Microfabrication

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George M Whitesides - One of the best experts on this subject based on the ideXlab platform.

  • Microfabrication meets microbiology
    Nature Reviews Microbiology, 2007
    Co-Authors: Douglas B Weibel, Willow R Diluzio, George M Whitesides
    Abstract:

    This Review summarizes methods for constructing systems and structures at micron or submicron scales that have applications in microbiology. These tools make it possible to manipulate individual cells and their immediate extracellular environments and have the capability to transform the study of microbial physiology and behaviour. Because of their simplicity, low cost and use in Microfabrication, we focus on the application of soft lithographic techniques to the study of microorganisms, and describe several key areas in microbiology in which the development of new microfabricated materials and tools can have a crucial role.

  • soft lithography and Microfabrication
    Physics World, 1998
    Co-Authors: Scott T Brittain, Xiaomei Zhao, Karteri Paul, George M Whitesides
    Abstract:

    Miniaturization is a central theme in technology. As the computer industry knows, smaller microelectronic devices have made computers faster, cheaper and more portable. These advances in microelectronics have also spawned a huge variety of other tiny devices. For example, micro-electro-mechanical systems are now being used in medicine as disposable blood-pressure sensors, and in the automotive industry as tiny accelerometers in airbags that protect drivers in crashes.

  • Microfabrication microstructures and microsystems
    Topics in Current Chemistry, 1998
    Co-Authors: John A Rogers, Rebecca J Jackman, Xiaomei Zhao, George M Whitesides
    Abstract:

    This review gives a brief introduction to materials and techniques used for Microfabrication. Rigid materials have typically been used to fabricate microstructures and systems. Elastomeric materials are becoming attractive, and may have advantages for certain types of applications. Photolithography is the most commonly used technique for the fabrication of structures for microelectronic circuits, microelectromechanical systems, microanalytical devices and micro-optics. Soft lithography represents a set of non-photolithographic techniques: it forms micropatterns of self-assembled monolayers (SAMs) by contact printing and generates microstructures of polymers by contact molding. The aim of this paper is to illustrate how non-traditional materials and methods for fabrication can yield simple, cost-effective routes to microsystems, and now they can expand the capabilities of these systems.

Guanghong Duan - One of the best experts on this subject based on the ideXlab platform.

  • Radial superresolution of the two-photon Microfabrication method
    Microsystem Technologies, 2009
    Co-Authors: P. Wei, Yu Zhu, Qiaofeng Tan, Guanghong Duan
    Abstract:

    The two-photon Microfabrication method, which has been developed over several years, is a new way to produce the real three-dimension microstructure. And now, this technology is recognized as a promising process for the creation of nano- and microscale devices. However, there are still important issues to be settled, one of them is the radial superresolution. The radial superresolution diffraction theory is introduced in the two-photon Microfabrication system. This method can improve the radial superresolution of the two-photon Microfabrication system. The theoretical analysis of the photosensitive resin is discussed based on the exciting power and concentration of free-radical theory. Experiment results of the two-photon Microfabrication method verify the method and show that it can provide weight into the Microfabrication system.

  • Axial superresolution of two-photon Microfabrication
    Applied optics, 2007
    Co-Authors: P. Wei, O. F. Tan, Yu Zhu, Guanghong Duan
    Abstract:

    An axial superresolution diffraction theory is developed in a two-photon Microfabrication system. This method can improve the axial superresolution of the two-photon Microfabrication system. A theoretical analysis of the photosensitive resin is discussed based on the exciting power and the concentration of free radical theory. Simulated results of the two-photon Microfabrication verify the method and show that it can provide insight into the Microfabrication system.

  • Discussion on the Radial Superresolution of the Two-Photon Microfabrication
    Key Engineering Materials, 2007
    Co-Authors: P. Wei, Yu Zhu, Guanghong Duan, Q.f. Tan, G.h. Gao
    Abstract:

    In order to improve the radial superresolution of the two-photon Microfabrication, the superresolution diffraction theory was introduced in detail. The theoretical analysis of the photosensitive resist based on the exciting power and concentration of free radical was given.. And the superresolution diffractive optical element was applied in the two-photon Microfabrication system. Simulation results indicated that the radial superresolution of the two-photon Microfabrication can be improved with the superresolution diffractive optical element.

  • Research of the new optical diffractive super-resolution element of the two-photon Microfabrication
    Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis Measurement Theory Photo-Electronic Technology and Artificial, 2006
    Co-Authors: P. Wei, Yu Zhu, Guanghong Duan
    Abstract:

    The new optical diffractive superresolution element (DSE) is being applied to improve the Microfabrication radial superresolution in the two-photon three-dimension (3D) Microfabrication system, which appeared only a few years ago and can provide the ability to confine photochemical and physical reactions to the order of laser wavelength in three dimensions. The design method of the DSE is that minimizing M if the lowest limit S l of the S and the highest limit G u of the G is set, where Liu [1] explained the definition of the S, M and G. Simulation test result proved that the Microfabrication radial superresolution can be improved by the new optical DSE. The phenomenon can only be interpreted as the intensity of high-order and side of the zero-order diffraction peaks have been clapped under the twophoton absorption (TPA) polymerization threshold. In a word the polymerized volume can be chosen because the S l and the G u is correspondingly adjustable, even if the laser wavelength, objective lens and the photosensitive resin is fixed for a given two-photon Microfabrication system. That means the radial superresolution of the two-photon Microfabrication can be chosen.

  • Discussion on the improved diffractive superresolution element of the two-photon Microfabrication
    International Technology and Innovation Conference 2006 (ITIC 2006), 2006
    Co-Authors: P. Wei, Yu Zhu, Qiaofeng Tan, Guanghong Duan
    Abstract:

    The improved diffractive superresolution element (DSE) is being applied to improve the Microfabrication radial superresolution in the two-photon three dimension (3D) Microfabrication system, which appeared only a few years ago and can provide the ability to confine photochemical and physical reactions to the order of laser wavelength in three dimensions. The design method of the improved DSE is that maximizing S if the highest limit Mu of the M and the highest limit Gu of the G is set, where reference explained the definition of the S, M and G. Simulation result proved that the Microfabrication radial superresolution can be got by the improved optical DSE. The phenomenon can only be interpreted as the intensity of high-order and side of the zero-order diffraction peaks have been clapped under the two-photon absorption (TPA) polymerization threshold. In a word the polymerized volume can be chosen because the Mu and the Gu is correspondingly adjustable, even if the laser wavelength, objective lens and the photosensitive resin is fixed for a given Microfabrication system. That means the radial superresolution of the two-photon Microfabrication can be chosen.

P. Wei - One of the best experts on this subject based on the ideXlab platform.

  • A Type of Two-Photon Microfabrication System and Experimentations
    ISRN Mechanical Engineering, 2011
    Co-Authors: P. Wei, Lishuang Feng
    Abstract:

    After the femtosecond laser was invented, two-photon Microfabrication technology has been recognized as an important method to fabricate the nanostructure and microstructure. In this paper, the two-photon Microfabrication system is described, and some experiments are done. From the experiment results, it can be seen that the resolution of the two-photon Microfabrication system can be improved by the expose time, the laser power, and the diffractive superresolution element (DSE). Finally, some three-dimensional (3D) microstructure models are fabricated to show the potential of the two-photon Microfabrication method.

  • Radial superresolution of the two-photon Microfabrication method
    Microsystem Technologies, 2009
    Co-Authors: P. Wei, Yu Zhu, Qiaofeng Tan, Guanghong Duan
    Abstract:

    The two-photon Microfabrication method, which has been developed over several years, is a new way to produce the real three-dimension microstructure. And now, this technology is recognized as a promising process for the creation of nano- and microscale devices. However, there are still important issues to be settled, one of them is the radial superresolution. The radial superresolution diffraction theory is introduced in the two-photon Microfabrication system. This method can improve the radial superresolution of the two-photon Microfabrication system. The theoretical analysis of the photosensitive resin is discussed based on the exciting power and concentration of free-radical theory. Experiment results of the two-photon Microfabrication method verify the method and show that it can provide weight into the Microfabrication system.

  • Axial superresolution of two-photon Microfabrication
    Applied optics, 2007
    Co-Authors: P. Wei, O. F. Tan, Yu Zhu, Guanghong Duan
    Abstract:

    An axial superresolution diffraction theory is developed in a two-photon Microfabrication system. This method can improve the axial superresolution of the two-photon Microfabrication system. A theoretical analysis of the photosensitive resin is discussed based on the exciting power and the concentration of free radical theory. Simulated results of the two-photon Microfabrication verify the method and show that it can provide insight into the Microfabrication system.

  • Discussion on the Radial Superresolution of the Two-Photon Microfabrication
    Key Engineering Materials, 2007
    Co-Authors: P. Wei, Yu Zhu, Guanghong Duan, Q.f. Tan, G.h. Gao
    Abstract:

    In order to improve the radial superresolution of the two-photon Microfabrication, the superresolution diffraction theory was introduced in detail. The theoretical analysis of the photosensitive resist based on the exciting power and concentration of free radical was given.. And the superresolution diffractive optical element was applied in the two-photon Microfabrication system. Simulation results indicated that the radial superresolution of the two-photon Microfabrication can be improved with the superresolution diffractive optical element.

  • Research of the new optical diffractive super-resolution element of the two-photon Microfabrication
    Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis Measurement Theory Photo-Electronic Technology and Artificial, 2006
    Co-Authors: P. Wei, Yu Zhu, Guanghong Duan
    Abstract:

    The new optical diffractive superresolution element (DSE) is being applied to improve the Microfabrication radial superresolution in the two-photon three-dimension (3D) Microfabrication system, which appeared only a few years ago and can provide the ability to confine photochemical and physical reactions to the order of laser wavelength in three dimensions. The design method of the DSE is that minimizing M if the lowest limit S l of the S and the highest limit G u of the G is set, where Liu [1] explained the definition of the S, M and G. Simulation test result proved that the Microfabrication radial superresolution can be improved by the new optical DSE. The phenomenon can only be interpreted as the intensity of high-order and side of the zero-order diffraction peaks have been clapped under the twophoton absorption (TPA) polymerization threshold. In a word the polymerized volume can be chosen because the S l and the G u is correspondingly adjustable, even if the laser wavelength, objective lens and the photosensitive resin is fixed for a given two-photon Microfabrication system. That means the radial superresolution of the two-photon Microfabrication can be chosen.

Sanghu Park - One of the best experts on this subject based on the ideXlab platform.

  • advances in 3d nano Microfabrication using two photon initiated polymerization
    Progress in Polymer Science, 2008
    Co-Authors: Kwangsup Lee, Ran Hee Kim, Dongyol Yang, Sanghu Park
    Abstract:

    Abstract In recent years considerable efforts have been put forth in two-photon initiated polymerization (TPP)-based two- and three-dimensional (2D and 3D) nano/Microfabrication for the development of novel nano/microdevices. In less than two decades of research, TPP has been employed in the fabrication of a great number of diverse micro-objects through the use of a wide variety of effective two-photon absorbing chromophores. In TPP, when a near-infrared ultrashort-pulsed laser is closely focused into a volume of photocurable resins, real 3D microstructures can be fabricated using a layer-by-layer accumulating technique making it a promising technique for 3D nano/Microfabrication. More recently, a spatial resolution of sub-100 nm scale was achieved with TPP by employing a radical quenching mechanism. There also have been many studies that aimed at improving the fabrication efficiency and precision of TPP. Focus of ongoing research is the development of efficient two-photon absorbing chromophores. In this article, we discuss recent efforts in developing two-photon absorbing chromophores with focus on their structure property relationship and some recent outstanding attempts at improving the fabrication efficiency of 3D nano/Microfabrications based on TPP.

Shoji Maruo - One of the best experts on this subject based on the ideXlab platform.