Nanofabrication

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George M Whitesides - One of the best experts on this subject based on the ideXlab platform.

  • New Approaches to Nanofabrication:  Molding, Printing, and Other Techniques
    Chemical Reviews, 2005
    Co-Authors: Byron D. Gates, Qiaobing Xu, Carlton G Willson, Declan Ryan, Michael Stewart, George M Whitesides
    Abstract:

    "Nanofabrication" is the process of making functional structures with arbitrary patterns having minimum dimensions currently defined (more-or-less arbitrarily) to be 100 nm. Microelectronic devices and information technologies have improved and will continue to improve as a result of large-scale, commercial implementation of Nanofabrication. The motivation for these improvements is to increase the density of components, lower their cost, and increase their performance per device and per integrated circuit.

  • New approaches to Nanofabrication: Molding, printing, and other techniques
    Chemical Reviews, 2005
    Co-Authors: Byron D. Gates, Qiaobing Xu, Carlton G Willson, Declan Ryan, Michael Stewart, George M Whitesides
    Abstract:

    "Nanofabrication" is the process of making functional structures with arbitrary patterns having minimum dimensions currently defined (more-or-less arbitrarily) to be 100 nm. Microelectronic devices and information technologies have improved and will continue to improve as a result of large-scale, commercial implementation of Nanofabrication. The motivation for these improvements is to increase the density of components, lower their cost, and increase their performance per device and per integrated circuit.

  • SOFT LITHOGRAPHY
    Annual Review of Materials Science, 1998
    Co-Authors: Y. Xia, George M Whitesides
    Abstract:

    Soft lithography represents a non-photolithographic strategy based on self- assembly and replica molding for carrying out micro- and Nanofabrication. It provides a convenient, effective, and low-cost method for the formation and manufacturing of micro- and nanostructures. In soft lithography, an elastomeric stamp with patterned relief structures on its surface is used to generate patterns and structures with feature sizes ranging from 30 nm to 100 µm. Five tech- niques have been demonstrated: microcontact printing (µCP), replica molding (REM), microtransfer molding (µTM), micromolding in capillaries (MIMIC), and solvent-assisted micromolding (SAMIM). In this chapter we discuss the pro- cedures for these techniques and their applications in micro- and Nanofabrication, surface chemistry, materials science, optics, MEMS, and microelectronics.

Kostya Ostrikov - One of the best experts on this subject based on the ideXlab platform.

  • Plasma Nanofabrication and nanomaterials safety
    Journal of Physics D, 2011
    Co-Authors: Igor Levchenko, Shailesh Kumar, M. M. A. Yajadda, Samuel Yick, Philip J. Martin, Sean A.f. Peel, Zdenka Kuncic, Kostya Ostrikov
    Abstract:

    The fast advances in nanotechnology have raised increasing concerns related to the safety of nanomaterials when exposed to humans, animals and the environment. However, despite several years of research, the nanomaterials safety field is still in its infancy owing to the complexities of structural and surface properties of these nanomaterials and organism-specific responses to them. Recently, plasma-based technology has been demonstrated as a versatile and effective way for Nanofabrication, yet its health and environment-benign nature has not been widely recognized. Here we address the environmental and occupational health and safety effects of various zero- and one-dimensional nanomaterials and elaborate the advantages of using plasmas as a safe Nanofabrication tool. These advantages include but are not limited to the production of substrate-bound nanomaterials, the isolation of humans from harmful nanomaterials, and the effective reforming of toxic and flammable gases. It is concluded that plasma Nanofabrication can minimize the hazards in the workplace and represents a safe way for future Nanofabrication technologies.

  • Plasma‐Aided Nanofabrication
    2007
    Co-Authors: Kostya Ostrikov, Shuyan Xu
    Abstract:

    In this single work to cover the use of plasma as Nanofabrication tool in sufficient depth internationally renowned authors with much experience in this important method of Nanofabrication look at reactive plasma as a Nanofabrication tool, plasma production and development of plasma sources, as well as such applications as carbon-based nanostructures, low-dimensional quantum confinement structures and hydroxyapatite bioceramics. Written principally for solid state physicists and chemists, materials scientists, and plasma physicists, the book concludes with the outlook for such applications. © 2007 Wiley-VCH Verlag GmbH & Co. KGaA

  • Plasma-aided Nanofabrication: Where is the cutting edge?
    Journal of Physics D: Applied Physics, 2007
    Co-Authors: Kostya Ostrikov, A. B. Murphy
    Abstract:

    Plasma-aided Nanofabrication is a rapidly expanding area of research spanning disciplines ranging from physics and chemistry of plasmas and gas discharges to solid state physics, materials science, surface science, nanoscience and nanotechnology and related engineering subjects. The current status of the research field is discussed and examples of superior performance and competitive advantage of plasma processes and techniques are given. These examples are selected to represent a range of applications of two major types of plasmas suitable for nanoscale synthesis and processing, namely thermally non-equilibrium and thermal plasmas. Major concepts and terminology used in the field are introduced. The paper also pinpoints the major challenges facing plasma-aided Nanofabrication and identifies some emerging topics for future research.

  • plasma aided Nanofabrication plasma building block approach
    International Journal of Nanoscience, 2006
    Co-Authors: Kostya Ostrikov, S Xu
    Abstract:

    Unique features and benefits of the plasma-aided Nanofabrication are considered by using the "plasma-building block" approach, which is based on plasma diagnostics and nanofilm characterization, cross-referenced by numerical simulation of generation and dynamics of building blocks in the gas phase, their interaction with nanostructured surfaces, and ab initio simulation of chemical structure of relevant nanoassemblies. The examples include carbon nanotip microemitter structures, semiconductor quantum dots and nanowires synthesized in the integrated plasma-aided Nanofabrication facility.

Kostya Ostrikov - One of the best experts on this subject based on the ideXlab platform.

  • Reactive plasmas as a versatile Nanofabrication tool
    Reviews of Modern Physics, 2020
    Co-Authors: Kostya Ostrikov
    Abstract:

    The underlying physics of the application of low-temperature, low-pressure reactive plasmas in various nanoassembly processes is described. From the viewpoint of the "cause and effect" approach, this Colloquium focuses on the benefits and challenges of using plasma-based systems in Nanofabrication of nanostructured silicon films, low-dimensional semiconducting quantum structures, ordered carbon nanotip arrays, highly crystalline TiO2 coatings, and nanostructured hydroxyapatite bioceramics. Other examples and future prospects of plasma-aided Nanofabrication are also discussed. © 2005 The American Physical Society.

  • colloquium reactive plasmas as a versatile Nanofabrication tool
    Reviews of Modern Physics, 2005
    Co-Authors: Kostya Ostrikov
    Abstract:

    The underlying physics of the application of low-temperature, low-pressure reactive plasmas in various nanoassembly processes is described. From the viewpoint of the ``cause and effect'' approach, this Colloquium focuses on the benefits and challenges of using plasma-based systems in Nanofabrication of nanostructured silicon films, low-dimensional semiconducting quantum structures, ordered carbon nanotip arrays, highly crystalline ${\mathrm{TiO}}_{2}$ coatings, and nanostructured hydroxyapatite bioceramics. Other examples and future prospects of plasma-aided Nanofabrication are also discussed.

Byron D. Gates - One of the best experts on this subject based on the ideXlab platform.

  • New approaches to Nanofabrication: Molding, printing, and other techniques
    Chemical Reviews, 2005
    Co-Authors: Byron D. Gates, Qiaobing Xu, Carlton G Willson, Declan Ryan, Michael Stewart, George M Whitesides
    Abstract:

    "Nanofabrication" is the process of making functional structures with arbitrary patterns having minimum dimensions currently defined (more-or-less arbitrarily) to be 100 nm. Microelectronic devices and information technologies have improved and will continue to improve as a result of large-scale, commercial implementation of Nanofabrication. The motivation for these improvements is to increase the density of components, lower their cost, and increase their performance per device and per integrated circuit.

  • New Approaches to Nanofabrication:  Molding, Printing, and Other Techniques
    Chemical Reviews, 2005
    Co-Authors: Byron D. Gates, Qiaobing Xu, Carlton G Willson, Declan Ryan, Michael Stewart, George M Whitesides
    Abstract:

    "Nanofabrication" is the process of making functional structures with arbitrary patterns having minimum dimensions currently defined (more-or-less arbitrarily) to be 100 nm. Microelectronic devices and information technologies have improved and will continue to improve as a result of large-scale, commercial implementation of Nanofabrication. The motivation for these improvements is to increase the density of components, lower their cost, and increase their performance per device and per integrated circuit.

A. B. Murphy - One of the best experts on this subject based on the ideXlab platform.

  • Plasma-aided Nanofabrication: Where is the cutting edge?
    Journal of Physics D: Applied Physics, 2007
    Co-Authors: Kostya Ostrikov, A. B. Murphy
    Abstract:

    Plasma-aided Nanofabrication is a rapidly expanding area of research spanning disciplines ranging from physics and chemistry of plasmas and gas discharges to solid state physics, materials science, surface science, nanoscience and nanotechnology and related engineering subjects. The current status of the research field is discussed and examples of superior performance and competitive advantage of plasma processes and techniques are given. These examples are selected to represent a range of applications of two major types of plasmas suitable for nanoscale synthesis and processing, namely thermally non-equilibrium and thermal plasmas. Major concepts and terminology used in the field are introduced. The paper also pinpoints the major challenges facing plasma-aided Nanofabrication and identifies some emerging topics for future research.