The Experts below are selected from a list of 318 Experts worldwide ranked by ideXlab platform
Sanjeev Kumar Raghuwanshi - One of the best experts on this subject based on the ideXlab platform.
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a complete analytical model for clamped edge Circular Diaphragm non touch and touch mode capacitive pressure sensor
Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems, 2016Co-Authors: Sumit Kumar Jindal, Ankush Mahajan, Sanjeev Kumar RaghuwanshiAbstract:Capacitive pressure sensor have become good substitute for piezoresistive pressure sensor because of low power consumption. In order to evaluate the characteristic profile for touch mode micro pressure sensor an accurate and simple model needs to be designed. Hence preferable analytical model is necessary to design and characterize the device. Lot of study has been done on touch mode capacitive sensing but no elaborate work has been presented to clearly understand the underlying expressions and the role of key performance parameters. With this step by step theoretical evaluation model the key performance parameter such as deflection, capacitance and sensitivity can be easily studied for both non-touch and touch mode capacitive pressure sensor. The next aspect has been to simulate the findings in order to validate the results and hence MATLAB has been introduced. It also eliminates the need for design using FEM and hence the study becomes lot easier.
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analytical comparison of Circular Diaphragm based simple single and double touch mode mems capacitive pressure sensor
International Conference on Conceptual Structures, 2016Co-Authors: Sumit Kumar Jindal, Sanjeev Kumar RaghuwanshiAbstract:In this paper a comparative study is done between normal capacitive pressure sensor, a touch mode capacitive pressure sensor and a double touch mode capacitive pressure sensor. The Diaphragm in use is of Circular shape. The theory and underlying equations has been described for the said devices and then simulations have been done for different performance parameters to understand the advantage of one over the other.
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A complete analytical model for Circular Diaphragm pressure sensor with freely supported edge
Microsystem Technologies, 2015Co-Authors: Sumit Kumar Jindal, Sanjeev Kumar RaghuwanshiAbstract:Microelectromechanical systems (MEMS) pressure sensors have been designed and characterized. Initially deflection, stress and strain of the pressure sensor are computed based on mechanics of Diaphragm structure for Circular shape in accordance with the theory of elasticity. The results have been simulated to define and understand the importance of various impact parameters such as sensitivity, optimization of resistor length etc. Moreover the present work also demonstrates the design of MEMS pressure sensor using solidworks. It allows detailed visualization of the parameters computed and supports the theory undertaken.
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modelling of simply supported Circular Diaphragm for touch mode capacitive sensors
Journal of Theoretical and Applied Mechanics, 2015Co-Authors: Sumit Kumar Jindal, Sanjeev Kumar RaghuwanshiAbstract:This paper describes the power series solution for modelling of the simply supported Circular Diaphragm deflection under uniform load. The parameters such as touch point pressure and touch radius are defined. Moreover, these parameters are also computed by the algorithm proposed in the paper. Therefore, the power series solution can be applied for touch mode operation.
Sumit Kumar Jindal - One of the best experts on this subject based on the ideXlab platform.
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a complete analytical model for clamped edge Circular Diaphragm non touch and touch mode capacitive pressure sensor
Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems, 2016Co-Authors: Sumit Kumar Jindal, Ankush Mahajan, Sanjeev Kumar RaghuwanshiAbstract:Capacitive pressure sensor have become good substitute for piezoresistive pressure sensor because of low power consumption. In order to evaluate the characteristic profile for touch mode micro pressure sensor an accurate and simple model needs to be designed. Hence preferable analytical model is necessary to design and characterize the device. Lot of study has been done on touch mode capacitive sensing but no elaborate work has been presented to clearly understand the underlying expressions and the role of key performance parameters. With this step by step theoretical evaluation model the key performance parameter such as deflection, capacitance and sensitivity can be easily studied for both non-touch and touch mode capacitive pressure sensor. The next aspect has been to simulate the findings in order to validate the results and hence MATLAB has been introduced. It also eliminates the need for design using FEM and hence the study becomes lot easier.
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analytical comparison of Circular Diaphragm based simple single and double touch mode mems capacitive pressure sensor
International Conference on Conceptual Structures, 2016Co-Authors: Sumit Kumar Jindal, Sanjeev Kumar RaghuwanshiAbstract:In this paper a comparative study is done between normal capacitive pressure sensor, a touch mode capacitive pressure sensor and a double touch mode capacitive pressure sensor. The Diaphragm in use is of Circular shape. The theory and underlying equations has been described for the said devices and then simulations have been done for different performance parameters to understand the advantage of one over the other.
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A complete analytical model for Circular Diaphragm pressure sensor with freely supported edge
Microsystem Technologies, 2015Co-Authors: Sumit Kumar Jindal, Sanjeev Kumar RaghuwanshiAbstract:Microelectromechanical systems (MEMS) pressure sensors have been designed and characterized. Initially deflection, stress and strain of the pressure sensor are computed based on mechanics of Diaphragm structure for Circular shape in accordance with the theory of elasticity. The results have been simulated to define and understand the importance of various impact parameters such as sensitivity, optimization of resistor length etc. Moreover the present work also demonstrates the design of MEMS pressure sensor using solidworks. It allows detailed visualization of the parameters computed and supports the theory undertaken.
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modelling of simply supported Circular Diaphragm for touch mode capacitive sensors
Journal of Theoretical and Applied Mechanics, 2015Co-Authors: Sumit Kumar Jindal, Sanjeev Kumar RaghuwanshiAbstract:This paper describes the power series solution for modelling of the simply supported Circular Diaphragm deflection under uniform load. The parameters such as touch point pressure and touch radius are defined. Moreover, these parameters are also computed by the algorithm proposed in the paper. Therefore, the power series solution can be applied for touch mode operation.
Wen Wang - One of the best experts on this subject based on the ideXlab platform.
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Static and dynamic simulation studies on the AlGaN/GaN pressure sensor
Semiconductor Science and Technology, 2019Co-Authors: Ashu Wang, Lingyan Zeng, Wen WangAbstract:In this paper, electro-thermo-mechanical coupled static and dynamic FEM simulations are adopted to study the AlGaN/GaN pressure sensor. The sensor sensitivity is expressed as the drain current change of transistor integrated on the AlGaN/GaN cantilever or Circular Diaphragm with the applied pressure, namely piezoresistive effect, which is caused essentially by the change of piezoelectric polarization charge. In the static simulation study, how the transistor self-heating, gate metal layer, AlGaN donor-like surface states, and bulk acceptor-like traps in GaN influence the sensitivity are separately illustrated. In the dynamic simulation study, transient behavior of the sensor with the bulk acceptor-like traps and dependences of the natural frequency of Circular Diaphragm on the self-heating as well as the position of transistor integrated on the Diaphragm are analyzed. This work would provide useful guidelines for the design and optimization of AlGaN/GaN pressure sensor.
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non linear deflection of a Circular Diaphragm type piezoactuator under loads of voltage and pressure
Sensors and Actuators A-physical, 2017Co-Authors: Yuanlin Hu, Wen WangAbstract:Abstract Analytical non-linear equations are formulated to predict the deflection of a Circular Diaphragm-type piezoactuator, which consists of a passive layer, a bonding layer and a PZT layer. Previous similar analytical solutions presented in the literature are based on thin plates with small deflections (linear problem), however the linear solutions fail to predict the deflection of the piezoactuator when the driven loads, such as voltage and pressure loads, are large. In this research, a non-linear analytical solution for the piezoactuator deflection under loads of voltage and pressure is derived using the principal of minimum energy and the Rayleigh-Ritz method. Each of the three layers in the piezoactuator is considered as an individual layer. The energy associated with the solution includes elastic potential energy of the deformed piezoactuator, electric potential energy in the piezodisc, and the work done by the uniform pressure force. The proposed non-liner solution is validated via static deflection measurements, and it approves that the non-linear analytical results are found to be in a good agreement with the measurements while the linear solution is invalid when the loads are large. Based on the non-linear equations, the effects of the piezoactuator dimensions and the imposed loads on the actuator performance (stroke volume) are also investigated.
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a theoretical solution of resonant Circular Diaphragm type piezoactuators with added mass loads
Sensors and Actuators A-physical, 2017Co-Authors: Yuanlin Hu, Xin Liang, Wen WangAbstract:Abstract A theoretical solution is formulated to analyze the vibration behaviors of Circular Diaphragm-type piezoactuators based on the Hamilton’s principle and Rayleigh-Ritz method, which are particular suitable for modeling the deflection of multilayer structures. Each of the actuator three layers is considered as an individual layer in the modeling. The energy associated with the solution includes the kinetic energy of the actuator, the elastic potential energy of the various layers, the electric potential energy in the piezodisc, and the work done by the force of electric filed. The transverse displacement is separated into a time dependence term and a mode shape term, then the vibrational governing equation is derived using the functional variation, and is approximately solved through the method of multiple scales. Moreover, added mass loads are introduced to the Diaphragm center for the sake of decreasing the resonant frequency, where many MEMS devices, such as gas micropumps and ejectors, have a higher working efficiency. The proposed analytical solution is validated numerically via the finite element method (FEM) and experimentally via measurements; the theoretical results are found to be in good agreement with the FEM results as well as with the experimental results. Furthermore, the effects of mass loads, geometric dimensions and material properties of the piezoactuator on the resonant frequency are discussed.
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deflection of Circular Diaphragm type piezoactuators coupling with gas compression in micropumps
Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems, 2017Co-Authors: Yuanlin Hu, Xin Liang, Wen WangAbstract:An analytical solution is formulated to predict the deflection of Circular piezoactuators for the sake of gas compression in micropumps. The solution is derived from the energy minimization method and Rayleigh–Ritz method based on the Kirchhoff thin plate theory. Energy associated with the micropump includes elastic potential energy of the deflecting actuator, electric potential energy in the piezodiscs and compression work to gas. The proposed analytical solution is validated via the finite element simulations and experimental data. Furthermore, the effects of dimensions and material properties of the piezoactuator on the static pressure rise are discussed; there exist optimal radius ratio of the PZT layer to passive layer, optimal thickness ratio of the PZT layer to passive layer, and optimal ratio of the passive layer thickness to its radius, however, these optimal values are related to pressure load as well. Finally, the static pressure rise and the deflection profile of the piezoactuator have been discussed under the optimal dimensions.
Wen H Ko - One of the best experts on this subject based on the ideXlab platform.
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modeling of Circular Diaphragm and spreadsheet solution programming for touch mode capacitive sensors
Sensors and Actuators A-physical, 1999Co-Authors: Guangqing Meng, Wen H KoAbstract:This article describes the power series solution to the model of Circular Diaphragm deflection under uniform load. The parameters for touch mode operation, such as touch point pressure and touch radius, are defined and computed by the algorithm proposed in this article. Therefore, the power series solution can be applied for touch mode operation. Based on the analysis, a spreadsheet solution software is programmed as a tool for touch mode capacitive sensor design and performance estimation. Compared the results from this tool and ABAQUS simulation, the error is within 5% and this PC-based tool is very promising in time saving.
Tongqing Yang - One of the best experts on this subject based on the ideXlab platform.
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improvement of uneven charge distribution on piezoelectric Circular Diaphragm with notched substrate
AIP Advances, 2020Co-Authors: Yuanbo Li, Yangyiwei Yang, Minghao Li, Tongqing YangAbstract:Vibration-based energy harvesting using piezoelectric Circular Diaphragms (PCDs) has drawn much attention in recent decades because of their compatibility with various operation modes. However, it has been revealed that their output distribution over the electrode surface is highly uneven, with less output generated around the edge. In this work, we present a possible structure of a PCD, which consists of a notched substrate (notched PCD), a PZT-5H disk, and an annular mass, in which the charge output around the edge of the PCD can be enhanced. Moreover, the difference in charge production between the outer region (the region with less charge) and the inner region (the region with high charge) is reduced so that the output distribution of the PCD is improved. In the notched-PCD, the perimeter region of the PCD is better utilized, which leads to a higher output power. Finite element analysis is performed in order to provide further information about how the notched substrates affect the output distribution...
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vibration based energy harvesting with a clamped piezoelectric Circular Diaphragm analysis and identification of optimal structural parameters
Smart Materials and Structures, 2017Co-Authors: Shuai Wang, Yangyiwei Yang, Peter Stein, Baixiang Xu, Tongqing YangAbstract:Due to many potential promising applications, vibration-based piezoelectric energy harvesters (VPEH) with a clamped Circular Diaphragm are an intensively studied design in the field of piezoelectric energy harvesters. Nonetheless, their performance still leaves space for improvement, which is the primary target of this article. We define two structural parameters, namely the ratio 1 between the bonding area and the piezoceramic diameter as well as the ratio 2 between the clamping rim and the substrate diameter, to characterize these structures. A vibration model is developed in order to provide an analytical foundation for the identification of optimal parameters 1 and 2. It is verified by finite-element simulations and substantive experiments. The results allow to relate the device performance, including resonance frequency and output power, to 1 and 2. This shows that the output rises with increasing 2, and that the maximum output for a given 2 always lies in the range Based on this observation, an improved harvester structure with a pre-stress of 0.3 N is identified, that exhibits a matched power up to 16.3 mW at 219 Hz. This demonstrates the feasibility to achieve VPEHs with higher outputs and lower eigenfrequency through simultaneous modification of 1 and 2, which is highly beneficial for low-frequency energy harvesting.
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performance enhancement of pzt material for Circular Diaphragm energy harvester
Journal of Materials Science: Materials in Electronics, 2015Co-Authors: Ying Dong, Tongqing Yang, Zhao Xiao, Xiucai WangAbstract:The property of piezoelectric material was one of the keys to optimize energy harvester based on piezoelectric effect. In this paper, the relation between the parameters of piezoelectric material and the performance of Circular Diaphragm energy harvester was studied. Theoretical analysis and idiographic experiment were combined to estimate the dependence of output power on the material parameters: piezoelectric coefficient d33 and dielectric constant e. The results show piezoelectric material with high-d33 and low-e was good for increasing the output power of energy harvester, and the influence of piezoelectric coefficient is more obvious than that of dielectric constant. Among soft PZT, material PZT-51 could best fit energy harvesting. By optimizing PZT material, the energy harvester using single piezoelectric Circular Diaphragm could generate a maximum power of 9.08 mW for a matching load about 45 kΩ and a tip mass of 30 gat its resonant frequency of 178 Hz.
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energy harvester array using piezoelectric Circular Diaphragm for broadband vibration
Applied Physics Letters, 2014Co-Authors: Zhao Xiao, Ying Dong, Tongqing Yang, Xiucai WangAbstract:A piezoelectric generator fabricated by multiple Circular Diaphragm piezoelectric harvesters array is provided to harvest power over a broad range of frequencies. Four harvesters with varies tip masses are incorporated on a board with an area of 98 × 98 mm2. In this case, four strong output power peaks are obtained over frequencies from 120 Hz to 225 Hz. With an optimum load resistance of 15 kΩ, the value of four output power peaks is, respectively, 5.14, 6.65, 9.7, and 10 mW for the generator under an acceleration of 9.8 m/s2. By choosing an appropriate combination of tip masses with piezoelectric elements in array, the frequency range of energy harvesting can be obviously widened to meet the broadband vibration.
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vibration energy harvesting using a piezoelectric Circular Diaphragm array
IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control, 2012Co-Authors: Wei Wang, Tongqing Yang, Xurui ChenAbstract:This paper presents a method for harvesting electric energy from mechanical vibration using a mechanically excited piezoelectric Circular membrane array. The piezoelectric Circular Diaphragm array consists of four plates with series and parallel connection, and the electrical characteristics of the array are examined under dynamic conditions. With an optimal load resistor of 160 kω, an output power of 28 mW was generated from the array in series connection at 150 Hz under a prestress of 0.8 N and a vibration acceleration of 9.8 m/s2, whereas a maximal output power of 27 mW can be obtained from the array in parallel connection through a resistive load of 11 kω under the same frequency, prestress, and acceleration conditions. The results show that using a piezoelectric Circular Diaphragm array can significantly increase the output of energy compared with the use of a single plate. By choosing an appropriate connection pattern (series or parallel connections) among the plates, the equivalent impedance of the energy harvesting devices can be tailored to meet the matched load of different applications for maximal power output.