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Dayung Wang - One of the best experts on this subject based on the ideXlab platform.
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mechanical properties of nano structured ti si n films synthesized by cathodic Arc Evaporation
Journal of Alloys and Compounds, 2007Co-Authors: Shengmin Yang, Dayung Wang, Yinyu Chang, Dongyih LinAbstract:Abstract Ti 1− x Si x N coatings were synthesized by cathodic Arc Evaporation with plasma-enhancing filter duct, using Ti 80 Si 20 alloy target as cathodes. Optical emission study revealed that excitation, ionization and charge transfer reactions of the Ti-Si-N plasma occurred during the Ti 1− x Si x N deposition process. The chemical content of Si varied from 3.3 to 6.0 at% in Ti 1− x Si x N depending on the nitrogen partial pressure of the reaction chamber. All the Ti 1− x Si x N coatings displayed a NaCl structure and a preferred (2 0 0) orientation parallel to the substrate surface. Among the studied Ti 1− x Si x N coatings, the Ti 1− x Si x N with 6 at.% Si possessed the highest hardness of 45 GPa and H 3 / E * 2 ratio of 0.527 GPa, indicating the best resistance to plastic deformation. We found that the structure and mechanical properties of the Ti 1− x Si x N films were correlated with the nitrogen pressure and silicon content of the coatings.
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influences of bias voltage on properties of tial doped dlc coatings synthesized by cathodic Arc Evaporation
Diamond and Related Materials, 2005Co-Authors: Chilung Chang, Juiyun Jao, Tangchun Chang, Dayung WangAbstract:In this work, the combinations of TiAl-doped DLC (Diamond-like Carbon) and TiAlN/TiN double-layered films were designed to deposit on the tool steels using cathodic Arc Evaporation in a single process. The economic advantage in depositing the combined coating in one production scale PVD coating system is of practical importance. The TiAl-doped DLC as lubricant coatings were synthesized with TiAl-target Arc sources to emit ion plasma to activate acetylene reactive gases. Scanning electron microscopy (SEM), Auger electron spectroscopy (AES), micro-Raman spectroscopy, X-ray photoelectron spectroscopy (XPS), X-ray diffraction (XRD) techniques were employed to analysis the microstructure properties of TiAl-doped DLC coatings. Vicker's and tribometer tester were used to measure the mechanical properties of TiAl-doped DLC coatings. The results show that the TiAl-doped DLC coatings retained lower friction coefficient at approximately 0.15 during the steady state sliding. The lubricity and wear resistance of TiAl-doped DLC coatings is then demonstrated to potentially be applied to the cutting tools with no lubricants.
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thermal stability of cr doped diamond like carbon films synthesized by cathodic Arc Evaporation
Thin Solid Films, 2005Co-Authors: Mingchieh Chiu, Dayung Wang, Wenpin Hsieh, Weiyu Ho, Fuhsheng ShieuAbstract:Abstract Cr-doped diamond-like carbon (DLC) films were synthesized using a cathodic Arc Evaporation (CAE) process. The thermal oxidation behavior of Cr-doped DLC films was investigated using thermal gravimetric analysis (TGA) and differential thermal analysis (DTA). The phase identification and microstructural examinations were conducted by X-ray diffraction, scanning electron spectroscopy (SEM), transmission electron spectroscopy (TEM), Raman spectroscopy, and X-ray photoelectron spectroscopy (XPS) in order to understand the characteristics of Cr-doped DLC films. The as-deposited Cr-doped DLC film exhibits a lamellar structure observed by TEM. A significant weight loss of film results from the thermal oxidation of carbon occurred at 290 to 342 °C. At the temperature higher than 342 °C, slight weight gain of specimen was observed due to the thermal oxidation of the underlying CrC x N y and CrN interlayer. By heat-treated specimens from 200 to 400 °C, Raman spectra reveal the increase of I D / I G value conforming to the graphitiation process of the Cr-doped DLC films. Finally, surface reactions of the annealed films using XPS analysis were discussed.
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thermal stability of cr doped diamond like carbon films synthesized by cathodic Arc Evaporation
Thin Solid Films, 2005Co-Authors: Mingchieh Chiu, Dayung Wang, Wenpin Hsieh, Fuhsheng ShieuAbstract:Abstract Cr-doped diamond-like carbon (DLC) films were synthesized using a cathodic Arc Evaporation (CAE) process. The thermal oxidation behavior of Cr-doped DLC films was investigated using thermal gravimetric analysis (TGA) and differential thermal analysis (DTA). The phase identification and microstructural examinations were conducted by X-ray diffraction, scanning electron spectroscopy (SEM), transmission electron spectroscopy (TEM), Raman spectroscopy, and X-ray photoelectron spectroscopy (XPS) in order to understand the characteristics of Cr-doped DLC films. The as-deposited Cr-doped DLC film exhibits a lamellar structure observed by TEM. A significant weight loss of film results from the thermal oxidation of carbon occurred at 290 to 342 °C. At the temperature higher than 342 °C, slight weight gain of specimen was observed due to the thermal oxidation of the underlying CrC x N y and CrN interlayer. By heat-treated specimens from 200 to 400 °C, Raman spectra reveal the increase of I D / I G value conforming to the graphitiation process of the Cr-doped DLC films. Finally, surface reactions of the annealed films using XPS analysis were discussed.
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deposition of crn coatings by current modulating cathodic Arc Evaporation
Surface & Coatings Technology, 2001Co-Authors: Dayung Wang, Kowei WengAbstract:Abstract Conventional cathodic Arc Evaporation (CAE) suffers from macroparticle contamination and excessive heat load on the substrates, resulting from the energetic ion flux emitted from hot cathode spots. In this study, a low frequency current-modulating controller was used to modulate the Arc currents in high-low cycles. The deposition is conducted primarily during the high-current cycles, while a minimum background-current is maintained to sustain the Arc discharge. Cathodes can be operated at currents lower than in the continuous CAE process. Macroparticle ejection is reduced substantially due to the effective cathode cooling. The preferred orientation of CrN changes from Cr 2 N (211) to CrN (111) by reducing heat load on substrates. The residual stress of CrN coatings is reduced from 3.8 GPa to 3.0 GPa in a current-modulating CAE process. The critical load of CrN deposited by the current-modulating CAE process is 78 N, which is comparable with that of CrN deposited by the continuous CAE process. Fracture toughness and film adhesion were significantly improved by the current-modulating mechanism, leading to a prolonged wear life of CrN coatings by three times. Results of this study provide a practical and effective way to operate CAE process with reduced substrate temperature, reduced coating roughness, and improved film adhesion.
Bogdan Warcholiński - One of the best experts on this subject based on the ideXlab platform.
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Comparison of Mechanical and Tribological Properties of Nitride and Oxynitride Coatings Based on Chrome and Zirconium Obtained by Cathodic Arc Evaporation
Journal of Friction and Wear, 2019Co-Authors: Bogdan Warcholiński, Adam Gilewicz, A.s. Kuprin, G.n. Tolmachova, V.d. Ovcharenko, T. A. Kuznetsova, Vasilina Lapitskaya, S.a. ChizhikAbstract:The results of the investigation of the microstructure, crystal lattice parameter, roughness, microhardness, elasticity modulus, friction coefficient, specific volumetric wear, and adhesion strength for CrN, ZrN, Zr–O–N, and Cr–O–N coatings are presented. The coatings are formed by cathodic Arc Evaporation and have a cubic lattice. Addition of oxygen to the nitride CrN and ZrN coatings leads to the lattice parameter increasing and the crystallite size decreasing simultaneously. The oxynitride coatings, Cr–O–N and Zr–O–N, possess improved tribological properties in comparison with nitride coatings.
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Structure, Morphology, and Mechanical Properties of AlCrN Coatings Deposited by Cathodic Arc Evaporation
Journal of Materials Engineering and Performance, 2019Co-Authors: Adam Gilewicz, Roman Jedrzejewski, Piotr Myslinski, Bogdan WarcholińskiAbstract:AlCrN coatings were deposited on steel substrates (HS6-5-2) using cathodic Arc Evaporation. The effect of nitrogen pressure on the properties of CrAlN coatings formed from Al_80Cr_20 cathode, such as chemical and phase composition of the coatings, surface morphology, deposition rate, hardness and adhesion to the substrate, and friction and wear were investigated. The coating deposited at nitrogen pressure of 3 Pa shows the highest deposition rate. The roughness parameter Ra of the coating surface decreases with increasing nitrogen pressure during its formation. The test results showed that the AlCrN coatings deposited under nitrogen pressure in the range from 1 to 5 Pa show similar hardness for all the coatings, which is around 17 GPa. The increase in the negative bias voltage of the substrate during the formation of the coating deteriorates its adhesion to the substrate, although the wear rate is rather good, about 1.4 × 10^−7 mm^3/Nm. The coatings deposited at nitrogen pressure of 3-4 Pa are characterized by the highest critical load, 95 N. Despite worse adhesion, these coatings are characterized by high resistance to wear, the wear rate is about 1.4 × 10^−7 mm^3/Nm.
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mechanical properties of cr o n coatings deposited by cathodic Arc Evaporation
Vacuum, 2018Co-Authors: Bogdan Warcholiński, Adam Gilewicz, A.s. Kuprin, G.n. Tolmachova, V.d. Ovcharenko, T. A. Kuznetsova, T I Zubar, A L Khudoley, S.a. ChizhikAbstract:Abstract Ternary chromium based coatings (Cr-O-N) were formed on HS6-5-2 steel substrates using a vacuum Arc plasma flux coating system at different relative oxygen concentrations, O2(x) = O2/(N2 + O2). The mechanical and tribological properties of the coatings were characterized using scanning electron microscopy (SEM), atomic force microscopy (AFM), hardness measurements, wear test and adhesion tests (scratch test and Daimler-Benz test). Special attention was paid to coating adhesion and failure modes in the adhesion tests. The coefficient of friction, wear rate and adhesion decreased as the relative oxygen concentration increased. Hardness of the coatings showed the opposite effect, increasing from approximately 19 GPa–30 GPa. The dominant failure mode of Cr-O-N coatings was abrasion. Individual micro fragmentation was also observed for Cr-O-N coating with O2(x) = 20%.
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mechanical properties of mo c n coatings deposited using cathodic Arc Evaporation
Surface & Coatings Technology, 2017Co-Authors: Bogdan Warcholiński, Adam Gilewicz, T. A. Kuznetsova, S.a. Chizhik, T I Zubar, S O Abetkovskaia, Vasilina LapitskayaAbstract:Abstract The mechanical and tribological properties of Mo(C)N coatings with different carbon concentration have been investigated. The set of coatings with different chemical composition were grown using cathodic Arc Evaporation in various atmosphere composition (nitrogen and acetylene mixture) in the vacuum chamber. The coatings have been tested in macro- and micro-scale. The tests in macro-scale have included: surface morphology (SEM, contact profilometry), hardness (nanoindentation), adhesion (scratch test), friction and wear (pin-on-disc). AFM method has been applied to measure tribological properties: friction coefficient and friction force, and wear in micro-scale. The highest carbon concentration in the coatings has been about 19 at.%. The coatings have shown very good adhesion to steel substrates, to 60 N. The hardness of the coatings has reached about 44 GPa for carbon free Mo N with evident minimum, about 34 GPa for coating with about 14 at.% of carbon. The wear rate of coatings tested in ball-on-disc system (macro-scale) has been very low, even to (4.7 ± 1.6) × 10 − 17 m 3 /Nm for Mo 0.64 C 0.07 N 0.29 coating and about two orders of magnitude lower than in AFM test (micro-scale) - 9.6 × 10 − 14 m 3 /Nm. Coefficient of friction in macro-scale has been about one level higher than in micro-scale, for Mo 0.64 C 0.07 N 0.29 coating it has been 0.42 and 0.041 respectively.
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corrosion resistance of crn and crcn crn coatings deposited using cathodic Arc Evaporation in ringer s and hank s solutions
Surface & Coatings Technology, 2016Co-Authors: Adam Gilewicz, P Chmielewska, Dawid Murzynski, Ewa Dobruchowska, Bogdan WarcholińskiAbstract:Abstract This paper presents the corrosion resistance of CrN monolayer coatings and CrCN/CrN multilayer coatings deposited by cathodic Arc Evaporation onto X39Cr13 stainless steel. Corrosion tests of the coating-substrate systems were conducted in Ringer's and Hank's solutions, usually used as infusion liquids. The parameters such as corrosion potential, corrosion current density and polarisation resistance were determined on the basis of the potentiodynamic polarisation curves. The corrosion properties of coatings in as-deposited state and after the polishing were compared. The results show that coated substrates are characterised by under half the corrosion potential and 10-times lower corrosion current density compared to the reference substrate (without coating). The corrosion parameters for polished coatings are slightly worse than unpolished, which is related to the method of coating deposition. The amount and distribution of macroparticles on the surface of the tested coatings are also presented.
Lars Hultman - One of the best experts on this subject based on the ideXlab platform.
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Thermal stability and mechanical properties of amorphous coatings in the Ti-B-Si-Al-N system grown by cathodic Arc Evaporation from TiB2, Ti33Al67, and Ti85Si15 cathodes
Journal of Vacuum Science & Technology A: Vacuum Surfaces and Films, 2014Co-Authors: Hanna Fager, Jens Jensen, Jon M. Andersson, Lars HultmanAbstract:Ti-B-Si-Al-N coatings were grown on cemented carbide substrates in an industrial scale cathodic Arc Evaporation system using Ti33Al67, Ti85Si15, and TiB2 cathodes in a reactive N2 atmosphere. The microstructure of the as-deposited coatings changes from nanocrystalline to amorphous with addition of (B + Si + Al), or high amounts of (B + Si) to TiN. In the as-deposited state, the 4 μm-thick amorphous coatings are dense and homogeneous, beside slight compositional modulation with Ti-rich layers induced by rotation of the substrate holder fixture during deposition, and have unusually few macroparticles. Annealing at temperatures ranging from 700 to 1100 °C results in that the coatings crystallize by clustering of TiN grains. The hardness of as-deposited amorphous coatings is 17–18 GPa, and increases to 21 GPa following annealing at 800 °C. At annealing temperatures of 1000 °C and above the hardness decreases due to interdiffusion of Co from the substrate to the coating.
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growth of hard amorphous tialsin thin films by cathodic Arc Evaporation
Surface & Coatings Technology, 2013Co-Authors: Hanna Fager, J M Andersson, M Johansson P Joesaar, Magnus Oden, Lars HultmanAbstract:Ti(1−x−y)AlxSiyNz (0.02≤x≤0.46, 0.02≤y≤0.28, and 1.08≤z≤1.29) thin films were grown on cemented carbide substrates in an industrial scale cathodic Arc Evaporation system using Ti-Al-Si compound cat ...
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structural and mechanical properties of corundum and cubic alxcr1 x 2 yo3 y coatings grown by reactive cathodic Arc Evaporation in as deposited and annealed states
Acta Materialia, 2013Co-Authors: Ali Khatibi, Jens Jensen, Axel Genvad, Emmanuelle Gothelid, Per Eklund, Lars HultmanAbstract:Abstract Coatings of (Al x Cr 1− x ) 2+ y O 3− y with 0.51 ⩽ x ⩽ 0.84 and 0.1 ⩽ y ⩽ 0.5 were deposited on hard cemented carbide substrates in an industrial cathodic Arc Evaporation system from powder-metallurgy-prepared Cr/Al targets in pure O 2 and O 2 + N 2 atmospheres. The substrate temperature and bias in all the deposition runs were 575 °C and −120 V, respectively. The composition of the coatings measured by energy dispersive X-ray spectroscopy and elastic recoil detection analysis differed from that of the facing targets by up to 11%. Microstructure analyses performed by symmetrical X-ray diffraction and transmission electron microscopy showed that corundum, cubic or mixed-phase coatings formed, depending on the Cr/Al ratio of the coatings and O 2 flow per active target during deposition. The corundum phase was promoted by high Cr content and high O 2 flow per target, while the cubic phase was observed mostly for high Al content and low O 2 flow per active target. In-situ annealing of the cubic coatings resulted in phase transformation from cubic to corundum, completed in the temperature range of 900–1100 °C, while corundum coatings retained their structure in the same range of annealing temperatures. Nanoindentation hardness of the coatings with Cr/Al ratio
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ti si c n thin films grown by reactive Arc Evaporation from ti3sic2 cathodes
Journal of Materials Research, 2011Co-Authors: Anders Eriksson, Magnus Oden, Lars Hultman, Jianqiang Zhu, Naureen Ghafoor, Mats Johansson, Jacob Sjolen, Jens Jensen, Grzegorz Greczynski, Johanna RosenAbstract:Ti–Si–C–N thin films were deposited onto WC-Co substrates by industrial scale Arc Evaporation from Ti3SiC2 compound cathodes in N2 gas. Microstructure and hardness were found to be highly dependent on the wide range of film compositions attained, comprising up to 12 at.% Si and 16 at.% C. Nonreactive deposition yielded films consisting of understoichiometric TiCx, Ti, and silicide phases with high (27 GPa) hardness. At a nitrogen pressure of 0.25–0.5 Pa, below that required for N saturation, superhard, 45–50 GPa, (Ti,Si)(C,N) films with a nanocrystalline feathered structure were formed. Films grown above 2 Pa displayed crystalline phases of more pronounced nitride character, but with C and Si segregated to grain boundaries to form weak grain boundary phases. In abundance of N, the combined presence of Si and C disturbs cubic phase growth severely and compromises the mechanical strength of the films.
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microstructure evolution and age hardening in ti si c n thin films deposited by cathodic Arc Evaporation
Thin Solid Films, 2010Co-Authors: Lars Johnson, Magnus Oden, Mats Johansson, Lina Rogstrom, Lars HultmanAbstract:Ti1 − xSixCyN1 − y films have been deposited by reactive cathodic Arc Evaporation onto cemented carbide substrates. The films were characterized by X-ray diffraction, elastic recoil detection an ...
Adam Gilewicz - One of the best experts on this subject based on the ideXlab platform.
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Comparison of Mechanical and Tribological Properties of Nitride and Oxynitride Coatings Based on Chrome and Zirconium Obtained by Cathodic Arc Evaporation
Journal of Friction and Wear, 2019Co-Authors: Bogdan Warcholiński, Adam Gilewicz, A.s. Kuprin, G.n. Tolmachova, V.d. Ovcharenko, T. A. Kuznetsova, Vasilina Lapitskaya, S.a. ChizhikAbstract:The results of the investigation of the microstructure, crystal lattice parameter, roughness, microhardness, elasticity modulus, friction coefficient, specific volumetric wear, and adhesion strength for CrN, ZrN, Zr–O–N, and Cr–O–N coatings are presented. The coatings are formed by cathodic Arc Evaporation and have a cubic lattice. Addition of oxygen to the nitride CrN and ZrN coatings leads to the lattice parameter increasing and the crystallite size decreasing simultaneously. The oxynitride coatings, Cr–O–N and Zr–O–N, possess improved tribological properties in comparison with nitride coatings.
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Structure, Morphology, and Mechanical Properties of AlCrN Coatings Deposited by Cathodic Arc Evaporation
Journal of Materials Engineering and Performance, 2019Co-Authors: Adam Gilewicz, Roman Jedrzejewski, Piotr Myslinski, Bogdan WarcholińskiAbstract:AlCrN coatings were deposited on steel substrates (HS6-5-2) using cathodic Arc Evaporation. The effect of nitrogen pressure on the properties of CrAlN coatings formed from Al_80Cr_20 cathode, such as chemical and phase composition of the coatings, surface morphology, deposition rate, hardness and adhesion to the substrate, and friction and wear were investigated. The coating deposited at nitrogen pressure of 3 Pa shows the highest deposition rate. The roughness parameter Ra of the coating surface decreases with increasing nitrogen pressure during its formation. The test results showed that the AlCrN coatings deposited under nitrogen pressure in the range from 1 to 5 Pa show similar hardness for all the coatings, which is around 17 GPa. The increase in the negative bias voltage of the substrate during the formation of the coating deteriorates its adhesion to the substrate, although the wear rate is rather good, about 1.4 × 10^−7 mm^3/Nm. The coatings deposited at nitrogen pressure of 3-4 Pa are characterized by the highest critical load, 95 N. Despite worse adhesion, these coatings are characterized by high resistance to wear, the wear rate is about 1.4 × 10^−7 mm^3/Nm.
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mechanical properties of cr o n coatings deposited by cathodic Arc Evaporation
Vacuum, 2018Co-Authors: Bogdan Warcholiński, Adam Gilewicz, A.s. Kuprin, G.n. Tolmachova, V.d. Ovcharenko, T. A. Kuznetsova, T I Zubar, A L Khudoley, S.a. ChizhikAbstract:Abstract Ternary chromium based coatings (Cr-O-N) were formed on HS6-5-2 steel substrates using a vacuum Arc plasma flux coating system at different relative oxygen concentrations, O2(x) = O2/(N2 + O2). The mechanical and tribological properties of the coatings were characterized using scanning electron microscopy (SEM), atomic force microscopy (AFM), hardness measurements, wear test and adhesion tests (scratch test and Daimler-Benz test). Special attention was paid to coating adhesion and failure modes in the adhesion tests. The coefficient of friction, wear rate and adhesion decreased as the relative oxygen concentration increased. Hardness of the coatings showed the opposite effect, increasing from approximately 19 GPa–30 GPa. The dominant failure mode of Cr-O-N coatings was abrasion. Individual micro fragmentation was also observed for Cr-O-N coating with O2(x) = 20%.
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mechanical properties of mo c n coatings deposited using cathodic Arc Evaporation
Surface & Coatings Technology, 2017Co-Authors: Bogdan Warcholiński, Adam Gilewicz, T. A. Kuznetsova, S.a. Chizhik, T I Zubar, S O Abetkovskaia, Vasilina LapitskayaAbstract:Abstract The mechanical and tribological properties of Mo(C)N coatings with different carbon concentration have been investigated. The set of coatings with different chemical composition were grown using cathodic Arc Evaporation in various atmosphere composition (nitrogen and acetylene mixture) in the vacuum chamber. The coatings have been tested in macro- and micro-scale. The tests in macro-scale have included: surface morphology (SEM, contact profilometry), hardness (nanoindentation), adhesion (scratch test), friction and wear (pin-on-disc). AFM method has been applied to measure tribological properties: friction coefficient and friction force, and wear in micro-scale. The highest carbon concentration in the coatings has been about 19 at.%. The coatings have shown very good adhesion to steel substrates, to 60 N. The hardness of the coatings has reached about 44 GPa for carbon free Mo N with evident minimum, about 34 GPa for coating with about 14 at.% of carbon. The wear rate of coatings tested in ball-on-disc system (macro-scale) has been very low, even to (4.7 ± 1.6) × 10 − 17 m 3 /Nm for Mo 0.64 C 0.07 N 0.29 coating and about two orders of magnitude lower than in AFM test (micro-scale) - 9.6 × 10 − 14 m 3 /Nm. Coefficient of friction in macro-scale has been about one level higher than in micro-scale, for Mo 0.64 C 0.07 N 0.29 coating it has been 0.42 and 0.041 respectively.
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corrosion resistance of crn and crcn crn coatings deposited using cathodic Arc Evaporation in ringer s and hank s solutions
Surface & Coatings Technology, 2016Co-Authors: Adam Gilewicz, P Chmielewska, Dawid Murzynski, Ewa Dobruchowska, Bogdan WarcholińskiAbstract:Abstract This paper presents the corrosion resistance of CrN monolayer coatings and CrCN/CrN multilayer coatings deposited by cathodic Arc Evaporation onto X39Cr13 stainless steel. Corrosion tests of the coating-substrate systems were conducted in Ringer's and Hank's solutions, usually used as infusion liquids. The parameters such as corrosion potential, corrosion current density and polarisation resistance were determined on the basis of the potentiodynamic polarisation curves. The corrosion properties of coatings in as-deposited state and after the polishing were compared. The results show that coated substrates are characterised by under half the corrosion potential and 10-times lower corrosion current density compared to the reference substrate (without coating). The corrosion parameters for polished coatings are slightly worse than unpolished, which is related to the method of coating deposition. The amount and distribution of macroparticles on the surface of the tested coatings are also presented.
Magnus Oden - One of the best experts on this subject based on the ideXlab platform.
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growth of hard amorphous tialsin thin films by cathodic Arc Evaporation
Surface & Coatings Technology, 2013Co-Authors: Hanna Fager, J M Andersson, M Johansson P Joesaar, Magnus Oden, Lars HultmanAbstract:Ti(1−x−y)AlxSiyNz (0.02≤x≤0.46, 0.02≤y≤0.28, and 1.08≤z≤1.29) thin films were grown on cemented carbide substrates in an industrial scale cathodic Arc Evaporation system using Ti-Al-Si compound cat ...
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ti si c n thin films grown by reactive Arc Evaporation from ti3sic2 cathodes
Journal of Materials Research, 2011Co-Authors: Anders Eriksson, Magnus Oden, Lars Hultman, Jianqiang Zhu, Naureen Ghafoor, Mats Johansson, Jacob Sjolen, Jens Jensen, Grzegorz Greczynski, Johanna RosenAbstract:Ti–Si–C–N thin films were deposited onto WC-Co substrates by industrial scale Arc Evaporation from Ti3SiC2 compound cathodes in N2 gas. Microstructure and hardness were found to be highly dependent on the wide range of film compositions attained, comprising up to 12 at.% Si and 16 at.% C. Nonreactive deposition yielded films consisting of understoichiometric TiCx, Ti, and silicide phases with high (27 GPa) hardness. At a nitrogen pressure of 0.25–0.5 Pa, below that required for N saturation, superhard, 45–50 GPa, (Ti,Si)(C,N) films with a nanocrystalline feathered structure were formed. Films grown above 2 Pa displayed crystalline phases of more pronounced nitride character, but with C and Si segregated to grain boundaries to form weak grain boundary phases. In abundance of N, the combined presence of Si and C disturbs cubic phase growth severely and compromises the mechanical strength of the films.
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microstructure evolution and age hardening in ti si c n thin films deposited by cathodic Arc Evaporation
Thin Solid Films, 2010Co-Authors: Lars Johnson, Magnus Oden, Mats Johansson, Lina Rogstrom, Lars HultmanAbstract:Ti1 − xSixCyN1 − y films have been deposited by reactive cathodic Arc Evaporation onto cemented carbide substrates. The films were characterized by X-ray diffraction, elastic recoil detection an ...
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age hardening in Arc evaporated zraln thin films
Scripta Materialia, 2010Co-Authors: Lina Rogstrom, Lars Hultman, Mats Johansson, Lars Johnson, Mats Ahlgren, Magnus OdenAbstract:Zr0.44Al0.56N1.20 films were deposited by reactive Arc Evaporation on WC-Co substrates. As-deposited films have a defect-rich NaCl-cubic and wurtzite phase mixture. During annealing at 1100 degrees ...
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characterization of worn ti si cathodes used for reactive cathodic Arc Evaporation
Journal of Vacuum Science and Technology, 2010Co-Authors: Jianqiang Zhu, Lars Hultman, Anders Eriksson, Naureen Ghafoor, Mats Johansson, Jacob Sjolen, Johanna Rosen, Magnus OdenAbstract:The microstructural evolution of Ti1-xSix cathode surfaces (x=0, 0.1, 0.2) used in reactive cathodic Arc Evaporation has been investigated by analytical electron microscopy and x-ray diffractometry ...