Cantilever Beam

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Masaya Toda - One of the best experts on this subject based on the ideXlab platform.

  • pico thermogravimetric material properties analysis using diamond Cantilever Beam
    Sensors and Actuators A-physical, 2018
    Co-Authors: Ioana Voiculescu, Meiyong Liao, Takahito Ono, Marjan Zakerin, Rudiger Berger, Masaya Toda
    Abstract:

    Abstract This paper presents a novel technique for pico-thermo gravimetric analysis of material properties using diamond Cantilever Beam. The thermal decomposition of calcium carbonate (CaCO3) was examined using this method and was detected in picogram range. The diamond Cantilever Beam with CaCO3 particles attached on the tip was introduced in a thermal chamber and the temperature was raised from room temperature to 600 °C. The Cantilever Beam was operated in vibration mode and the resonant frequency was monitored in real time during the thermal process. From the resonant frequency behavior, there was evidence that the thermal conversion from CaCO3 to CaO starts around 500 °C. This novel technique used very small amount of material and variations of the analyzed material pico-mass at different temperatures were observed from the Cantilever Beam measurements. The thermal analysis expects a release of carbon dioxide (CO2) which in turn decreases the sample mass. Variations of the sample mass are an indication that the thermal decomposition of the analyzed material started. In this research the information about the conversion temperature was repeatable and highly accurate. The diamond Cantilever Beam is well suited for the thermal measurements because large variations of temperature produced small changes of the resonant frequency. This novel thermogravimetic technic provides accurate information about the analyzed material mass variations at picogram range during the thermal process.

  • Pico-thermogravimetric material properties analysis using diamond Cantilever Beam
    2017 19th International Conference on Solid-State Sensors Actuators and Microsystems (TRANSDUCERS), 2017
    Co-Authors: Ioana Voiculescu, Masaya Toda, Meiyong Liao, Takahito Ono
    Abstract:

    This paper presents a novel technique for pico-thermo gravimetric analysis of material properties using diamond Cantilever Beam. The thermal decomposition of calcium carbonate (CaCO 3 ) was examined using this method. The diamond Cantilever Beam with CaCO 3 attached on the tip was introduced in a thermal chamber and the temperature was raised to 600°C. The Cantilever Beam was vibrated and the resonant frequency was monitored in real time during the thermal process. From the resonant frequency behavior, there was evidence that the thermal conversion from CaCO 3 to CaO starts around 500°C. The novel technique used very small amount of material and variations of the analyzed material pico-mass can be observed from the Cantilever Beam measurements. The information about the conversion temperature was highly accurate.

  • Cantilever Beam temperature sensors for biological applications
    IEEJ Transactions on Electrical and Electronic Engineering, 2017
    Co-Authors: Masaya Toda, Takahito Ono, Naoki Inomata, Ioana Voiculescu
    Abstract:

    This review presents two types of Cantilever Beams employed as highly sensitive temperature sensors. One type is fabricated from composite materials and is operated in the deflection mode. The second type, used as a temperature sensor and presented in this review, is a resonant Cantilever Beam. The materials used for the fabrication of the bimaterial Cantilever Beam are silicon or silicon nitride and thin metallic films such as gold or aluminum. When the temperature changes, the different coefficients of thermal expansion of the metal and silicon cause the sensor to deflect. Considering the models of temperature measurement for biological cells, the heat should be applied locally at the tip of the Cantilever Beam. Formulas for the calculation of the deflection as a function of incident power applied at the free end of the Cantilever Beam operated in a liquid are presented in this review. The natural convective heat transfer coefficient was estimated by using the mathematical model and experimental values. For biological applications, the Cantilever Beam temperature sensor was operated in a liquid, and the heat transfer coefficients were between 381 and 642 W/m2K when the temperature applied to the Cantilever's free end varied from 28 to 71.8 °C. The resonant Cantilever Beam was also demonstrated as a sensitive temperature sensor for biological applications. As a thermogenic sample, brown fat cells (BFCs), which are related to metabolic heat production, are employed. The working principle of the resonator Cantilever Beam temperature sensor is based on the shift in resonant frequency in response to temperature changes. The resonant frequency and the temperature coefficient were 960 kHz and 22.0 ppm/K, respectively. The measurements were performed by stimulating the activity of BFCs by flowing a norepinephrine (NE) solution (1 µM).

  • Investigation of bimaterial Cantilever Beam for heat sensing in liquid
    Sensors and Actuators A: Physical, 2016
    Co-Authors: Ioana Voiculescu, Takahito Ono, Fei Liu, Masaya Toda
    Abstract:

    Abstract This paper presents the theoretical and experimental temperature profiles along a microCantilever Beam operated in liquid and employed in this research as a temperature sensor. The main application of this Cantilever Beam is for sensing temperature variations of mammalian cells. The Cantilever Beam was microprocessed as a composite structure fabricated from thin layers of silicon nitride and gold. In order to achieve high sensitivity the Cantilever Beam was conceived with the length at microscale and the thickness at nanoscale dimensions. Very small temperature variations generated the deflection of the Cantilever Beam free end due to different values of the thermal expansion coefficients of silicon nitride and gold. The paper is focused on the temperature calibration of the Cantilever Beam temperature sensor when it is operated in liquid. In the paper a microwire heater was used as a localized heat source to generate the heat required for calibration purposes. The Cantilever Beam was immersed in the liquid and the heater temperature was varied from 27.5 °C to 71.8 °C. In analogy with the situation when temperature variations are sensed at certain distance from a cell in suspension the heater was located at 15 μm distance from the Cantilever Beam. The experimental deflection values were compared with the theoretical deflection values and the heat transfer coefficient h of the system was calculated. At low temperatures the heat transfer coefficient value was 381 W/m2K and at higher temperatures 642 W/m2K. The experimental measurements illustrate that the Cantilever Beam deflection has the largest values when the heater was located near the midpoint of the Cantilever Beam. A systematic investigation of the Cantilever Beam deflection in liquid as a function of the applied heat is important for chemical and biological applications.

  • Evaluation of bimaterial Cantilever Beam for heat sensing at atmospheric pressure.
    The Review of scientific instruments, 2010
    Co-Authors: Masaya Toda, Takahito Ono, Fei Liu, Ioana Voiculescu
    Abstract:

    The bimaterial Cantilever Beam is an important basic structure of microelectromechanical system thermal devices. The research described in this paper is a study of the deflection of the bimaterial Cantilever Beam operated in the air and irradiated with a laser Beam at the free end. The bimaterial Cantilever Beam is a composite structure formed by layers of silicon nitride and gold. The temperature variations produce the deflection of the Cantilever Beam end due to different values of the thermal expansion coefficients of silicon nitride and gold. The deflection was experimentally measured in vacuum and atmospheric pressure when a laser Beam was irradiated at the free end. A formula for the calculation of the deflection as a function of incident power applied at the free end of the Cantilever Beam operated in air was also demonstrated. The predicted values of the deflection calculated using this formula and the experimental values of the deflection were compared, and the results were in good agreement. A systematic investigation of the Cantilever Beam deflection in vacuum and atmospheric pressure as a function of the heat applied at the free end is important for chemical and biological applications.

Ioana Voiculescu - One of the best experts on this subject based on the ideXlab platform.

  • pico thermogravimetric material properties analysis using diamond Cantilever Beam
    Sensors and Actuators A-physical, 2018
    Co-Authors: Ioana Voiculescu, Meiyong Liao, Takahito Ono, Marjan Zakerin, Rudiger Berger, Masaya Toda
    Abstract:

    Abstract This paper presents a novel technique for pico-thermo gravimetric analysis of material properties using diamond Cantilever Beam. The thermal decomposition of calcium carbonate (CaCO3) was examined using this method and was detected in picogram range. The diamond Cantilever Beam with CaCO3 particles attached on the tip was introduced in a thermal chamber and the temperature was raised from room temperature to 600 °C. The Cantilever Beam was operated in vibration mode and the resonant frequency was monitored in real time during the thermal process. From the resonant frequency behavior, there was evidence that the thermal conversion from CaCO3 to CaO starts around 500 °C. This novel technique used very small amount of material and variations of the analyzed material pico-mass at different temperatures were observed from the Cantilever Beam measurements. The thermal analysis expects a release of carbon dioxide (CO2) which in turn decreases the sample mass. Variations of the sample mass are an indication that the thermal decomposition of the analyzed material started. In this research the information about the conversion temperature was repeatable and highly accurate. The diamond Cantilever Beam is well suited for the thermal measurements because large variations of temperature produced small changes of the resonant frequency. This novel thermogravimetic technic provides accurate information about the analyzed material mass variations at picogram range during the thermal process.

  • Pico-thermogravimetric material properties analysis using diamond Cantilever Beam
    2017 19th International Conference on Solid-State Sensors Actuators and Microsystems (TRANSDUCERS), 2017
    Co-Authors: Ioana Voiculescu, Masaya Toda, Meiyong Liao, Takahito Ono
    Abstract:

    This paper presents a novel technique for pico-thermo gravimetric analysis of material properties using diamond Cantilever Beam. The thermal decomposition of calcium carbonate (CaCO 3 ) was examined using this method. The diamond Cantilever Beam with CaCO 3 attached on the tip was introduced in a thermal chamber and the temperature was raised to 600°C. The Cantilever Beam was vibrated and the resonant frequency was monitored in real time during the thermal process. From the resonant frequency behavior, there was evidence that the thermal conversion from CaCO 3 to CaO starts around 500°C. The novel technique used very small amount of material and variations of the analyzed material pico-mass can be observed from the Cantilever Beam measurements. The information about the conversion temperature was highly accurate.

  • Cantilever Beam temperature sensors for biological applications
    IEEJ Transactions on Electrical and Electronic Engineering, 2017
    Co-Authors: Masaya Toda, Takahito Ono, Naoki Inomata, Ioana Voiculescu
    Abstract:

    This review presents two types of Cantilever Beams employed as highly sensitive temperature sensors. One type is fabricated from composite materials and is operated in the deflection mode. The second type, used as a temperature sensor and presented in this review, is a resonant Cantilever Beam. The materials used for the fabrication of the bimaterial Cantilever Beam are silicon or silicon nitride and thin metallic films such as gold or aluminum. When the temperature changes, the different coefficients of thermal expansion of the metal and silicon cause the sensor to deflect. Considering the models of temperature measurement for biological cells, the heat should be applied locally at the tip of the Cantilever Beam. Formulas for the calculation of the deflection as a function of incident power applied at the free end of the Cantilever Beam operated in a liquid are presented in this review. The natural convective heat transfer coefficient was estimated by using the mathematical model and experimental values. For biological applications, the Cantilever Beam temperature sensor was operated in a liquid, and the heat transfer coefficients were between 381 and 642 W/m2K when the temperature applied to the Cantilever's free end varied from 28 to 71.8 °C. The resonant Cantilever Beam was also demonstrated as a sensitive temperature sensor for biological applications. As a thermogenic sample, brown fat cells (BFCs), which are related to metabolic heat production, are employed. The working principle of the resonator Cantilever Beam temperature sensor is based on the shift in resonant frequency in response to temperature changes. The resonant frequency and the temperature coefficient were 960 kHz and 22.0 ppm/K, respectively. The measurements were performed by stimulating the activity of BFCs by flowing a norepinephrine (NE) solution (1 µM).

  • Investigation of bimaterial Cantilever Beam for heat sensing in liquid
    Sensors and Actuators A: Physical, 2016
    Co-Authors: Ioana Voiculescu, Takahito Ono, Fei Liu, Masaya Toda
    Abstract:

    Abstract This paper presents the theoretical and experimental temperature profiles along a microCantilever Beam operated in liquid and employed in this research as a temperature sensor. The main application of this Cantilever Beam is for sensing temperature variations of mammalian cells. The Cantilever Beam was microprocessed as a composite structure fabricated from thin layers of silicon nitride and gold. In order to achieve high sensitivity the Cantilever Beam was conceived with the length at microscale and the thickness at nanoscale dimensions. Very small temperature variations generated the deflection of the Cantilever Beam free end due to different values of the thermal expansion coefficients of silicon nitride and gold. The paper is focused on the temperature calibration of the Cantilever Beam temperature sensor when it is operated in liquid. In the paper a microwire heater was used as a localized heat source to generate the heat required for calibration purposes. The Cantilever Beam was immersed in the liquid and the heater temperature was varied from 27.5 °C to 71.8 °C. In analogy with the situation when temperature variations are sensed at certain distance from a cell in suspension the heater was located at 15 μm distance from the Cantilever Beam. The experimental deflection values were compared with the theoretical deflection values and the heat transfer coefficient h of the system was calculated. At low temperatures the heat transfer coefficient value was 381 W/m2K and at higher temperatures 642 W/m2K. The experimental measurements illustrate that the Cantilever Beam deflection has the largest values when the heater was located near the midpoint of the Cantilever Beam. A systematic investigation of the Cantilever Beam deflection in liquid as a function of the applied heat is important for chemical and biological applications.

  • Evaluation of bimaterial Cantilever Beam for heat sensing at atmospheric pressure.
    The Review of scientific instruments, 2010
    Co-Authors: Masaya Toda, Takahito Ono, Fei Liu, Ioana Voiculescu
    Abstract:

    The bimaterial Cantilever Beam is an important basic structure of microelectromechanical system thermal devices. The research described in this paper is a study of the deflection of the bimaterial Cantilever Beam operated in the air and irradiated with a laser Beam at the free end. The bimaterial Cantilever Beam is a composite structure formed by layers of silicon nitride and gold. The temperature variations produce the deflection of the Cantilever Beam end due to different values of the thermal expansion coefficients of silicon nitride and gold. The deflection was experimentally measured in vacuum and atmospheric pressure when a laser Beam was irradiated at the free end. A formula for the calculation of the deflection as a function of incident power applied at the free end of the Cantilever Beam operated in air was also demonstrated. The predicted values of the deflection calculated using this formula and the experimental values of the deflection were compared, and the results were in good agreement. A systematic investigation of the Cantilever Beam deflection in vacuum and atmospheric pressure as a function of the heat applied at the free end is important for chemical and biological applications.

Takahito Ono - One of the best experts on this subject based on the ideXlab platform.

  • pico thermogravimetric material properties analysis using diamond Cantilever Beam
    Sensors and Actuators A-physical, 2018
    Co-Authors: Ioana Voiculescu, Meiyong Liao, Takahito Ono, Marjan Zakerin, Rudiger Berger, Masaya Toda
    Abstract:

    Abstract This paper presents a novel technique for pico-thermo gravimetric analysis of material properties using diamond Cantilever Beam. The thermal decomposition of calcium carbonate (CaCO3) was examined using this method and was detected in picogram range. The diamond Cantilever Beam with CaCO3 particles attached on the tip was introduced in a thermal chamber and the temperature was raised from room temperature to 600 °C. The Cantilever Beam was operated in vibration mode and the resonant frequency was monitored in real time during the thermal process. From the resonant frequency behavior, there was evidence that the thermal conversion from CaCO3 to CaO starts around 500 °C. This novel technique used very small amount of material and variations of the analyzed material pico-mass at different temperatures were observed from the Cantilever Beam measurements. The thermal analysis expects a release of carbon dioxide (CO2) which in turn decreases the sample mass. Variations of the sample mass are an indication that the thermal decomposition of the analyzed material started. In this research the information about the conversion temperature was repeatable and highly accurate. The diamond Cantilever Beam is well suited for the thermal measurements because large variations of temperature produced small changes of the resonant frequency. This novel thermogravimetic technic provides accurate information about the analyzed material mass variations at picogram range during the thermal process.

  • Pico-thermogravimetric material properties analysis using diamond Cantilever Beam
    2017 19th International Conference on Solid-State Sensors Actuators and Microsystems (TRANSDUCERS), 2017
    Co-Authors: Ioana Voiculescu, Masaya Toda, Meiyong Liao, Takahito Ono
    Abstract:

    This paper presents a novel technique for pico-thermo gravimetric analysis of material properties using diamond Cantilever Beam. The thermal decomposition of calcium carbonate (CaCO 3 ) was examined using this method. The diamond Cantilever Beam with CaCO 3 attached on the tip was introduced in a thermal chamber and the temperature was raised to 600°C. The Cantilever Beam was vibrated and the resonant frequency was monitored in real time during the thermal process. From the resonant frequency behavior, there was evidence that the thermal conversion from CaCO 3 to CaO starts around 500°C. The novel technique used very small amount of material and variations of the analyzed material pico-mass can be observed from the Cantilever Beam measurements. The information about the conversion temperature was highly accurate.

  • Cantilever Beam temperature sensors for biological applications
    IEEJ Transactions on Electrical and Electronic Engineering, 2017
    Co-Authors: Masaya Toda, Takahito Ono, Naoki Inomata, Ioana Voiculescu
    Abstract:

    This review presents two types of Cantilever Beams employed as highly sensitive temperature sensors. One type is fabricated from composite materials and is operated in the deflection mode. The second type, used as a temperature sensor and presented in this review, is a resonant Cantilever Beam. The materials used for the fabrication of the bimaterial Cantilever Beam are silicon or silicon nitride and thin metallic films such as gold or aluminum. When the temperature changes, the different coefficients of thermal expansion of the metal and silicon cause the sensor to deflect. Considering the models of temperature measurement for biological cells, the heat should be applied locally at the tip of the Cantilever Beam. Formulas for the calculation of the deflection as a function of incident power applied at the free end of the Cantilever Beam operated in a liquid are presented in this review. The natural convective heat transfer coefficient was estimated by using the mathematical model and experimental values. For biological applications, the Cantilever Beam temperature sensor was operated in a liquid, and the heat transfer coefficients were between 381 and 642 W/m2K when the temperature applied to the Cantilever's free end varied from 28 to 71.8 °C. The resonant Cantilever Beam was also demonstrated as a sensitive temperature sensor for biological applications. As a thermogenic sample, brown fat cells (BFCs), which are related to metabolic heat production, are employed. The working principle of the resonator Cantilever Beam temperature sensor is based on the shift in resonant frequency in response to temperature changes. The resonant frequency and the temperature coefficient were 960 kHz and 22.0 ppm/K, respectively. The measurements were performed by stimulating the activity of BFCs by flowing a norepinephrine (NE) solution (1 µM).

  • Investigation of bimaterial Cantilever Beam for heat sensing in liquid
    Sensors and Actuators A: Physical, 2016
    Co-Authors: Ioana Voiculescu, Takahito Ono, Fei Liu, Masaya Toda
    Abstract:

    Abstract This paper presents the theoretical and experimental temperature profiles along a microCantilever Beam operated in liquid and employed in this research as a temperature sensor. The main application of this Cantilever Beam is for sensing temperature variations of mammalian cells. The Cantilever Beam was microprocessed as a composite structure fabricated from thin layers of silicon nitride and gold. In order to achieve high sensitivity the Cantilever Beam was conceived with the length at microscale and the thickness at nanoscale dimensions. Very small temperature variations generated the deflection of the Cantilever Beam free end due to different values of the thermal expansion coefficients of silicon nitride and gold. The paper is focused on the temperature calibration of the Cantilever Beam temperature sensor when it is operated in liquid. In the paper a microwire heater was used as a localized heat source to generate the heat required for calibration purposes. The Cantilever Beam was immersed in the liquid and the heater temperature was varied from 27.5 °C to 71.8 °C. In analogy with the situation when temperature variations are sensed at certain distance from a cell in suspension the heater was located at 15 μm distance from the Cantilever Beam. The experimental deflection values were compared with the theoretical deflection values and the heat transfer coefficient h of the system was calculated. At low temperatures the heat transfer coefficient value was 381 W/m2K and at higher temperatures 642 W/m2K. The experimental measurements illustrate that the Cantilever Beam deflection has the largest values when the heater was located near the midpoint of the Cantilever Beam. A systematic investigation of the Cantilever Beam deflection in liquid as a function of the applied heat is important for chemical and biological applications.

  • Evaluation of bimaterial Cantilever Beam for heat sensing at atmospheric pressure.
    The Review of scientific instruments, 2010
    Co-Authors: Masaya Toda, Takahito Ono, Fei Liu, Ioana Voiculescu
    Abstract:

    The bimaterial Cantilever Beam is an important basic structure of microelectromechanical system thermal devices. The research described in this paper is a study of the deflection of the bimaterial Cantilever Beam operated in the air and irradiated with a laser Beam at the free end. The bimaterial Cantilever Beam is a composite structure formed by layers of silicon nitride and gold. The temperature variations produce the deflection of the Cantilever Beam end due to different values of the thermal expansion coefficients of silicon nitride and gold. The deflection was experimentally measured in vacuum and atmospheric pressure when a laser Beam was irradiated at the free end. A formula for the calculation of the deflection as a function of incident power applied at the free end of the Cantilever Beam operated in air was also demonstrated. The predicted values of the deflection calculated using this formula and the experimental values of the deflection were compared, and the results were in good agreement. A systematic investigation of the Cantilever Beam deflection in vacuum and atmospheric pressure as a function of the heat applied at the free end is important for chemical and biological applications.

Li Ru - One of the best experts on this subject based on the ideXlab platform.

Meiyong Liao - One of the best experts on this subject based on the ideXlab platform.

  • pico thermogravimetric material properties analysis using diamond Cantilever Beam
    Sensors and Actuators A-physical, 2018
    Co-Authors: Ioana Voiculescu, Meiyong Liao, Takahito Ono, Marjan Zakerin, Rudiger Berger, Masaya Toda
    Abstract:

    Abstract This paper presents a novel technique for pico-thermo gravimetric analysis of material properties using diamond Cantilever Beam. The thermal decomposition of calcium carbonate (CaCO3) was examined using this method and was detected in picogram range. The diamond Cantilever Beam with CaCO3 particles attached on the tip was introduced in a thermal chamber and the temperature was raised from room temperature to 600 °C. The Cantilever Beam was operated in vibration mode and the resonant frequency was monitored in real time during the thermal process. From the resonant frequency behavior, there was evidence that the thermal conversion from CaCO3 to CaO starts around 500 °C. This novel technique used very small amount of material and variations of the analyzed material pico-mass at different temperatures were observed from the Cantilever Beam measurements. The thermal analysis expects a release of carbon dioxide (CO2) which in turn decreases the sample mass. Variations of the sample mass are an indication that the thermal decomposition of the analyzed material started. In this research the information about the conversion temperature was repeatable and highly accurate. The diamond Cantilever Beam is well suited for the thermal measurements because large variations of temperature produced small changes of the resonant frequency. This novel thermogravimetic technic provides accurate information about the analyzed material mass variations at picogram range during the thermal process.

  • Pico-thermogravimetric material properties analysis using diamond Cantilever Beam
    2017 19th International Conference on Solid-State Sensors Actuators and Microsystems (TRANSDUCERS), 2017
    Co-Authors: Ioana Voiculescu, Masaya Toda, Meiyong Liao, Takahito Ono
    Abstract:

    This paper presents a novel technique for pico-thermo gravimetric analysis of material properties using diamond Cantilever Beam. The thermal decomposition of calcium carbonate (CaCO 3 ) was examined using this method. The diamond Cantilever Beam with CaCO 3 attached on the tip was introduced in a thermal chamber and the temperature was raised to 600°C. The Cantilever Beam was vibrated and the resonant frequency was monitored in real time during the thermal process. From the resonant frequency behavior, there was evidence that the thermal conversion from CaCO 3 to CaO starts around 500°C. The novel technique used very small amount of material and variations of the analyzed material pico-mass can be observed from the Cantilever Beam measurements. The information about the conversion temperature was highly accurate.