mechanical stresses after cooling from 4000/spl deg/C to room temperature is calculated. From measurements and simulations it can be concluded that the source of the pad size effect on the measured piezoelectric properties can he attributed to the mechanics of the layered structure.

C. Kugeler - One of the best experts on this subject based on the ideXlab platform.

  • Effects of ferroelectric switching on the piezoelectric small-Signal response (d33) and electrostriction (M33) of lead zirconate titanate thin films
    Journal of Applied Physics, 2004
    Co-Authors: P. Gerber, C. Kugeler, Ulrich Böttger, Rainer Waser
    Abstract:

    The effects of an increasing small Signal amplitude on the piezoelectric small-Signal response and electrostriction of tetragonal Pb(Zrx, Ti1−x)O3 thin films are investigated. The piezoelectric small-Signal Coefficient d33, piezoelectric large Signal-strain S, and electrostriction Coefficient M33 are measured using a double-beam laser interferometer. A continuously increasing influence of the small Signal amplitude is found starting at very low values. In particular, the impact on the measured coercive field Ec is found to be stronger than the impact of the cycling frequency of the applied bias field. Also, unexpected electrostrictive behavior is investigated and explained by the influence of ferroelectric switching on the intrinsic piezoelectric lattice strain. Furthermore, the influence of an applied small-Signal on the piezoelectric large-Signal response is investigated.

  • Effects of the top-electrode size on the piezoelectric properties (d33 and S) of lead zirconate titanate thin films
    Journal of Applied Physics, 2004
    Co-Authors: P. Gerber, C. Kugeler, A. Roelofs, Ulrich Böttger, Rainer Waser, Klaus Prume
    Abstract:

    The effects of a decreasing top electrode size on the electric and piezoelectric properties of tetragonal Pb(ZrX,Ti1−X)O3 thin films are investigated. The effective piezoelectric small-Signal Coefficient d33,eff and the piezoelectric large Signal-strain S are measured using a double-beam laser interferometer. Both properties are found to decrease rapidly with decreasing size of the used Pt top electrode for the investigated dimensions of 5mmto100μm edge length (square pads). While the loss of d33,eff is as high as 75%, the influence on the relative permittivity is only small. The source of the pad size effect on the measured piezoelectric properties is found to be the mechanics of the layered structure commonly used for piezoelectric measurements (Pt∕PZT∕Pt∕TiO∕SiO2∕Si), [PZT,Pb(Zrx,Ti1−x)O3] which is verified by finite element simulations.The effects of a decreasing top electrode size on the electric and piezoelectric properties of tetragonal Pb(ZrX,Ti1−X)O3 thin films are investigated. The effective piezoelectric small-Signal Coefficient d33,eff and the piezoelectric large Signal-strain S are measured using a double-beam laser interferometer. Both properties are found to decrease rapidly with decreasing size of the used Pt top electrode for the investigated dimensions of 5mmto100μm edge length (square pads). While the loss of d33,eff is as high as 75%, the influence on the relative permittivity is only small. The source of the pad size effect on the measured piezoelectric properties is found to be the mechanics of the layered structure commonly used for piezoelectric measurements (Pt∕PZT∕Pt∕TiO∕SiO2∕Si), [PZT,Pb(Zrx,Ti1−x)O3] which is verified by finite element simulations.

  • Simulation and measurements of the piezoelectric properties response (d/sub 33/) of piezoelectric layered thin film structures influenced by the top-electrode size
    14th IEEE International Symposium on Applications of Ferroelectrics 2004. ISAF-04. 2004, 1
    Co-Authors: Klaus Prume, P. Gerber, C. Kugeler, A. Roelofs, Ulrich Böttger, Rainer Waser, Thorsten Schmitz-kempen, S. Tiedke
    Abstract:

    The properties of piezoelectric thin film layered structures are in the focus of many investigations. Significant decreasing piezoelectric properties have been observed with decreasing top-electrode size. These results are obtained by measurements of the effective piezoelectric small-Signal Coefficient d/sub 33,eff/ and the piezoelectric large Signal-strain S using a double-beam laser interferometer. Samples are investigated with squared top-electrodes with dimensions of 0.1 mm to 1 mm edge length. The loss of d/sub 33,eff/ is as high as 50 %, whereas the influence on the relative permittivity is only small. This work investigates this behaviour by calculating the influence of varying elastic and geometrical properties of substrate, electrodes, and piezoelectric thin film on the effective piezoelectric small-Signal Coefficient d/sub 33,eff/ by means of finite element simulations. Beside the clamping effect of the substrate under electrical operating conditions also the influence of thermally induced mechanical stresses after cooling from 4000/spl deg/C to room temperature is calculated. From measurements and simulations it can be concluded that the source of the pad size effect on the measured piezoelectric properties can he attributed to the mechanics of the layered structure.

Ulrich Böttger - One of the best experts on this subject based on the ideXlab platform.

  • Effects of ferroelectric switching on the piezoelectric small-Signal response (d33) and electrostriction (M33) of lead zirconate titanate thin films
    Journal of Applied Physics, 2004
    Co-Authors: P. Gerber, C. Kugeler, Ulrich Böttger, Rainer Waser
    Abstract:

    The effects of an increasing small Signal amplitude on the piezoelectric small-Signal response and electrostriction of tetragonal Pb(Zrx, Ti1−x)O3 thin films are investigated. The piezoelectric small-Signal Coefficient d33, piezoelectric large Signal-strain S, and electrostriction Coefficient M33 are measured using a double-beam laser interferometer. A continuously increasing influence of the small Signal amplitude is found starting at very low values. In particular, the impact on the measured coercive field Ec is found to be stronger than the impact of the cycling frequency of the applied bias field. Also, unexpected electrostrictive behavior is investigated and explained by the influence of ferroelectric switching on the intrinsic piezoelectric lattice strain. Furthermore, the influence of an applied small-Signal on the piezoelectric large-Signal response is investigated.

  • Effects of the top-electrode size on the piezoelectric properties (d33 and S) of lead zirconate titanate thin films
    Journal of Applied Physics, 2004
    Co-Authors: P. Gerber, C. Kugeler, A. Roelofs, Ulrich Böttger, Rainer Waser, Klaus Prume
    Abstract:

    The effects of a decreasing top electrode size on the electric and piezoelectric properties of tetragonal Pb(ZrX,Ti1−X)O3 thin films are investigated. The effective piezoelectric small-Signal Coefficient d33,eff and the piezoelectric large Signal-strain S are measured using a double-beam laser interferometer. Both properties are found to decrease rapidly with decreasing size of the used Pt top electrode for the investigated dimensions of 5mmto100μm edge length (square pads). While the loss of d33,eff is as high as 75%, the influence on the relative permittivity is only small. The source of the pad size effect on the measured piezoelectric properties is found to be the mechanics of the layered structure commonly used for piezoelectric measurements (Pt∕PZT∕Pt∕TiO∕SiO2∕Si), [PZT,Pb(Zrx,Ti1−x)O3] which is verified by finite element simulations.The effects of a decreasing top electrode size on the electric and piezoelectric properties of tetragonal Pb(ZrX,Ti1−X)O3 thin films are investigated. The effective piezoelectric small-Signal Coefficient d33,eff and the piezoelectric large Signal-strain S are measured using a double-beam laser interferometer. Both properties are found to decrease rapidly with decreasing size of the used Pt top electrode for the investigated dimensions of 5mmto100μm edge length (square pads). While the loss of d33,eff is as high as 75%, the influence on the relative permittivity is only small. The source of the pad size effect on the measured piezoelectric properties is found to be the mechanics of the layered structure commonly used for piezoelectric measurements (Pt∕PZT∕Pt∕TiO∕SiO2∕Si), [PZT,Pb(Zrx,Ti1−x)O3] which is verified by finite element simulations.

  • Simulation and measurements of the piezoelectric properties response (d/sub 33/) of piezoelectric layered thin film structures influenced by the top-electrode size
    14th IEEE International Symposium on Applications of Ferroelectrics 2004. ISAF-04. 2004, 1
    Co-Authors: Klaus Prume, P. Gerber, C. Kugeler, A. Roelofs, Ulrich Böttger, Rainer Waser, Thorsten Schmitz-kempen, S. Tiedke
    Abstract:

    The properties of piezoelectric thin film layered structures are in the focus of many investigations. Significant decreasing piezoelectric properties have been observed with decreasing top-electrode size. These results are obtained by measurements of the effective piezoelectric small-Signal Coefficient d/sub 33,eff/ and the piezoelectric large Signal-strain S using a double-beam laser interferometer. Samples are investigated with squared top-electrodes with dimensions of 0.1 mm to 1 mm edge length. The loss of d/sub 33,eff/ is as high as 50 %, whereas the influence on the relative permittivity is only small. This work investigates this behaviour by calculating the influence of varying elastic and geometrical properties of substrate, electrodes, and piezoelectric thin film on the effective piezoelectric small-Signal Coefficient d/sub 33,eff/ by means of finite element simulations. Beside the clamping effect of the substrate under electrical operating conditions also the influence of thermally induced mechanical stresses after cooling from 4000/spl deg/C to room temperature is calculated. From measurements and simulations it can be concluded that the source of the pad size effect on the measured piezoelectric properties can he attributed to the mechanics of the layered structure.