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Jun Ishimoto - One of the best experts on this subject based on the ideXlab platform.
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Integrated Experimental and Numerical Study of Thermomechanical Resist Removal-Cleaning Performance Using Cryogenic Micro-Solid Nitrogen Spray
ECS Transactions, 2019Co-Authors: Jun Ishimoto, Daisuke Tan, Tomohiro Kubota, Seiji SamukawaAbstract:The fundamental characteristics of the resist removalcleaning system using cryogenic micro-Solid Nitrogen spray flow were investigated by a new type of integrated measurement and numerical technique. The present system utilizes the micro-Solid Nitrogen (SN2) which consists of the fine Solid Nitrogen particle produced by the high-speed collision of subcooled liquid Nitrogen and the cryogenic gaseous helium (cryogen). According to present study, the effect of ultra-high heat flux cooling on the resist removal performance due to the rapid thermal contraction of resist material is experimentally and numerically clarified in detail. Furthermore, the effect of ultrasonic atomization of micro-Solid Nitrogen on ultraclean performance of the wafer is newly founded. The application of cryogenic micro-Solid Nitrogen (SN2)
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Ultra-high heat flux cooling characteristics of cryogenic micro-Solid Nitrogen particles and its application to semiconductor wafer cleaning technology
2014Co-Authors: Jun Ishimoto, Tomoki Koike, Zhao Guanghan, Naoya OchiaiAbstract:The ultra-high heat flux cooling characteristics and impingement behavior of cryogenic micro-Solid Nitrogen (SN2) particles in relation to a heated wafer substrate were investigated for application to next generation semiconductor wafer cleaning technology. The fundamental characteristics of cooling heat transfer and photoresist removal-cleaning performance using micro-Solid Nitrogen particulate spray impinging on a heated substrate were numerically investigated and experimentally measured by a new type of integrated computational-experimental technique. This study contributes not only advanced cryogenic cooling technology for high thermal emission devices, but also to the field of nano device engineering including the semiconductor wafer cleaning technology.
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Photoresist Removal-Cleaning Technology Using Cryogenic Micro-Solid Nitrogen Spray
ECS Journal of Solid State Science and Technology, 2013Co-Authors: Jun Ishimoto, U. Oh, Tomoki Koike, Naoya OchiaiAbstract:The fundamental characteristics of a thermomechanical resist removal-cleaning system using cryogenic micro-nano Solid Nitrogen spray flow was investigated using a new type of integrated measurement coupled numerical technique. The effect of ultra-high heat flux cooling on the resist removal performance due to the thermal contraction of resist material was clarified. It was numerically predicted that resist removal performance could be improved by the scraping effect of impinging micro-Solid Nitrogen particle with plastic deformation in the narrow region between the resist. Furthermore, it was numerically and experimentally found that the hybrid interactive effects of fluid mechanical force by impingement of micro-Solid particles and the thermomechanical effect due to
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Ultra-Cooling Heat Transfer Characteristics Using Cryogenic Micro-Solid Nitrogen Spray
Volume 2: Heat Transfer Enhancement for Practical Applications; Fire and Combustion; Multi-Phase Systems; Heat Transfer in Electronic Equipment; Low T, 2012Co-Authors: Jun Ishimoto, Naoki Harada, Daisuke TanAbstract:The fundamental characteristics of heat transfer and cooling performance of micro-Solid Nitrogen particulate spray impinging on a heated substrate were numerically investigated and experimentally measured by a new type of integrated computational-experimental technique. The employed CFD based on the Euler-Lagrange model is focused on the cryogenic spray behavior of atomized particulate micro-Solid Nitrogen and also on its ultra-high heat flux cooling characteristics. Based on the numerically predicted performance, a new type of cryogenic spray cooling technique for application to a ultra-high heat power density device was developed. In the present integrated computation, it is clarified that the cryogenic micro-Solid spray cooling characteristics are affected by several factors of the heat transfer process of micro-Solid spray which impinges on heated surface as well as by atomization behavior of micro-Solid particles.Copyright © 2012 by ASME
Naoya Ochiai - One of the best experts on this subject based on the ideXlab platform.
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Ultra-high heat flux cooling characteristics of cryogenic micro-Solid Nitrogen particles and its application to semiconductor wafer cleaning technology
2014Co-Authors: Jun Ishimoto, Tomoki Koike, Zhao Guanghan, Naoya OchiaiAbstract:The ultra-high heat flux cooling characteristics and impingement behavior of cryogenic micro-Solid Nitrogen (SN2) particles in relation to a heated wafer substrate were investigated for application to next generation semiconductor wafer cleaning technology. The fundamental characteristics of cooling heat transfer and photoresist removal-cleaning performance using micro-Solid Nitrogen particulate spray impinging on a heated substrate were numerically investigated and experimentally measured by a new type of integrated computational-experimental technique. This study contributes not only advanced cryogenic cooling technology for high thermal emission devices, but also to the field of nano device engineering including the semiconductor wafer cleaning technology.
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Photoresist Removal-Cleaning Technology Using Cryogenic Micro-Solid Nitrogen Spray
ECS Journal of Solid State Science and Technology, 2013Co-Authors: Jun Ishimoto, U. Oh, Tomoki Koike, Naoya OchiaiAbstract:The fundamental characteristics of a thermomechanical resist removal-cleaning system using cryogenic micro-nano Solid Nitrogen spray flow was investigated using a new type of integrated measurement coupled numerical technique. The effect of ultra-high heat flux cooling on the resist removal performance due to the thermal contraction of resist material was clarified. It was numerically predicted that resist removal performance could be improved by the scraping effect of impinging micro-Solid Nitrogen particle with plastic deformation in the narrow region between the resist. Furthermore, it was numerically and experimentally found that the hybrid interactive effects of fluid mechanical force by impingement of micro-Solid particles and the thermomechanical effect due to
A. Yabe - One of the best experts on this subject based on the ideXlab platform.
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Laser ablation of Solid-Nitrogen film by UV ps-laser irradiation
Technical Digest. CLEO Pacific Rim 2001. 4th Pacific Rim Conference on Lasers and Electro-Optics (Cat. No.01TH8557), 2001Co-Authors: H. Niino, T. Sato, A. Narazaki, A. YabeAbstract:Photo-dissociation and laser ablation of Solid Nitrogen film at 10 K was carried out upon irradiation with a picosecond UV laser. The mechanism of these processes was discussed on the basis of multiphoton absorption of Nitrogen.
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Laser ablation of Solid Nitrogen films at a cryogenic temperature
Laser Applications in Microelectronic and Optoelectronic Manufacturing VI, 2001Co-Authors: H. Niino, T. Sato, A. YabeAbstract:Photo-dissociation and laser ablation of Solid Nitrogen film at 10 K was carried out upon irradiation with a picosecond UV laser (FHG of Nd:YLF laser; 263 nm, 8 ps, 10 Hz) in vacuum. The optical emission lines, attributed to molecular and atomic Nitrogen of the film, were monitored by a time-resolved spectroscopic technique. The mechanism of these processes was discussed on the basis of multi-photon absorption of molecular Nitrogen.© (2001) COPYRIGHT SPIE--The International Society for Optical Engineering. Downloading of the abstract is permitted for personal use only.
Mike Tomsic - One of the best experts on this subject based on the ideXlab platform.
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Evaluation of a Solid Nitrogen impregnated MgB2 racetrack coil
Superconductor Science and Technology, 2018Co-Authors: Dipak Patel, Wenbin Qiu, Mislav Mustapić, Jonathan C Knott, Daniel Gajda, Mohammed Shahabuddin, Seyong Choi, Mike TomsicAbstract:To develop powerful wind turbine generators using superconducting technology, high-performance superconducting racetrack coils are essential. Herein, we report an evaluation of a multifilamentary magnesium diboride (MgB2) conductor-based racetrack coil cooled and impregnated simultaneously by Solid Nitrogen (SN2). The coil was wound on a copper former with 13 mm winding width, an inner diameter of 124 mm at the curvature, and 130 mm length of the straight section. An in situ processed S-glass-insulated 36-filament MgB2 wire was wound on the former in two layers with 19.5 turns, and heat treated via the wind and react method without any epoxy resin. The coil was evaluated for critical temperature and transport critical current in the SN2 environment at different temperatures up to 31.3 K in self-field. The coil was able to carry 200 A transport current at 28.8 K in self-field. During coil charging and operation, SN2 effectively acted as an impregnation material. The test results demonstrate the viability to use MgB2 racetrack coil potentially with SN2 impregnation in advanced rotating machine applications.
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evaluation of persistent mode operation in a superconducting mgb2 coil in Solid Nitrogen
Superconductor Science and Technology, 2016Co-Authors: Dipakkumar Patel, Mohammed Shahabuddin, Seyong Choi, Shahriar A Hossain, Hiroki Kobayashi, Jonggi Hong, Jin Yong Park, Minoru Maeda, M Rindfleisch, Mike TomsicAbstract:We report the fabrication of a magnesium diboride (MgB2) coil and evaluate its persistent-mode operation in a system cooled by a cryocooler with Solid Nitrogen (SN2) as a cooling medium. The main purpose of SN2 was to increase enthalpy of the cold mass. For this work, an in situ processed carbon-doped MgB2 wire was used. The coil was wound on a stainless steel former in a single layer (22 turns), with an inner diameter of 109 mm and height of 20 mm without any insulation. The two ends of the coil were then joined to make a persistent-current switch to obtain the persistent-current mode. After a heat treatment, the whole coil was installed in the SN2 chamber. During operation, the resultant total circuit resistance was estimated to be <7.4 × 10−14 Ω at 19.5 K ± 1.5 K, which meets the technical requirement for magnetic resonance imaging application.
Hamit Yurtseven - One of the best experts on this subject based on the ideXlab platform.
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Calculation of the Raman frequency and linewidth of vibrons using anharmonic self energy model for the ε, δloc and δ phases in Solid Nitrogen
Optik, 2020Co-Authors: Ö. Akay, Hamit YurtsevenAbstract:Abstract Temperature dependences of the Raman frequency shifts and linewidths of vibrons ν1, ν2 and ν22 are calculated from the anharmonic self energy in the e, δloc (localized δ) and δ phases of Solid Nitrogen (P = 18.5 GPa). This is performed by fitting the expressions from the the anharmonic self energy to the experimental frequency and FWHM data for those vibrons from the literature. Our results show that the anharmonic self energy model can explain adequately the observed behavior of the Raman frequency and linewidth of the vibrons for the transitions of the e-δloc – δ in Solid Nitrogen. This method of analysis can also be applied to other some molecular Solids close to the phase transitions.
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CALCULATION OF THE RAMAN FREQUENCIES AT LOW PRESSURES AND TEMPERATURES (σ-PHASE) Solid Nitrogen
International Journal of Modern Physics B, 2013Co-Authors: Hamit Yurtseven, A. AslantaşAbstract:We calculate the Raman frequencies of the Eg mode and, the low and high frequency Tg mode as a function of temperature at a constant pressure of 2.85 kbar in the α-phase of Solid Nitrogen. The Raman frequencies of those lattice modes are calculated using the volume data from the literature at various temperatures (2.85 kbar) for the α-phase of Solid N2 through the mode Gruneisen parameter. Our predicted Raman frequencies can be compared with the experimental data and by this method the Raman frequencies can be calculated as a function of temperature at some other constant pressures.
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Analysis of the Raman Frequency Shifts for the Lattice Modes and Vibrons Related to the Thermodynamic Quantities in the η Phase of Solid Nitrogen
High Temperature Materials and Processes, 2013Co-Authors: Hamit Yurtseven, Ö. AkayAbstract:AbstractThe thermodynamic quantities of the isothermal compressibility, thermal expansion and the specific heat are calculated here as a function of pressure by using the observed Raman frequencies of the lattice modes and vibrons in the η phase of Solid Nitrogen. The Pippard relations and their spectroscopic modifications are constructed, and the slope dP/dT is deduced from the Raman frequency shifts in this phase of N2. It is shown that the thermodynamic quantities can be predicted from the Raman frequency shifts, in particular, in the η phase of Solid Nitrogen.
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THERMODYNAMIC QUANTITIES AT HIGH PRESSURES IN THE i AND θ PHASES OF Solid Nitrogen DEDUCED BY RAMAN FREQUENCY SHIFTS FOR THE INTERNAL MODES IN LITERATURE
International Journal of Modern Physics B, 2013Co-Authors: Hamit Yurtseven, S. SaritaşAbstract:The pressure dependence of the Raman frequencies of the internal modes is analyzed (T = 300 K) for the phases i and θ of Solid Nitrogen using the experimental data from the literature. Through the mode Gruneisen parameter, the isothermal compressibility κT, thermal expansion αp and the specific heat Cp–Cv are calculated as a function of pressure using the Raman data in these phases. We obtain that the αp varies linearly with the (1/υ)(∂υ/∂P)T and also that the Cp–Cv varies linearly with the αp for N2. Our results show that by means of the analysis given here, the αp, κT and Cp–Cv can be predicted from the Raman frequency shifts for the i and θ phases of Solid Nitrogen.
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ANALYSIS OF THE FREQUENCY SHIFT AND THE LINEWIDTH AS A FUNCTION OF TEMPERATURE IN Solid Nitrogen
International Journal of Modern Physics B, 2011Co-Authors: M. Kurt, Hamit YurtsevenAbstract:The temperature dependence of the frequency shift and the linewidth is studied using the expressions derived from the anharmonic self-energy. The functional form of the frequency shift is fitted in this study to the experimental data for the R1 fluorescence line of ruby sample as a function temperature at zero pressure, instead of using empirical ν–P and ν–T relations in the ruby fluorescence method as given in the literature, in particular, for the Solid Nitrogen. We also demonstrate in this study the temperature dependence of the Eg librational frequency and its linewidth by fitting the functional forms of both frequency shift and the linewidth to the experimental data for the α phase of Solid Nitrogen.