The Experts below are selected from a list of 2436 Experts worldwide ranked by ideXlab platform
Kazuhiro Hane - One of the best experts on this subject based on the ideXlab platform.
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Nonlinear Rotational Spring withTension forStabilizing Electrostaticall y Driven Micromirror
2020Co-Authors: Kazuhiro HaneAbstract:stiffening ofthefixed-fixed beamcombining withthe Thinfilmtorsion barwithtension isintroduced inthe piston-only actuator [6,7]. micromirror realizing thelow-Voltage Driving. The We haveintroduced thetense thin filmtorsion barfor rotational spring ofthistorsion barshowsthelarge realizing low-Voltage Driving ofthemirror astheoriginal nonlinearity whichisobserved inthechangeofthe aim[8]. Thetension isincluded inthetorsion barofthe ringing frequency. Thecurveofthemirrorrotationsuspension spring, andfoundtowidenthestable region angleagainst theDriving Voltage becomesrather linear suppressing thepull-in instability. Asfarasweknow,the increasing thestableregion. The originof the strong nonlinearity isfirst observed intherotational spring nonlinearity isinvestigated. Thecombination between [9]. Inthisstudy, theeffect ofthisnonlinear spring is thetension andthevertical displacement ofthetorsion investigated. Comparing withtheexperimental results, the barisconsidered forexpressing theexperimental result. origin ofthenonlinearity andits magnitude arediscussed.
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Wireless Driving of micromirror using electromagnetic induction
2009 IEEE LEOS International Conference on Optical MEMS and Nanophotonics, 2009Co-Authors: M. Sasaki, Narimune Ohnishi, Shinya Kumagai, Kazuhiro HaneAbstract:The wireless Driving of the micromirror is investigated using the electromagnetic induction. Taking advantages of the low-Voltage Driving of the micromirror and the use of electrical and mechanical resonances, the mirror rotation angle of 0.6° at the separation gap of 24 mm is obtained being excited by 1 mT field at the relatively low Q conditions.
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Simultaneous Realization of Stabilized Temperature Characteristics and Low-Voltage Driving of a Micromirror Using the Thin-Film Torsion Bar of Tensile Poly-Si
IEEE Journal of Selected Topics in Quantum Electronics, 2009Co-Authors: M. Sasaki, Kazuhiro Hane, Masayuki Fujishima, Hideo MiuraAbstract:The tense thin-film torsion bar of polycrystalline (poly-) Si has been recently introduced into a micromirror. A tensile stress is obtained by the crystallization of amorphous Si. The poly-Si has almost the same coefficient of thermal expansion as that of Si substrate. An electrical connection is obtained with doping without the use of metal overlayer. The thin-film torsion bar of poly-Si is fabricated with a revised process so as to protect against the crystalline Si etching. Considering the earlier advantages and techniques, the stabilized temperature characteristics and the low-Voltage Driving are simultaneously realized.
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Stabilization of temperature characteristics of micromirror for low-Voltage Driving using thin film torsion bar of tensile poly-Si
2008 IEEE LEOS International Conference on Optical MEMs and Nanophotonics, 2008Co-Authors: M. Sasaki, Kazuhiro Hane, Masayuki Fujishima, Hideo MiuraAbstract:The micromirror with the tense thin film torsion bar can realize the low-Voltage Driving. The temperature characteristic is improved using polycrystalline (poly-) Si thin film taking advantage of the following features. The large tensile stress is obtained by the crystallization of amorphous (a-) Si film. The doping realizes the electrical connection. The poly-Si has the almost same coefficient of thermal expansion (CTE) with that of Si substrate.
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Nonlinear Rotational Spring with Tension for Stabilizing Electrostatically Driven Micromirror
2008 International Symposium on Micro-NanoMechatronics and Human Science, 2008Co-Authors: M. Sasaki, Shinya Kumagai, Kazuhiro HaneAbstract:Thin film torsion bar with tension is introduced in the micromirror realizing the low-Voltage Driving. The rotational spring of this torsion bar shows the large nonlinearity which is observed in the change of the ringing frequency. The curve of the mirror rotation angle against the Driving Voltage becomes rather linear increasing the stable region. The origin of the nonlinearity is investigated. The combination between the tension and the vertical displacement of the torsion bar is considered for expressing the experimental result.
M. Sasaki - One of the best experts on this subject based on the ideXlab platform.
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Wireless Driving of micromirror using electromagnetic induction
2009 IEEE LEOS International Conference on Optical MEMS and Nanophotonics, 2009Co-Authors: M. Sasaki, Narimune Ohnishi, Shinya Kumagai, Kazuhiro HaneAbstract:The wireless Driving of the micromirror is investigated using the electromagnetic induction. Taking advantages of the low-Voltage Driving of the micromirror and the use of electrical and mechanical resonances, the mirror rotation angle of 0.6° at the separation gap of 24 mm is obtained being excited by 1 mT field at the relatively low Q conditions.
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Simultaneous Realization of Stabilized Temperature Characteristics and Low-Voltage Driving of a Micromirror Using the Thin-Film Torsion Bar of Tensile Poly-Si
IEEE Journal of Selected Topics in Quantum Electronics, 2009Co-Authors: M. Sasaki, Kazuhiro Hane, Masayuki Fujishima, Hideo MiuraAbstract:The tense thin-film torsion bar of polycrystalline (poly-) Si has been recently introduced into a micromirror. A tensile stress is obtained by the crystallization of amorphous Si. The poly-Si has almost the same coefficient of thermal expansion as that of Si substrate. An electrical connection is obtained with doping without the use of metal overlayer. The thin-film torsion bar of poly-Si is fabricated with a revised process so as to protect against the crystalline Si etching. Considering the earlier advantages and techniques, the stabilized temperature characteristics and the low-Voltage Driving are simultaneously realized.
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Stabilization of temperature characteristics of micromirror for low-Voltage Driving using thin film torsion bar of tensile poly-Si
2008 IEEE LEOS International Conference on Optical MEMs and Nanophotonics, 2008Co-Authors: M. Sasaki, Kazuhiro Hane, Masayuki Fujishima, Hideo MiuraAbstract:The micromirror with the tense thin film torsion bar can realize the low-Voltage Driving. The temperature characteristic is improved using polycrystalline (poly-) Si thin film taking advantage of the following features. The large tensile stress is obtained by the crystallization of amorphous (a-) Si film. The doping realizes the electrical connection. The poly-Si has the almost same coefficient of thermal expansion (CTE) with that of Si substrate.
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Nonlinear Rotational Spring with Tension for Stabilizing Electrostatically Driven Micromirror
2008 International Symposium on Micro-NanoMechatronics and Human Science, 2008Co-Authors: M. Sasaki, Shinya Kumagai, Kazuhiro HaneAbstract:Thin film torsion bar with tension is introduced in the micromirror realizing the low-Voltage Driving. The rotational spring of this torsion bar shows the large nonlinearity which is observed in the change of the ringing frequency. The curve of the mirror rotation angle against the Driving Voltage becomes rather linear increasing the stable region. The origin of the nonlinearity is investigated. The combination between the tension and the vertical displacement of the torsion bar is considered for expressing the experimental result.
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Performance of Tense Thin-Film Torsion Bar for Large Rotation and Low-Voltage Driving of Micromirror
IEEE Journal of Selected Topics in Quantum Electronics, 2007Co-Authors: M. Sasaki, Shinya Yuki, Kazuhiro HaneAbstract:In this paper, a micromirror device is developed by realizing the large rotation with the low-Voltage Driving. The maximum rotation angles observed at 5 V are 8.6deg with hysteresis and 7deg with little hysteresis at the static condition. The thin-film torsion bars contribute to decrease in the torsional spring constant. The tension is included for maintaining the compliance in the rotation of the mirror and for increasing stiffness in other movements. The performance of the torsion bar is investigated. The observed hard-spring effect is significant and this can be explained by the combination of the tension and the vertical displacement of the torsion bar
Hideo Miura - One of the best experts on this subject based on the ideXlab platform.
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Simultaneous Realization of Stabilized Temperature Characteristics and Low-Voltage Driving of a Micromirror Using the Thin-Film Torsion Bar of Tensile Poly-Si
IEEE Journal of Selected Topics in Quantum Electronics, 2009Co-Authors: M. Sasaki, Kazuhiro Hane, Masayuki Fujishima, Hideo MiuraAbstract:The tense thin-film torsion bar of polycrystalline (poly-) Si has been recently introduced into a micromirror. A tensile stress is obtained by the crystallization of amorphous Si. The poly-Si has almost the same coefficient of thermal expansion as that of Si substrate. An electrical connection is obtained with doping without the use of metal overlayer. The thin-film torsion bar of poly-Si is fabricated with a revised process so as to protect against the crystalline Si etching. Considering the earlier advantages and techniques, the stabilized temperature characteristics and the low-Voltage Driving are simultaneously realized.
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Stabilization of temperature characteristics of micromirror for low-Voltage Driving using thin film torsion bar of tensile poly-Si
2008 IEEE LEOS International Conference on Optical MEMs and Nanophotonics, 2008Co-Authors: M. Sasaki, Kazuhiro Hane, Masayuki Fujishima, Hideo MiuraAbstract:The micromirror with the tense thin film torsion bar can realize the low-Voltage Driving. The temperature characteristic is improved using polycrystalline (poly-) Si thin film taking advantage of the following features. The large tensile stress is obtained by the crystallization of amorphous (a-) Si film. The doping realizes the electrical connection. The poly-Si has the almost same coefficient of thermal expansion (CTE) with that of Si substrate.
Shinya Yuki - One of the best experts on this subject based on the ideXlab platform.
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Performance of Tense Thin-Film Torsion Bar for Large Rotation and Low-Voltage Driving of Micromirror
IEEE Journal of Selected Topics in Quantum Electronics, 2007Co-Authors: M. Sasaki, Shinya Yuki, Kazuhiro HaneAbstract:In this paper, a micromirror device is developed by realizing the large rotation with the low-Voltage Driving. The maximum rotation angles observed at 5 V are 8.6deg with hysteresis and 7deg with little hysteresis at the static condition. The thin-film torsion bars contribute to decrease in the torsional spring constant. The tension is included for maintaining the compliance in the rotation of the mirror and for increasing stiffness in other movements. The performance of the torsion bar is investigated. The observed hard-spring effect is significant and this can be explained by the combination of the tension and the vertical displacement of the torsion bar
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Large-rotation and low-Voltage Driving of micromirror realized by tense thin-film torsion bar
IEEE Photonics Technology Letters, 2006Co-Authors: M. Sasaki, Shinya Yuki, Kazuhiro HaneAbstract:An electrostatically driven micromirror device using a thin-film torsion bar is proposed. The mirror rotation angle of 7.3deg at 5 V is demonstrated at the nonresonant condition. A bulk Si micromirror is suspended by SiN thin-film torsion bars. Inside the torsion bar, the tension having the magnitude larger than that of the Driving force is included. The torsion bar can have a compliance with the mirror rotation and the rigidity against the unwanted motions (e.g., vertical displacement or in-plane rotation)
Masayuki Fujishima - One of the best experts on this subject based on the ideXlab platform.
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Simultaneous Realization of Stabilized Temperature Characteristics and Low-Voltage Driving of a Micromirror Using the Thin-Film Torsion Bar of Tensile Poly-Si
IEEE Journal of Selected Topics in Quantum Electronics, 2009Co-Authors: M. Sasaki, Kazuhiro Hane, Masayuki Fujishima, Hideo MiuraAbstract:The tense thin-film torsion bar of polycrystalline (poly-) Si has been recently introduced into a micromirror. A tensile stress is obtained by the crystallization of amorphous Si. The poly-Si has almost the same coefficient of thermal expansion as that of Si substrate. An electrical connection is obtained with doping without the use of metal overlayer. The thin-film torsion bar of poly-Si is fabricated with a revised process so as to protect against the crystalline Si etching. Considering the earlier advantages and techniques, the stabilized temperature characteristics and the low-Voltage Driving are simultaneously realized.
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Stabilization of temperature characteristics of micromirror for low-Voltage Driving using thin film torsion bar of tensile poly-Si
2008 IEEE LEOS International Conference on Optical MEMs and Nanophotonics, 2008Co-Authors: M. Sasaki, Kazuhiro Hane, Masayuki Fujishima, Hideo MiuraAbstract:The micromirror with the tense thin film torsion bar can realize the low-Voltage Driving. The temperature characteristic is improved using polycrystalline (poly-) Si thin film taking advantage of the following features. The large tensile stress is obtained by the crystallization of amorphous (a-) Si film. The doping realizes the electrical connection. The poly-Si has the almost same coefficient of thermal expansion (CTE) with that of Si substrate.
