The Experts below are selected from a list of 321 Experts worldwide ranked by ideXlab platform
Ohhun Kwon - One of the best experts on this subject based on the ideXlab platform.
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Evaluation of Hazardous Chemicals with Material Safety Data Sheet and By-products of a Photoresist Used in the Semiconductor-Manufacturing Industry
Elsevier, 2019Co-Authors: Miyeon Jang, Chungsik Yoon, Jihoon Park, Ohhun KwonAbstract:Background: The photolithography process in the semiconductor industry uses various chemicals with little information on their constitution. This study aimed to identify the chemical constituents of photoresist (PR) products and their by-products and to compare these constituents with material Safety Data Sheets (MSDSs) and analytical results. Methods: A total of 51 PRs with 48 MSDSs were collected. Analysis consisted of two parts: First, the constituents of the chemical products were identified and analyzed using MSDS Data; second, for verification of the by-products of PR, volatile organic compounds were analyzed. The chemical constituents were categorized according to hazards. Results: Forty-five of 48 products contained trade secrets in amounts ranging from 1 to 65%. A total of 238 ingredients with multiple counting (35 ingredients without multiple counting) were identified in the MSDS Data, and 48.7% of ingredients were labeled as trade secrets under the Korea Occupational Safety and Health Act. The concordance rate between the MSDS Data and the analytical result was 41.7%. The by-product analysis identified 129 chemicals classified according to Chemical Abstracts Service No., with 17 chemicals that are carcinogenic, mutagenic, and reprotoxic substances. Formaldehyde was found to be released from 12 of 21 products that use novolak resin. Conclusion: We confirmed that several PRs contain carcinogens, and some were not specified in the toxicological information in the MSDS. Hazardous chemicals, including benzene and formaldehyde, are released from PRs products as by-products. Therefore, it is necessary to establish a systematic management system for chemical compounds and the working environment. Keywords: By-product, Material Safety Data Sheet, Photoresist, Semiconductor, Trade secre
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Evaluation of Hazardous Chemicals with Material Safety Data Sheet and By-products of a Photoresist Used in the Semiconductor-Manufacturing Industry.
Safety and Health at Work, 2019Co-Authors: Miyeon Jang, Chungsik Yoon, Jihoon Park, Ohhun KwonAbstract:Abstract Background The photolithography process in the semiconductor industry uses various chemicals with little information on their constitution. This study aimed to identify the chemical constituents of photoresist (PR) products and their by-products and to compare these constituents with material Safety Data Sheets (MSDSs) and analytical results. Methods A total of 51 PRs with 48 MSDSs were collected. Analysis consisted of two parts: First, the constituents of the chemical products were identified and analyzed using MSDS Data; second, for verification of the by-products of PR, volatile organic compounds were analyzed. The chemical constituents were categorized according to hazards. Results Forty-five of 48 products contained trade secrets in amounts ranging from 1 to 65%. A total of 238 ingredients with multiple counting (35 ingredients without multiple counting) were identified in the MSDS Data, and 48.7% of ingredients were labeled as trade secrets under the Korea Occupational Safety and Health Act. The concordance rate between the MSDS Data and the analytical result was 41.7%. The by-product analysis identified 129 chemicals classified according to Chemical Abstracts Service No., with 17 chemicals that are carcinogenic, mutagenic, and reprotoxic substances. Formaldehyde was found to be released from 12 of 21 products that use novolak resin. Conclusion We confirmed that several PRs contain carcinogens, and some were not specified in the toxicological information in the MSDS. Hazardous chemicals, including benzene and formaldehyde, are released from PRs products as by-products. Therefore, it is necessary to establish a systematic management system for chemical compounds and the working environment.
Miyeon Jang - One of the best experts on this subject based on the ideXlab platform.
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Evaluation of Hazardous Chemicals with Material Safety Data Sheet and By-products of a Photoresist Used in the Semiconductor-Manufacturing Industry
Elsevier, 2019Co-Authors: Miyeon Jang, Chungsik Yoon, Jihoon Park, Ohhun KwonAbstract:Background: The photolithography process in the semiconductor industry uses various chemicals with little information on their constitution. This study aimed to identify the chemical constituents of photoresist (PR) products and their by-products and to compare these constituents with material Safety Data Sheets (MSDSs) and analytical results. Methods: A total of 51 PRs with 48 MSDSs were collected. Analysis consisted of two parts: First, the constituents of the chemical products were identified and analyzed using MSDS Data; second, for verification of the by-products of PR, volatile organic compounds were analyzed. The chemical constituents were categorized according to hazards. Results: Forty-five of 48 products contained trade secrets in amounts ranging from 1 to 65%. A total of 238 ingredients with multiple counting (35 ingredients without multiple counting) were identified in the MSDS Data, and 48.7% of ingredients were labeled as trade secrets under the Korea Occupational Safety and Health Act. The concordance rate between the MSDS Data and the analytical result was 41.7%. The by-product analysis identified 129 chemicals classified according to Chemical Abstracts Service No., with 17 chemicals that are carcinogenic, mutagenic, and reprotoxic substances. Formaldehyde was found to be released from 12 of 21 products that use novolak resin. Conclusion: We confirmed that several PRs contain carcinogens, and some were not specified in the toxicological information in the MSDS. Hazardous chemicals, including benzene and formaldehyde, are released from PRs products as by-products. Therefore, it is necessary to establish a systematic management system for chemical compounds and the working environment. Keywords: By-product, Material Safety Data Sheet, Photoresist, Semiconductor, Trade secre
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Evaluation of Hazardous Chemicals with Material Safety Data Sheet and By-products of a Photoresist Used in the Semiconductor-Manufacturing Industry.
Safety and Health at Work, 2019Co-Authors: Miyeon Jang, Chungsik Yoon, Jihoon Park, Ohhun KwonAbstract:Abstract Background The photolithography process in the semiconductor industry uses various chemicals with little information on their constitution. This study aimed to identify the chemical constituents of photoresist (PR) products and their by-products and to compare these constituents with material Safety Data Sheets (MSDSs) and analytical results. Methods A total of 51 PRs with 48 MSDSs were collected. Analysis consisted of two parts: First, the constituents of the chemical products were identified and analyzed using MSDS Data; second, for verification of the by-products of PR, volatile organic compounds were analyzed. The chemical constituents were categorized according to hazards. Results Forty-five of 48 products contained trade secrets in amounts ranging from 1 to 65%. A total of 238 ingredients with multiple counting (35 ingredients without multiple counting) were identified in the MSDS Data, and 48.7% of ingredients were labeled as trade secrets under the Korea Occupational Safety and Health Act. The concordance rate between the MSDS Data and the analytical result was 41.7%. The by-product analysis identified 129 chemicals classified according to Chemical Abstracts Service No., with 17 chemicals that are carcinogenic, mutagenic, and reprotoxic substances. Formaldehyde was found to be released from 12 of 21 products that use novolak resin. Conclusion We confirmed that several PRs contain carcinogens, and some were not specified in the toxicological information in the MSDS. Hazardous chemicals, including benzene and formaldehyde, are released from PRs products as by-products. Therefore, it is necessary to establish a systematic management system for chemical compounds and the working environment.
Michelle K Kutz - One of the best experts on this subject based on the ideXlab platform.
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exposure to crystalline silica in abrasive blasting operations where silica and non silica abrasives are used
Annals of Occupational Hygiene, 2014Co-Authors: Diane Radnoff, Michelle K KutzAbstract:: Exposure to respirable crystalline silica is a hazard common to many industries in Alberta but particularly so in abrasive blasting. Alberta occupational health and Safety legislation requires the consideration of silica substitutes when conducting abrasive blasting, where reasonably practicable. In this study, exposure to crystalline silica during abrasive blasting was evaluated when both silica and non-silica products were used. The crystalline silica content of non-silica abrasives was also measured. The facilities evaluated were preparing metal products for the application of coatings, so the substrate should not have had a significant contribution to worker exposure to crystalline silica. The occupational sampling results indicate that two-thirds of the workers assessed were potentially over-exposed to respirable crystalline silica. About one-third of the measurements over the exposure limit were at the work sites using silica substitutes at the time of the assessment. The use of the silica substitute, by itself, did not appear to have a large effect on the mean airborne exposure levels. There are a number of factors that may contribute to over-exposures, including the isolation of the blasting area, housekeeping, and inappropriate use of respiratory protective equipment. However, the non-silica abrasives themselves also contain silica. Bulk analysis results for non-silica abrasives commercially available in Alberta indicate that many contain crystalline silica above the legislated disclosure limit of 0.1% weight of silica per weight of product (w/w) and this information may not be accurately disclosed on the material Safety Data Sheet for the product. The employer may still have to evaluate the potential for exposure to crystalline silica at their work site, even when silica substitutes are used. Limited tests on recycled non-silica abrasive indicated that the silica content had increased. Further study is required to evaluate the impact of product recycling on crystalline silica content for non-silica abrasives. Measurement of blaster exposure was challenging in this study as the blasters evaluated conducted this task intermittently throughout the work shift, frequently removing their blasting helmets. In spite of the challenges in accurately measuring blaster exposure, the measurements were still, for the most part, over the 8-h OEL. Further work is required to develop more effective sampling strategies to evaluate blaster exposure over the full work shift when task-based monitoring is not practical.
Ponisseril Somasundaran - One of the best experts on this subject based on the ideXlab platform.
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Greenness index evaluation of fracking chemicals using SDS (Safety Data Sheet) information
Journal of Environmental Chemical Engineering, 2019Co-Authors: Yang Shen, Ponisseril SomasundaranAbstract:Abstract The fracking industry faces various challenges although technologies have been advanced in the hydraulic fracturing and horizontal drilling. Treatment for the water used after the fracking process is one of the key issues preventing hydraulic fracturing from being widely implemented. Especially the chemicals that are used for various purposes during fracking remain in the water that flows back to the surface. Reports have been seen that the problematic chemicals used in the fracking process cause HSE (Health, Safety and Environment) issues. Before any chemical used in the fracking is eliminated or replaced with alternatives, its greenness should be evaluated. A tool called Greenness Index was used in this study to evaluate several typical chemicals used in the current fracking process. SDS (Safety Data Sheet) information was used by Greenness Index to assess the chemicals. It was found that with similar amount of SDS information available, citric acid is relatively greener than ammonium persulfate. SDS information of guar gum is less than that of citric acid and ammonium persulfate, but the evaluation for guar gum still indicates that it is a green chemical based on the limited Data from its SDS. When more information with respect to how they behave during the fracking process is available, Greenness Index can provide more comprehensive evaluations.
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Development of Greenness Index as an evaluation tool to assess reagents: Evaluation based on SDS (Safety Data Sheet) information
Minerals Engineering, 2016Co-Authors: Yang Shen, D.r. Nagaraj, Raymond Farinato, Amy Essenfeld, Ponisseril SomasundaranAbstract:Abstract Evaluation of the impacts of reagents on SHE (Safety, health, and the environment) is crucial for industries, regulatory agencies, and governments; however, it is a nontrivial task and there has not been universal acceptance of metrics or tools for this purpose. We have been developing an evaluation tool called Greenness Index to provide a holistic assessment of reagents used in various industries. Analysis by means of this tool is based on information found in reagent SDSs (Safety Data Sheets) plus metrics for various consequences when the reagent is used in a particular application. SDSs contain information on the various properties of a reagent and how it impacts SHE from cradle to grave; however, these summaries rarely consider the multifarious possibilities of how the reagent may transform during use in an application. Including such features in a more complete evaluation of the SHE impact of a reagent is the ultimate goal of our efforts to develop Greenness Index. Efforts reported here are in the preliminary step of representing the panoply of SHE information found in SDSs in a manner that allows a more holistic, multi-parametric comparison of reagents. Five clusters (Health Impact, General Properties, Odor, Fire Safety, and Stability) of attributes that are combined to form a total evaluation were created based on widely accepted sustainability guidelines such as the Green Chemistry 12 Principles and Green Engineering 12 Principles. Sorting and binning algorithms were developed to quantify each attribute and cluster of attributes, resulting in quantitative scores for each. Scores are displayed graphically to help visualize the relative Greenness of the reagent. Displays are in the form of a hierarchy of spider-diagrams. This Greenness Index method has been applied in a variety of instances to specific reagents used in various industries such as mineral processing and personal care. Greenness Index analysis of PAX (Potassium Amyl Xanthate), commonly used as a flotation reagent in mineral processing, is described here as an example. Results from such an analysis can be incorporated into a decision making process that facilitates the selection of greener reagents and provides valuable insights to improve and develop sustainable practices.
Jihoon Park - One of the best experts on this subject based on the ideXlab platform.
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Evaluation of Hazardous Chemicals with Material Safety Data Sheet and By-products of a Photoresist Used in the Semiconductor-Manufacturing Industry
Elsevier, 2019Co-Authors: Miyeon Jang, Chungsik Yoon, Jihoon Park, Ohhun KwonAbstract:Background: The photolithography process in the semiconductor industry uses various chemicals with little information on their constitution. This study aimed to identify the chemical constituents of photoresist (PR) products and their by-products and to compare these constituents with material Safety Data Sheets (MSDSs) and analytical results. Methods: A total of 51 PRs with 48 MSDSs were collected. Analysis consisted of two parts: First, the constituents of the chemical products were identified and analyzed using MSDS Data; second, for verification of the by-products of PR, volatile organic compounds were analyzed. The chemical constituents were categorized according to hazards. Results: Forty-five of 48 products contained trade secrets in amounts ranging from 1 to 65%. A total of 238 ingredients with multiple counting (35 ingredients without multiple counting) were identified in the MSDS Data, and 48.7% of ingredients were labeled as trade secrets under the Korea Occupational Safety and Health Act. The concordance rate between the MSDS Data and the analytical result was 41.7%. The by-product analysis identified 129 chemicals classified according to Chemical Abstracts Service No., with 17 chemicals that are carcinogenic, mutagenic, and reprotoxic substances. Formaldehyde was found to be released from 12 of 21 products that use novolak resin. Conclusion: We confirmed that several PRs contain carcinogens, and some were not specified in the toxicological information in the MSDS. Hazardous chemicals, including benzene and formaldehyde, are released from PRs products as by-products. Therefore, it is necessary to establish a systematic management system for chemical compounds and the working environment. Keywords: By-product, Material Safety Data Sheet, Photoresist, Semiconductor, Trade secre
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Evaluation of Hazardous Chemicals with Material Safety Data Sheet and By-products of a Photoresist Used in the Semiconductor-Manufacturing Industry.
Safety and Health at Work, 2019Co-Authors: Miyeon Jang, Chungsik Yoon, Jihoon Park, Ohhun KwonAbstract:Abstract Background The photolithography process in the semiconductor industry uses various chemicals with little information on their constitution. This study aimed to identify the chemical constituents of photoresist (PR) products and their by-products and to compare these constituents with material Safety Data Sheets (MSDSs) and analytical results. Methods A total of 51 PRs with 48 MSDSs were collected. Analysis consisted of two parts: First, the constituents of the chemical products were identified and analyzed using MSDS Data; second, for verification of the by-products of PR, volatile organic compounds were analyzed. The chemical constituents were categorized according to hazards. Results Forty-five of 48 products contained trade secrets in amounts ranging from 1 to 65%. A total of 238 ingredients with multiple counting (35 ingredients without multiple counting) were identified in the MSDS Data, and 48.7% of ingredients were labeled as trade secrets under the Korea Occupational Safety and Health Act. The concordance rate between the MSDS Data and the analytical result was 41.7%. The by-product analysis identified 129 chemicals classified according to Chemical Abstracts Service No., with 17 chemicals that are carcinogenic, mutagenic, and reprotoxic substances. Formaldehyde was found to be released from 12 of 21 products that use novolak resin. Conclusion We confirmed that several PRs contain carcinogens, and some were not specified in the toxicological information in the MSDS. Hazardous chemicals, including benzene and formaldehyde, are released from PRs products as by-products. Therefore, it is necessary to establish a systematic management system for chemical compounds and the working environment.
