Scanning Electron Microscope

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Yu. A. Novikov - One of the best experts on this subject based on the ideXlab platform.

  • A virtual Scanning Electron Microscope. 4. Simulator-based implementation
    Russian Microelectronics, 2014
    Co-Authors: Yu. A. Novikov
    Abstract:

    A virtual Scanning Electron Microscope (VSEM), which is based on a simulator of information, obtained on a real Scanning Electron Microscope (SEM), is described. A semiempirical generation model of images in a SEM, operating in the low-voltage mode and high-voltage mode during recording backscattered and secondary slow Electrons, forms the basis of a virtual SEM. A method of comparing real and virtual images is proposed. Examples of operation of the virtual SEM are given for elements of structures which are located both far from the edges of the structure and near these edges.

  • Resolution of a Scanning Electron Microscope: 1. Current State of the Problem
    Journal of Surface Investigation. X-ray Synchrotron and Neutron Techniques, 2013
    Co-Authors: Yu. A. Novikov
    Abstract:

    Known methods for determining the resolution of a Scanning Electron Microscope are discussed. It is shown that none of them can unambiguously characterize the Scanning Electron Microscope.

  • Virtual Scanning Electron Microscope
    International Conference Micro- and Nano-Electronics 2012, 2013
    Co-Authors: Yu. V. Larionov, Yu. A. Novikov
    Abstract:

    Application of virtual instruments to a process of measurements of geometrical characteristics of investigated objects is considered. Methods of construction of virtual instruments on a base of imitators and simulators are discussed. It is demonstrated, that a virtual Scanning Electron Microscope (SEM) can be constructed only on the base of simulator. Examples of work of the virtual SEM in a low-voltage mode and in modes of registration of back scattered Electrons (BSE) and slow secondary of Electrons (SSE) are given.

  • Effective probe for Scanning Electron Microscope
    International Conference Micro- and Nano-Electronics 2012, 2013
    Co-Authors: Yu. V. Larionov, Yu. A. Novikov
    Abstract:

    Traditional insight of effective probe of Scanning Electron Microscope (SEM) is considered. A contradiction of this insight with experimental results registered at Scanning of test objects with the trapezoidal profile and large slope angles by SEM probe is detected. A new insight of effective probe based on analyzes of the experimental results registered by SEM working in a back scattered Electron (BSE) mode is proposed.

  • Measurements of scan nonlinearity in a Scanning Electron Microscope
    Journal of Surface Investigation. X-ray Synchrotron and Neutron Techniques, 2013
    Co-Authors: Yu. A. Novikov
    Abstract:

    A method for measuring the scan nonlinearity of a Scanning Electron Microscope is discussed. This method is tested using a mass-produced Microscope and demonstrates good results.

Y. Tselentis - One of the best experts on this subject based on the ideXlab platform.

  • Studies onEchinococcus granulosus using the Scanning Electron Microscope
    Parasitology Research, 1993
    Co-Authors: Maria Antoniou, Y. Tselentis
    Abstract:

    The development of the protoscoleces of Echinococcus granulosus was studied after chemical stimulation, which mimics that offered by the final host. This stimulation resulted in some morphological changes in the parasite and to its evagination. These changes prepare the parasite to infect the intestine of its final host. The external morphology of the protoscolex body and of the germinal layer of the cyst and brood capsule were studied using the Scanning Electron Microscope (SEM). Findings were related to other studies using the tranmission Electron Microscope (TEM). The morphology of the flame cell is described and four cases of teratogenesis are reported.

Yu. V. Larionov - One of the best experts on this subject based on the ideXlab platform.

  • Virtual Scanning Electron Microscope
    International Conference Micro- and Nano-Electronics 2012, 2013
    Co-Authors: Yu. V. Larionov, Yu. A. Novikov
    Abstract:

    Application of virtual instruments to a process of measurements of geometrical characteristics of investigated objects is considered. Methods of construction of virtual instruments on a base of imitators and simulators are discussed. It is demonstrated, that a virtual Scanning Electron Microscope (SEM) can be constructed only on the base of simulator. Examples of work of the virtual SEM in a low-voltage mode and in modes of registration of back scattered Electrons (BSE) and slow secondary of Electrons (SSE) are given.

  • Effective probe for Scanning Electron Microscope
    International Conference Micro- and Nano-Electronics 2012, 2013
    Co-Authors: Yu. V. Larionov, Yu. A. Novikov
    Abstract:

    Traditional insight of effective probe of Scanning Electron Microscope (SEM) is considered. A contradiction of this insight with experimental results registered at Scanning of test objects with the trapezoidal profile and large slope angles by SEM probe is detected. A new insight of effective probe based on analyzes of the experimental results registered by SEM working in a back scattered Electron (BSE) mode is proposed.

Yan Huan-fang - One of the best experts on this subject based on the ideXlab platform.

Eric Marchand - One of the best experts on this subject based on the ideXlab platform.

  • Closed-Loop Autofocus Scheme for Scanning Electron Microscope
    2015
    Co-Authors: Le Cui, Eric Marchand, Naresh Marturi, Sounkalo Dembélé, Nadine Piat
    Abstract:

    In this paper, we present a full scale autofocus approach for Scanning Electron Microscope (SEM). The optimal focus (in-focus) position of the Microscope is achieved by maximizing the image sharpness using a vision-based closed-loop control scheme. An iterative optimization algorithm has been designed using the sharpness score derived from image gradient information. The proposed method has been implemented and validated using a tungsten gun SEM at various experimental conditions like varying raster scan speed, magnification at real-time. We demonstrate that the proposed autofocus technique is accurate, robust and fast.

  • Scanning Electron Microscope Calibration Using a Multi-Image Non-Linear Minimization Process
    International Journal of Optomechatronics, 2015
    Co-Authors: Le Cui, Eric Marchand
    Abstract:

    A Scanning Electron Microscope (SEM) calibrating approach based on non-linear minimization procedure is presented in this article 1. Both the intrinsic parameters and the extrinsic parameters estimations are achieved simultaneously by minimizing the registration error. The proposed approach considers multi-images of a multi-scale calibration pattern view from different positions and orientations. Since the projection geometry of the Scanning Electron Microscope is different from that of a classical optical sensor, the perspective projection model and the parallel projection model are considered and compared with distortion models.