The Experts below are selected from a list of 312 Experts worldwide ranked by ideXlab platform
R S Muller - One of the best experts on this subject based on the ideXlab platform.
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magnetic microactuation of torsional polysilicon structures
Sensors and Actuators A-physical, 1996Co-Authors: Jack W Judy, R S MullerAbstract:Abstract A microactuator technology utilizing magnetic thin films and polysilicon flexures in applied to torsional microstructures. These structures are constructed in a batch-fabrication process that combines electroplating with conventional IC-lithography, materials, and equipment. A microactuated mirror made from a 430 μ m × 130 μ m × 15 μ m nickel-Iron Plate attached to a pair of 400 μ m × 2.2 μ m × 2.2 μ m polysilicon torsional beams has been rotated more than 90° out of the plane of the wafer and actuated with a torque greater than 3.0 nN m. The torsional flexure structure constrains motion to rotation about a single axis, which can be an advantage for a number of microphonic applications (e.g., beam chopping, scanning, and steering).
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magnetic microactuation of torsional polysilicon structures
Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95, 1995Co-Authors: Jack W Judy, R S MullerAbstract:A microactuator technology utilizing magnetic thin films and polysilicon flexures is applied to torsional micro structures. These structures are constructed in a batch-fabrication process that combines electroplating with conventional IC-lithography, materials, and equipment. A microactuated mirror made from a 430 x 130 x l5 /spl mu/m/sup 3/ nickel-Iron Plate attached to a pair of 400 x 2.2 x 2.2 /spl mu/m/sup 3/ polysilicon torsional beams has been rotated more than 90/spl deg/ out of the plane of the wafer and actuated with a torque greater than 3.0 nN-m. The torsional flexure structure constrains motion to rotation about a single axis which can be an advantage for a number of microphotonic applications (e.g., beam chopping, scanning, and steering).
Mutsumi Touge - One of the best experts on this subject based on the ideXlab platform.
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Surface smoothing of a polycrystalline diamond using an Iron Plate-H2O2 chemical reaction
Diamond and Related Materials, 2016Co-Authors: Akihisa Kubota, Shuya Motoyama, Mutsumi TougeAbstract:Abstract In this study, the researchers demonstrated an ultraprecise polishing method that achieved an improved polycrystalline diamond (PCD) surface. This novel polishing technique uses hydroxyl radicals generated on an Iron Plate in a hydrogen peroxide (H2O2) solution. To demonstrate the feasibility of obtaining an ultrasmooth PCD surface, we conducted a polishing experiment using an Iron Plate in an H2O2 solution; the rotating speed of the polishing table/sample holder and the contact load were controlled. After polishing, we cleaned the PCD samples using two different methods and evaluated the surface morphology and chemical components using scanning white light interference microscopy, atomic force microscopy, and an electron-probe micro analyzer. The results showed that atomic-level smoothing of the topmost grain diamond (which constitutes the PCD substrate) could be realized using our proposed method. Moreover, cleaning with a mixed acid (H2SO4/H2O2) solution was more effective in removing residual contaminates than ultrasonic cleaning in acetone.
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Two-step polishing technique for single crystal diamond (100) substrate utilizing a chemical reaction with Iron Plate
Diamond and Related Materials, 2015Co-Authors: Akihisa Kubota, Shuya Motoyama, Shin Nagae, Mutsumi TougeAbstract:Abstract A polishing technique for diamond substrates is described. It is a two-step process, consisting of (1) a rough processing step using carbon reaction with an Iron Plate at elevated friction temperatures, and (2) a finish processing step using hydroxyl (OH) radicals generated by a Fenton reaction between an Iron Plate and hydrogen peroxide solution. We analyzed the processing characteristics using optical interferometric microscopy, atomic force microscopy and transmission electron microscopy. Experimental results show that the surface roughness of a diamond substrate is markedly improved to an atomic-scale smoothness, and that a damage-free diamond surface can be fabricated with 5 h of polishing. These results provide useful information for obtaining atomically smooth diamond substrates.
Jack W Judy - One of the best experts on this subject based on the ideXlab platform.
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magnetic microactuation of torsional polysilicon structures
Sensors and Actuators A-physical, 1996Co-Authors: Jack W Judy, R S MullerAbstract:Abstract A microactuator technology utilizing magnetic thin films and polysilicon flexures in applied to torsional microstructures. These structures are constructed in a batch-fabrication process that combines electroplating with conventional IC-lithography, materials, and equipment. A microactuated mirror made from a 430 μ m × 130 μ m × 15 μ m nickel-Iron Plate attached to a pair of 400 μ m × 2.2 μ m × 2.2 μ m polysilicon torsional beams has been rotated more than 90° out of the plane of the wafer and actuated with a torque greater than 3.0 nN m. The torsional flexure structure constrains motion to rotation about a single axis, which can be an advantage for a number of microphonic applications (e.g., beam chopping, scanning, and steering).
-
magnetic microactuation of torsional polysilicon structures
Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95, 1995Co-Authors: Jack W Judy, R S MullerAbstract:A microactuator technology utilizing magnetic thin films and polysilicon flexures is applied to torsional micro structures. These structures are constructed in a batch-fabrication process that combines electroplating with conventional IC-lithography, materials, and equipment. A microactuated mirror made from a 430 x 130 x l5 /spl mu/m/sup 3/ nickel-Iron Plate attached to a pair of 400 x 2.2 x 2.2 /spl mu/m/sup 3/ polysilicon torsional beams has been rotated more than 90/spl deg/ out of the plane of the wafer and actuated with a torque greater than 3.0 nN-m. The torsional flexure structure constrains motion to rotation about a single axis which can be an advantage for a number of microphotonic applications (e.g., beam chopping, scanning, and steering).
Akihisa Kubota - One of the best experts on this subject based on the ideXlab platform.
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Surface smoothing of a polycrystalline diamond using an Iron Plate-H2O2 chemical reaction
Diamond and Related Materials, 2016Co-Authors: Akihisa Kubota, Shuya Motoyama, Mutsumi TougeAbstract:Abstract In this study, the researchers demonstrated an ultraprecise polishing method that achieved an improved polycrystalline diamond (PCD) surface. This novel polishing technique uses hydroxyl radicals generated on an Iron Plate in a hydrogen peroxide (H2O2) solution. To demonstrate the feasibility of obtaining an ultrasmooth PCD surface, we conducted a polishing experiment using an Iron Plate in an H2O2 solution; the rotating speed of the polishing table/sample holder and the contact load were controlled. After polishing, we cleaned the PCD samples using two different methods and evaluated the surface morphology and chemical components using scanning white light interference microscopy, atomic force microscopy, and an electron-probe micro analyzer. The results showed that atomic-level smoothing of the topmost grain diamond (which constitutes the PCD substrate) could be realized using our proposed method. Moreover, cleaning with a mixed acid (H2SO4/H2O2) solution was more effective in removing residual contaminates than ultrasonic cleaning in acetone.
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Two-step polishing technique for single crystal diamond (100) substrate utilizing a chemical reaction with Iron Plate
Diamond and Related Materials, 2015Co-Authors: Akihisa Kubota, Shuya Motoyama, Shin Nagae, Mutsumi TougeAbstract:Abstract A polishing technique for diamond substrates is described. It is a two-step process, consisting of (1) a rough processing step using carbon reaction with an Iron Plate at elevated friction temperatures, and (2) a finish processing step using hydroxyl (OH) radicals generated by a Fenton reaction between an Iron Plate and hydrogen peroxide solution. We analyzed the processing characteristics using optical interferometric microscopy, atomic force microscopy and transmission electron microscopy. Experimental results show that the surface roughness of a diamond substrate is markedly improved to an atomic-scale smoothness, and that a damage-free diamond surface can be fabricated with 5 h of polishing. These results provide useful information for obtaining atomically smooth diamond substrates.
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chemical planarization of gan using hydroxyl radicals generated on a catalyst Plate in h2o2 solution
Journal of Crystal Growth, 2008Co-Authors: Junji Murata, Akihisa Kubota, Keita Yagi, Yasuhisa Sano, Hideyuki Hara, Kazuya Arima, Takeshi Okamoto, Hidekazu Mimura, Kazuto YamauchiAbstract:Abstract A novel technique for planarizing gallium nitride (GaN) wafers has been developed. In this method, hydroxyl radicals (OH ) catalytically generated on a polishing Plate are used to oxidize the surface of a GaN wafer, and the produced oxide is dissolved in the solution. H 2 O 2 is employed as the source of OH . Iron is used as the catalyst material that functions as the polishing Plate. A GaN wafer was placed on the Iron Plate in the H 2 O 2 solution, and it was rotated relative to the Plate with a controlled contacting load. Extremely flat surfaces that were free from scratches or pits were obtained for the Ga-polar GaN surface. Atomic force microscope images of the processed surface indicate that it is well ordered and that it has an atomic step-terrace structure.
Shuya Motoyama - One of the best experts on this subject based on the ideXlab platform.
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Surface smoothing of a polycrystalline diamond using an Iron Plate-H2O2 chemical reaction
Diamond and Related Materials, 2016Co-Authors: Akihisa Kubota, Shuya Motoyama, Mutsumi TougeAbstract:Abstract In this study, the researchers demonstrated an ultraprecise polishing method that achieved an improved polycrystalline diamond (PCD) surface. This novel polishing technique uses hydroxyl radicals generated on an Iron Plate in a hydrogen peroxide (H2O2) solution. To demonstrate the feasibility of obtaining an ultrasmooth PCD surface, we conducted a polishing experiment using an Iron Plate in an H2O2 solution; the rotating speed of the polishing table/sample holder and the contact load were controlled. After polishing, we cleaned the PCD samples using two different methods and evaluated the surface morphology and chemical components using scanning white light interference microscopy, atomic force microscopy, and an electron-probe micro analyzer. The results showed that atomic-level smoothing of the topmost grain diamond (which constitutes the PCD substrate) could be realized using our proposed method. Moreover, cleaning with a mixed acid (H2SO4/H2O2) solution was more effective in removing residual contaminates than ultrasonic cleaning in acetone.
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Two-step polishing technique for single crystal diamond (100) substrate utilizing a chemical reaction with Iron Plate
Diamond and Related Materials, 2015Co-Authors: Akihisa Kubota, Shuya Motoyama, Shin Nagae, Mutsumi TougeAbstract:Abstract A polishing technique for diamond substrates is described. It is a two-step process, consisting of (1) a rough processing step using carbon reaction with an Iron Plate at elevated friction temperatures, and (2) a finish processing step using hydroxyl (OH) radicals generated by a Fenton reaction between an Iron Plate and hydrogen peroxide solution. We analyzed the processing characteristics using optical interferometric microscopy, atomic force microscopy and transmission electron microscopy. Experimental results show that the surface roughness of a diamond substrate is markedly improved to an atomic-scale smoothness, and that a damage-free diamond surface can be fabricated with 5 h of polishing. These results provide useful information for obtaining atomically smooth diamond substrates.
