The Experts below are selected from a list of 24861 Experts worldwide ranked by ideXlab platform
Lauri Sydanheimo - One of the best experts on this subject based on the ideXlab platform.
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Inkjet-Printed Humidity Sensor for Passive UHF RFID Systems
IEEE Transactions on Instrumentation and Measurement, 2011Co-Authors: Juha Virtanen, Leena Ukkonen, Toni Bjorninen, Atef Z. Elsherbeni, Lauri SydanheimoAbstract:This paper presents a novel inkjet-printed Humidity Sensor tag for passive radio-frequency identification (RFID) systems operating at ultrahigh frequencies (UHFs). During recent years, various Humidity Sensors have been developed by researchers around the world for HF and UHF RFID systems. However, to our best knowledge, the Humidity Sensor presented in this paper is one of the first passive UHF RFID Humidity Sensor tags fabricated using inkjet technology. This paper describes the structure and operation principle of the Sensor tag as well as discusses the method of performing Humidity measurements in practice. Furthermore, measurement results are presented, which include air Humidity-sensitivity characterization and tag identification performance measurements.
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printed Humidity Sensor for uhf rfid systems
Static Analysis Symposium, 2010Co-Authors: Juha Virtanen, Leena Ukkonen, Toni Bjorninen, Lauri SydanheimoAbstract:This paper presents a printable Humidity Sensor for RFID systems at UHF frequencies. The Sensor is printed onto Kapton HN polyimide substrate using silver ink. The Sensor measures Humidity capacitively through the permittivity change in the polyimide. The actual measurement result is acquired from the tag using a threshold power sweep performed by the reader device. The operation principle is explained and simulation results are shown. Simulation results predict good Sensor performance and thus the Sensor is ready for the prototype stage.
Juha Virtanen - One of the best experts on this subject based on the ideXlab platform.
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Inkjet-Printed Humidity Sensor for Passive UHF RFID Systems
IEEE Transactions on Instrumentation and Measurement, 2011Co-Authors: Juha Virtanen, Leena Ukkonen, Toni Bjorninen, Atef Z. Elsherbeni, Lauri SydanheimoAbstract:This paper presents a novel inkjet-printed Humidity Sensor tag for passive radio-frequency identification (RFID) systems operating at ultrahigh frequencies (UHFs). During recent years, various Humidity Sensors have been developed by researchers around the world for HF and UHF RFID systems. However, to our best knowledge, the Humidity Sensor presented in this paper is one of the first passive UHF RFID Humidity Sensor tags fabricated using inkjet technology. This paper describes the structure and operation principle of the Sensor tag as well as discusses the method of performing Humidity measurements in practice. Furthermore, measurement results are presented, which include air Humidity-sensitivity characterization and tag identification performance measurements.
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printed Humidity Sensor for uhf rfid systems
Static Analysis Symposium, 2010Co-Authors: Juha Virtanen, Leena Ukkonen, Toni Bjorninen, Lauri SydanheimoAbstract:This paper presents a printable Humidity Sensor for RFID systems at UHF frequencies. The Sensor is printed onto Kapton HN polyimide substrate using silver ink. The Sensor measures Humidity capacitively through the permittivity change in the polyimide. The actual measurement result is acquired from the tag using a threshold power sweep performed by the reader device. The operation principle is explained and simulation results are shown. Simulation results predict good Sensor performance and thus the Sensor is ready for the prototype stage.
Qing-an Huang - One of the best experts on this subject based on the ideXlab platform.
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a fully packaged cmos interdigital capacitive Humidity Sensor with polysilicon heaters
IEEE Sensors Journal, 2011Co-Authors: Cheng Long Zhao, Ming Qin, Qing-an HuangAbstract:This paper presents a fully packaged CMOS interdigital capacitive Humidity Sensor with polysilicon heaters. The Sensor was fabricated with the industrial standard CMOS process and the MEMS postprocessing step. Polyimide was used as the sensing material for its good linearity. To enlarge the depth of the recesses between the interdigital electrodes, the polysilicon heater was placed under the Al electrode and also the passivation between the interdigital electrodes was partly etched. As a result, thicker polyimide can be deposited between the Al electrodes and thus the sensitivity of the Sensor can be improved. The etching resistant passivation between Al electrodes and polyimide was used to ensure the reliability of the Sensor. To put it into practical use, the Sensor was fully packaged, and by using the polysilicon heaters, both the hysteresis and the recovery time of the Sensor could be greatly improved. The packaged Humidity Sensor was measured to show a good linearity and repeatability over the whole testing range.
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Enhanced performance of a CMOS interdigital capacitive Humidity Sensor by graphene oxide
2011 16th International Solid-State Sensors Actuators and Microsystems Conference TRANSDUCERS'11, 2011Co-Authors: Cheng Long Zhao, Ming Qin, Wei-hua Li, Qing-an HuangAbstract:This paper presents a CMOS interdigital capacitive Humidity Sensor based on graphene oxide, and the sensitivity of this Humidity Sensor was improved significantly by using graphene oxide as sensing material. The passivation between the Al electrodes and the sensing material was used to ensure the reliability of the capacitive-type Humidity Sensor. The experimental results show that, compared with the Sensor using polyimide as sensing material, the sensitivity of the Sensor based on graphene oxide is 23 times larger, and the response time of such a Sensor is also improved greatly.
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A CMOS interdigital capacitive Humidity Sensor with polysilicon heaters
2010 IEEE Sensors, 2010Co-Authors: Cheng Long Zhao, Qing-an Huang, Ming QinAbstract:A CMOS interdigital capacitive Humidity Sensor with polysilicon heaters is presented. Polyimide was used as the sensing material. In order to find out the relationship between filling effect of deposited polyimide and the spacing distance of Al electrodes, another interdigital capacitive Humidity Sensor with no passivation around Al electrodes was also fabricated. The measured results show that good filling effect of deposited polyimide can be realized when the gap between interdigital electrodes is twice the thickness of deposited polyimide. By using the polysilicon heaters, the hysteresis of the Humidity Sensor is less than 2%RH.
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a novel capacitive type Humidity Sensor using cmos fabrication technology
Sensors and Actuators B-chemical, 2004Co-Authors: Lei Gu, Qing-an HuangAbstract:Abstract This paper reports a novel capacitive Humidity Sensor integrated on a polysilicon heater. The Sensor was fabricated with the industrial standard CMOS process to achieve a cost-effective solution for accurate and reliability. The sensing material polyimide was obtained by a post-processing step after the standard CMOS fabrication. The sensing principle of the Sensor is based on the dielectric constant change of deposited polyimide due to absorption/desorption of vapor. The passivation (silicon nitride) layer with no limitations to the electrode selection is between the electrode and sensing material in order to improve the reliability of the relative Humidity for the Sensors. The Humidity Sensor was measured to show a linear dependence on the relative Humidity in the range of 20–70%, the maximum hysteresis is 3%.
Leena Ukkonen - One of the best experts on this subject based on the ideXlab platform.
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Inkjet-Printed Humidity Sensor for Passive UHF RFID Systems
IEEE Transactions on Instrumentation and Measurement, 2011Co-Authors: Juha Virtanen, Leena Ukkonen, Toni Bjorninen, Atef Z. Elsherbeni, Lauri SydanheimoAbstract:This paper presents a novel inkjet-printed Humidity Sensor tag for passive radio-frequency identification (RFID) systems operating at ultrahigh frequencies (UHFs). During recent years, various Humidity Sensors have been developed by researchers around the world for HF and UHF RFID systems. However, to our best knowledge, the Humidity Sensor presented in this paper is one of the first passive UHF RFID Humidity Sensor tags fabricated using inkjet technology. This paper describes the structure and operation principle of the Sensor tag as well as discusses the method of performing Humidity measurements in practice. Furthermore, measurement results are presented, which include air Humidity-sensitivity characterization and tag identification performance measurements.
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printed Humidity Sensor for uhf rfid systems
Static Analysis Symposium, 2010Co-Authors: Juha Virtanen, Leena Ukkonen, Toni Bjorninen, Lauri SydanheimoAbstract:This paper presents a printable Humidity Sensor for RFID systems at UHF frequencies. The Sensor is printed onto Kapton HN polyimide substrate using silver ink. The Sensor measures Humidity capacitively through the permittivity change in the polyimide. The actual measurement result is acquired from the tag using a threshold power sweep performed by the reader device. The operation principle is explained and simulation results are shown. Simulation results predict good Sensor performance and thus the Sensor is ready for the prototype stage.
Toni Bjorninen - One of the best experts on this subject based on the ideXlab platform.
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Inkjet-Printed Humidity Sensor for Passive UHF RFID Systems
IEEE Transactions on Instrumentation and Measurement, 2011Co-Authors: Juha Virtanen, Leena Ukkonen, Toni Bjorninen, Atef Z. Elsherbeni, Lauri SydanheimoAbstract:This paper presents a novel inkjet-printed Humidity Sensor tag for passive radio-frequency identification (RFID) systems operating at ultrahigh frequencies (UHFs). During recent years, various Humidity Sensors have been developed by researchers around the world for HF and UHF RFID systems. However, to our best knowledge, the Humidity Sensor presented in this paper is one of the first passive UHF RFID Humidity Sensor tags fabricated using inkjet technology. This paper describes the structure and operation principle of the Sensor tag as well as discusses the method of performing Humidity measurements in practice. Furthermore, measurement results are presented, which include air Humidity-sensitivity characterization and tag identification performance measurements.
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printed Humidity Sensor for uhf rfid systems
Static Analysis Symposium, 2010Co-Authors: Juha Virtanen, Leena Ukkonen, Toni Bjorninen, Lauri SydanheimoAbstract:This paper presents a printable Humidity Sensor for RFID systems at UHF frequencies. The Sensor is printed onto Kapton HN polyimide substrate using silver ink. The Sensor measures Humidity capacitively through the permittivity change in the polyimide. The actual measurement result is acquired from the tag using a threshold power sweep performed by the reader device. The operation principle is explained and simulation results are shown. Simulation results predict good Sensor performance and thus the Sensor is ready for the prototype stage.