Rubber Membrane

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Yutaka Tsujimura - One of the best experts on this subject based on the ideXlab platform.

Keiichi Kimura - One of the best experts on this subject based on the ideXlab platform.

K. Kimura - One of the best experts on this subject based on the ideXlab platform.

Yu-chong Tai - One of the best experts on this subject based on the ideXlab platform.

  • Design, fabrication, and testing of micromachined silicone Rubber Membrane valves
    Journal of Microelectromechanical Systems, 1999
    Co-Authors: Xing Yang, Charles Grosjean, Yu-chong Tai
    Abstract:

    Technologies for fabricating silicone Rubber Membranes and integrating them with other processes on silicon wafers have been developed. Silicone Rubber has been found to have exceptional mechanical properties including low modulus, high elongation, and good sealing. Thermopneumatically actuated, normally open, silicone Rubber Membrane valves with optimized components have been designed, fabricated, and tested. Suspended silicon nitride Membrane heaters have been developed for low-power thermopneumatic actuation. Composite silicone Rubber on Parylene valve Membranes have been shown to have low permeability and modulus. Also, novel valve seats were designed to improve sealing in the presence of particles. The valves have been extensively characterized with respect to power consumption versus flow rate and transient response. Low power consumption, high flow rate, and high pressure have been demonstrated. For example, less than 40 mW is required to switch a 1-slpm nitrogen flow at 33 psi. Water requires dose to 100 mW due to the cooling effect of the liquid.

  • A MEMS thermopneumatic silicone Rubber Membrane valve
    Sensors and Actuators A-physical, 1998
    Co-Authors: Xing Yang, Charles Grosjean, Yu-chong Tai
    Abstract:

    Abstract In this paper, a technology for fabricating silicone Rubber Membranes and integrating them with other processes on a silicon wafer has been developed. Silicone Rubber has been found to have exceptional mechanical properties, including low Young's modulus, high elongation, and good sealing. An integrated normally open valve using a silicone Rubber Membrane and 3M PF5060 liquid for thermopneumatic actuation has been fabricated and tested. For a 1.34 LPM (1 min −1 ) air flow, 280 mW power input is required to close the valve at 20 psi inlet pressure. Due to the high permeability of silicone Rubber, most liquids used in thermopneumatic systems will be lost, necessitating more work to find a suitable barrier material compatible with silicone Rubber.

Masaaki Yokoyama - One of the best experts on this subject based on the ideXlab platform.