The Experts below are selected from a list of 261 Experts worldwide ranked by ideXlab platform
Oleg Kostko - One of the best experts on this subject based on the ideXlab platform.
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characterization of secondary electron blur via determination of electron Attenuation Length
Extreme Ultraviolet (EUV) Lithography XII, 2021Co-Authors: Oleg Kostko, Terry R Mcafee, Patrick P NaulleauAbstract:The absorption of an EUV photon by a thin film resist leads to the emission of a photoelectron as well as several secondary electrons with low kinetic energy. The “universal curve”, used in X-ray photoelectron spectroscopy, indicates that the low kinetic energy electrons may travel tens to hundreds of nanometers before losing their kinetic energy via initiation of chemical reactions. The distance that the electrons are able to travel in the resist is directly related to the resultant “blur” of the aerial image. Thus, identifying how to measure and influence the distance traveled by the secondary electrons is extremely beneficial to the resist community. In this work, we utilize several model polymer materials to investigate the impact of specific chemistry groups on the secondary electron Attenuation Length (EAL) – the thickness of resist material required to reduce number of emitted secondary electrons to 1/e of initial. The EAL measures the distance the secondary electrons can travel in a resist film, which is directly related to the electron blur. Possibilities to gain additional information on electron penetration depth in resist films will also be discussed.
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determination of effective Attenuation Length of slow electrons in polymer films
Journal of Applied Physics, 2020Co-Authors: J H, Patrick P Naulleau, Musahid Ahmed, Oleg KostkoAbstract:Slow electrons (with energy below 10 eV) play an important role in nature and technology. For instance, they are believed to initiate solubility change in extreme ultraviolet resists. Depending on their mobility, such secondary electrons can lead to image blur and degradation of patterning resolution. Hence, it is important to characterize the transport of slow electrons by measuring parameters such as the effective Attenuation Length (EAL). We present a technique that allows for prompt characterization of EAL in polymer films. In this experiment, slow electrons are generated in a substrate upon absorption of x-ray photons. The Attenuation of electron flux by a polymer film is measured as a function of film thickness, allowing for the determination of EAL for slow electrons. We illustrate this method with poly(hydroxy styrene) and poly(methyl metacrylate) films. Furthermore, we propose an improvement for this technique that would enable the measurement of EAL as a function of electron kinetic energy.
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determination of secondary electron Attenuation Length to characterize electron blur conference presentation
Extreme Ultraviolet (EUV) Lithography XI, 2020Co-Authors: Oleg Kostko, Patrick P NaulleauAbstract:EUV photon absorption by a resist film leads to emission of a photoelectron and several low kinetic energy secondary electrons. The “universal curve”, used in X-ray photoelectron spectroscopy, suggests that the low kinetic energy electrons may travel tens to hundreds of nanometers in solids until they inelastically scatter. The fact that electrons travel long distances before they may initiate chemical reactions ultimately result in blur of the aerial image, reducing the contrast and subsequently resolution of the resist. In this work, we will present an experimental approach to determine secondary electron Attenuation Length (EAL) – the thickness of resist material required to reduce number of emitted secondary electrons to 1/e of initial. The EAL describes how far secondary electrons can travel in a resist film and is directly related to the electron blur. Possibilities to gain additional information on electron penetration depth in resist films will also be discussed.
J H - One of the best experts on this subject based on the ideXlab platform.
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determination of effective Attenuation Length of slow electrons in polymer films
Journal of Applied Physics, 2020Co-Authors: J H, Patrick P Naulleau, Musahid Ahmed, Oleg KostkoAbstract:Slow electrons (with energy below 10 eV) play an important role in nature and technology. For instance, they are believed to initiate solubility change in extreme ultraviolet resists. Depending on their mobility, such secondary electrons can lead to image blur and degradation of patterning resolution. Hence, it is important to characterize the transport of slow electrons by measuring parameters such as the effective Attenuation Length (EAL). We present a technique that allows for prompt characterization of EAL in polymer films. In this experiment, slow electrons are generated in a substrate upon absorption of x-ray photons. The Attenuation of electron flux by a polymer film is measured as a function of film thickness, allowing for the determination of EAL for slow electrons. We illustrate this method with poly(hydroxy styrene) and poly(methyl metacrylate) films. Furthermore, we propose an improvement for this technique that would enable the measurement of EAL as a function of electron kinetic energy.
Brian J. Landi - One of the best experts on this subject based on the ideXlab platform.
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coaxial cables with single wall carbon nanotube outer conductors exhibiting Attenuation Length within specification
Micro & Nano Letters, 2012Co-Authors: Paul Jarosz, Aalyia Shaukat, Thomas Mastrangelo, Christopher M. Schauerman, Cory D. Cress, Richard D. Ridgley, Brian J. LandiAbstract:In this Letter, high-purity, KAuBr4-treated single-wall carbon nanotube (SWCNT) materials are utilised as outer conductors in coaxial cables. The Attenuation/Length is within Mil-C-17 specification and nearly equivalent to traditional copper outer conductors up to 3 GHz. The improved transmission performance is attributed to higher conductivity and density of the SWCNT network which creates enhanced nanoscale coverage to improve screening. The weight/Length which can be achieved with SWCNT outer coaxial cables results in greater than 40% savings compared with conventional coaxial cables while maintaining a flexible cable design.
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Coaxial cables with single-wall carbon nanotube outer conductors exhibiting Attenuation/Length within specification
Micro & Nano Letters, 2012Co-Authors: Paul Jarosz, Aalyia Shaukat, Thomas Mastrangelo, Christopher M. Schauerman, Cory D. Cress, Richard D. Ridgley, Brian J. LandiAbstract:In this Letter, high-purity, KAuBr4-treated single-wall carbon nanotube (SWCNT) materials are utilised as outer conductors in coaxial cables. The Attenuation/Length is within Mil-C-17 specification and nearly equivalent to traditional copper outer conductors up to 3 GHz. The improved transmission performance is attributed to higher conductivity and density of the SWCNT network which creates enhanced nanoscale coverage to improve screening. The weight/Length which can be achieved with SWCNT outer coaxial cables results in greater than 40% savings compared with conventional coaxial cables while maintaining a flexible cable design.
Patrick P Naulleau - One of the best experts on this subject based on the ideXlab platform.
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characterization of secondary electron blur via determination of electron Attenuation Length
Extreme Ultraviolet (EUV) Lithography XII, 2021Co-Authors: Oleg Kostko, Terry R Mcafee, Patrick P NaulleauAbstract:The absorption of an EUV photon by a thin film resist leads to the emission of a photoelectron as well as several secondary electrons with low kinetic energy. The “universal curve”, used in X-ray photoelectron spectroscopy, indicates that the low kinetic energy electrons may travel tens to hundreds of nanometers before losing their kinetic energy via initiation of chemical reactions. The distance that the electrons are able to travel in the resist is directly related to the resultant “blur” of the aerial image. Thus, identifying how to measure and influence the distance traveled by the secondary electrons is extremely beneficial to the resist community. In this work, we utilize several model polymer materials to investigate the impact of specific chemistry groups on the secondary electron Attenuation Length (EAL) – the thickness of resist material required to reduce number of emitted secondary electrons to 1/e of initial. The EAL measures the distance the secondary electrons can travel in a resist film, which is directly related to the electron blur. Possibilities to gain additional information on electron penetration depth in resist films will also be discussed.
-
determination of effective Attenuation Length of slow electrons in polymer films
Journal of Applied Physics, 2020Co-Authors: J H, Patrick P Naulleau, Musahid Ahmed, Oleg KostkoAbstract:Slow electrons (with energy below 10 eV) play an important role in nature and technology. For instance, they are believed to initiate solubility change in extreme ultraviolet resists. Depending on their mobility, such secondary electrons can lead to image blur and degradation of patterning resolution. Hence, it is important to characterize the transport of slow electrons by measuring parameters such as the effective Attenuation Length (EAL). We present a technique that allows for prompt characterization of EAL in polymer films. In this experiment, slow electrons are generated in a substrate upon absorption of x-ray photons. The Attenuation of electron flux by a polymer film is measured as a function of film thickness, allowing for the determination of EAL for slow electrons. We illustrate this method with poly(hydroxy styrene) and poly(methyl metacrylate) films. Furthermore, we propose an improvement for this technique that would enable the measurement of EAL as a function of electron kinetic energy.
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determination of secondary electron Attenuation Length to characterize electron blur conference presentation
Extreme Ultraviolet (EUV) Lithography XI, 2020Co-Authors: Oleg Kostko, Patrick P NaulleauAbstract:EUV photon absorption by a resist film leads to emission of a photoelectron and several low kinetic energy secondary electrons. The “universal curve”, used in X-ray photoelectron spectroscopy, suggests that the low kinetic energy electrons may travel tens to hundreds of nanometers in solids until they inelastically scatter. The fact that electrons travel long distances before they may initiate chemical reactions ultimately result in blur of the aerial image, reducing the contrast and subsequently resolution of the resist. In this work, we will present an experimental approach to determine secondary electron Attenuation Length (EAL) – the thickness of resist material required to reduce number of emitted secondary electrons to 1/e of initial. The EAL describes how far secondary electrons can travel in a resist film and is directly related to the electron blur. Possibilities to gain additional information on electron penetration depth in resist films will also be discussed.
Paul Jarosz - One of the best experts on this subject based on the ideXlab platform.
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coaxial cables with single wall carbon nanotube outer conductors exhibiting Attenuation Length within specification
Micro & Nano Letters, 2012Co-Authors: Paul Jarosz, Aalyia Shaukat, Thomas Mastrangelo, Christopher M. Schauerman, Cory D. Cress, Richard D. Ridgley, Brian J. LandiAbstract:In this Letter, high-purity, KAuBr4-treated single-wall carbon nanotube (SWCNT) materials are utilised as outer conductors in coaxial cables. The Attenuation/Length is within Mil-C-17 specification and nearly equivalent to traditional copper outer conductors up to 3 GHz. The improved transmission performance is attributed to higher conductivity and density of the SWCNT network which creates enhanced nanoscale coverage to improve screening. The weight/Length which can be achieved with SWCNT outer coaxial cables results in greater than 40% savings compared with conventional coaxial cables while maintaining a flexible cable design.
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Coaxial cables with single-wall carbon nanotube outer conductors exhibiting Attenuation/Length within specification
Micro & Nano Letters, 2012Co-Authors: Paul Jarosz, Aalyia Shaukat, Thomas Mastrangelo, Christopher M. Schauerman, Cory D. Cress, Richard D. Ridgley, Brian J. LandiAbstract:In this Letter, high-purity, KAuBr4-treated single-wall carbon nanotube (SWCNT) materials are utilised as outer conductors in coaxial cables. The Attenuation/Length is within Mil-C-17 specification and nearly equivalent to traditional copper outer conductors up to 3 GHz. The improved transmission performance is attributed to higher conductivity and density of the SWCNT network which creates enhanced nanoscale coverage to improve screening. The weight/Length which can be achieved with SWCNT outer coaxial cables results in greater than 40% savings compared with conventional coaxial cables while maintaining a flexible cable design.
