Barrier Layer

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Clive A. Randall - One of the best experts on this subject based on the ideXlab platform.

  • Contrasting conduction mechanisms of two internal Barrier Layer capacitors: (Mn, Nb)-doped SrTiO3 and CaCu3Ti4O12
    Journal of Applied Physics, 2017
    Co-Authors: Kosuke Tsuji, Wei-ting Chen, Hanzheng Guo, Wen-hsi Lee, Sophie Guillemet, Clive A. Randall
    Abstract:

    The d.c. conduction is investigated in the two different types of internal Barrier Layer capacitors, namely, (Mn, Nb)-doped SrTiO3 (STO) and CaCu3Ti4O12 (CCTO). Scanning electron microscopy (SEM) and Capacitance - Voltage (C-V) analysis are performed to estimate the effective electric field at a grain boundary, EGB. Then, the d.c. conduction mechanism is discussed based on the J (Current density)-EGB characteristics. Three different conduction mechanisms are successively observed with the increase of EGB in both systems. In (Mn, Nb)-doped STO, non-linear J-EGB characteristics is temperature dependent at the intermediate EGB and becomes relatively insensitive to the temperature at the higher EGB. The J- EGB at each regime is explained by the Schottky emission (SE) followed by Fowler-Nordheim (F-N) tunneling. Based on the F-N tunneling, the breakdown voltage is then scaled by the function of the depletion Layer thickness and Schottky Barrier height at the average grain boundary. The proposed function shows a clear linear relationship with the breakdown. On the other hand, F-N tunneling was not observed in CCTO in our measurement. Ohmic, Poole-Frenkel (P-F), and SE are successively observed in CCTO. The transition point from P-F and SE depends on EGB and temperature. A charge-based deep level transient spectroscopy study reveals that 3 types of trap states exist in CCTO. The trap one with Et ∼ 0.65 eV below the conduction band is found to be responsible for the P-F conduction.

C P Mulligan - One of the best experts on this subject based on the ideXlab platform.

  • Control of lubricant transport by a CrN diffusion Barrier Layer during high-temperature sliding of a CrN-Ag composite coating
    2020
    Co-Authors: C P Mulligan, Thierry A Blanchet, D Gall
    Abstract:

    a b s t r a c t a r t i c l e i n f o Available online 4 August 2010 Keywords: CrN-Ag Nanocomposite coating Solid lubrication High-temperature materials Sliding wear Diffusion Barrier CrN-Ag composite coatings, 2 and 5 μm thick and containing 22 at.% Ag solid lubricant, were grown on Si(001) and 440C stainless steel substrates by reactive co-sputtering at T s = 500°C, and were covered with 200 nm thick pure CrN diffusion Barrier cap Layers. Annealing experiments at T a = 625°C, followed by quantitative scanning electron microscopy, energy dispersive x-ray spectroscopy, and Auger depth profile analyses indicate considerable Ag transport to the top surface for a Barrier Layer deposited at a substrate floating potential of −30 V, but negligible Ag diffusion when deposited with a substrate bias potential of −150 V. This is attributed to ion-irradiation induced densification which makes the cap Layer an effective diffusion Barrier. High temperature tribological sliding tests of this coating system against alumina balls at T t = 550°C indicate an initial friction coefficient μ = 0.43 ± 0.04 which decreases monotonically to 0.23 ± 0.03. This is attributed to the development of wear mediated openings in the Barrier Layer which allow Ag lubricant to diffuse to the sliding top surface. In contrast, pure CrN exhibits a constant μ = 0.41 ± 0.02 while CrN-Ag composite coatings without cap Layer show a low transient μ = 0.16 ± 0.03, attributed to Ag transport to the surface, that however increases to μ = 0.39 ± 0.04 after~6000 cycles as the Ag reservoir in the coating is depleted. That is, the dense CrN cap Layer reduces the Ag lubricant flow rate and therefore prolongs the time when the coating provides effective lubrication. This results in a cumulative wear rate over 10,000 cycles of 3.1 × 10 −6 mm 3 /Nm, which is 3.3 × lower than without diffusion Barrier Layer. Published by Elsevier B.V

  • control of lubricant transport by a crn diffusion Barrier Layer during high temperature sliding of a crn ag composite coating
    Surface & Coatings Technology, 2010
    Co-Authors: C P Mulligan, Thierry A Blanchet, D Gall
    Abstract:

    Abstract CrN–Ag composite coatings, 2 and 5 μm thick and containing 22 at.% Ag solid lubricant, were grown on Si(001) and 440C stainless steel substrates by reactive co-sputtering at T s  = 500 °C, and were covered with 200 nm thick pure CrN diffusion Barrier cap Layers. Annealing experiments at T a  = 625 °C, followed by quantitative scanning electron microscopy, energy dispersive x-ray spectroscopy, and Auger depth profile analyses indicate considerable Ag transport to the top surface for a Barrier Layer deposited at a substrate floating potential of −30 V, but negligible Ag diffusion when deposited with a substrate bias potential of −150 V. This is attributed to ion-irradiation induced densification which makes the cap Layer an effective diffusion Barrier. High temperature tribological sliding tests of this coating system against alumina balls at T t  = 550 °C indicate an initial friction coefficient μ = 0.43 ± 0.04 which decreases monotonically to 0.23 ± 0.03. This is attributed to the development of wear mediated openings in the Barrier Layer which allow Ag lubricant to diffuse to the sliding top surface. In contrast, pure CrN exhibits a constant μ = 0.41 ± 0.02 while CrN–Ag composite coatings without cap Layer show a low transient μ = 0.16 ± 0.03, attributed to Ag transport to the surface, that however increases to μ = 0.39 ± 0.04 after ~ 6000 cycles as the Ag reservoir in the coating is depleted. That is, the dense CrN cap Layer reduces the Ag lubricant flow rate and therefore prolongs the time when the coating provides effective lubrication. This results in a cumulative wear rate over 10,000 cycles of 3.1 × 10 −6  mm 3 /Nm, which is 3.3 × lower than without diffusion Barrier Layer.

Junichi Koike - One of the best experts on this subject based on the ideXlab platform.

  • formation of a manganese oxide Barrier Layer with thermal chemical vapor deposition for advanced large scale integrated interconnect structure
    Applied Physics Letters, 2008
    Co-Authors: Koji Neishi, Shiro Aki, Kenji Matsumoto, Hiroshi Sato, Hitoshi Itoh, Shigetoshi Hosaka, Junichi Koike
    Abstract:

    Advanced large-scale integrated interconnect structure faces a major challenge in forming a thin and conformal diffusion Barrier Layer. We deposited a Mn oxide Layer by thermal chemical vapor deposition (CVD) on SiO2 substrates and investigated deposition behavior and diffusion Barrier property. A thin Mn oxide Layer was formed with a uniform thickness of 2.6–10nm depending on deposition temperature between 100 and 400°C. Heat-treated samples of Cu/CVD-Mn oxide/SiO2 indicated no interdiffusion at 400°C for 100h. The CVD of the Mn oxide Layer was found to be an excellent Barrier formation process.

  • growth kinetics and thermal stability of a self formed Barrier Layer at cu mn sio2 interface
    Journal of Applied Physics, 2007
    Co-Authors: Junichi Koike, M Haneda, Jun Iijima, Y Otsuka, H Sako, Koji Neishi
    Abstract:

    A thin diffusion Barrier was self-formed by annealing at an interface between a Cu-Mn alloy film and a SiO2 substrate. The growth of the Barrier Layer followed a logarithmic rate law, which represents field-enhanced growth mechanism in the early stage and self-limiting growth behavior in the late stage. The Barrier Layer was stable at 450 °C for 100 h and at 600 °C for 10 h. The interface diffusivity was estimated from the morphology change of the Barrier Layer at 600 °C and was found to be smaller than the grain-boundary diffusivity of bulk Cu.

  • self forming diffusion Barrier Layer in cu mn alloy metallization
    Applied Physics Letters, 2005
    Co-Authors: Junichi Koike, M Wada
    Abstract:

    Advancement of semiconductor devices requires the realization of an ultrathin diffusion Barrier Layer between Cu interconnect and insulating Layers. The present work investigated the possibility of the self-forming Barrier Layer in Cu–Mn alloy thin films deposited directly on SiO2. After annealing at 450 °C for 30 min, a Mn containing amorphous oxide Layer of 3–4 nm in thickness was formed uniformly at the interface. Residual Mn atoms were removed to form a surface oxide Layer, leading to a drastic resistivity decrease of the film. No interdiffusion was detected between Cu and SiO2 within the detection limit of x-ray energy dispersive spectroscopy.

Chandrakant D. Lokhande - One of the best experts on this subject based on the ideXlab platform.

  • achievement of 4 51 conversion efficiency using zno recombination Barrier Layer in tio2 based dye sensitized solar cells
    Applied Physics Letters, 2006
    Co-Authors: Rajaram S. Mane, Chandrakant D. Lokhande
    Abstract:

    The authors report the use of chemically deposited ZnO recombination Barrier Layer for improved efficiency of TiO2 based dye-sensitized solar cells. The ZnO Layers of different thicknesses were deposited on spin coated porous TiO2. The presence of ZnO over TiO2 was confirmed by x-ray diffraction, electron dispersive x-ray analysis, and supported by x-ray photoelectron spectroscopy, proved inherent energy Barrier between the porous TiO2 electrode and lithium iodide electrolyte. They found that TiO2 based dye-sensitized solar cell with 30nm ZnO Layer thickness showed 4.51% efficiency due to the formation of efficient recombination Barrier at electrode/electrolyte interface. Further increase in ZnO Barrier thickness may leak the electrons injected from the dye due to its low electron effective mass of 0.2me.

D Gall - One of the best experts on this subject based on the ideXlab platform.

  • Control of lubricant transport by a CrN diffusion Barrier Layer during high-temperature sliding of a CrN-Ag composite coating
    2020
    Co-Authors: C P Mulligan, Thierry A Blanchet, D Gall
    Abstract:

    a b s t r a c t a r t i c l e i n f o Available online 4 August 2010 Keywords: CrN-Ag Nanocomposite coating Solid lubrication High-temperature materials Sliding wear Diffusion Barrier CrN-Ag composite coatings, 2 and 5 μm thick and containing 22 at.% Ag solid lubricant, were grown on Si(001) and 440C stainless steel substrates by reactive co-sputtering at T s = 500°C, and were covered with 200 nm thick pure CrN diffusion Barrier cap Layers. Annealing experiments at T a = 625°C, followed by quantitative scanning electron microscopy, energy dispersive x-ray spectroscopy, and Auger depth profile analyses indicate considerable Ag transport to the top surface for a Barrier Layer deposited at a substrate floating potential of −30 V, but negligible Ag diffusion when deposited with a substrate bias potential of −150 V. This is attributed to ion-irradiation induced densification which makes the cap Layer an effective diffusion Barrier. High temperature tribological sliding tests of this coating system against alumina balls at T t = 550°C indicate an initial friction coefficient μ = 0.43 ± 0.04 which decreases monotonically to 0.23 ± 0.03. This is attributed to the development of wear mediated openings in the Barrier Layer which allow Ag lubricant to diffuse to the sliding top surface. In contrast, pure CrN exhibits a constant μ = 0.41 ± 0.02 while CrN-Ag composite coatings without cap Layer show a low transient μ = 0.16 ± 0.03, attributed to Ag transport to the surface, that however increases to μ = 0.39 ± 0.04 after~6000 cycles as the Ag reservoir in the coating is depleted. That is, the dense CrN cap Layer reduces the Ag lubricant flow rate and therefore prolongs the time when the coating provides effective lubrication. This results in a cumulative wear rate over 10,000 cycles of 3.1 × 10 −6 mm 3 /Nm, which is 3.3 × lower than without diffusion Barrier Layer. Published by Elsevier B.V

  • control of lubricant transport by a crn diffusion Barrier Layer during high temperature sliding of a crn ag composite coating
    Surface & Coatings Technology, 2010
    Co-Authors: C P Mulligan, Thierry A Blanchet, D Gall
    Abstract:

    Abstract CrN–Ag composite coatings, 2 and 5 μm thick and containing 22 at.% Ag solid lubricant, were grown on Si(001) and 440C stainless steel substrates by reactive co-sputtering at T s  = 500 °C, and were covered with 200 nm thick pure CrN diffusion Barrier cap Layers. Annealing experiments at T a  = 625 °C, followed by quantitative scanning electron microscopy, energy dispersive x-ray spectroscopy, and Auger depth profile analyses indicate considerable Ag transport to the top surface for a Barrier Layer deposited at a substrate floating potential of −30 V, but negligible Ag diffusion when deposited with a substrate bias potential of −150 V. This is attributed to ion-irradiation induced densification which makes the cap Layer an effective diffusion Barrier. High temperature tribological sliding tests of this coating system against alumina balls at T t  = 550 °C indicate an initial friction coefficient μ = 0.43 ± 0.04 which decreases monotonically to 0.23 ± 0.03. This is attributed to the development of wear mediated openings in the Barrier Layer which allow Ag lubricant to diffuse to the sliding top surface. In contrast, pure CrN exhibits a constant μ = 0.41 ± 0.02 while CrN–Ag composite coatings without cap Layer show a low transient μ = 0.16 ± 0.03, attributed to Ag transport to the surface, that however increases to μ = 0.39 ± 0.04 after ~ 6000 cycles as the Ag reservoir in the coating is depleted. That is, the dense CrN cap Layer reduces the Ag lubricant flow rate and therefore prolongs the time when the coating provides effective lubrication. This results in a cumulative wear rate over 10,000 cycles of 3.1 × 10 −6  mm 3 /Nm, which is 3.3 × lower than without diffusion Barrier Layer.