The Experts below are selected from a list of 15458154 Experts worldwide ranked by ideXlab platform
Don L Devoe - One of the best experts on this subject based on the ideXlab platform.
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Miniature Bulk PZT Traveling Wave Ultrasonic Motors for Low-Speed High-Torque Rotary Actuation
IEEE\ ASME Journal of Microelectromechanical Systems, 2018Co-Authors: Prakruthi Hareesh, Don L DevoeAbstract:Traveling wave ultrasonic micromotors fabricated from a single layer of homogeneous bulk piezoelectric lead zirconate titanate (PZT) are described. The miniature motors are capable of bi-directional rotary motion with controllable speeds. By taking advantage of transverse interdigitated electrodes to excite traveling waves in a patterned bulk PZT substrate, the monolithic micromotor Stators are patterned using a simple and low cost fabrication technique based on micropowder blasting. Performance of the ultrasonic micromotors is explored using devices with integrated glass rotors, using defined preload forces applied between the microfabricated Stator and rotor elements. For the case of a 4.12 mm diameter PZT Stator, a maximum speed of 30 rpm and stall torque of 501 mN $\cdot $ mm are achieved when applying a 323 mN preload force to the rotor. [2017-0257]
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integrated thin film piezoelectric traveling wave ultrasonic motors
Sensors and Actuators A-physical, 2012Co-Authors: Gabriel L Smith, Ryan Q Rudy, Ronald G Polcawich, Don L DevoeAbstract:Abstract An integrated approach to the fabrication of thin-film piezoelectric traveling wave ultrasonic motors at the mm-scale is being developed for low power, high torque motors for small scale robotics, biomedical, and sensing applications. This paper describes the realization of ultrasonic motor Stators ranging in diameter from 1 to 3 mm using wafer scale MEMS fabrication techniques with lead zirconate titanate (PZT) thin films. Using laser Doppler vibrometry (LDV), controlled traveling waves were demonstrated in the bulk silicon elastic medium of the Stator and the standing wave behavior was characterized for control purposes. Furthermore, the resonant modes of the fabricated Stators were modeled using finite element models, and experimental results agree well with this analysis.
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integrated thin film piezoelectric traveling wave ultrasonic motors
International Conference on Solid-State Sensors Actuators and Microsystems, 2011Co-Authors: Gabriel L Smith, Ryan Q Rudy, Don L Devoe, Ronald G PolcawichAbstract:An integrated approach to the fabrication of thin-film piezoelectric traveling wave ultrasonic motors (USMs) at the mm-scale is reported here for the first time. This paper describes the realization of ultrasonic motor Stators ranging in diameter from 1–3 mm using wafer scale MEMS fabrication techniques. Using laser Doppler vibrometry (LDV), we have demonstrated traveling waves in the bulk silicon elastic medium of the Stator. Furthermore, the resonant modes of the fabricated Stators have been modeled, and experimental results agree well with these simulations.
Ryan Q Rudy - One of the best experts on this subject based on the ideXlab platform.
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integrated thin film piezoelectric traveling wave ultrasonic motors
Sensors and Actuators A-physical, 2012Co-Authors: Gabriel L Smith, Ryan Q Rudy, Ronald G Polcawich, Don L DevoeAbstract:Abstract An integrated approach to the fabrication of thin-film piezoelectric traveling wave ultrasonic motors at the mm-scale is being developed for low power, high torque motors for small scale robotics, biomedical, and sensing applications. This paper describes the realization of ultrasonic motor Stators ranging in diameter from 1 to 3 mm using wafer scale MEMS fabrication techniques with lead zirconate titanate (PZT) thin films. Using laser Doppler vibrometry (LDV), controlled traveling waves were demonstrated in the bulk silicon elastic medium of the Stator and the standing wave behavior was characterized for control purposes. Furthermore, the resonant modes of the fabricated Stators were modeled using finite element models, and experimental results agree well with this analysis.
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integrated thin film piezoelectric traveling wave ultrasonic motors
International Conference on Solid-State Sensors Actuators and Microsystems, 2011Co-Authors: Gabriel L Smith, Ryan Q Rudy, Don L Devoe, Ronald G PolcawichAbstract:An integrated approach to the fabrication of thin-film piezoelectric traveling wave ultrasonic motors (USMs) at the mm-scale is reported here for the first time. This paper describes the realization of ultrasonic motor Stators ranging in diameter from 1–3 mm using wafer scale MEMS fabrication techniques. Using laser Doppler vibrometry (LDV), we have demonstrated traveling waves in the bulk silicon elastic medium of the Stator. Furthermore, the resonant modes of the fabricated Stators have been modeled, and experimental results agree well with these simulations.
Gabriel L Smith - One of the best experts on this subject based on the ideXlab platform.
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integrated thin film piezoelectric traveling wave ultrasonic motors
Sensors and Actuators A-physical, 2012Co-Authors: Gabriel L Smith, Ryan Q Rudy, Ronald G Polcawich, Don L DevoeAbstract:Abstract An integrated approach to the fabrication of thin-film piezoelectric traveling wave ultrasonic motors at the mm-scale is being developed for low power, high torque motors for small scale robotics, biomedical, and sensing applications. This paper describes the realization of ultrasonic motor Stators ranging in diameter from 1 to 3 mm using wafer scale MEMS fabrication techniques with lead zirconate titanate (PZT) thin films. Using laser Doppler vibrometry (LDV), controlled traveling waves were demonstrated in the bulk silicon elastic medium of the Stator and the standing wave behavior was characterized for control purposes. Furthermore, the resonant modes of the fabricated Stators were modeled using finite element models, and experimental results agree well with this analysis.
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integrated thin film piezoelectric traveling wave ultrasonic motors
International Conference on Solid-State Sensors Actuators and Microsystems, 2011Co-Authors: Gabriel L Smith, Ryan Q Rudy, Don L Devoe, Ronald G PolcawichAbstract:An integrated approach to the fabrication of thin-film piezoelectric traveling wave ultrasonic motors (USMs) at the mm-scale is reported here for the first time. This paper describes the realization of ultrasonic motor Stators ranging in diameter from 1–3 mm using wafer scale MEMS fabrication techniques. Using laser Doppler vibrometry (LDV), we have demonstrated traveling waves in the bulk silicon elastic medium of the Stator. Furthermore, the resonant modes of the fabricated Stators have been modeled, and experimental results agree well with these simulations.
Ronald G Polcawich - One of the best experts on this subject based on the ideXlab platform.
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integrated thin film piezoelectric traveling wave ultrasonic motors
Sensors and Actuators A-physical, 2012Co-Authors: Gabriel L Smith, Ryan Q Rudy, Ronald G Polcawich, Don L DevoeAbstract:Abstract An integrated approach to the fabrication of thin-film piezoelectric traveling wave ultrasonic motors at the mm-scale is being developed for low power, high torque motors for small scale robotics, biomedical, and sensing applications. This paper describes the realization of ultrasonic motor Stators ranging in diameter from 1 to 3 mm using wafer scale MEMS fabrication techniques with lead zirconate titanate (PZT) thin films. Using laser Doppler vibrometry (LDV), controlled traveling waves were demonstrated in the bulk silicon elastic medium of the Stator and the standing wave behavior was characterized for control purposes. Furthermore, the resonant modes of the fabricated Stators were modeled using finite element models, and experimental results agree well with this analysis.
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integrated thin film piezoelectric traveling wave ultrasonic motors
International Conference on Solid-State Sensors Actuators and Microsystems, 2011Co-Authors: Gabriel L Smith, Ryan Q Rudy, Don L Devoe, Ronald G PolcawichAbstract:An integrated approach to the fabrication of thin-film piezoelectric traveling wave ultrasonic motors (USMs) at the mm-scale is reported here for the first time. This paper describes the realization of ultrasonic motor Stators ranging in diameter from 1–3 mm using wafer scale MEMS fabrication techniques. Using laser Doppler vibrometry (LDV), we have demonstrated traveling waves in the bulk silicon elastic medium of the Stator. Furthermore, the resonant modes of the fabricated Stators have been modeled, and experimental results agree well with these simulations.
Jorg Wallaschek - One of the best experts on this subject based on the ideXlab platform.
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finite element models for the piezoelectric actuation in ultrasonic traveling wave motors
Journal of Intelligent Material Systems and Structures, 1996Co-Authors: J W Krome, Jorg WallaschekAbstract:By appropriate superposition of two standing waves, a traveling wave can be excited in the ring-shaped Stator of a traveling wave motor. Thus, the material points on the surface of the Stator perform an elliptical motion. A second disk, pressed against the Stator, is driven by frictional forces, generated in the interface between Stator and rotor. Traveling wave motors produce a very high torque at low rotational speed. Their simple mechanical design and good controllability make these motors a very promising alternative to small electromagnetic motors. The mechanical oscillations of high frequency are excited by piezoelectric ceramic actuators, bonded to the surface of the Stator. The dynamic behavior of the Stator is strongly influenced by these actuators. Since it is difficult to produce big ceramic rings and bond them to the Stators, single piezoelectric elements have to be used for the excitation of large Stators. The geometry of the ceramic actuators as well as the stiffness of the bonding layer do ...
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finite element models for the piezoelectric actuation in ultrasonic traveling wave motors
ICAST '95, 1996Co-Authors: J W Krome, Jorg WallaschekAbstract:By appropriate superposition of two standing waves, a traveling wave can be excited in the ring-shaped Stator of a traveling wave motor. Thus, the material points on the surface of the Stator perform an elliptical motion. A second disk, pressed against the Stator, is driven by frictional forces, generated in the interface between Stator and rotor. Traveling wave motors produce a very high torque at low rotational speed. Their simple mechanical design and good controllability make these motors a very promising alternative to small electro-magnetic motors. The mechanical oscillations of high frequency are excited by piezoelectric ceramic actuators, bonded to the surface of the Stator. The dynamic behavior of the Stator is strongly influenced by these actuators. Since it is difficult to produce big ceramic rings and bond them to the Stators, single piezoelectric elements have to be used for the excitation of large Stators. The geometry of the ceramic actuators as well as the stiffness of the bonding layer do have marked influence on the efficiency of the excitation, because the actuation mechanism is of induced strain type and the Stator is excited by tangential stresses in the bonding layer. In this paper, the influence of the shape of the ceramics on the vibration of the Stator is investigated using the finite element method. A detailed model taking into account the piezoelectric effect in the ceramic actuators as well as the exact geometry of the Stator is used to calculate the transfer function between the electrical excitation and the mechanical vibrations of the Stator. The results allow to compare the efficiency of different actuator configurations.
