The Experts below are selected from a list of 198 Experts worldwide ranked by ideXlab platform
Mark M Somoza - One of the best experts on this subject based on the ideXlab platform.
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High-Power 365 nm UV LED Mercury Arc Lamp Replacement for Photochemistry and Chemical Photolithography
ACS Sustainable Chemistry and Engineering, 2017Co-Authors: Kathrin Hölz, Jory Lietard, Mark M SomozaAbstract:Ultraviolet light emitting diodes (UV LEDs) have become widespread in chemical reseArch as highly efficient light sources for photochemistry and photopolymerization. However, in more complex experimental setups requiring highly concentrated light and highly spatially resolved patterning of the light, high-pressure mercury Arc Lamps are still widely used because they emit intense UV light from a compact Arc volume that can be efficienlty coupled into optical systems. Advances in the deposition and p-type doping of galium nitride have recently permitted the manufacture of UV LEDs capable of replacing mercury Arc Lamps also in these applications. These UV LEDs exceed the spectral radiance of mercury Lamps even at the intense I-line at 365 nm. Here we present the successful exchange of a high-pressure mercury Arc Lamp for a new generation UV LED as a light source in photolithographic chemistry and its use in the fabrication of high-density DNA microarrays. We show that the improved light radiance and efficiency of these LEDs offers substantial practical, economic and ecological advantages, including faster synthesis, lower hardware costs, very long lifetime, a >85-fold reduction in electricity consumption and the elimination of mercury waste and contamination. KEYWORDS:
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High-Power 365 nm UV LED Mercury Arc Lamp Replacement for Photochemistry and Chemical Photolithography
ACS Sustainable Chemistry & Engineering, 2016Co-Authors: Kathrin Hölz, Jory Lietard, Mark M SomozaAbstract:Ultraviolet light emitting diodes (UV LEDs) have become widespread in chemical reseArch as highly efficient light sources for photochemistry and photopolymerization. However, in more complex experimental setups requiring highly concentrated light and highly spatially resolved patterning of the light, high-pressure mercury Arc Lamps are still widely used because they emit intense UV light from a compact Arc volume that can be efficiently coupled into optical systems. Advances in the deposition and p-type doping of gallium nitride have recently permitted the manufacture of UV LEDs capable of replacing mercury Arc Lamps also in these applications. These UV LEDs exceed the spectral radiance of mercury Lamps even at the intense I-line at 365 nm. Here we present the successful exchange of a high-pressure mercury Arc Lamp for a new generation UV LED as a light source in photolithographic chemistry and its use in the fabrication of high-density DNA microarrays. We show that the improved light radiance and efficie...
Peter Betz - One of the best experts on this subject based on the ideXlab platform.
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comparison of laser and mercury Arc Lamp for the detection of body fluids on different substrates
International Journal of Legal Medicine, 2008Co-Authors: S. Seidl, Ruth Hausmann, Peter BetzAbstract:The performance of two detection techniques for body fluids, the Spectra-Physics® Reveal™ portable forensic laser system and the mercury-Arc Lamp Lumatec Superlite 400, was evaluated with various biological stains on different substrates. Serial dilutions of neat, 1/10, 1/100 and 1/1,000 using fluid semen, saliva, urine and blood were applied on glazed tiles, glass, PVC, wood, metal, stone, formica, carpet and cotton. Apart from the fact that blood traces were not detectable with the laser, both light sources showed comparable results regarding their detection capability. Clear advantages of the Lumatec Superlite 400, however, are its lower size, weight, purchase costs and the possibility to operate this light source by battery.
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Comparison of laser and mercury-Arc Lamp for the detection of body fluids on different substrates
International Journal of Legal Medicine, 2008Co-Authors: S. Seidl, Ruth Hausmann, Peter BetzAbstract:The performance of two detection techniques for body fluids, the Spectra-Physics(R) Revealtrade mark portable forensic laser system and the mercury-Arc Lamp Lumatec Superlite 400, was evaluated with various biological stains on different substrates. Serial dilutions of neat, 1/10, 1/100 and 1/1,000 using fluid semen, saliva, urine and blood were applied on glazed tiles, glass, PVC, wood, metal, stone, formica, carpet and cotton. Apart from the fact that blood traces were not detectable with the laser, both light sources showed comparable results regarding their detection capability. Clear advantages of the Lumatec Superlite 400, however, are its lower size, weight, purchase costs and the possibility to operate this light source by battery.
Manabu Tanaka - One of the best experts on this subject based on the ideXlab platform.
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investigation of the influence of buoyancy on gas convection of a horizontal xenon short Arc Lamp through 3d numerical simulation
Journal of Physics D, 2020Co-Authors: Shiro Maenaka, Shinichi Tashiro, Anthony B Murphy, K Fujita, Manabu TanakaAbstract:When operating a xenon short Arc Lamp, tungsten (W) vapour that evaporates from the electrodes is transported by gas convection to blacken the inner bulb wall. Since this reduces the output light intensity and increases the risk of Lamp breakage, it is crucial to thoroughly understand the factors that govern gas convection to optimally control it to reduce blackening. Gas convection is complex, especially in horizontal Lamps, because it is strongly affected by buoyancy. This study used 3D numerical simulation to investigate buoyancy's influence on the gas convection of a horizontal xenon short Arc Lamp, which directly affects the blackening location. Gas convection, especially in the low flow velocity region, was strongly affected by the buoyancy, whose strength was mainly determined by the anode surface temperature. The gas convection in turn affected the bulb wall temperature and the W vapour transport and was reflected in the blackening location. This result indicates that the surface temperature of the anode, which was determined by the energy balance between the gas and anode, also affected the blackening location. Therefore, the emissivity of the anode surface was an important factor controlling the horizontal Lamp's gas convection.
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Influence of Electrode Energy Balance on Gas Convective Pattern of a High-Pressure Xenon Short Arc Lamp
Plasma Chemistry and Plasma Processing, 2020Co-Authors: Shiro Maenaka, Shinichi Tashiro, Anthony B Murphy, K Fujita, Manabu TanakaAbstract:The transport of tungsten vapour evaporated from the electrode surfaces of a high-pressure xenon short-Arc Lamp, which is dominated by the gas convection in the Lamp, determines the location and extent of the blackened area on the inner bulb wall. We have investigated factors affecting the vapour transport and other important phenomena related to the gas convection using a unified numerical model. The influence of the Lamp operating parameters and also the thermodynamic and transport properties of the gas is discussed. The predicted Lamp characteristics and phenomena agree well with experimental results. The gas velocity in the Lamp is strongly affected by the Lorentz force and the gas density, which respectively depend on the current and the filling pressure. The viscosity and density of the gas adjacent to the anode surface were found to depend on the anode energy balance and to affect the resistance of the gas flow, which in turn affects the separation point of the gas flow from the anode surface. This indicates that the anode surface temperature, which is determined by the energy balance between the gas and the anode, also affects the blackening location.
David Malcolm Camm - One of the best experts on this subject based on the ideXlab platform.
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Modeling of a Vortex Water-Wall Argon Arc Lamp for Rapid Thermal Annealing Applications
IEEE Transactions on Industry Applications, 2015Co-Authors: Harpreet Singh Grover, Francis Dawson, David Malcolm Camm, Yann Cressault, Markus LiebererAbstract:This paper describes a modeling approach for a vortex water-wall argon Arc Lamp that is amenable to implementation in real-time controller hardware. The net emission coefficient (NEC) method has been successfully applied for different current levels and can predict the electrical properties of the positive column to sufficient accuracy. The radiation efficiency as a function of the isothermal core temperature has been explained qualitatively, but the correction for radiation efficiency as a function of input power has been implemented as a lookup table using experimental data.
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IAS - Physics-based circuit model for a water-wall high temperature Arc Lamp using Finite Volume Method
2013 IEEE Industry Applications Society Annual Meeting, 2013Co-Authors: Amgad A. El-deib, Francis Dawson, David Malcolm CammAbstract:High-Temperature Arc Lamps are used for thermal processing of semiconductor wafers. A vortex water wall on the inner surface of the Lamp's enclosure is used to provide cooling for the glass. It has been experimentally observed that above certain levels of injected energy the Arc shows an unstable behaviour and is self-extinguished. In this paper, a physics-based model for the water-wall high-temperature Arc Lamp is derived and implemented in the form of an equivalent electrical circuit. The equivalent circuit is then coupled to the flash power supply equivalent circuit to validate the derived model against experimental voltage and current waveforms.
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Physics-based circuit model for a water-wall high temperature Arc Lamp using Finite Volume Method
2013 IEEE Industry Applications Society Annual Meeting, 2013Co-Authors: Amgad A. El-deib, Francis Dawson, David Malcolm CammAbstract:High-Temperature Arc Lamps are used for thermal processing of semiconductor wafers. A vortex water wall on the inner surface of the Lamp's enclosure is used to provide cooling for the glass. It has been experimentally observed that above certain levels of injected energy the Arc shows an unstable behaviour and is self-extinguished. In this paper, a physics-based model for the water-wall high-temperature Arc Lamp is derived and implemented in the form of an equivalent electrical circuit. The equivalent circuit is then coupled to the flash power supply equivalent circuit to validate the derived model against experimental voltage and current waveforms.
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Emissivity independent process control in a short wavelength Arc Lamp RTP chamber
MRS Proceedings, 1996Co-Authors: Marcel Edmond Lefrancois, David Malcolm Camm, Brendon James HicksonAbstract:Two dimensional temperature measurements of patterned wafers are presented. The measurements are made using a commercially available CCD camera operating at {lambda} = 900nm, yielding a spatial resolution of 1 pixel per mm{sup 2} and a relative accuracy of {+-}0.25 C. The emissivity is determined using a reflectivity measurement made possible by the unique properties of a short wavelength Arc Lamp RTP chamber. The use of this measurement system for closed loop control is discussed and the application to maintaining accurate time temperature profiles independent of emissivity is described.
Kathrin Hölz - One of the best experts on this subject based on the ideXlab platform.
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High-Power 365 nm UV LED Mercury Arc Lamp Replacement for Photochemistry and Chemical Photolithography
ACS Sustainable Chemistry and Engineering, 2017Co-Authors: Kathrin Hölz, Jory Lietard, Mark M SomozaAbstract:Ultraviolet light emitting diodes (UV LEDs) have become widespread in chemical reseArch as highly efficient light sources for photochemistry and photopolymerization. However, in more complex experimental setups requiring highly concentrated light and highly spatially resolved patterning of the light, high-pressure mercury Arc Lamps are still widely used because they emit intense UV light from a compact Arc volume that can be efficienlty coupled into optical systems. Advances in the deposition and p-type doping of galium nitride have recently permitted the manufacture of UV LEDs capable of replacing mercury Arc Lamps also in these applications. These UV LEDs exceed the spectral radiance of mercury Lamps even at the intense I-line at 365 nm. Here we present the successful exchange of a high-pressure mercury Arc Lamp for a new generation UV LED as a light source in photolithographic chemistry and its use in the fabrication of high-density DNA microarrays. We show that the improved light radiance and efficiency of these LEDs offers substantial practical, economic and ecological advantages, including faster synthesis, lower hardware costs, very long lifetime, a >85-fold reduction in electricity consumption and the elimination of mercury waste and contamination. KEYWORDS:
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High-Power 365 nm UV LED Mercury Arc Lamp Replacement for Photochemistry and Chemical Photolithography
ACS Sustainable Chemistry & Engineering, 2016Co-Authors: Kathrin Hölz, Jory Lietard, Mark M SomozaAbstract:Ultraviolet light emitting diodes (UV LEDs) have become widespread in chemical reseArch as highly efficient light sources for photochemistry and photopolymerization. However, in more complex experimental setups requiring highly concentrated light and highly spatially resolved patterning of the light, high-pressure mercury Arc Lamps are still widely used because they emit intense UV light from a compact Arc volume that can be efficiently coupled into optical systems. Advances in the deposition and p-type doping of gallium nitride have recently permitted the manufacture of UV LEDs capable of replacing mercury Arc Lamps also in these applications. These UV LEDs exceed the spectral radiance of mercury Lamps even at the intense I-line at 365 nm. Here we present the successful exchange of a high-pressure mercury Arc Lamp for a new generation UV LED as a light source in photolithographic chemistry and its use in the fabrication of high-density DNA microarrays. We show that the improved light radiance and efficie...
