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Cheng-tang Pan - One of the best experts on this subject based on the ideXlab platform.

  • Fabrication of gapless triangular Micro-Lens Array
    Sensors and Actuators A: Physical, 2007
    Co-Authors: Cheng-tang Pan
    Abstract:

    Abstract This study presents a new process to fabricate gapless triangular Micro-Lens Array (GTMA) optical film. The process includes ultraviolet (UV) lithography, photoresist reflow process, Ni–Co electroplating and hot embossing technique. After photoresist triangular column Array is defined by UV lithography, reflow technique is applied to melt photoresist triangular column Array into the shape of triangular Micro-Lens Array. With this reflowed triangular Micro-Lens Array, metal Ni–Co is deposited and covered uniformly on the triangular Micro-Lens Array using electroplating process. The growth rate of Ni–Co is controlled at 0.4–0.6 μm/min at electroplating current density of 1 A/dm 2 (ampere square decimetre, ASD). After this electroplating process, a mold of GTMA is obtained, which is served as the primary mold. Next, with passivation technique applied on this primary mold's surface, a secondary mold is obtained by applying the electroplating process again. This secondary mold is served as master for the subsequent hot embossing process to replicate the GTMA pattern onto polymeric material of polymethyl methacrylate (PMMA) sheet. The Ni–Co mold with hardness over hardness of vicker (Hv) 650 is obtained. The stiffness and hardness of the mold play important roles in GTMA hot embossing process. In addition, this PMMA-based GTMA film used as optical film offers a 100% fill factor and high optical coupling efficiency to improve luminance. The optical measurement shows that this optical film with GTMA pattern increases 15.1% of luminance for backlight module (BLM) of liquid crystal display (LCD).

  • A novel method to fabricate gapless hexagonal Micro-Lens Array
    Sensors and Actuators A: Physical, 2005
    Co-Authors: M. C. Chou, Cheng-tang Pan, Sheng-chih Shen, M.f. Chen, K. L. Lin
    Abstract:

    This study presents an innovative process to fabricate gapless hexagonal Micro-Lens Array to replace expensive grey-mask method. The process includes conventional UV lithography, photoresist reflow technique, Ni–Co electroplating with high hardness and hot embossing process. The Ni–Co electroplating process with hardness larger than Hardness of Vicker (Hv) 650 plays an important role in gapless hexagonal Micro-Lens fabrication. The Ni–Co is deposited and covered on the reflowed half-spherical Micro-Lens template, uniformly by electroplating. After the electroplating process is finished, the profile of gapless hexagonal Micro-Lens Array can be obtained known as primary master mold. The inverse primary master mold was then fabricated, which is known as secondary master mold. Subsequently, the secondary master mold served as master for hot embossing process to replicate the Array pattern onto polymer material sheet. In addition, the innovative fabrication process of gapless hexagonal Micro-Lens Array can offer a 100% fill factor to improve overall light efficiently. © 2004 Elsevier B.V. All rights reserved.

Ik-bu Sohn - One of the best experts on this subject based on the ideXlab platform.

  • Laser assisted fabrication of Micro-Lens Array and characterization of their beam shaping property
    Applied Surface Science, 2019
    Co-Authors: Ik-bu Sohn, Hun-kook Choi, Young-chul Noh, Jong-yeol Kim, Shamim Ahsan
    Abstract:

    Abstract This paper demonstrates the formation of high-fill-factor plano-convex cylindrical and dome-type Micro-Lens Arrays on fused silica glass surface using CO2 laser assisted reshaping technique. Cylindrical Micro-Lens Array is fabricated by polishing the femtosecond laser engraved linear micro-gratings by a CO2 laser beam. Initially, a femtosecond laser beam has been irradiated on the surface of the fused silica glass samples to fabricate periodic micro-gratings on the glass surface. Afterwards, these micro-gratings encoded glass samples are polished several times by a CO2 laser beam. As a result, plano-convex cylindrical Micro-Lens Arrays with the lens period varying from 20 μm to 50 μm are developed on the glass surface. Similarly, dome-type Micro-Lens Array is achieved by femtosecond laser assisted fabrication of periodic micro-pillars followed by several times CO2 laser polishing. We report the formation of a large variety of dome-shape Micro-Lens Array with lens size varying from 20 μm × 20 μm to 50 μm × 50 μm. The fabricated Micro-Lenses show great consistency in size and shape throughout the sample area. We also investigate the intensity distribution of light passed through the Micro-Lens engraved glass samples. Using the dome-type Micro-Lens Array engraved glass samples, a Gaussian laser beam has been converted to a flat-top laser beam for selective patterning of a thin indium-tin-oxide coating from fused silica glass surface.

  • Formation of a plano-convex Micro-Lens Array in fused silica glass by using a CO_2 laser-assisted reshaping technique
    Journal of the Korean Physical Society, 2016
    Co-Authors: Ik-bu Sohn, Hun-kook Choi, Young-chul Noh, Jae-hee Sung, Seong-ku Lee, Dongyoon Yoo, Md. Shamim Ahsan
    Abstract:

    We report on fabricating high-fill-factor plano-convex spherical and square Micro-Lens Arrays on fused silica glass surface by using a CO_2 laser-assisted reshaping technique. Initially, periodic micro-pillars are encoded on glass surfaces by means of a femtosecond laser beam, afterwards, the micro-pillars are polished several times by irradiating a CO_2 laser beam on top of the micro-pillars. Consequently, a spherical Micro-Lens Array with Micro-Lens size of 50 μ m × 50 μ m and a square Micro-Lens Array with Micro-Lens size of 100 μ m × 100 μ m are formed on the surface of the fused silica glass. We also study the intensity distribution of light passing through the glass sample engraved with a spherical Micro-Lens Array. The simulation result shows that the focal length of the spherical Micro-Lens Array is 35 μ m. Furthermore, we investigate the optical properties of glass samples with engraved Micro-Lens Arrays. The proposed CO_2-laser-based reshaping technique is simple and fast and shows promises for fabricating Arrays of smooth Micro-Lenses in various transparent materials.

  • formation of cylindrical micro lens Array on fused silica glass surface using co2 laser assisted reshaping technique
    Optics and Laser Technology, 2015
    Co-Authors: Hun-kook Choi, Ik-bu Sohn, Young-chul Noh, Jin-tae Kim, Dongyoon Yoo, Deok Jung, Jin Hyeok Kim, Md. Shamim Ahsan, Homin Kang
    Abstract:

    Abstract This paper demonstrates the laser assisted formation of plano-convex cylindrical and flat-top curved Micro-Lens Array on fused silica glass surface. Initially, femtosecond laser pulses are irradiated on the sample glass to fabricate periodic linear micro-gratings on the glass surface. Afterwards, we reshape the micro-gratings by several times irradiation of a CO 2 laser beam by focusing the laser beam on top of the micro-gratings. As a consequence, plano-convex cylindrical Micro-Lens Array with a period varying from 20 to 40 µm are formed on fused silica glass surface. However, flat-top curved gratings’ Array is observed on the glass surface for a gratings’ period of 50 µm. The fabricated Micro-Lenses show great consistency in size and shape throughout the sample area. Furthermore, we analyze the formation mechanism of Micro-Lens Array on glass surface using the CO 2 laser assisted reshaping technique. The proposed reshaping technique exhibits great potential for forming a large variety of Micro-Lens Arrays on the surface of various transparent materials.

  • Laser fabrication of Micro-Lens Array on fused silica
    2015 11th Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015
    Co-Authors: Hun-kook Choi, Young-jun Jeong, Ik-bu Sohn, Young-chul Noh, Jae-hee Sung, Seong-ku Lee, Tae-moon Jeong, Jin-tae Kim
    Abstract:

    We fabricated Micro-Lens Array on fused silica glass using femtosecond and CO2 laser. We micro-machined periodic micro-grooves on the glass surface with femtosecond laser, and polished the patterned surface with CO2 laser. We confirmed that curvature was formed on the surface by heat from the CO2 laser beam as the surface roughness was removed. Depending on the fabricated pattern size, we could fabricate Micro-Lens Array with controlling sizes. Using such this laser fabrication technique, we have demonstrated Micro-Lens Array with various dimension.

  • Formation of cylindrical Micro-Lens Array in fused silica glass using laser irradiations
    Micro Nano Materials Devices and Systems, 2013
    Co-Authors: Hun-kook Choi, Ik-bu Sohn, Young-chul Noh, Jin-tae Kim, Shamim Ahsan, Dongyoon Yoo, Deok Jung, Jin Hyeok Kim
    Abstract:

    In this article, we report the development of plano-convex cylindrical Micro-Lens Array on the surface of fused silica glass using laser processing technology. Initially, femtosecond laser pulses are irradiated on the target fused silica glass substrate to pattern periodic micro-grooves. Afterwards, laser beam from CO2 laser source is applied several times on the previously micro-patterned fused silica glass surface, the purpose of which is to polish the micro-patterned glass surface. As a consequence, periodic plano-convex cylindrical Micro-Lens Array is evolved on the glass surface. The Micro-Lens Array shows great consistency in size and shape throughout the sample area. We also investigate various optical properties of the Micro-Lenses evolved glass substrates including the diffraction pattern and diffraction efficiency of light. The glass sample comprising cylindrical Micro-Lens Array can diffract light with moderate diffraction efficiency. We strongly believe that, it is possible to engineer cylindrical Micro-Lens Array on the surface of a variety of transparent materials including glasses and polymers over a large area.

Hun-kook Choi - One of the best experts on this subject based on the ideXlab platform.

  • Laser assisted fabrication of Micro-Lens Array and characterization of their beam shaping property
    Applied Surface Science, 2019
    Co-Authors: Ik-bu Sohn, Hun-kook Choi, Young-chul Noh, Jong-yeol Kim, Shamim Ahsan
    Abstract:

    Abstract This paper demonstrates the formation of high-fill-factor plano-convex cylindrical and dome-type Micro-Lens Arrays on fused silica glass surface using CO2 laser assisted reshaping technique. Cylindrical Micro-Lens Array is fabricated by polishing the femtosecond laser engraved linear micro-gratings by a CO2 laser beam. Initially, a femtosecond laser beam has been irradiated on the surface of the fused silica glass samples to fabricate periodic micro-gratings on the glass surface. Afterwards, these micro-gratings encoded glass samples are polished several times by a CO2 laser beam. As a result, plano-convex cylindrical Micro-Lens Arrays with the lens period varying from 20 μm to 50 μm are developed on the glass surface. Similarly, dome-type Micro-Lens Array is achieved by femtosecond laser assisted fabrication of periodic micro-pillars followed by several times CO2 laser polishing. We report the formation of a large variety of dome-shape Micro-Lens Array with lens size varying from 20 μm × 20 μm to 50 μm × 50 μm. The fabricated Micro-Lenses show great consistency in size and shape throughout the sample area. We also investigate the intensity distribution of light passed through the Micro-Lens engraved glass samples. Using the dome-type Micro-Lens Array engraved glass samples, a Gaussian laser beam has been converted to a flat-top laser beam for selective patterning of a thin indium-tin-oxide coating from fused silica glass surface.

  • Formation of a plano-convex Micro-Lens Array in fused silica glass by using a CO_2 laser-assisted reshaping technique
    Journal of the Korean Physical Society, 2016
    Co-Authors: Ik-bu Sohn, Hun-kook Choi, Young-chul Noh, Jae-hee Sung, Seong-ku Lee, Dongyoon Yoo, Md. Shamim Ahsan
    Abstract:

    We report on fabricating high-fill-factor plano-convex spherical and square Micro-Lens Arrays on fused silica glass surface by using a CO_2 laser-assisted reshaping technique. Initially, periodic micro-pillars are encoded on glass surfaces by means of a femtosecond laser beam, afterwards, the micro-pillars are polished several times by irradiating a CO_2 laser beam on top of the micro-pillars. Consequently, a spherical Micro-Lens Array with Micro-Lens size of 50 μ m × 50 μ m and a square Micro-Lens Array with Micro-Lens size of 100 μ m × 100 μ m are formed on the surface of the fused silica glass. We also study the intensity distribution of light passing through the glass sample engraved with a spherical Micro-Lens Array. The simulation result shows that the focal length of the spherical Micro-Lens Array is 35 μ m. Furthermore, we investigate the optical properties of glass samples with engraved Micro-Lens Arrays. The proposed CO_2-laser-based reshaping technique is simple and fast and shows promises for fabricating Arrays of smooth Micro-Lenses in various transparent materials.

  • formation of cylindrical micro lens Array on fused silica glass surface using co2 laser assisted reshaping technique
    Optics and Laser Technology, 2015
    Co-Authors: Hun-kook Choi, Ik-bu Sohn, Young-chul Noh, Jin-tae Kim, Dongyoon Yoo, Deok Jung, Jin Hyeok Kim, Md. Shamim Ahsan, Homin Kang
    Abstract:

    Abstract This paper demonstrates the laser assisted formation of plano-convex cylindrical and flat-top curved Micro-Lens Array on fused silica glass surface. Initially, femtosecond laser pulses are irradiated on the sample glass to fabricate periodic linear micro-gratings on the glass surface. Afterwards, we reshape the micro-gratings by several times irradiation of a CO 2 laser beam by focusing the laser beam on top of the micro-gratings. As a consequence, plano-convex cylindrical Micro-Lens Array with a period varying from 20 to 40 µm are formed on fused silica glass surface. However, flat-top curved gratings’ Array is observed on the glass surface for a gratings’ period of 50 µm. The fabricated Micro-Lenses show great consistency in size and shape throughout the sample area. Furthermore, we analyze the formation mechanism of Micro-Lens Array on glass surface using the CO 2 laser assisted reshaping technique. The proposed reshaping technique exhibits great potential for forming a large variety of Micro-Lens Arrays on the surface of various transparent materials.

  • Laser fabrication of Micro-Lens Array on fused silica
    2015 11th Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015
    Co-Authors: Hun-kook Choi, Young-jun Jeong, Ik-bu Sohn, Young-chul Noh, Jae-hee Sung, Seong-ku Lee, Tae-moon Jeong, Jin-tae Kim
    Abstract:

    We fabricated Micro-Lens Array on fused silica glass using femtosecond and CO2 laser. We micro-machined periodic micro-grooves on the glass surface with femtosecond laser, and polished the patterned surface with CO2 laser. We confirmed that curvature was formed on the surface by heat from the CO2 laser beam as the surface roughness was removed. Depending on the fabricated pattern size, we could fabricate Micro-Lens Array with controlling sizes. Using such this laser fabrication technique, we have demonstrated Micro-Lens Array with various dimension.

  • Formation of cylindrical Micro-Lens Array in fused silica glass using laser irradiations
    Micro Nano Materials Devices and Systems, 2013
    Co-Authors: Hun-kook Choi, Ik-bu Sohn, Young-chul Noh, Jin-tae Kim, Shamim Ahsan, Dongyoon Yoo, Deok Jung, Jin Hyeok Kim
    Abstract:

    In this article, we report the development of plano-convex cylindrical Micro-Lens Array on the surface of fused silica glass using laser processing technology. Initially, femtosecond laser pulses are irradiated on the target fused silica glass substrate to pattern periodic micro-grooves. Afterwards, laser beam from CO2 laser source is applied several times on the previously micro-patterned fused silica glass surface, the purpose of which is to polish the micro-patterned glass surface. As a consequence, periodic plano-convex cylindrical Micro-Lens Array is evolved on the glass surface. The Micro-Lens Array shows great consistency in size and shape throughout the sample area. We also investigate various optical properties of the Micro-Lenses evolved glass substrates including the diffraction pattern and diffraction efficiency of light. The glass sample comprising cylindrical Micro-Lens Array can diffract light with moderate diffraction efficiency. We strongly believe that, it is possible to engineer cylindrical Micro-Lens Array on the surface of a variety of transparent materials including glasses and polymers over a large area.

Young-chul Noh - One of the best experts on this subject based on the ideXlab platform.

  • Laser assisted fabrication of Micro-Lens Array and characterization of their beam shaping property
    Applied Surface Science, 2019
    Co-Authors: Ik-bu Sohn, Hun-kook Choi, Young-chul Noh, Jong-yeol Kim, Shamim Ahsan
    Abstract:

    Abstract This paper demonstrates the formation of high-fill-factor plano-convex cylindrical and dome-type Micro-Lens Arrays on fused silica glass surface using CO2 laser assisted reshaping technique. Cylindrical Micro-Lens Array is fabricated by polishing the femtosecond laser engraved linear micro-gratings by a CO2 laser beam. Initially, a femtosecond laser beam has been irradiated on the surface of the fused silica glass samples to fabricate periodic micro-gratings on the glass surface. Afterwards, these micro-gratings encoded glass samples are polished several times by a CO2 laser beam. As a result, plano-convex cylindrical Micro-Lens Arrays with the lens period varying from 20 μm to 50 μm are developed on the glass surface. Similarly, dome-type Micro-Lens Array is achieved by femtosecond laser assisted fabrication of periodic micro-pillars followed by several times CO2 laser polishing. We report the formation of a large variety of dome-shape Micro-Lens Array with lens size varying from 20 μm × 20 μm to 50 μm × 50 μm. The fabricated Micro-Lenses show great consistency in size and shape throughout the sample area. We also investigate the intensity distribution of light passed through the Micro-Lens engraved glass samples. Using the dome-type Micro-Lens Array engraved glass samples, a Gaussian laser beam has been converted to a flat-top laser beam for selective patterning of a thin indium-tin-oxide coating from fused silica glass surface.

  • Formation of a plano-convex Micro-Lens Array in fused silica glass by using a CO_2 laser-assisted reshaping technique
    Journal of the Korean Physical Society, 2016
    Co-Authors: Ik-bu Sohn, Hun-kook Choi, Young-chul Noh, Jae-hee Sung, Seong-ku Lee, Dongyoon Yoo, Md. Shamim Ahsan
    Abstract:

    We report on fabricating high-fill-factor plano-convex spherical and square Micro-Lens Arrays on fused silica glass surface by using a CO_2 laser-assisted reshaping technique. Initially, periodic micro-pillars are encoded on glass surfaces by means of a femtosecond laser beam, afterwards, the micro-pillars are polished several times by irradiating a CO_2 laser beam on top of the micro-pillars. Consequently, a spherical Micro-Lens Array with Micro-Lens size of 50 μ m × 50 μ m and a square Micro-Lens Array with Micro-Lens size of 100 μ m × 100 μ m are formed on the surface of the fused silica glass. We also study the intensity distribution of light passing through the glass sample engraved with a spherical Micro-Lens Array. The simulation result shows that the focal length of the spherical Micro-Lens Array is 35 μ m. Furthermore, we investigate the optical properties of glass samples with engraved Micro-Lens Arrays. The proposed CO_2-laser-based reshaping technique is simple and fast and shows promises for fabricating Arrays of smooth Micro-Lenses in various transparent materials.

  • formation of cylindrical micro lens Array on fused silica glass surface using co2 laser assisted reshaping technique
    Optics and Laser Technology, 2015
    Co-Authors: Hun-kook Choi, Ik-bu Sohn, Young-chul Noh, Jin-tae Kim, Dongyoon Yoo, Deok Jung, Jin Hyeok Kim, Md. Shamim Ahsan, Homin Kang
    Abstract:

    Abstract This paper demonstrates the laser assisted formation of plano-convex cylindrical and flat-top curved Micro-Lens Array on fused silica glass surface. Initially, femtosecond laser pulses are irradiated on the sample glass to fabricate periodic linear micro-gratings on the glass surface. Afterwards, we reshape the micro-gratings by several times irradiation of a CO 2 laser beam by focusing the laser beam on top of the micro-gratings. As a consequence, plano-convex cylindrical Micro-Lens Array with a period varying from 20 to 40 µm are formed on fused silica glass surface. However, flat-top curved gratings’ Array is observed on the glass surface for a gratings’ period of 50 µm. The fabricated Micro-Lenses show great consistency in size and shape throughout the sample area. Furthermore, we analyze the formation mechanism of Micro-Lens Array on glass surface using the CO 2 laser assisted reshaping technique. The proposed reshaping technique exhibits great potential for forming a large variety of Micro-Lens Arrays on the surface of various transparent materials.

  • Laser fabrication of Micro-Lens Array on fused silica
    2015 11th Conference on Lasers and Electro-Optics Pacific Rim (CLEO-PR), 2015
    Co-Authors: Hun-kook Choi, Young-jun Jeong, Ik-bu Sohn, Young-chul Noh, Jae-hee Sung, Seong-ku Lee, Tae-moon Jeong, Jin-tae Kim
    Abstract:

    We fabricated Micro-Lens Array on fused silica glass using femtosecond and CO2 laser. We micro-machined periodic micro-grooves on the glass surface with femtosecond laser, and polished the patterned surface with CO2 laser. We confirmed that curvature was formed on the surface by heat from the CO2 laser beam as the surface roughness was removed. Depending on the fabricated pattern size, we could fabricate Micro-Lens Array with controlling sizes. Using such this laser fabrication technique, we have demonstrated Micro-Lens Array with various dimension.

  • Formation of cylindrical Micro-Lens Array in fused silica glass using laser irradiations
    Micro Nano Materials Devices and Systems, 2013
    Co-Authors: Hun-kook Choi, Ik-bu Sohn, Young-chul Noh, Jin-tae Kim, Shamim Ahsan, Dongyoon Yoo, Deok Jung, Jin Hyeok Kim
    Abstract:

    In this article, we report the development of plano-convex cylindrical Micro-Lens Array on the surface of fused silica glass using laser processing technology. Initially, femtosecond laser pulses are irradiated on the target fused silica glass substrate to pattern periodic micro-grooves. Afterwards, laser beam from CO2 laser source is applied several times on the previously micro-patterned fused silica glass surface, the purpose of which is to polish the micro-patterned glass surface. As a consequence, periodic plano-convex cylindrical Micro-Lens Array is evolved on the glass surface. The Micro-Lens Array shows great consistency in size and shape throughout the sample area. We also investigate various optical properties of the Micro-Lenses evolved glass substrates including the diffraction pattern and diffraction efficiency of light. The glass sample comprising cylindrical Micro-Lens Array can diffract light with moderate diffraction efficiency. We strongly believe that, it is possible to engineer cylindrical Micro-Lens Array on the surface of a variety of transparent materials including glasses and polymers over a large area.

Minghui Hong - One of the best experts on this subject based on the ideXlab platform.

  • Coupling effect of spiral-shaped terahertz metamaterials for tunable electromagnetic response
    Applied Physics A, 2014
    Co-Authors: Dacheng Wang, Chengwei Qiu, Minghui Hong
    Abstract:

    Coupling effect in spiral-shaped metamaterials composed of four half rings at different sizes is investigated to achieve tunability in THz range. This novel spiral-shaped structure was fabricated on flexible substrate with laser Micro-Lens Array (MLA) lithography and measured by THz time domain spectroscopy (THz-TDS). The experimental results suggest that mutual capacitance and inductance coupling in the spiral-shaped structure would result in frequency shifts of the four resonances. The observed shifting trends of the four resonant frequencies are in good agreement with simulation and are further explained by the electric field distribution. By varying the gap sizes among the half rings, four resonant frequencies can be tuned flexibly. Such a spiral-shaped design has potential applications in multi-band tunable THz MEMS devices.

  • Surface Nano-fabrication by Laser Precision Engineering
    The Review of Laser Engineering, 2008
    Co-Authors: Minghui Hong, Yi Zhou, T C Chong
    Abstract:

    Research progress on laser nano-fabrication with the combination of AFM, NSOM and transparent particles mask is reviewed. With the combination of other advanced processing tools, laser irradiation can push the processing feature size down to ~ 20 nm. However, laser nano-fabrication with single optics brings about the technical challenge of slow processing speed. Parallel laser nano-patterning was recently developed to achieve large area and high speed nano-fabrication with laser irradiation through a Micro-Lens Array. Laser interference lithography is also studied to fabricate 100 nm functional periodic nanostructures on substrate surfaces.

  • Fabrication of concave micro lens Array using laser patterning and isotropic etching
    International Journal of Machine Tools and Manufacture, 2006
    Co-Authors: C. S. Lim, Minghui Hong, A. Senthil Kumar, M. Rahman, Xueqiao Liu
    Abstract:

    Micro lens Arrays are widely used in optical communication and laser-fiber coupling applications. In this paper, a technique to fabricate concave micro lens Arrays on glass substrate using a third harmonic Nd:YAG laser direct patterning and followed by chemical wet isotropic etching is presented. The patterning process was done on gold film, which was coated on a glass substrate by using a NC controlled laser ablation tool paths. The glass substrate is then etched by using hydrofluoric acid (HF) solutions whereby the exposed area will be dissolved away by chemical reaction with HF. The type of etching process is an isotropic etching which the etching rate is equal at all direction thus produce hemispherical concave profile on glass. The optimum laser patterning parameters is obtained and the effect of different types of HF solutions on etching efficiency is studied. The surface morphology, 2D and 3D profiles are also measured. Various micro lens diameters are fabricated with different values of lens sag.