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P.m. Gabla - One of the best experts on this subject based on the ideXlab platform.

S. Borderieux - One of the best experts on this subject based on the ideXlab platform.

G. Grandpierre - One of the best experts on this subject based on the ideXlab platform.

Eric Brandon - One of the best experts on this subject based on the ideXlab platform.

David M. Holburn - One of the best experts on this subject based on the ideXlab platform.

  • A novel pixellated solid-state photon detector for enhancing the Everhart-Thornley detector.
    Microscopy Research and Technique, 2013
    Co-Authors: Joon Huang Chuah, David M. Holburn
    Abstract:

    This article presents a pixellated solid-state photon detector designed specifically to improve certain aspects of the existing Everhart-Thornley detector. The photon detector was constructed and fabricated in an Austriamicrosystems 0.35 µm complementary metal-oxide-semiconductor process technology. This integrated circuit consists of an array of high-responsivity photodiodes coupled to corresponding low-noise transimpedance amplifiers, a selector-combiner circuit and a variable-gain Postamplifier. Simulated and experimental results show that the photon detector can achieve a maximum transimpedance gain of 170 dBΩ and minimum bandwidth of 3.6 MHz. It is able to detect signals with optical power as low as 10 nW and produces a minimum signal-to-noise ratio (SNR) of 24 dB regardless of gain configuration. The detector has been proven to be able to effectively select and combine signals from different pixels. The key advantages of this detector are smaller dimensions, higher cost effectiveness, lower voltage and power requirements and better integration. The photon detector supports pixel-selection configurability which may improve overall SNR and also potentially generate images for different analyses. This work has contributed to the future research of system-level integration of a pixellated solid-state detector for secondary electron detection in the scanning electron microscope.

  • Design of Pixellated CMOS Photon Detector for Secondary Electron Detection in the Scanning Electron Microscope
    Advances in OptoElectronics, 2011
    Co-Authors: Joon Huang Chuah, David M. Holburn
    Abstract:

    This paper presents a novel method of detecting secondary electrons generated in the scanning electron microscope (SEM). The method suggests that the photomultiplier tube (PMT), traditionally used in the Everhart-Thornley (ET) detector, is to be replaced with a configurable multipixel solid-state photon detector offering the advantages of smaller dimension, lower supply voltage and power requirements, and potentially cheaper product cost. The design of the proposed detector has been implemented using a standard 0.35 μm CMOS technology with optical enhancement. This microchip comprises main circuit constituents of an array of photodiodes connecting to respective noise-optimised transimpedance amplifiers (TIAs), a selector-combiner (SC) circuit, and a Postamplifier (PA). The design possesses the capability of detecting photons with low input optical power in the range of 1 nW with 100 μm × 100 μm sized photodiodes and achieves a total amplification of 180 dBΩ at the output.