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Abrasive Particle

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Elias Siores – One of the best experts on this subject based on the ideXlab platform.

  • the effect of cutting jet variation on surface striation formation in Abrasive water jet cutting
    Journal of Materials Processing Technology, 2003
    Co-Authors: Frank L Chen, Elias Siores

    Abstract:

    Abstract Abrasive water jet machining is an emerging technology which can shape almost all engineering materials, but also produces a characteristic striated surface finish which limits its potential applications. In this study, the characterisation of different materials’ cut surfaces is investigated using a scanning electron microscope. The effect of Abrasive Particle distribution in the jet on striation formation is detailed. A non-invasive technique: laser Doppler anemometry is used to analyse the Abrasive Particle distribution in the jet. Furthermore, the mechanisms of striation formation are discussed in detail and an effective striation minimisation technique applied to the cutting process is outlined.

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  • the effect of cutting jet variation on striation formation in Abrasive water jet cutting
    International Journal of Machine Tools & Manufacture, 2001
    Co-Authors: Frank L Chen, Elias Siores

    Abstract:

    Abrasive water jet machining is an emerging technology which can shape almost all engineering materials, but it also produces a characteristic striated surface finish which limits its potential applications. In this study, the characterisation of different materials’ cut surfaces is investigated using a scanning electron microscope. The effect of Abrasive Particle distribution in the jet on striation formation is detailed. A non-invasive technique, Laser Doppler Anemometry, is used to analyse the Abrasive Particle distribution in the jet. Furthermore, the mechanisms of striation formation are discussed in detail and an effective striation minimisation technique applied to the cutting process is outlined.

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Frank L Chen – One of the best experts on this subject based on the ideXlab platform.

  • the effect of cutting jet variation on surface striation formation in Abrasive water jet cutting
    Journal of Materials Processing Technology, 2003
    Co-Authors: Frank L Chen, Elias Siores

    Abstract:

    Abstract Abrasive water jet machining is an emerging technology which can shape almost all engineering materials, but also produces a characteristic striated surface finish which limits its potential applications. In this study, the characterisation of different materials’ cut surfaces is investigated using a scanning electron microscope. The effect of Abrasive Particle distribution in the jet on striation formation is detailed. A non-invasive technique: laser Doppler anemometry is used to analyse the Abrasive Particle distribution in the jet. Furthermore, the mechanisms of striation formation are discussed in detail and an effective striation minimisation technique applied to the cutting process is outlined.

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  • the effect of cutting jet variation on striation formation in Abrasive water jet cutting
    International Journal of Machine Tools & Manufacture, 2001
    Co-Authors: Frank L Chen, Elias Siores

    Abstract:

    Abrasive water jet machining is an emerging technology which can shape almost all engineering materials, but it also produces a characteristic striated surface finish which limits its potential applications. In this study, the characterisation of different materials’ cut surfaces is investigated using a scanning electron microscope. The effect of Abrasive Particle distribution in the jet on striation formation is detailed. A non-invasive technique, Laser Doppler Anemometry, is used to analyse the Abrasive Particle distribution in the jet. Furthermore, the mechanisms of striation formation are discussed in detail and an effective striation minimisation technique applied to the cutting process is outlined.

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Taesung Kim – One of the best experts on this subject based on the ideXlab platform.

  • Measurement of CMP Slurry Abrasive Size Distribution by Scanning Mobility Particle Sizer
    Electrochemical and Solid-State Letters, 2010
    Co-Authors: Hojoong Kim, Ji Chul Yang, Taesung Kim

    Abstract:

    This article introduces an Abrasive Particle size measurement by a scanning mobility Particle sizer (SMPS) to measure precise size distribution in the nanoregime. Static light scattering (SLS), which is a conventional method, is compared with the SMPS-based technique. Both measurement techniques differ in the measurement of SiO 2 and CeO 2 Abrasive Particle sizes. Results showed that SMPS is more sensitive than the SLS equipment due to a single-Particle count, which is suitable for representing nanoParticle Abrasives. To the best of our knowledge, there has been no article yet about the use of an SMPS for the measurement of Abrasive size in chemical mechanical planarization (CMP) technology.

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  • Slurry Abrasive Particle Size Measurement by Scanning Mobility Particle Sizer
    , 2009
    Co-Authors: Hojoong Kim, Ji Chul Yang, Taesung Kim

    Abstract:

    Abrasive Particle size of CMP slurry is known as one of the key design parameters to control the defect level during CMP process. For the measurement of Abrasive size distribution, laser light scattering is widely used for its fast measurement speed and ease of use. However, it also has disadvantages, such as non-repeatable measurement result due to customized signal converting algorithms and imprecise result for poly-disperse Abrasive Particles due to bulk unit sample measurement. Thus, in this paper, we propose the use of scanning mobility Particle sizer (SMPS) for the measurement of Abrasive Particle size distribution. SMPS is one of the standard instruments in aerosol and nanoParticle research field for several decades. SMPS utilizes size classification by electrical mobility and single Particle counting, which provide more precise result. We measured Abrasive size distribution of SiO2 and CeO2 slurry using both static laser light scattering instrument (SLS) and SMPS for SiO2 and CeO2. SMPS showed another mode of size distribution, which was not measured by SLS. From SEM measurement, we confirmed that this mode corresponded to primary Abrasive size.

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