The Experts below are selected from a list of 69228 Experts worldwide ranked by ideXlab platform

Wolfgang Nitsche - One of the best experts on this subject based on the ideXlab platform.

  • aeromems wall hot wire anemometer on polyimide foil for measurement of high frequency fluctuations
    IEEE Sensors, 2005
    Co-Authors: U. Buder, Andanton Berns, R. Petz, Ernst Obermeier, Wolfgang Nitsche
    Abstract:

    Design, Simulation, Manufacturing, calibration, and basic characterization of a MEMS wall hot-wire anemometer is presented. A highly sensitive nickel thin film resistor spanning a reactive ion etched cavity in a polyimide foil is employed. This sensor is the first in literature to feature both a thermally insulating cavity and a flexible base material. The polyimide base material allows adopting of the sensor to aerodynamic surfaces, e.g. airfoils and turbine blades. A mismatch of curvature of aerodynamic surface and silicon sensor surface, as observed with previously presented MEMS hot-wire anemometers, is avoided. The combination of polyimide's low thermal conductivity and a cavity featuring FEM-optimized dimensions accounts for a very low power consumption (<30 mW). Fluctuations in wall shear stress up to 80 kHz can be resolved in constant-temperature mode. An average sensitivity of 0.44 V/(N/m2) is achieved in a wall shear stress range from 0 to 0.25 N/m2

  • AeroMEMS wall hot-wire anemometer on polyimide foil for measurement of high frequency fluctuations
    SENSORS 2005 IEEE, 2005
    Co-Authors: U. Buder, Andanton Berns, R. Petz, Ernst Obermeier, Wolfgang Nitsche
    Abstract:

    Design, Simulation, Manufacturing, calibration, and basic characterization of a MEMS wall hot-wire anemometer is presented. A highly sensitive nickel thin film resistor spanning a reactive ion etched cavity in a polyimide foil is employed. This sensor is the first in literature to feature both a thermally insulating cavity and a flexible base material. The polyimide base material allows adopting of the sensor to aerodynamic surfaces, e.g. airfoils and turbine blades. A mismatch of curvature of aerodynamic surface and silicon sensor surface, as observed with previously presented MEMS hot-wire anemometers, is avoided. The combination of polyimide's low thermal conductivity and a cavity featuring FEM-optimized dimensions accounts for a very low power consumption (

U. Buder - One of the best experts on this subject based on the ideXlab platform.

  • aeromems wall hot wire anemometer on polyimide foil for measurement of high frequency fluctuations
    IEEE Sensors, 2005
    Co-Authors: U. Buder, Andanton Berns, R. Petz, Ernst Obermeier, Wolfgang Nitsche
    Abstract:

    Design, Simulation, Manufacturing, calibration, and basic characterization of a MEMS wall hot-wire anemometer is presented. A highly sensitive nickel thin film resistor spanning a reactive ion etched cavity in a polyimide foil is employed. This sensor is the first in literature to feature both a thermally insulating cavity and a flexible base material. The polyimide base material allows adopting of the sensor to aerodynamic surfaces, e.g. airfoils and turbine blades. A mismatch of curvature of aerodynamic surface and silicon sensor surface, as observed with previously presented MEMS hot-wire anemometers, is avoided. The combination of polyimide's low thermal conductivity and a cavity featuring FEM-optimized dimensions accounts for a very low power consumption (<30 mW). Fluctuations in wall shear stress up to 80 kHz can be resolved in constant-temperature mode. An average sensitivity of 0.44 V/(N/m2) is achieved in a wall shear stress range from 0 to 0.25 N/m2

  • AeroMEMS wall hot-wire anemometer on polyimide foil for measurement of high frequency fluctuations
    SENSORS 2005 IEEE, 2005
    Co-Authors: U. Buder, Andanton Berns, R. Petz, Ernst Obermeier, Wolfgang Nitsche
    Abstract:

    Design, Simulation, Manufacturing, calibration, and basic characterization of a MEMS wall hot-wire anemometer is presented. A highly sensitive nickel thin film resistor spanning a reactive ion etched cavity in a polyimide foil is employed. This sensor is the first in literature to feature both a thermally insulating cavity and a flexible base material. The polyimide base material allows adopting of the sensor to aerodynamic surfaces, e.g. airfoils and turbine blades. A mismatch of curvature of aerodynamic surface and silicon sensor surface, as observed with previously presented MEMS hot-wire anemometers, is avoided. The combination of polyimide's low thermal conductivity and a cavity featuring FEM-optimized dimensions accounts for a very low power consumption (

Guibing Du - One of the best experts on this subject based on the ideXlab platform.

  • Micromachined array microjet for inhalation drug therapy
    The 13th International Conference on Solid-State Sensors Actuators and Microsystems 2005. Digest of Technical Papers. TRANSDUCERS '05., 2005
    Co-Authors: Zhaoying Zhou, Yanying Feng, Guibing Du
    Abstract:

    This paper presents a novel array microjet for inhalation drug therapy (IDT). Compared with other atomizing devices, the MEMS based array microjets have smaller droplet size and a more narrow size distribution. The microjet adopts the piezoelectric transducer as the actuator. The vibration of the piezoelectric transducer generates a pressure wave in the liquid chamber, and the liquid is squeezed out of the array nozzles by the pressure to form droplets. This paper presents the design, Simulation, Manufacturing and experiment results of the microjet.

  • Micromachined array microjet for inhalation drug therapy
    The 13th International Conference on Solid-State Sensors Actuators and Microsystems 2005. Digest of Technical Papers. TRANSDUCERS '05., 2005
    Co-Authors: Zhaoying Zhou, Yanying Feng, Guibing Du
    Abstract:

    This paper presents a novel array microjet for inhalation drug therapy (IDT). Compared with other atomizing devices, the MEMS based array microjets have smaller droplet size and a more narrow size distribution. The microjet adopts the piezoelectric transducer as the actuator. The vibration of the piezoelectric transducer generates a pressure wave in the liquid chamber, and the liquid is squeezed out of the array nozzles by the pressure to form droplets. This paper presents the design, Simulation, Manufacturing and experiment results of the microjet.

Ernst Obermeier - One of the best experts on this subject based on the ideXlab platform.

  • aeromems wall hot wire anemometer on polyimide foil for measurement of high frequency fluctuations
    IEEE Sensors, 2005
    Co-Authors: U. Buder, Andanton Berns, R. Petz, Ernst Obermeier, Wolfgang Nitsche
    Abstract:

    Design, Simulation, Manufacturing, calibration, and basic characterization of a MEMS wall hot-wire anemometer is presented. A highly sensitive nickel thin film resistor spanning a reactive ion etched cavity in a polyimide foil is employed. This sensor is the first in literature to feature both a thermally insulating cavity and a flexible base material. The polyimide base material allows adopting of the sensor to aerodynamic surfaces, e.g. airfoils and turbine blades. A mismatch of curvature of aerodynamic surface and silicon sensor surface, as observed with previously presented MEMS hot-wire anemometers, is avoided. The combination of polyimide's low thermal conductivity and a cavity featuring FEM-optimized dimensions accounts for a very low power consumption (<30 mW). Fluctuations in wall shear stress up to 80 kHz can be resolved in constant-temperature mode. An average sensitivity of 0.44 V/(N/m2) is achieved in a wall shear stress range from 0 to 0.25 N/m2

  • AeroMEMS wall hot-wire anemometer on polyimide foil for measurement of high frequency fluctuations
    SENSORS 2005 IEEE, 2005
    Co-Authors: U. Buder, Andanton Berns, R. Petz, Ernst Obermeier, Wolfgang Nitsche
    Abstract:

    Design, Simulation, Manufacturing, calibration, and basic characterization of a MEMS wall hot-wire anemometer is presented. A highly sensitive nickel thin film resistor spanning a reactive ion etched cavity in a polyimide foil is employed. This sensor is the first in literature to feature both a thermally insulating cavity and a flexible base material. The polyimide base material allows adopting of the sensor to aerodynamic surfaces, e.g. airfoils and turbine blades. A mismatch of curvature of aerodynamic surface and silicon sensor surface, as observed with previously presented MEMS hot-wire anemometers, is avoided. The combination of polyimide's low thermal conductivity and a cavity featuring FEM-optimized dimensions accounts for a very low power consumption (

Andanton Berns - One of the best experts on this subject based on the ideXlab platform.

  • aeromems wall hot wire anemometer on polyimide foil for measurement of high frequency fluctuations
    IEEE Sensors, 2005
    Co-Authors: U. Buder, Andanton Berns, R. Petz, Ernst Obermeier, Wolfgang Nitsche
    Abstract:

    Design, Simulation, Manufacturing, calibration, and basic characterization of a MEMS wall hot-wire anemometer is presented. A highly sensitive nickel thin film resistor spanning a reactive ion etched cavity in a polyimide foil is employed. This sensor is the first in literature to feature both a thermally insulating cavity and a flexible base material. The polyimide base material allows adopting of the sensor to aerodynamic surfaces, e.g. airfoils and turbine blades. A mismatch of curvature of aerodynamic surface and silicon sensor surface, as observed with previously presented MEMS hot-wire anemometers, is avoided. The combination of polyimide's low thermal conductivity and a cavity featuring FEM-optimized dimensions accounts for a very low power consumption (<30 mW). Fluctuations in wall shear stress up to 80 kHz can be resolved in constant-temperature mode. An average sensitivity of 0.44 V/(N/m2) is achieved in a wall shear stress range from 0 to 0.25 N/m2

  • AeroMEMS wall hot-wire anemometer on polyimide foil for measurement of high frequency fluctuations
    SENSORS 2005 IEEE, 2005
    Co-Authors: U. Buder, Andanton Berns, R. Petz, Ernst Obermeier, Wolfgang Nitsche
    Abstract:

    Design, Simulation, Manufacturing, calibration, and basic characterization of a MEMS wall hot-wire anemometer is presented. A highly sensitive nickel thin film resistor spanning a reactive ion etched cavity in a polyimide foil is employed. This sensor is the first in literature to feature both a thermally insulating cavity and a flexible base material. The polyimide base material allows adopting of the sensor to aerodynamic surfaces, e.g. airfoils and turbine blades. A mismatch of curvature of aerodynamic surface and silicon sensor surface, as observed with previously presented MEMS hot-wire anemometers, is avoided. The combination of polyimide's low thermal conductivity and a cavity featuring FEM-optimized dimensions accounts for a very low power consumption (