Microelectromechanical Systems

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Mark J Schnitzer - One of the best experts on this subject based on the ideXlab platform.

  • In vivo brain imaging using a portable 2.9 g two-photon microscope based on a Microelectromechanical Systems scanning mirror.
    Optics letters, 2009
    Co-Authors: Wibool Piyawattanametha, Eric D. Cocker, Laurie D Burns, Juergen C Jung, Hyejun Ra, Robert P J Barretto, Olav Solgaard, Mark J Schnitzer
    Abstract:

    We present a two-photon microscope that is approximately 2.9 g in mass and 2.0 x 1.9 x 1.1 cm(3) in size and based on a Microelectromechanical Systems (MEMS) laser-scanning mirror. The microscope has a focusing motor and a micro-optical assembly composed of four gradient refractive index lenses and a dichroic microprism. Fluorescence is captured without the detected emissions reflecting off the MEMS mirror, by use of separate optical fibers for fluorescence collection and delivery of ultrashort excitation pulses. Using this microscope we imaged neocortical microvasculature and tracked the flow of erythrocytes in live mice.

  • fast scanning two photon fluorescence imaging based on a Microelectromechanical Systems two dimensional scanning mirror
    Optics Letters, 2006
    Co-Authors: Wibool Piyawattanametha, Eric D. Cocker, Robert P J Barretto, Olav Solgaard, Benjamin A Flusberg, Daesung Lee, Mark J Schnitzer
    Abstract:

    Towards overcoming the size limitations of conventional two-photon fluorescence microscopy, we introduce two-photon imaging based on Microelectromechanical Systems (MEMS) scanners. Single crystalline silicon scanning mirrors that are 0.75 mm x 0.75 mm in size and driven in two dimensions by microfabricated vertical comb electrostatic actuators can provide optical deflection angles through a range of approximately16 degrees . Using such scanners we demonstrated two-photon microscopy and microendoscopy with fast-axis acquisition rates up to 3.52 kHz.

Wibool Piyawattanametha - One of the best experts on this subject based on the ideXlab platform.

  • In vivo brain imaging using a portable 2.9 g two-photon microscope based on a Microelectromechanical Systems scanning mirror.
    Optics letters, 2009
    Co-Authors: Wibool Piyawattanametha, Eric D. Cocker, Laurie D Burns, Juergen C Jung, Hyejun Ra, Robert P J Barretto, Olav Solgaard, Mark J Schnitzer
    Abstract:

    We present a two-photon microscope that is approximately 2.9 g in mass and 2.0 x 1.9 x 1.1 cm(3) in size and based on a Microelectromechanical Systems (MEMS) laser-scanning mirror. The microscope has a focusing motor and a micro-optical assembly composed of four gradient refractive index lenses and a dichroic microprism. Fluorescence is captured without the detected emissions reflecting off the MEMS mirror, by use of separate optical fibers for fluorescence collection and delivery of ultrashort excitation pulses. Using this microscope we imaged neocortical microvasculature and tracked the flow of erythrocytes in live mice.

  • miniature near infrared dual axes confocal microscope utilizing a two dimensional Microelectromechanical Systems scanner
    Optics Letters, 2007
    Co-Authors: Jonathan T. C. Liu, Wibool Piyawattanametha, Michael J. Mandella, Olav Solgaard, G S Kino, Christopher H Contag, Larry K Wong, Thomas D Wang
    Abstract:

    The first, to our knowledge, miniature dual-axes confocal microscope has been developed, with an outer diameter of 10 mm, for subsurface imaging of biological tissues with 5-7 μm resolution. Depth-resolved en face images are obtained at 30 frames per second, with a field of view of 800×100 μm, by employing a two-dimensional scanning Microelectromechanical Systems mirror. Reflectance and fluorescence images are obtained with a laser source at 785 nm, demonstrating the ability to perform real-time optical biopsy.

  • fast scanning two photon fluorescence imaging based on a Microelectromechanical Systems two dimensional scanning mirror
    Optics Letters, 2006
    Co-Authors: Wibool Piyawattanametha, Eric D. Cocker, Robert P J Barretto, Olav Solgaard, Benjamin A Flusberg, Daesung Lee, Mark J Schnitzer
    Abstract:

    Towards overcoming the size limitations of conventional two-photon fluorescence microscopy, we introduce two-photon imaging based on Microelectromechanical Systems (MEMS) scanners. Single crystalline silicon scanning mirrors that are 0.75 mm x 0.75 mm in size and driven in two dimensions by microfabricated vertical comb electrostatic actuators can provide optical deflection angles through a range of approximately16 degrees . Using such scanners we demonstrated two-photon microscopy and microendoscopy with fast-axis acquisition rates up to 3.52 kHz.

R S Muller - One of the best experts on this subject based on the ideXlab platform.

  • surface micromachining for Microelectromechanical Systems
    Proceedings of the IEEE, 1998
    Co-Authors: J M Bustillo, Roger T Howe, R S Muller
    Abstract:

    Surface micromachining is characterized by the fabrication of micromechanical structures from deposited thin films. Originally employed for integrated circuits, films composed of materials such as low-pressure chemical-vapor-deposition polycrystalline silicon, silicon nitride, and silicon dioxides can be sequentially deposited and selectively removed to build or "machine" three-dimensional structures whose functionality typically requires that they be freed from the planar substrate. Although the process to accomplish this fabrication dates from the 1960's, its rapid extension over the past few years and its application to batch fabrication of micromechanisms and of monolithic Microelectromechanical Systems (MEMS) make a thorough review of surface micromachining appropriate at this time. Four central issues of consequence to the MEMS technologist are: (i) the understanding and control of the material properties of microstructural films, such as polycrystalline silicon, (ii) the release of the microstructure, for example, by wet etching silicon dioxide sacrificial films, followed by its drying and surface passivation, (iii) the constraints defined by the combination of micromachining and integrated-circuit technologies when fabricating monolithic sensor devices, and (iv) the methods, materials, and practices used when packaging the completed device. Last, recent developments of hinged structures for postrelease assembly, high-aspect-ratio fabrication of molded parts from deposited thin films, and the advent of deep anisotropic silicon etching hold promise to extend markedly the capabilities of surface-micromachining technologies.

Olav Solgaard - One of the best experts on this subject based on the ideXlab platform.

  • In vivo brain imaging using a portable 2.9 g two-photon microscope based on a Microelectromechanical Systems scanning mirror.
    Optics letters, 2009
    Co-Authors: Wibool Piyawattanametha, Eric D. Cocker, Laurie D Burns, Juergen C Jung, Hyejun Ra, Robert P J Barretto, Olav Solgaard, Mark J Schnitzer
    Abstract:

    We present a two-photon microscope that is approximately 2.9 g in mass and 2.0 x 1.9 x 1.1 cm(3) in size and based on a Microelectromechanical Systems (MEMS) laser-scanning mirror. The microscope has a focusing motor and a micro-optical assembly composed of four gradient refractive index lenses and a dichroic microprism. Fluorescence is captured without the detected emissions reflecting off the MEMS mirror, by use of separate optical fibers for fluorescence collection and delivery of ultrashort excitation pulses. Using this microscope we imaged neocortical microvasculature and tracked the flow of erythrocytes in live mice.

  • miniature near infrared dual axes confocal microscope utilizing a two dimensional Microelectromechanical Systems scanner
    Optics Letters, 2007
    Co-Authors: Jonathan T. C. Liu, Wibool Piyawattanametha, Michael J. Mandella, Olav Solgaard, G S Kino, Christopher H Contag, Larry K Wong, Thomas D Wang
    Abstract:

    The first, to our knowledge, miniature dual-axes confocal microscope has been developed, with an outer diameter of 10 mm, for subsurface imaging of biological tissues with 5-7 μm resolution. Depth-resolved en face images are obtained at 30 frames per second, with a field of view of 800×100 μm, by employing a two-dimensional scanning Microelectromechanical Systems mirror. Reflectance and fluorescence images are obtained with a laser source at 785 nm, demonstrating the ability to perform real-time optical biopsy.

  • fast scanning two photon fluorescence imaging based on a Microelectromechanical Systems two dimensional scanning mirror
    Optics Letters, 2006
    Co-Authors: Wibool Piyawattanametha, Eric D. Cocker, Robert P J Barretto, Olav Solgaard, Benjamin A Flusberg, Daesung Lee, Mark J Schnitzer
    Abstract:

    Towards overcoming the size limitations of conventional two-photon fluorescence microscopy, we introduce two-photon imaging based on Microelectromechanical Systems (MEMS) scanners. Single crystalline silicon scanning mirrors that are 0.75 mm x 0.75 mm in size and driven in two dimensions by microfabricated vertical comb electrostatic actuators can provide optical deflection angles through a range of approximately16 degrees . Using such scanners we demonstrated two-photon microscopy and microendoscopy with fast-axis acquisition rates up to 3.52 kHz.

Kazuya Masu - One of the best experts on this subject based on the ideXlab platform.

  • design of sub 1g Microelectromechanical Systems accelerometersa
    Applied Physics Letters, 2014
    Co-Authors: Daisuke Yamane, Toshifumi Konishi, Takaaki Matsushima, Katsuyuki Machida, Hiroshi Toshiyoshi, Kazuya Masu
    Abstract:

    This paper presents a design of Microelectromechanical Systems (MEMS) accelerometers for sensing sub-1g (g = 9.8 m/s2) acceleration. The accelerometer has a high-density proof mass to suppress the Brownian noise that dominates the output noise of the sensor. The low-temperature (<400 °C) process enables to integrate the accelerometer on the sensing complementary metal-oxide semiconductor circuit by electroplating of gold; a proof mass of 1020 μm × 1020 μm in area with the thickness of 12 μm has been found to suppress the measured noise floor to 0.78 μg/Hz at 300 K, which is nearly one order of magnitude smaller than those of the conventional MEMS accelerometers made of silicon.

  • novel sensor structure and its evaluation for integrated complementary metal oxide semiconductor Microelectromechanical Systems accelerometer
    Japanese Journal of Applied Physics, 2013
    Co-Authors: Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima, Katsuyuki Machida, Hiroshi Toshiyoshi, Ghou Motohashi, Ken Kagaya, Hiroyuki Ito, Noboru Ishihara, Kazuya Masu
    Abstract:

    This paper reports a novel sensor structure and its evaluation results for an integrated complementary metal oxide semiconductor (CMOS) Microelectromechanical Systems (MEMS) accelerometer with a wide detection range on a chip. The proposed sensor structure has the following features: i) a layer separation technique between the proof mass and the mechanical suspensions, ii) mechanical stoppers for the proof mass to avoid destruction, and iii) a SiO2 film underneath the proof mass to prevent stiction and electrical short. Gold was used as the MEMS structure material to reduce the proof mass size and to lower the Brownian noise to below 100 µg/√Hz. Furthermore, the micro fabrication was carried out below 310 °C for the CMOS devices to remain intact. The evaluation results indicate that the Brownian noise was 90.6 µg/√Hz. Thus, we have confirmed that the proposed MEMS structure has the potential for use in future integrated CMOS-MEMS accelerometers.

  • novel sensor structure and its evaluation for integrated complementary metal oxide semiconductor Microelectromechanical Systems accelerometer
    Japanese Journal of Applied Physics, 2013
    Co-Authors: Toshifumi Konishi, Daisuke Yamane, Takaaki Matsushima, Katsuyuki Machida, Hiroshi Toshiyoshi, Ghou Motohashi, Ken Kagaya, Noboru Ishihara, Kazuya Masu
    Abstract:

    This paper reports a novel sensor structure and its evaluation results for an integrated complementary metal oxide semiconductor (CMOS) Microelectromechanical Systems (MEMS) accelerometer with a wide detection range on a chip. The proposed sensor structure has the following features: i) a layer separation technique between the proof mass and the mechanical suspensions, ii) mechanical stoppers for the proof mass to avoid destruction, and iii) a SiO2 film underneath the proof mass to prevent stiction and electrical short. Gold was used as the MEMS structure material to reduce the proof mass size and to lower the Brownian noise to below 100 µg/√Hz. Furthermore, the micro fabrication was carried out below 310 °C for the CMOS devices to remain intact. The evaluation results indicate that the Brownian noise was 90.6 µg/√Hz. Thus, we have confirmed that the proposed MEMS structure has the potential for use in future integrated CMOS-MEMS accelerometers.

  • on chip variable inductor using Microelectromechanical Systems technology
    Japanese Journal of Applied Physics, 2003
    Co-Authors: Yoshisato Yokoyama, Kazuya Masu, Takashi Fukushige, Seiichi Hata, Akira Shimokohbe
    Abstract:

    We have proposed and evaluated the novel three-dimensional on-chip variable inductor that is fabricated using Microelectromechanical Systems technology. The variable inductor was made of thin film metallic glass, Pd76Cu7Si17, that has high flexibility. Since the thin film metallic glass has high elasticity, the height of the three-dimensional spiral inductor can be changed, resulting in the change of inductance. The fabricated inductor has the inductance of 3.64–3.74 nH due to the change in the spiral height with a Q-factor of 2.0 at 2 GHz. The variable range of inductance is 0.1 nH, and the ratio is 3%. Simulation results have shown that the Q-factor is increased by coating with a low-resistivity metal; when the inductor is coated with Au, the Q-factor is increased to 7.2 at 2 GHz. Furthermore, the several-nH inductor with a variable range of 10% is designed.