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Erik Stemme - One of the best experts on this subject based on the ideXlab platform.

  • a numerical design study of the valveless diffuser Pump using a lumped mass model
    Journal of Micromechanics and Microengineering, 1999
    Co-Authors: Anders Olsson, Goran Stemme, Erik Stemme
    Abstract:

    This paper presents a lumped-mass model especially developed for valveless diffuser Pumps. It is implemented using MATLAB. The model is tested for different previously reported valveless diffuser Pumps and shows good agreement with the experimental results. The model predicts the flow-Pressure characteristics for different excitation levels. The model makes it possible to study flows and Pressures inside the Pump. The simulations show that the Maximum excitation level for the valveless diffuser Pump is probably limited by low chamber Pressure. Modified designs are tested and it is shown that a Pump with two serially connected Pump chambers working in anti-phase is advantageous compared with a single chamber Pump for both the Maximum volume flow and Maximum Pump Pressure. The simulations also indicate that scaling down the diffuser elements from an throat cross-sectional area to a throat cross-sectional area probably increases the attainable Pressure head.

  • a valve less planar Pump isotropically etched in silicon
    Journal of Micromechanics and Microengineering, 1996
    Co-Authors: Anders Olsso, Pete Enoksso, Goran Stemme, Erik Stemme
    Abstract:

    The first valve-less diffuser fluid Pump in silicon is presented. It consists of a planar double-chamber arrangement fabricated in a silicon wafer anodically bonded to a glass wafer. The Pump uses fluid-directing diffuser - nozzle elements which have a depth of and a neck width of . The Pump chamber diameter is 6 mm. Pump cavities and diffuser - nozzle elements are etched with an isotropic HNA silicon etch. Pumps with three different diffuser lengths are compared reaching a Maximum Pump capacity of and a Maximum Pump Pressure of 1.7 m at a resonance frequency of 1318 Hz for methanol.

  • An improved valve-less Pump fabricated using deep reactive ion etching
    Proceedings of Ninth International Workshop on Micro Electromechanical Systems, 1996
    Co-Authors: Anders Olsso, Pete Enoksso, Goran Stemme, Erik Stemme
    Abstract:

    We present the first valve-less diffuser Pump fabricated using the latest technology in deep reactive ion etching (DRIE). The Pump is fabricated in a simple micromachining process in a double side polished silicon wafer anodically bonded to a glass wafer. Pump chambers and diffuser elements are etched in the silicon wafer using DRIE while inlet and outlet holes are etched using an anisotropic KOH-etch. The DRIE etch resulted in rectangular diffuser cross-sections. We present results on Pumps with different diffuser dimensions in terms of diffuser neck width, length and angle. We reached a Maximum Pump Pressure of 7.6 m H/sub 2/O (74 kPa) and Maximum Pump flow of 2.3 ml/min for water.

  • a valve less planar fluid Pump with two Pump chambers
    Sensors and Actuators A-physical, 1995
    Co-Authors: Anders Olsso, Goran Stemme, Erik Stemme
    Abstract:

    A new planar fluid Pump based on the valve-less diffuser/nozzle Pump principle is presented. The Pump consists of two Pump chambers, each with two flow rectifying diffuser/nozzle elements with rectangular cross sections, one at the inlet and one at the outlet. The Pump chambers are arranged in parallel for high Pump flow. Each Pump chamber has two piezoelectrically vibrated diaphragms. The planar Pump is fabricated in brass with a total thickness of 1 mm. The Pump chamber diameter is 13 mm and the diffuser/nozzle element neck dimensions are 0.3×0.3 mm. Simplified theoretical analyses of the Maximum Pump flow and resonance frequency are given. The flow rectifying ability of the diffuser/nozzle elements is demonstrated in a stationary flow situation and the Pump performance is verified in two different Pump mode configurations: anti-phase and in-phase chamber volume excitation. The measurements in the anti-phase mode show Pump flows and Pump Pressures which are more than twice as high as those of the in-phase oscillation mode. The anti-phase mode has a Pump capacity of about 16 ml/min and a Maximum Pump Pressure of about 1.7 m H2O with the Pump diaphragm vibration frequency set to the Pump resonance frequency of 540 Hz.

  • a valveless diffuser nozzle based fluid Pump
    Sensors and Actuators A-physical, 1993
    Co-Authors: Erik Stemme, Goran Stemme
    Abstract:

    Abstract A new valveless fluid Pump has been designed and tested. The Pump consists of two fluid diffuser/nozzle elements on each side of a chamber volume with an oscillating diaphragm. The vibrating diaphragm produces an oscillating chamber volume, which together with the two fluid-flow-rectifying diffuser/nozzle elements, creates a one-way fluid flow. A microPump prototype with a chamber diameter of 19 mm with conical diffuser/nozzle elements has been built and tested. The Maximum liquid flow rate is 16 ml/min and the Maximum Pump Pressure is 2 m H 2 O. The Pump frequency is of the order of 100 Hz.

Goran Stemme - One of the best experts on this subject based on the ideXlab platform.

  • a numerical design study of the valveless diffuser Pump using a lumped mass model
    Journal of Micromechanics and Microengineering, 1999
    Co-Authors: Anders Olsson, Goran Stemme, Erik Stemme
    Abstract:

    This paper presents a lumped-mass model especially developed for valveless diffuser Pumps. It is implemented using MATLAB. The model is tested for different previously reported valveless diffuser Pumps and shows good agreement with the experimental results. The model predicts the flow-Pressure characteristics for different excitation levels. The model makes it possible to study flows and Pressures inside the Pump. The simulations show that the Maximum excitation level for the valveless diffuser Pump is probably limited by low chamber Pressure. Modified designs are tested and it is shown that a Pump with two serially connected Pump chambers working in anti-phase is advantageous compared with a single chamber Pump for both the Maximum volume flow and Maximum Pump Pressure. The simulations also indicate that scaling down the diffuser elements from an throat cross-sectional area to a throat cross-sectional area probably increases the attainable Pressure head.

  • a valve less planar Pump isotropically etched in silicon
    Journal of Micromechanics and Microengineering, 1996
    Co-Authors: Anders Olsso, Pete Enoksso, Goran Stemme, Erik Stemme
    Abstract:

    The first valve-less diffuser fluid Pump in silicon is presented. It consists of a planar double-chamber arrangement fabricated in a silicon wafer anodically bonded to a glass wafer. The Pump uses fluid-directing diffuser - nozzle elements which have a depth of and a neck width of . The Pump chamber diameter is 6 mm. Pump cavities and diffuser - nozzle elements are etched with an isotropic HNA silicon etch. Pumps with three different diffuser lengths are compared reaching a Maximum Pump capacity of and a Maximum Pump Pressure of 1.7 m at a resonance frequency of 1318 Hz for methanol.

  • An improved valve-less Pump fabricated using deep reactive ion etching
    Proceedings of Ninth International Workshop on Micro Electromechanical Systems, 1996
    Co-Authors: Anders Olsso, Pete Enoksso, Goran Stemme, Erik Stemme
    Abstract:

    We present the first valve-less diffuser Pump fabricated using the latest technology in deep reactive ion etching (DRIE). The Pump is fabricated in a simple micromachining process in a double side polished silicon wafer anodically bonded to a glass wafer. Pump chambers and diffuser elements are etched in the silicon wafer using DRIE while inlet and outlet holes are etched using an anisotropic KOH-etch. The DRIE etch resulted in rectangular diffuser cross-sections. We present results on Pumps with different diffuser dimensions in terms of diffuser neck width, length and angle. We reached a Maximum Pump Pressure of 7.6 m H/sub 2/O (74 kPa) and Maximum Pump flow of 2.3 ml/min for water.

  • a valve less planar fluid Pump with two Pump chambers
    Sensors and Actuators A-physical, 1995
    Co-Authors: Anders Olsso, Goran Stemme, Erik Stemme
    Abstract:

    A new planar fluid Pump based on the valve-less diffuser/nozzle Pump principle is presented. The Pump consists of two Pump chambers, each with two flow rectifying diffuser/nozzle elements with rectangular cross sections, one at the inlet and one at the outlet. The Pump chambers are arranged in parallel for high Pump flow. Each Pump chamber has two piezoelectrically vibrated diaphragms. The planar Pump is fabricated in brass with a total thickness of 1 mm. The Pump chamber diameter is 13 mm and the diffuser/nozzle element neck dimensions are 0.3×0.3 mm. Simplified theoretical analyses of the Maximum Pump flow and resonance frequency are given. The flow rectifying ability of the diffuser/nozzle elements is demonstrated in a stationary flow situation and the Pump performance is verified in two different Pump mode configurations: anti-phase and in-phase chamber volume excitation. The measurements in the anti-phase mode show Pump flows and Pump Pressures which are more than twice as high as those of the in-phase oscillation mode. The anti-phase mode has a Pump capacity of about 16 ml/min and a Maximum Pump Pressure of about 1.7 m H2O with the Pump diaphragm vibration frequency set to the Pump resonance frequency of 540 Hz.

  • a valveless diffuser nozzle based fluid Pump
    Sensors and Actuators A-physical, 1993
    Co-Authors: Erik Stemme, Goran Stemme
    Abstract:

    Abstract A new valveless fluid Pump has been designed and tested. The Pump consists of two fluid diffuser/nozzle elements on each side of a chamber volume with an oscillating diaphragm. The vibrating diaphragm produces an oscillating chamber volume, which together with the two fluid-flow-rectifying diffuser/nozzle elements, creates a one-way fluid flow. A microPump prototype with a chamber diameter of 19 mm with conical diffuser/nozzle elements has been built and tested. The Maximum liquid flow rate is 16 ml/min and the Maximum Pump Pressure is 2 m H 2 O. The Pump frequency is of the order of 100 Hz.

Anders Olsso - One of the best experts on this subject based on the ideXlab platform.

  • a valve less planar Pump isotropically etched in silicon
    Journal of Micromechanics and Microengineering, 1996
    Co-Authors: Anders Olsso, Pete Enoksso, Goran Stemme, Erik Stemme
    Abstract:

    The first valve-less diffuser fluid Pump in silicon is presented. It consists of a planar double-chamber arrangement fabricated in a silicon wafer anodically bonded to a glass wafer. The Pump uses fluid-directing diffuser - nozzle elements which have a depth of and a neck width of . The Pump chamber diameter is 6 mm. Pump cavities and diffuser - nozzle elements are etched with an isotropic HNA silicon etch. Pumps with three different diffuser lengths are compared reaching a Maximum Pump capacity of and a Maximum Pump Pressure of 1.7 m at a resonance frequency of 1318 Hz for methanol.

  • An improved valve-less Pump fabricated using deep reactive ion etching
    Proceedings of Ninth International Workshop on Micro Electromechanical Systems, 1996
    Co-Authors: Anders Olsso, Pete Enoksso, Goran Stemme, Erik Stemme
    Abstract:

    We present the first valve-less diffuser Pump fabricated using the latest technology in deep reactive ion etching (DRIE). The Pump is fabricated in a simple micromachining process in a double side polished silicon wafer anodically bonded to a glass wafer. Pump chambers and diffuser elements are etched in the silicon wafer using DRIE while inlet and outlet holes are etched using an anisotropic KOH-etch. The DRIE etch resulted in rectangular diffuser cross-sections. We present results on Pumps with different diffuser dimensions in terms of diffuser neck width, length and angle. We reached a Maximum Pump Pressure of 7.6 m H/sub 2/O (74 kPa) and Maximum Pump flow of 2.3 ml/min for water.

  • a valve less planar fluid Pump with two Pump chambers
    Sensors and Actuators A-physical, 1995
    Co-Authors: Anders Olsso, Goran Stemme, Erik Stemme
    Abstract:

    A new planar fluid Pump based on the valve-less diffuser/nozzle Pump principle is presented. The Pump consists of two Pump chambers, each with two flow rectifying diffuser/nozzle elements with rectangular cross sections, one at the inlet and one at the outlet. The Pump chambers are arranged in parallel for high Pump flow. Each Pump chamber has two piezoelectrically vibrated diaphragms. The planar Pump is fabricated in brass with a total thickness of 1 mm. The Pump chamber diameter is 13 mm and the diffuser/nozzle element neck dimensions are 0.3×0.3 mm. Simplified theoretical analyses of the Maximum Pump flow and resonance frequency are given. The flow rectifying ability of the diffuser/nozzle elements is demonstrated in a stationary flow situation and the Pump performance is verified in two different Pump mode configurations: anti-phase and in-phase chamber volume excitation. The measurements in the anti-phase mode show Pump flows and Pump Pressures which are more than twice as high as those of the in-phase oscillation mode. The anti-phase mode has a Pump capacity of about 16 ml/min and a Maximum Pump Pressure of about 1.7 m H2O with the Pump diaphragm vibration frequency set to the Pump resonance frequency of 540 Hz.

Euisik Yoon - One of the best experts on this subject based on the ideXlab platform.

  • a surface tension driven microPump for low voltage and low power operations
    IEEE\ ASME Journal of Microelectromechanical Systems, 2002
    Co-Authors: Kwangseok Yun, Iljoo Cho, Changjin Kim, Euisik Yoon
    Abstract:

    In this paper, we first report a microPump actuated by surface tension based on continuous electrowetting (CEW). We have used the surface-tension-induced motion of a mercury drop in a microchannel filled with an electrolyte as actuation energy for the microPump. This allows low voltage operation as well as low-power consumption. The microPump is composed of a stack of three wafers bonded together. The microchannel is formed on a glass wafer using SU-8 and is filled with electrolyte where the mercury drop is inserted. The movement of the mercury pushes or drags the electrolyte, resulting in the deflection of a membrane that is formed on the second silicon wafer. Another silicon wafer, which has passive check valves and holes, is stacked on the membrane wafer, forming inlet and outlet chambers. Finally, these two chambers are connected through a silicone tube forming the complete microPump. The performance of the fabricated microPump has been tested for various operation voltages and frequencies. We have demonstrated actual liquid Pumping up to 70 /spl mu/l/min with a driving voltage of 2.3 V and a power consumption of 170 /spl mu/W. The Maximum Pump Pressure is about 800 Pa at the applied voltage of 2.3 V with an operation frequency of 25 Hz.

  • a microPump driven by continuous electrowetting actuation for low voltage and low power operations
    International Conference on Micro Electro Mechanical Systems, 2001
    Co-Authors: Kwangseok Yun, Iljoo Cho, Geunho Kim, Youngsam Jeon, Changjin Kim, Euisik Yoon
    Abstract:

    In this paper we first report a microPump actuated by continuous electrowetting (CEW). We have used the surface-tension-induced motion of a mercury drop in the microchannel filled with an electrolyte as actuation energy. We have fabricated the CEW actuator, silicone rubber Pumping membranes and copper flap check valves, and have demonstrated actual liquid Pumping up to 63 /spl mu/l/min at the applied voltage of 2.3 Vpp. The Maximum Pump Pressure is about 600 Pa at the applied voltage of 2.3 Vpp with operation frequency of 10 Hz.

T Gerlach - One of the best experts on this subject based on the ideXlab platform.

  • Pumping gases by a silicon micro Pump with dynamic passive valves
    Sensors, 1997
    Co-Authors: T Gerlach
    Abstract:

    Pumping gases by a membrane Pump requires a strong compression ratio inside the Pump chamber. This demand is fulfilled by an optimized micro Pump with dynamic passive valves, working at the resonance frequency. The experimental results for the zero-load Pump rate and the Maximum Pump Pressure are 7.5 ml/min and 2.8 kPa, respectively. The Pump's behaviour is described by a mathematical model. The calculated values coincide with the experimental data quite well.