The Experts below are selected from a list of 234 Experts worldwide ranked by ideXlab platform

Randolph K. Belter - One of the best experts on this subject based on the ideXlab platform.

John H Holloway - One of the best experts on this subject based on the ideXlab platform.

Yoshinori Hara - One of the best experts on this subject based on the ideXlab platform.

  • growth of znse thin films by metalorganic chemical vapor deposition using Nitrogen Trifluoride
    Applied Surface Science, 1997
    Co-Authors: Y Noda, Tetsuya Ishikawa, Mitsuharu Yamabe, Yoshinori Hara
    Abstract:

    The radical-assisted metalorganic chemical vapor deposition (MOCVD) of ZnSe films on GaAs (100) was performed at 723 K under atmospheric pressure by using rf-heated horizontal reactor. Diethylzinc (DEZn) and diethylselenide (DESe) as source materials were carried by H 2 gas, where the [VI]/[II] ratio was kept at 1. Nitrogen Trifluoride (NF 3 ) was used as co-reactant. With an increase of NF 3 flux, the growth rate was drastically enhanced, which might be due to dealkylation by chain reactions between DESe and NF 3 . Photoluminescence of the ZnSe films measured for the films grown with small NF 3 flux indicated the donor-acceptor (D-A) pair emission. The Hall coefficient measured using Au Ohmic contacts indicated the hole concentration in the order of magnitude of 10 22 m -3 . The results suggest that the Nitrogen atoms from NF 3 might be incorporated into the grown films as acceptors.

Wentien Tsai - One of the best experts on this subject based on the ideXlab platform.

  • environmental and health risk analysis of Nitrogen Trifluoride nf3 a toxic and potent greenhouse gas
    Journal of Hazardous Materials, 2008
    Co-Authors: Wentien Tsai
    Abstract:

    Abstract This article aimed at the introduction of Nitrogen Trifluoride (NF3) and its decomposition products into its hazards to the environment and health because this perfluorocompound is a toxic and potent greenhouse gas not blanketed into the Kyoto Protocol. This paper also predicted the global NF3 emissions from the electronics industry on the basis of the methodologies recommended by the Intergovernmental Panel on Climate Change (IPCC), and further discussed its atmospheric implications according to the estimation of environmental fate for NF3. It showed that the vaporization of NF3 from the water bodies to the atmosphere is very high according to its predicted value (ca. 6.0 × 105 MPa) of Henry's law constant (KH). Furthermore, NF3 emitted from the electronics industry around the world in 2006 was estimated to be between 3.6 and 56 metric tonnes and it will be on increasing trend in the near future. Although the accumulative amount of NF3 in the atmosphere currently should be very negligible based on the predicted ratio (the order of 10−6 to 10−7) of equivalent CO2 emission from NF3 to total equivalent CO2 emissions from potent greenhouse gases, it is necessary to adopt the available abatement and also monitor the concentration of NF3 in the workplaces for reducing the overall environmental and health impacts of various semiconductor processes.

  • Environmental and health risk analysis of Nitrogen Trifluoride (NF(3)), a toxic and potent greenhouse gas.
    Journal of hazardous materials, 2008
    Co-Authors: Wentien Tsai
    Abstract:

    This article aimed at the introduction of Nitrogen Trifluoride (NF(3)) and its decomposition products into its hazards to the environment and health because this perfluorocompound is a toxic and potent greenhouse gas not blanketed into the Kyoto Protocol. This paper also predicted the global NF(3) emissions from the electronics industry on the basis of the methodologies recommended by the Intergovernmental Panel on Climate Change (IPCC), and further discussed its atmospheric implications according to the estimation of environmental fate for NF(3). It showed that the vaporization of NF(3) from the water bodies to the atmosphere is very high according to its predicted value (ca. 6.0 x 10(5)MPa) of Henry's law constant (K(H)). Furthermore, NF(3) emitted from the electronics industry around the world in 2006 was estimated to be between 3.6 and 56 metric tonnes and it will be on increasing trend in the near future. Although the accumulative amount of NF(3) in the atmosphere currently should be very negligible based on the predicted ratio (the order of 10(-6) to 10(-7)) of equivalent CO(2) emission from NF(3) to total equivalent CO(2) emissions from potent greenhouse gases, it is necessary to adopt the available abatement and also monitor the concentration of NF(3) in the workplaces for reducing the overall environmental and health impacts of various semiconductor processes.

Eric R Waclawik - One of the best experts on this subject based on the ideXlab platform.