The Experts below are selected from a list of 1038 Experts worldwide ranked by ideXlab platform
Charitidis C. A. - One of the best experts on this subject based on the ideXlab platform.
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Metrology and nano-mechanical tests for nano-manufacturing and nano-bio interface: challenges & future perspectives
'Elsevier BV', 2019Co-Authors: Koumoulos E. P., Tofail S. A. M., Silien Christophe, De Felicis D., Moscatelli R., Dragatogiannis D.a., Bemporad E., Sebastiani M., Charitidis C. A.Abstract:peer-reviewedThe full text of this article will not be available in ULIR until the embargo expires on the 14/10/2019Nanometrology refers to measurement techniques that assess materials properties at the nanoscale. Laboratorybased characterisatIon of nanomaterials has been the key enabler in the growth of nanotechnology and nanoenabled products. Due to the small size involved, dimensIonal measurements has dominated such characterisatIon underpinned by a tremendous development in stand-alone electron/Ion Microscopes and scanning probe Microscopes. However, the scope of nanometrology extends far beyond off-site, laboratory-based measurements of dimensIons only, and is expected to have a tremendous impact on design of nano-enabled materials and devices. In this article, we discuss some of the available techniques for laboratory-based characterisatIon of mechanical and interfacial properties for nanometrology. We also provide a deep insight into the emerging techniques in measuring these properties, keeping in view the need in advanced manufacturing and nanobio-interactIons to developmultifunctIonal instrumentatIon, traceable and standardizedmethods, andmodelling tools for unambiguous data interpretatIon. We also discuss the evaluatIon of nanomechanical properties and surface/interface response of materials, within the purview of manufacturing processes and standardizatIon
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Metrology and nano-mechanical tests for nano-manufacturing and nano-bio interface: Challenges & future perspectives
'Elsevier BV', 2018Co-Authors: Koumoulos E. P., Tofail S. A. M., Silien C., De Felicis Daniele, Moscatelli Riccardo, Dragatogiannis D. A., Bemporad Edoardo, Sebastiani Marco, Charitidis C. A.Abstract:Nanometrology refers to measurement techniques that assess materials properties at the nanoscale. Laboratory-based characterisatIon of nanomaterials has been the key enabler in the growth of nanotechnology and nano-enabled products. Due to the small size involved, dimensIonal measurements has dominated such characterisatIon underpinned by a tremendous development in stand-alone electron/Ion Microscopes and scanning probe Microscopes. However, the scope of nanometrology extends far beyond off-site, laboratory-based measurements of dimensIons only, and is expected to have a tremendous impact on design of nano-enabled materials and devices. In this article, we discuss some of the available techniques for laboratory-based characterisatIon of mechanical and interfacial properties for nanometrology. We also provide a deep insight into the emerging techniques in measuring these properties, keeping in view the need in advanced manufacturing and nanobio-interactIons to develop multifunctIonal instrumentatIon, traceable and standardized methods, and modelling tools for unambiguous data interpretatIon. We also discuss the evaluatIon of nanomechanical properties and surface/interface response of materials, within the purview of manufacturing processes and standardizatIon. Finally, we discuss scientific and technological challenges that are required to move towards real-time nano-characterisatIon for rapid, reliable, repeatable and predictive metrology to underpin upscaling nanomaterials and nano-enabled products from the research field to industry and market
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Metrology and nano-mechanical tests for nano-manufacturing and nano-bio interface: challenges & future perspectives
Elsevier, 2018Co-Authors: Koumoulos E. P., Tofail S. A. M., Silien Christophe, De Felicis D., Moscatelli R., Dragatogiannis D.a., Bemporad E., Sebastiani M., Charitidis C. A.Abstract:The full text of this article will not be available in ULIR until the embargo expires on the 14/10/2019Nanometrology refers to measurement techniques that assess materials properties at the nanoscale. Laboratorybased characterisatIon of nanomaterials has been the key enabler in the growth of nanotechnology and nanoenabled products. Due to the small size involved, dimensIonal measurements has dominated such characterisatIon underpinned by a tremendous development in stand-alone electron/Ion Microscopes and scanning probe Microscopes. However, the scope of nanometrology extends far beyond off-site, laboratory-based measurements of dimensIons only, and is expected to have a tremendous impact on design of nano-enabled materials and devices. In this article, we discuss some of the available techniques for laboratory-based characterisatIon of mechanical and interfacial properties for nanometrology. We also provide a deep insight into the emerging techniques in measuring these properties, keeping in view the need in advanced manufacturing and nanobio-interactIons to developmultifunctIonal instrumentatIon, traceable and standardizedmethods, andmodelling tools for unambiguous data interpretatIon. We also discuss the evaluatIon of nanomechanical properties and surface/interface response of materials, within the purview of manufacturing processes and standardizatIon
Koumoulos E. P. - One of the best experts on this subject based on the ideXlab platform.
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Metrology and nano-mechanical tests for nano-manufacturing and nano-bio interface: challenges & future perspectives
'Elsevier BV', 2019Co-Authors: Koumoulos E. P., Tofail S. A. M., Silien Christophe, De Felicis D., Moscatelli R., Dragatogiannis D.a., Bemporad E., Sebastiani M., Charitidis C. A.Abstract:peer-reviewedThe full text of this article will not be available in ULIR until the embargo expires on the 14/10/2019Nanometrology refers to measurement techniques that assess materials properties at the nanoscale. Laboratorybased characterisatIon of nanomaterials has been the key enabler in the growth of nanotechnology and nanoenabled products. Due to the small size involved, dimensIonal measurements has dominated such characterisatIon underpinned by a tremendous development in stand-alone electron/Ion Microscopes and scanning probe Microscopes. However, the scope of nanometrology extends far beyond off-site, laboratory-based measurements of dimensIons only, and is expected to have a tremendous impact on design of nano-enabled materials and devices. In this article, we discuss some of the available techniques for laboratory-based characterisatIon of mechanical and interfacial properties for nanometrology. We also provide a deep insight into the emerging techniques in measuring these properties, keeping in view the need in advanced manufacturing and nanobio-interactIons to developmultifunctIonal instrumentatIon, traceable and standardizedmethods, andmodelling tools for unambiguous data interpretatIon. We also discuss the evaluatIon of nanomechanical properties and surface/interface response of materials, within the purview of manufacturing processes and standardizatIon
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Metrology and nano-mechanical tests for nano-manufacturing and nano-bio interface: Challenges & future perspectives
'Elsevier BV', 2018Co-Authors: Koumoulos E. P., Tofail S. A. M., Silien C., De Felicis Daniele, Moscatelli Riccardo, Dragatogiannis D. A., Bemporad Edoardo, Sebastiani Marco, Charitidis C. A.Abstract:Nanometrology refers to measurement techniques that assess materials properties at the nanoscale. Laboratory-based characterisatIon of nanomaterials has been the key enabler in the growth of nanotechnology and nano-enabled products. Due to the small size involved, dimensIonal measurements has dominated such characterisatIon underpinned by a tremendous development in stand-alone electron/Ion Microscopes and scanning probe Microscopes. However, the scope of nanometrology extends far beyond off-site, laboratory-based measurements of dimensIons only, and is expected to have a tremendous impact on design of nano-enabled materials and devices. In this article, we discuss some of the available techniques for laboratory-based characterisatIon of mechanical and interfacial properties for nanometrology. We also provide a deep insight into the emerging techniques in measuring these properties, keeping in view the need in advanced manufacturing and nanobio-interactIons to develop multifunctIonal instrumentatIon, traceable and standardized methods, and modelling tools for unambiguous data interpretatIon. We also discuss the evaluatIon of nanomechanical properties and surface/interface response of materials, within the purview of manufacturing processes and standardizatIon. Finally, we discuss scientific and technological challenges that are required to move towards real-time nano-characterisatIon for rapid, reliable, repeatable and predictive metrology to underpin upscaling nanomaterials and nano-enabled products from the research field to industry and market
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Metrology and nano-mechanical tests for nano-manufacturing and nano-bio interface: challenges & future perspectives
Elsevier, 2018Co-Authors: Koumoulos E. P., Tofail S. A. M., Silien Christophe, De Felicis D., Moscatelli R., Dragatogiannis D.a., Bemporad E., Sebastiani M., Charitidis C. A.Abstract:The full text of this article will not be available in ULIR until the embargo expires on the 14/10/2019Nanometrology refers to measurement techniques that assess materials properties at the nanoscale. Laboratorybased characterisatIon of nanomaterials has been the key enabler in the growth of nanotechnology and nanoenabled products. Due to the small size involved, dimensIonal measurements has dominated such characterisatIon underpinned by a tremendous development in stand-alone electron/Ion Microscopes and scanning probe Microscopes. However, the scope of nanometrology extends far beyond off-site, laboratory-based measurements of dimensIons only, and is expected to have a tremendous impact on design of nano-enabled materials and devices. In this article, we discuss some of the available techniques for laboratory-based characterisatIon of mechanical and interfacial properties for nanometrology. We also provide a deep insight into the emerging techniques in measuring these properties, keeping in view the need in advanced manufacturing and nanobio-interactIons to developmultifunctIonal instrumentatIon, traceable and standardizedmethods, andmodelling tools for unambiguous data interpretatIon. We also discuss the evaluatIon of nanomechanical properties and surface/interface response of materials, within the purview of manufacturing processes and standardizatIon
Tofail S. A. M. - One of the best experts on this subject based on the ideXlab platform.
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Metrology and nano-mechanical tests for nano-manufacturing and nano-bio interface: challenges & future perspectives
'Elsevier BV', 2019Co-Authors: Koumoulos E. P., Tofail S. A. M., Silien Christophe, De Felicis D., Moscatelli R., Dragatogiannis D.a., Bemporad E., Sebastiani M., Charitidis C. A.Abstract:peer-reviewedThe full text of this article will not be available in ULIR until the embargo expires on the 14/10/2019Nanometrology refers to measurement techniques that assess materials properties at the nanoscale. Laboratorybased characterisatIon of nanomaterials has been the key enabler in the growth of nanotechnology and nanoenabled products. Due to the small size involved, dimensIonal measurements has dominated such characterisatIon underpinned by a tremendous development in stand-alone electron/Ion Microscopes and scanning probe Microscopes. However, the scope of nanometrology extends far beyond off-site, laboratory-based measurements of dimensIons only, and is expected to have a tremendous impact on design of nano-enabled materials and devices. In this article, we discuss some of the available techniques for laboratory-based characterisatIon of mechanical and interfacial properties for nanometrology. We also provide a deep insight into the emerging techniques in measuring these properties, keeping in view the need in advanced manufacturing and nanobio-interactIons to developmultifunctIonal instrumentatIon, traceable and standardizedmethods, andmodelling tools for unambiguous data interpretatIon. We also discuss the evaluatIon of nanomechanical properties and surface/interface response of materials, within the purview of manufacturing processes and standardizatIon
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Metrology and nano-mechanical tests for nano-manufacturing and nano-bio interface: Challenges & future perspectives
'Elsevier BV', 2018Co-Authors: Koumoulos E. P., Tofail S. A. M., Silien C., De Felicis Daniele, Moscatelli Riccardo, Dragatogiannis D. A., Bemporad Edoardo, Sebastiani Marco, Charitidis C. A.Abstract:Nanometrology refers to measurement techniques that assess materials properties at the nanoscale. Laboratory-based characterisatIon of nanomaterials has been the key enabler in the growth of nanotechnology and nano-enabled products. Due to the small size involved, dimensIonal measurements has dominated such characterisatIon underpinned by a tremendous development in stand-alone electron/Ion Microscopes and scanning probe Microscopes. However, the scope of nanometrology extends far beyond off-site, laboratory-based measurements of dimensIons only, and is expected to have a tremendous impact on design of nano-enabled materials and devices. In this article, we discuss some of the available techniques for laboratory-based characterisatIon of mechanical and interfacial properties for nanometrology. We also provide a deep insight into the emerging techniques in measuring these properties, keeping in view the need in advanced manufacturing and nanobio-interactIons to develop multifunctIonal instrumentatIon, traceable and standardized methods, and modelling tools for unambiguous data interpretatIon. We also discuss the evaluatIon of nanomechanical properties and surface/interface response of materials, within the purview of manufacturing processes and standardizatIon. Finally, we discuss scientific and technological challenges that are required to move towards real-time nano-characterisatIon for rapid, reliable, repeatable and predictive metrology to underpin upscaling nanomaterials and nano-enabled products from the research field to industry and market
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Metrology and nano-mechanical tests for nano-manufacturing and nano-bio interface: challenges & future perspectives
Elsevier, 2018Co-Authors: Koumoulos E. P., Tofail S. A. M., Silien Christophe, De Felicis D., Moscatelli R., Dragatogiannis D.a., Bemporad E., Sebastiani M., Charitidis C. A.Abstract:The full text of this article will not be available in ULIR until the embargo expires on the 14/10/2019Nanometrology refers to measurement techniques that assess materials properties at the nanoscale. Laboratorybased characterisatIon of nanomaterials has been the key enabler in the growth of nanotechnology and nanoenabled products. Due to the small size involved, dimensIonal measurements has dominated such characterisatIon underpinned by a tremendous development in stand-alone electron/Ion Microscopes and scanning probe Microscopes. However, the scope of nanometrology extends far beyond off-site, laboratory-based measurements of dimensIons only, and is expected to have a tremendous impact on design of nano-enabled materials and devices. In this article, we discuss some of the available techniques for laboratory-based characterisatIon of mechanical and interfacial properties for nanometrology. We also provide a deep insight into the emerging techniques in measuring these properties, keeping in view the need in advanced manufacturing and nanobio-interactIons to developmultifunctIonal instrumentatIon, traceable and standardizedmethods, andmodelling tools for unambiguous data interpretatIon. We also discuss the evaluatIon of nanomechanical properties and surface/interface response of materials, within the purview of manufacturing processes and standardizatIon
Anjam Khursheed - One of the best experts on this subject based on the ideXlab platform.
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a wide range parallel radial mirror analyzer for scanning electron Ion Microscopes
Journal of Electron Spectroscopy and Related Phenomena, 2012Co-Authors: Anjam Khursheed, Hung Q Hoang, Avinash SrinivasanAbstract:Abstract This paper presents the design of a wide-range Parallel Radial Mirror Analyzer (RMA) for use as an attachment inside the specimen chambers of scanning electron/Ion Microscopes. The range of energies for the PRMA typically varies by a factor of 50, and it is predicted to have second-order focusing properties for all electrons/Ions that are detected. For a polar angular spread of ±3°, the simulated energy resolutIon at an energy of 100 eV is around 0.65%, and it drops to less than 0.2% for energies between 300 eV and 5000 eV. The PRMA is predicted to have a transmittance of over an order magnitude better than previous wide-range parallel energy analyzer designs.
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a radial mirror analyzer for scanning electron Ion Microscopes
Nuclear Instruments & Methods in Physics Research Section A-accelerators Spectrometers Detectors and Associated Equipment, 2011Co-Authors: Hung Q Hoang, Anjam KhursheedAbstract:Abstract This paper presents a high-resolutIon transmittance electron energy analyzer suitable for use as an attachment inside the specimen chambers of scanning electron/Ion Microscopes. The analyzer uses a rotatIonally symmetric electric field distributIon to transport electrons/Ions emitted from a central point source in a radial directIon on to a ring-shaped collectIon/detectIon area. The analyzer is designed to fit around a conical shaped objective lens pole-piece/electrode, allowing for a relatively short minimum working distance, 5 mm or less. SimulatIon results for the analyzer design predict that it will have a relative energy resolutIon of 0.025% for an entrance angular spread of ±6°, around an order of magnitude better then the well-known Cylindrical Mirror Analyzer (CMA). The analyzer design allows for a parallel mode of operatIon in which the energy bandwidth on a conical shaped detectIon plane is predicted to be as high as 32% (±16%) of the central-band energy. On a flat ring-shaped detectIon plane, the energy bandwidth is predicted to be around 12% (±6%) of the central-band energy, over which the simulated relative energy resolutIon remains below 0.06% for angular spreads of ±6°.
Kaoru Ohya - One of the best experts on this subject based on the ideXlab platform.
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simulatIon of secondary electron emissIon from a stepped surface in scanning Ion Microscopes
Japanese Journal of Applied Physics, 2014Co-Authors: Kaoru OhyaAbstract:For the use of scanning Ion Microscopes in device metrology, secondary electron (SE) emissIon from step patterns formed on a silicon substrate is investigated by simulatIon. The entire surface of a step is irradiated by H, He, Ne, and Ga Ions with energies of 10–50 keV to form the line profile of the SE yield. Because of their highly localized productIon of SEs, light-Ion beams result in clearer peaks in the line profile than heavy-Ion beams. The recoiling atoms and cascade electrons contribute to the height of the SE peak, but tend to broaden it as well. Both the peak height and width decrease with decreasing step height. The presence of an inclining side wall in the step largely decreases the peak height and increases the peak width. Reducing the Ion energy decreases the height gradually, but produces no clear change in the width.
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modeling of charging effects in scanning Ion Microscopes
Scanning microscopy, 2010Co-Authors: Kaoru Ohya, Takuya Yamanaka, Daiki Takami, K InaiAbstract:Unwilling deformatIons of secondary electron (SE) images due to charging of an insulating layer on materials is one of important issues for semiconductor industry applicatIons of scanning Ion Microscopes (SIM). This paper presents a Monte Carlo model of SE emissIon from SiO 2 in which the charging induced by Ion bombardment at the energy range of tens of keV is taken into account. A self-consistent calculatIon is carried out for the transport of a projectile Ion, recoiled material atoms and SEs, the creatIon of space charges trapped in the material and the resultant electric field in/out the material. Drift motIon of trapped charges is calculated as well, where the recombinatIon with a charge of opposite sign is taken into account. Therefore, the evolutIon of the charging is simulated with successive arrivals of Ions. Since the surface voltage is positive due to ejectIon of SEs and injectIon of positive Ions, some of ejected SEs are drawn back to the surface and can rebound on it; these SEs are unable to produce a net emissIon. Dynamic changes in the SE yield and surface voltage are compared among He Ions, Ga Ions and low-energy (<1 keV) electrons, along with the space charge distributIons and the in/out electric fields. The net SE yield is decreased during Ion bombardment and finally it vanishes, which is different from the case of electron bombardment where the net SE yield (including BSEs) is kept to one due to a balance between coming and outgoing electrons. Even if there is not net emissIon of SEs, the surface voltage does not reach any steady-state conditIon but progressively increases due to successive injectIon of positive Ions. The growth rate of the surface voltage depends on both the SE yield with no charging and the spatial distributIon of the Ions penetrating into the material.
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comparative study of depth and lateral distributIons of electron excitatIon between scanning Ion and scanning electron Microscopes
Journal of Electron Microscopy, 2003Co-Authors: Kaoru Ohya, Tohru IshitaniAbstract:In order to study the contrast difference between scanning Ion Microscopes (SIM) and scanning electron Microscopes (SEM), the depth and lateral distributIons of secondary electrons escaped from surfaces of 17 metals with atomic numbers, Z2, of 4-79 were calculated for bombardment with 30 keV Ga Ions and for 10 keV electrons. For both projectiles, the excitatIon depth generally decreased with increasing Z2, while showing the same periodic change as the secondary-electron yield. However, an opposite trend in Z2 dependence between the Ga Ion and electron bombardments was calculated with the lateral distributIon of secondary electrons escaped from the surface. Except for low Z2 metals, the lateral distributIon, which is much narrower for 30 keV Ga Ions than for 10 keV electrons, indicates that the spatial resolutIon of the secondary-electron images is better for SIM than for SEM, if zero-sized probe beams are assumed. Furthermore, the present calculatIon reveals important effects of electron excitatIon by recoiled material atoms and reflected electrons on the lateral distributIon, as well as the secondary-electron yield, for the Ga Ion and electron bombardments, respectively.
