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Tetsuo Iwata - One of the best experts on this subject based on the ideXlab platform.
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dual comb Spectroscopic Ellipsometry
Nature Communications, 2017Co-Authors: Takeo Minamikawa, Yida Hsieh, Kyuki Shibuya, Eiji Hase, Yoshiki Kaneoka, Sho Okubo, Hajime Inaba, Yasuhiro Mizutani, Hirotsugu Yamamoto, Tetsuo IwataAbstract:Spectroscopic Ellipsometry is a means of investigating optical and dielectric material responses. Conventional Spectroscopic Ellipsometry is subject to trade-offs between spectral accuracy, resolution, and measurement time. Polarization modulation has afforded poor performance because of its sensitivity to mechanical vibrational noise, thermal instability, and polarization-wavelength dependency. We combine Spectroscopic Ellipsometry with dual-comb spectroscopy, namely, dual-comb Spectroscopic Ellipsometry. Dual-comb Spectroscopic Ellipsometry (DCSE). DCSE directly and simultaneously obtains the ellipsometric parameters of the amplitude ratio and phase difference between s-polarized and p-polarized light signals with ultra-high spectral resolution and no polarization modulation, beyond the conventional limit. Ellipsometric evaluation without polarization modulation also enhances the stability and robustness of the system. In this study, we construct a polarization-modulation-free DCSE system with a spectral resolution of up to 1.2 × 10−5 nm throughout the spectral range of 1514–1595 nm and achieved an accuracy of 38.4 nm and a precision of 3.3 nm in the measurement of thin-film samples.
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Dual-optical-comb Spectroscopic Ellipsometry
Nature communications, 2017Co-Authors: Takeo Minamikawa, Yida Hsieh, Kyuki Shibuya, Eiji Hase, Yoshiki Kaneoka, Sho Okubo, Hajime Inaba, Yasuhiro Mizutani, Hirotsugu Yamamoto, Tetsuo IwataAbstract:Spectroscopic Ellipsometry is a means to investigate optical and dielectric material responses. Conventional Spectroscopic Ellipsometry has trade-offs between spectral accuracy, resolution, and measurement time. Polarization modulation has afforded poor performance due to its sensitivity to mechanical vibrational noise, thermal instability, and polarization wavelength dependency. We equip a Spectroscopic ellipsometer with dual-optical-comb spectroscopy, viz. dual-optical-comb Spectroscopic Ellipsometry (DCSE). The DCSE directly and simultaneously obtains amplitude and phase information with ultra-high spectral precision that is beyond the conventional limit. This precision is due to the automatic time-sweeping acquisition of the interferogram using Fourier transform spectroscopy and optical combs with well-defined frequency. Ellipsometric evaluation without polarization modulation also enhances the stability and robustness of the system. In this study, we evaluate the DCSE of birefringent materials and thin films, which showed improved spectral accuracy and a resolution of up to 1.2x10-5 nm across a 5-10 THz spectral bandwidth without any mechanical movement.
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Dual-optical-comb Spectroscopic Ellipsometry
Conference on Lasers and Electro-Optics, 2016Co-Authors: Takeo Minamikawa, Yida Hsieh, Kyuki Shibuya, Yoshiki Kaneoka, Sho Okubo, Hajime Inaba, Yasuhiro Mizutani, Takeshi Yasui, Tetsuo IwataAbstract:We proposed Spectroscopic Ellipsometry employing dual-optical-comb spectroscopy. We demonstrated the ellipsometric evaluation of a high-order quarter waveplate and a SiO 2 thin film standard with the spectral resolution of 48 MHz.
Takeo Minamikawa - One of the best experts on this subject based on the ideXlab platform.
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dual comb Spectroscopic Ellipsometry
Nature Communications, 2017Co-Authors: Takeo Minamikawa, Yida Hsieh, Kyuki Shibuya, Eiji Hase, Yoshiki Kaneoka, Sho Okubo, Hajime Inaba, Yasuhiro Mizutani, Hirotsugu Yamamoto, Tetsuo IwataAbstract:Spectroscopic Ellipsometry is a means of investigating optical and dielectric material responses. Conventional Spectroscopic Ellipsometry is subject to trade-offs between spectral accuracy, resolution, and measurement time. Polarization modulation has afforded poor performance because of its sensitivity to mechanical vibrational noise, thermal instability, and polarization-wavelength dependency. We combine Spectroscopic Ellipsometry with dual-comb spectroscopy, namely, dual-comb Spectroscopic Ellipsometry. Dual-comb Spectroscopic Ellipsometry (DCSE). DCSE directly and simultaneously obtains the ellipsometric parameters of the amplitude ratio and phase difference between s-polarized and p-polarized light signals with ultra-high spectral resolution and no polarization modulation, beyond the conventional limit. Ellipsometric evaluation without polarization modulation also enhances the stability and robustness of the system. In this study, we construct a polarization-modulation-free DCSE system with a spectral resolution of up to 1.2 × 10−5 nm throughout the spectral range of 1514–1595 nm and achieved an accuracy of 38.4 nm and a precision of 3.3 nm in the measurement of thin-film samples.
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Dual-optical-comb Spectroscopic Ellipsometry
Nature communications, 2017Co-Authors: Takeo Minamikawa, Yida Hsieh, Kyuki Shibuya, Eiji Hase, Yoshiki Kaneoka, Sho Okubo, Hajime Inaba, Yasuhiro Mizutani, Hirotsugu Yamamoto, Tetsuo IwataAbstract:Spectroscopic Ellipsometry is a means to investigate optical and dielectric material responses. Conventional Spectroscopic Ellipsometry has trade-offs between spectral accuracy, resolution, and measurement time. Polarization modulation has afforded poor performance due to its sensitivity to mechanical vibrational noise, thermal instability, and polarization wavelength dependency. We equip a Spectroscopic ellipsometer with dual-optical-comb spectroscopy, viz. dual-optical-comb Spectroscopic Ellipsometry (DCSE). The DCSE directly and simultaneously obtains amplitude and phase information with ultra-high spectral precision that is beyond the conventional limit. This precision is due to the automatic time-sweeping acquisition of the interferogram using Fourier transform spectroscopy and optical combs with well-defined frequency. Ellipsometric evaluation without polarization modulation also enhances the stability and robustness of the system. In this study, we evaluate the DCSE of birefringent materials and thin films, which showed improved spectral accuracy and a resolution of up to 1.2x10-5 nm across a 5-10 THz spectral bandwidth without any mechanical movement.
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Dual-optical-comb Spectroscopic Ellipsometry
Conference on Lasers and Electro-Optics, 2016Co-Authors: Takeo Minamikawa, Yida Hsieh, Kyuki Shibuya, Yoshiki Kaneoka, Sho Okubo, Hajime Inaba, Yasuhiro Mizutani, Takeshi Yasui, Tetsuo IwataAbstract:We proposed Spectroscopic Ellipsometry employing dual-optical-comb spectroscopy. We demonstrated the ellipsometric evaluation of a high-order quarter waveplate and a SiO 2 thin film standard with the spectral resolution of 48 MHz.
Kyuki Shibuya - One of the best experts on this subject based on the ideXlab platform.
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dual comb Spectroscopic Ellipsometry
Nature Communications, 2017Co-Authors: Takeo Minamikawa, Yida Hsieh, Kyuki Shibuya, Eiji Hase, Yoshiki Kaneoka, Sho Okubo, Hajime Inaba, Yasuhiro Mizutani, Hirotsugu Yamamoto, Tetsuo IwataAbstract:Spectroscopic Ellipsometry is a means of investigating optical and dielectric material responses. Conventional Spectroscopic Ellipsometry is subject to trade-offs between spectral accuracy, resolution, and measurement time. Polarization modulation has afforded poor performance because of its sensitivity to mechanical vibrational noise, thermal instability, and polarization-wavelength dependency. We combine Spectroscopic Ellipsometry with dual-comb spectroscopy, namely, dual-comb Spectroscopic Ellipsometry. Dual-comb Spectroscopic Ellipsometry (DCSE). DCSE directly and simultaneously obtains the ellipsometric parameters of the amplitude ratio and phase difference between s-polarized and p-polarized light signals with ultra-high spectral resolution and no polarization modulation, beyond the conventional limit. Ellipsometric evaluation without polarization modulation also enhances the stability and robustness of the system. In this study, we construct a polarization-modulation-free DCSE system with a spectral resolution of up to 1.2 × 10−5 nm throughout the spectral range of 1514–1595 nm and achieved an accuracy of 38.4 nm and a precision of 3.3 nm in the measurement of thin-film samples.
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Dual-optical-comb Spectroscopic Ellipsometry
Nature communications, 2017Co-Authors: Takeo Minamikawa, Yida Hsieh, Kyuki Shibuya, Eiji Hase, Yoshiki Kaneoka, Sho Okubo, Hajime Inaba, Yasuhiro Mizutani, Hirotsugu Yamamoto, Tetsuo IwataAbstract:Spectroscopic Ellipsometry is a means to investigate optical and dielectric material responses. Conventional Spectroscopic Ellipsometry has trade-offs between spectral accuracy, resolution, and measurement time. Polarization modulation has afforded poor performance due to its sensitivity to mechanical vibrational noise, thermal instability, and polarization wavelength dependency. We equip a Spectroscopic ellipsometer with dual-optical-comb spectroscopy, viz. dual-optical-comb Spectroscopic Ellipsometry (DCSE). The DCSE directly and simultaneously obtains amplitude and phase information with ultra-high spectral precision that is beyond the conventional limit. This precision is due to the automatic time-sweeping acquisition of the interferogram using Fourier transform spectroscopy and optical combs with well-defined frequency. Ellipsometric evaluation without polarization modulation also enhances the stability and robustness of the system. In this study, we evaluate the DCSE of birefringent materials and thin films, which showed improved spectral accuracy and a resolution of up to 1.2x10-5 nm across a 5-10 THz spectral bandwidth without any mechanical movement.
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Dual-optical-comb Spectroscopic Ellipsometry
Conference on Lasers and Electro-Optics, 2016Co-Authors: Takeo Minamikawa, Yida Hsieh, Kyuki Shibuya, Yoshiki Kaneoka, Sho Okubo, Hajime Inaba, Yasuhiro Mizutani, Takeshi Yasui, Tetsuo IwataAbstract:We proposed Spectroscopic Ellipsometry employing dual-optical-comb spectroscopy. We demonstrated the ellipsometric evaluation of a high-order quarter waveplate and a SiO 2 thin film standard with the spectral resolution of 48 MHz.
Yoshiki Kaneoka - One of the best experts on this subject based on the ideXlab platform.
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dual comb Spectroscopic Ellipsometry
Nature Communications, 2017Co-Authors: Takeo Minamikawa, Yida Hsieh, Kyuki Shibuya, Eiji Hase, Yoshiki Kaneoka, Sho Okubo, Hajime Inaba, Yasuhiro Mizutani, Hirotsugu Yamamoto, Tetsuo IwataAbstract:Spectroscopic Ellipsometry is a means of investigating optical and dielectric material responses. Conventional Spectroscopic Ellipsometry is subject to trade-offs between spectral accuracy, resolution, and measurement time. Polarization modulation has afforded poor performance because of its sensitivity to mechanical vibrational noise, thermal instability, and polarization-wavelength dependency. We combine Spectroscopic Ellipsometry with dual-comb spectroscopy, namely, dual-comb Spectroscopic Ellipsometry. Dual-comb Spectroscopic Ellipsometry (DCSE). DCSE directly and simultaneously obtains the ellipsometric parameters of the amplitude ratio and phase difference between s-polarized and p-polarized light signals with ultra-high spectral resolution and no polarization modulation, beyond the conventional limit. Ellipsometric evaluation without polarization modulation also enhances the stability and robustness of the system. In this study, we construct a polarization-modulation-free DCSE system with a spectral resolution of up to 1.2 × 10−5 nm throughout the spectral range of 1514–1595 nm and achieved an accuracy of 38.4 nm and a precision of 3.3 nm in the measurement of thin-film samples.
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Dual-optical-comb Spectroscopic Ellipsometry
Nature communications, 2017Co-Authors: Takeo Minamikawa, Yida Hsieh, Kyuki Shibuya, Eiji Hase, Yoshiki Kaneoka, Sho Okubo, Hajime Inaba, Yasuhiro Mizutani, Hirotsugu Yamamoto, Tetsuo IwataAbstract:Spectroscopic Ellipsometry is a means to investigate optical and dielectric material responses. Conventional Spectroscopic Ellipsometry has trade-offs between spectral accuracy, resolution, and measurement time. Polarization modulation has afforded poor performance due to its sensitivity to mechanical vibrational noise, thermal instability, and polarization wavelength dependency. We equip a Spectroscopic ellipsometer with dual-optical-comb spectroscopy, viz. dual-optical-comb Spectroscopic Ellipsometry (DCSE). The DCSE directly and simultaneously obtains amplitude and phase information with ultra-high spectral precision that is beyond the conventional limit. This precision is due to the automatic time-sweeping acquisition of the interferogram using Fourier transform spectroscopy and optical combs with well-defined frequency. Ellipsometric evaluation without polarization modulation also enhances the stability and robustness of the system. In this study, we evaluate the DCSE of birefringent materials and thin films, which showed improved spectral accuracy and a resolution of up to 1.2x10-5 nm across a 5-10 THz spectral bandwidth without any mechanical movement.
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Dual-optical-comb Spectroscopic Ellipsometry
Conference on Lasers and Electro-Optics, 2016Co-Authors: Takeo Minamikawa, Yida Hsieh, Kyuki Shibuya, Yoshiki Kaneoka, Sho Okubo, Hajime Inaba, Yasuhiro Mizutani, Takeshi Yasui, Tetsuo IwataAbstract:We proposed Spectroscopic Ellipsometry employing dual-optical-comb spectroscopy. We demonstrated the ellipsometric evaluation of a high-order quarter waveplate and a SiO 2 thin film standard with the spectral resolution of 48 MHz.
Sho Okubo - One of the best experts on this subject based on the ideXlab platform.
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dual comb Spectroscopic Ellipsometry
Nature Communications, 2017Co-Authors: Takeo Minamikawa, Yida Hsieh, Kyuki Shibuya, Eiji Hase, Yoshiki Kaneoka, Sho Okubo, Hajime Inaba, Yasuhiro Mizutani, Hirotsugu Yamamoto, Tetsuo IwataAbstract:Spectroscopic Ellipsometry is a means of investigating optical and dielectric material responses. Conventional Spectroscopic Ellipsometry is subject to trade-offs between spectral accuracy, resolution, and measurement time. Polarization modulation has afforded poor performance because of its sensitivity to mechanical vibrational noise, thermal instability, and polarization-wavelength dependency. We combine Spectroscopic Ellipsometry with dual-comb spectroscopy, namely, dual-comb Spectroscopic Ellipsometry. Dual-comb Spectroscopic Ellipsometry (DCSE). DCSE directly and simultaneously obtains the ellipsometric parameters of the amplitude ratio and phase difference between s-polarized and p-polarized light signals with ultra-high spectral resolution and no polarization modulation, beyond the conventional limit. Ellipsometric evaluation without polarization modulation also enhances the stability and robustness of the system. In this study, we construct a polarization-modulation-free DCSE system with a spectral resolution of up to 1.2 × 10−5 nm throughout the spectral range of 1514–1595 nm and achieved an accuracy of 38.4 nm and a precision of 3.3 nm in the measurement of thin-film samples.
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Dual-optical-comb Spectroscopic Ellipsometry
Nature communications, 2017Co-Authors: Takeo Minamikawa, Yida Hsieh, Kyuki Shibuya, Eiji Hase, Yoshiki Kaneoka, Sho Okubo, Hajime Inaba, Yasuhiro Mizutani, Hirotsugu Yamamoto, Tetsuo IwataAbstract:Spectroscopic Ellipsometry is a means to investigate optical and dielectric material responses. Conventional Spectroscopic Ellipsometry has trade-offs between spectral accuracy, resolution, and measurement time. Polarization modulation has afforded poor performance due to its sensitivity to mechanical vibrational noise, thermal instability, and polarization wavelength dependency. We equip a Spectroscopic ellipsometer with dual-optical-comb spectroscopy, viz. dual-optical-comb Spectroscopic Ellipsometry (DCSE). The DCSE directly and simultaneously obtains amplitude and phase information with ultra-high spectral precision that is beyond the conventional limit. This precision is due to the automatic time-sweeping acquisition of the interferogram using Fourier transform spectroscopy and optical combs with well-defined frequency. Ellipsometric evaluation without polarization modulation also enhances the stability and robustness of the system. In this study, we evaluate the DCSE of birefringent materials and thin films, which showed improved spectral accuracy and a resolution of up to 1.2x10-5 nm across a 5-10 THz spectral bandwidth without any mechanical movement.
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Dual-optical-comb Spectroscopic Ellipsometry
Conference on Lasers and Electro-Optics, 2016Co-Authors: Takeo Minamikawa, Yida Hsieh, Kyuki Shibuya, Yoshiki Kaneoka, Sho Okubo, Hajime Inaba, Yasuhiro Mizutani, Takeshi Yasui, Tetsuo IwataAbstract:We proposed Spectroscopic Ellipsometry employing dual-optical-comb spectroscopy. We demonstrated the ellipsometric evaluation of a high-order quarter waveplate and a SiO 2 thin film standard with the spectral resolution of 48 MHz.