Surface Micro-Machining

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Christian Gierl - One of the best experts on this subject based on the ideXlab platform.

  • Surface micromachined MEMS tunable VCSEL at 1550 nm with > 70 nm single mode tuning
    Vertical-Cavity Surface-Emitting Lasers XVI, 2012
    Co-Authors: Christian Gierl, Karolina Zogal, Christian Grasse, H. A. Davani, G. Böhm, Franko Küppers, Peter Meissner, Pierluigi Debernardi, Tobias Gründl, Markus-christian Amann
    Abstract:

    We present Surface micro-machined tunable vertical-cavity Surface-emitting lasers (VCSELs) operating around 1550nm with tuning ranges up to 100nm and side mode suppression ratios beyond 40 dB. The output power reaches 3.5mW at 1555 nm. The electro-thermal and the electro-statical actuation of a micro electro-mechanical system (MEMS) movable distributed Bragg reflector (DBR) membrane increases/decreases the cavity length which shifts the resonant wavelength of the cavity to higher/lower values. The wavelength is modulated with 200 Hz/120 kHz. Both tuning mechanisms can be used simultaneously within the same device. The newly developed Surface Micro-Machining technology uses competitive dielectric materials for the MEMS, deposited with low temperature plasma enhanced chemical vapor deposition (PECVD), which is cost effective and capable for on wafer mass production.

  • Surface micromachined MEMS tunable VCSEL at 1550 nm with \textgreater 70 nm single mode tuning
    2012
    Co-Authors: Christian Gierl, Karolina Zogal, Christian Grasse, H. A. Davani, G. Böhm, Franko Küppers, Peter Meissner, Pierluigi Debernardi, Tobias Gründl, Markus-christian Amann
    Abstract:

    We present Surface micro-machined tunable vertical-cavity Surface-emitting lasers (VCSELs) operating around 1550nm with tuning ranges up to 100nm and side mode suppression ratios beyond 40 dB. The output power reaches 3.5mW at 1555 nm. The electro-thermal and the electro-statical actuation of a micro electro-mechanical system (MEMS) movable distributed Bragg reflector (DBR) membrane increases/decreases the cavity length which shifts the resonant wavelength of the cavity to higher/lower values. The wavelength is modulated with 200 Hz/120 kHz. Both tuning mechanisms can be used simultaneously within the same device. The newly developed Surface Micro-Machining technology uses competitive dielectric materials for the MEMS, deposited with low temperature plasma enhanced chemical vapor deposition (PECVD), which is cost effective and capable for on wafer mass production.

  • Linewidth of Surface micro-machined MEMS tunable VCSELs at 1.5μm
    Conference on Lasers and Electro-Optics 2012, 2012
    Co-Authors: Christian Gierl, T. Gruendl, Karolina Zogal, Christian Grasse, H. A. Davani, G. Böhm, Franko Küppers, Peter Meissner, M.-c. Amann
    Abstract:

    We demonstrate the linewidth characteristics of a micro-electro-mechanical system (MEMS) widely tunable VCSEL based on a newly developed Surface Micro-Machining technology. The minimal linewidth is 98MHz at thermal rollover.

  • Surface micromachined tunable 1.55 μm-VCSEL with 102 nm continuous single-mode tuning.
    Optics express, 2011
    Co-Authors: Christian Gierl, T. Gruendl, Karolina Zogal, Christian Grasse, H. A. Davani, G. Böhm, Franko Küppers, Pierluigi Debernardi, Sandro Jatta, P. Meißner
    Abstract:

    For the first time a vertical-cavity Surface-emitting laser (VCSEL) with a single-mode wavelength-tuning over 102nm in the range of 1550nm is demonstrated. The fiber-coupled optical output power has a maximum of 3.5mW and is > 2mW over the entire tuning range. The sidemode suppression ratios are > 45dB. The wavelength tuning is achieved with the micro-electro mechanical actuation of a mirror membrane fabricated with Surface Micro-Machining for on-wafer mass production. The mirror membrane consists of low cost dielectric materials (SiOx/SiNy) deposited with low temperature (< 100°C) Plasma Enhanced Chemical Vapor Deposition (PECVD).

P. Meißner - One of the best experts on this subject based on the ideXlab platform.

  • Surface micromachined tunable 1.55 μm-VCSEL with 102 nm continuous single-mode tuning.
    Optics express, 2011
    Co-Authors: Christian Gierl, T. Gruendl, Karolina Zogal, Christian Grasse, H. A. Davani, G. Böhm, Franko Küppers, Pierluigi Debernardi, Sandro Jatta, P. Meißner
    Abstract:

    For the first time a vertical-cavity Surface-emitting laser (VCSEL) with a single-mode wavelength-tuning over 102nm in the range of 1550nm is demonstrated. The fiber-coupled optical output power has a maximum of 3.5mW and is > 2mW over the entire tuning range. The sidemode suppression ratios are > 45dB. The wavelength tuning is achieved with the micro-electro mechanical actuation of a mirror membrane fabricated with Surface Micro-Machining for on-wafer mass production. The mirror membrane consists of low cost dielectric materials (SiOx/SiNy) deposited with low temperature (< 100°C) Plasma Enhanced Chemical Vapor Deposition (PECVD).

Christian Grasse - One of the best experts on this subject based on the ideXlab platform.

  • Surface micromachined MEMS tunable VCSEL at 1550 nm with > 70 nm single mode tuning
    Vertical-Cavity Surface-Emitting Lasers XVI, 2012
    Co-Authors: Christian Gierl, Karolina Zogal, Christian Grasse, H. A. Davani, G. Böhm, Franko Küppers, Peter Meissner, Pierluigi Debernardi, Tobias Gründl, Markus-christian Amann
    Abstract:

    We present Surface micro-machined tunable vertical-cavity Surface-emitting lasers (VCSELs) operating around 1550nm with tuning ranges up to 100nm and side mode suppression ratios beyond 40 dB. The output power reaches 3.5mW at 1555 nm. The electro-thermal and the electro-statical actuation of a micro electro-mechanical system (MEMS) movable distributed Bragg reflector (DBR) membrane increases/decreases the cavity length which shifts the resonant wavelength of the cavity to higher/lower values. The wavelength is modulated with 200 Hz/120 kHz. Both tuning mechanisms can be used simultaneously within the same device. The newly developed Surface Micro-Machining technology uses competitive dielectric materials for the MEMS, deposited with low temperature plasma enhanced chemical vapor deposition (PECVD), which is cost effective and capable for on wafer mass production.

  • Surface micromachined MEMS tunable VCSEL at 1550 nm with \textgreater 70 nm single mode tuning
    2012
    Co-Authors: Christian Gierl, Karolina Zogal, Christian Grasse, H. A. Davani, G. Böhm, Franko Küppers, Peter Meissner, Pierluigi Debernardi, Tobias Gründl, Markus-christian Amann
    Abstract:

    We present Surface micro-machined tunable vertical-cavity Surface-emitting lasers (VCSELs) operating around 1550nm with tuning ranges up to 100nm and side mode suppression ratios beyond 40 dB. The output power reaches 3.5mW at 1555 nm. The electro-thermal and the electro-statical actuation of a micro electro-mechanical system (MEMS) movable distributed Bragg reflector (DBR) membrane increases/decreases the cavity length which shifts the resonant wavelength of the cavity to higher/lower values. The wavelength is modulated with 200 Hz/120 kHz. Both tuning mechanisms can be used simultaneously within the same device. The newly developed Surface Micro-Machining technology uses competitive dielectric materials for the MEMS, deposited with low temperature plasma enhanced chemical vapor deposition (PECVD), which is cost effective and capable for on wafer mass production.

  • Linewidth of Surface micro-machined MEMS tunable VCSELs at 1.5μm
    Conference on Lasers and Electro-Optics 2012, 2012
    Co-Authors: Christian Gierl, T. Gruendl, Karolina Zogal, Christian Grasse, H. A. Davani, G. Böhm, Franko Küppers, Peter Meissner, M.-c. Amann
    Abstract:

    We demonstrate the linewidth characteristics of a micro-electro-mechanical system (MEMS) widely tunable VCSEL based on a newly developed Surface Micro-Machining technology. The minimal linewidth is 98MHz at thermal rollover.

  • Surface micromachined tunable 1.55 μm-VCSEL with 102 nm continuous single-mode tuning.
    Optics express, 2011
    Co-Authors: Christian Gierl, T. Gruendl, Karolina Zogal, Christian Grasse, H. A. Davani, G. Böhm, Franko Küppers, Pierluigi Debernardi, Sandro Jatta, P. Meißner
    Abstract:

    For the first time a vertical-cavity Surface-emitting laser (VCSEL) with a single-mode wavelength-tuning over 102nm in the range of 1550nm is demonstrated. The fiber-coupled optical output power has a maximum of 3.5mW and is > 2mW over the entire tuning range. The sidemode suppression ratios are > 45dB. The wavelength tuning is achieved with the micro-electro mechanical actuation of a mirror membrane fabricated with Surface Micro-Machining for on-wafer mass production. The mirror membrane consists of low cost dielectric materials (SiOx/SiNy) deposited with low temperature (< 100°C) Plasma Enhanced Chemical Vapor Deposition (PECVD).

Franko Küppers - One of the best experts on this subject based on the ideXlab platform.

  • Surface micromachined MEMS tunable VCSEL at 1550 nm with > 70 nm single mode tuning
    Vertical-Cavity Surface-Emitting Lasers XVI, 2012
    Co-Authors: Christian Gierl, Karolina Zogal, Christian Grasse, H. A. Davani, G. Böhm, Franko Küppers, Peter Meissner, Pierluigi Debernardi, Tobias Gründl, Markus-christian Amann
    Abstract:

    We present Surface micro-machined tunable vertical-cavity Surface-emitting lasers (VCSELs) operating around 1550nm with tuning ranges up to 100nm and side mode suppression ratios beyond 40 dB. The output power reaches 3.5mW at 1555 nm. The electro-thermal and the electro-statical actuation of a micro electro-mechanical system (MEMS) movable distributed Bragg reflector (DBR) membrane increases/decreases the cavity length which shifts the resonant wavelength of the cavity to higher/lower values. The wavelength is modulated with 200 Hz/120 kHz. Both tuning mechanisms can be used simultaneously within the same device. The newly developed Surface Micro-Machining technology uses competitive dielectric materials for the MEMS, deposited with low temperature plasma enhanced chemical vapor deposition (PECVD), which is cost effective and capable for on wafer mass production.

  • Surface micromachined MEMS tunable VCSEL at 1550 nm with \textgreater 70 nm single mode tuning
    2012
    Co-Authors: Christian Gierl, Karolina Zogal, Christian Grasse, H. A. Davani, G. Böhm, Franko Küppers, Peter Meissner, Pierluigi Debernardi, Tobias Gründl, Markus-christian Amann
    Abstract:

    We present Surface micro-machined tunable vertical-cavity Surface-emitting lasers (VCSELs) operating around 1550nm with tuning ranges up to 100nm and side mode suppression ratios beyond 40 dB. The output power reaches 3.5mW at 1555 nm. The electro-thermal and the electro-statical actuation of a micro electro-mechanical system (MEMS) movable distributed Bragg reflector (DBR) membrane increases/decreases the cavity length which shifts the resonant wavelength of the cavity to higher/lower values. The wavelength is modulated with 200 Hz/120 kHz. Both tuning mechanisms can be used simultaneously within the same device. The newly developed Surface Micro-Machining technology uses competitive dielectric materials for the MEMS, deposited with low temperature plasma enhanced chemical vapor deposition (PECVD), which is cost effective and capable for on wafer mass production.

  • Linewidth of Surface micro-machined MEMS tunable VCSELs at 1.5μm
    Conference on Lasers and Electro-Optics 2012, 2012
    Co-Authors: Christian Gierl, T. Gruendl, Karolina Zogal, Christian Grasse, H. A. Davani, G. Böhm, Franko Küppers, Peter Meissner, M.-c. Amann
    Abstract:

    We demonstrate the linewidth characteristics of a micro-electro-mechanical system (MEMS) widely tunable VCSEL based on a newly developed Surface Micro-Machining technology. The minimal linewidth is 98MHz at thermal rollover.

  • Surface micromachined tunable 1.55 μm-VCSEL with 102 nm continuous single-mode tuning.
    Optics express, 2011
    Co-Authors: Christian Gierl, T. Gruendl, Karolina Zogal, Christian Grasse, H. A. Davani, G. Böhm, Franko Küppers, Pierluigi Debernardi, Sandro Jatta, P. Meißner
    Abstract:

    For the first time a vertical-cavity Surface-emitting laser (VCSEL) with a single-mode wavelength-tuning over 102nm in the range of 1550nm is demonstrated. The fiber-coupled optical output power has a maximum of 3.5mW and is > 2mW over the entire tuning range. The sidemode suppression ratios are > 45dB. The wavelength tuning is achieved with the micro-electro mechanical actuation of a mirror membrane fabricated with Surface Micro-Machining for on-wafer mass production. The mirror membrane consists of low cost dielectric materials (SiOx/SiNy) deposited with low temperature (< 100°C) Plasma Enhanced Chemical Vapor Deposition (PECVD).

H. A. Davani - One of the best experts on this subject based on the ideXlab platform.

  • Surface micromachined MEMS tunable VCSEL at 1550 nm with > 70 nm single mode tuning
    Vertical-Cavity Surface-Emitting Lasers XVI, 2012
    Co-Authors: Christian Gierl, Karolina Zogal, Christian Grasse, H. A. Davani, G. Böhm, Franko Küppers, Peter Meissner, Pierluigi Debernardi, Tobias Gründl, Markus-christian Amann
    Abstract:

    We present Surface micro-machined tunable vertical-cavity Surface-emitting lasers (VCSELs) operating around 1550nm with tuning ranges up to 100nm and side mode suppression ratios beyond 40 dB. The output power reaches 3.5mW at 1555 nm. The electro-thermal and the electro-statical actuation of a micro electro-mechanical system (MEMS) movable distributed Bragg reflector (DBR) membrane increases/decreases the cavity length which shifts the resonant wavelength of the cavity to higher/lower values. The wavelength is modulated with 200 Hz/120 kHz. Both tuning mechanisms can be used simultaneously within the same device. The newly developed Surface Micro-Machining technology uses competitive dielectric materials for the MEMS, deposited with low temperature plasma enhanced chemical vapor deposition (PECVD), which is cost effective and capable for on wafer mass production.

  • Surface micromachined MEMS tunable VCSEL at 1550 nm with \textgreater 70 nm single mode tuning
    2012
    Co-Authors: Christian Gierl, Karolina Zogal, Christian Grasse, H. A. Davani, G. Böhm, Franko Küppers, Peter Meissner, Pierluigi Debernardi, Tobias Gründl, Markus-christian Amann
    Abstract:

    We present Surface micro-machined tunable vertical-cavity Surface-emitting lasers (VCSELs) operating around 1550nm with tuning ranges up to 100nm and side mode suppression ratios beyond 40 dB. The output power reaches 3.5mW at 1555 nm. The electro-thermal and the electro-statical actuation of a micro electro-mechanical system (MEMS) movable distributed Bragg reflector (DBR) membrane increases/decreases the cavity length which shifts the resonant wavelength of the cavity to higher/lower values. The wavelength is modulated with 200 Hz/120 kHz. Both tuning mechanisms can be used simultaneously within the same device. The newly developed Surface Micro-Machining technology uses competitive dielectric materials for the MEMS, deposited with low temperature plasma enhanced chemical vapor deposition (PECVD), which is cost effective and capable for on wafer mass production.

  • Linewidth of Surface micro-machined MEMS tunable VCSELs at 1.5μm
    Conference on Lasers and Electro-Optics 2012, 2012
    Co-Authors: Christian Gierl, T. Gruendl, Karolina Zogal, Christian Grasse, H. A. Davani, G. Böhm, Franko Küppers, Peter Meissner, M.-c. Amann
    Abstract:

    We demonstrate the linewidth characteristics of a micro-electro-mechanical system (MEMS) widely tunable VCSEL based on a newly developed Surface Micro-Machining technology. The minimal linewidth is 98MHz at thermal rollover.

  • Surface micromachined tunable 1.55 μm-VCSEL with 102 nm continuous single-mode tuning.
    Optics express, 2011
    Co-Authors: Christian Gierl, T. Gruendl, Karolina Zogal, Christian Grasse, H. A. Davani, G. Böhm, Franko Küppers, Pierluigi Debernardi, Sandro Jatta, P. Meißner
    Abstract:

    For the first time a vertical-cavity Surface-emitting laser (VCSEL) with a single-mode wavelength-tuning over 102nm in the range of 1550nm is demonstrated. The fiber-coupled optical output power has a maximum of 3.5mW and is > 2mW over the entire tuning range. The sidemode suppression ratios are > 45dB. The wavelength tuning is achieved with the micro-electro mechanical actuation of a mirror membrane fabricated with Surface Micro-Machining for on-wafer mass production. The mirror membrane consists of low cost dielectric materials (SiOx/SiNy) deposited with low temperature (< 100°C) Plasma Enhanced Chemical Vapor Deposition (PECVD).

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