The Experts below are selected from a list of 724995 Experts worldwide ranked by ideXlab platform
Yangyua Wang - One of the best experts on this subject based on the ideXlab platform.
-
an integrated gas Sensor Technology using surface micro machining
Sensors and Actuators B-chemical, 2002Co-Authors: P C H Cha, Lieyi Sheng, Rajnish K Sharma, Zhena Tang, Iming Hsing, Yangyua WangAbstract:We report the first silicon based integrated gas Sensor Technology using surface micro-machined micro-hotplate (MHP). In this work, the thermally isolated hotplate was fabricated using surface silicon micro-machining technique. Various etching window designs for the polysilicon sacrificial etch were also explored to optimize the surface micro-machining process yield. The front-side surface micro-machined MHP provide excellent manufacturing yield compared to the bulk micro-machined counterpart and at the same time retains all the desirable thermal characteristics that are essential to the integrated gas Sensor application. Integrated gas Sensors with sensitivity down to 1 ppm of carbon monoxide were demonstrated using this Technology. This approach has been extended to integrated gas Sensor array.
-
an integrated gas Sensor Technology using surface micro machining
International Conference on Micro Electro Mechanical Systems, 2001Co-Authors: P C H Cha, Lieyi Sheng, Rajnish K Sharma, Zhena Tang, Iming Hsing, Yangyua WangAbstract:We report the silicon based integrated gas Sensor Technology using surface micro-machined micro-hotplate. Using this Technology, an integrated gas Sensor sensitive to 1 ppm of carbon monoxide was demonstrated. This approach was extended to integrated gas Sensor array application.
Lieyi Sheng - One of the best experts on this subject based on the ideXlab platform.
-
an integrated gas Sensor Technology using surface micro machining
Sensors and Actuators B-chemical, 2002Co-Authors: P C H Cha, Lieyi Sheng, Rajnish K Sharma, Zhena Tang, Iming Hsing, Yangyua WangAbstract:We report the first silicon based integrated gas Sensor Technology using surface micro-machined micro-hotplate (MHP). In this work, the thermally isolated hotplate was fabricated using surface silicon micro-machining technique. Various etching window designs for the polysilicon sacrificial etch were also explored to optimize the surface micro-machining process yield. The front-side surface micro-machined MHP provide excellent manufacturing yield compared to the bulk micro-machined counterpart and at the same time retains all the desirable thermal characteristics that are essential to the integrated gas Sensor application. Integrated gas Sensors with sensitivity down to 1 ppm of carbon monoxide were demonstrated using this Technology. This approach has been extended to integrated gas Sensor array.
-
an integrated gas Sensor Technology using surface micro machining
International Conference on Micro Electro Mechanical Systems, 2001Co-Authors: P C H Cha, Lieyi Sheng, Rajnish K Sharma, Zhena Tang, Iming Hsing, Yangyua WangAbstract:We report the silicon based integrated gas Sensor Technology using surface micro-machined micro-hotplate. Using this Technology, an integrated gas Sensor sensitive to 1 ppm of carbon monoxide was demonstrated. This approach was extended to integrated gas Sensor array application.
Zhena Tang - One of the best experts on this subject based on the ideXlab platform.
-
an integrated gas Sensor Technology using surface micro machining
Sensors and Actuators B-chemical, 2002Co-Authors: P C H Cha, Lieyi Sheng, Rajnish K Sharma, Zhena Tang, Iming Hsing, Yangyua WangAbstract:We report the first silicon based integrated gas Sensor Technology using surface micro-machined micro-hotplate (MHP). In this work, the thermally isolated hotplate was fabricated using surface silicon micro-machining technique. Various etching window designs for the polysilicon sacrificial etch were also explored to optimize the surface micro-machining process yield. The front-side surface micro-machined MHP provide excellent manufacturing yield compared to the bulk micro-machined counterpart and at the same time retains all the desirable thermal characteristics that are essential to the integrated gas Sensor application. Integrated gas Sensors with sensitivity down to 1 ppm of carbon monoxide were demonstrated using this Technology. This approach has been extended to integrated gas Sensor array.
-
an integrated gas Sensor Technology using surface micro machining
International Conference on Micro Electro Mechanical Systems, 2001Co-Authors: P C H Cha, Lieyi Sheng, Rajnish K Sharma, Zhena Tang, Iming Hsing, Yangyua WangAbstract:We report the silicon based integrated gas Sensor Technology using surface micro-machined micro-hotplate. Using this Technology, an integrated gas Sensor sensitive to 1 ppm of carbon monoxide was demonstrated. This approach was extended to integrated gas Sensor array application.
Igo Ouk - One of the best experts on this subject based on the ideXlab platform.
-
measurements and simulations of low dark count rate single photon avalanche diode device in a low voltage 180 nm cmos image Sensor Technology
IEEE Transactions on Electron Devices, 2013Co-Authors: Tome Leitne, A Feiningstei, R Turchetta, Rebecca E Coath, S Chick, Gil Visokolov, Vitali Savuska, M Javi, Lio Gal, Igo OukAbstract:This paper presents the key features of single photon avalanche diode (SPAD) devices fabricated in a low voltage commercial 180-nm CMOS image Sensor Technology exhibiting very low dark count rate (DCR). The measured DCR is <; 100 Hz at room temperature even for excess voltages above 2 V. The active junction of the SPAD measures 10 μm in diameter within a 24-μm test structure. The active region where Geiger avalanche occurs is determined by an implanted charge sheet. Edge avalanche is averted by utilizing a virtual guard ring, formed by the retrograde well profile. The design, measurements, and simulations of doping and electric field profiles that lead to such low DCR are reported and analyzed. The current-voltage characteristics and the temperature dependence of the breakdown voltage provide further, indirect evidence for the low DCR measured in the device. Thus, the key features of measured good SPADs are presented and are correlated with simulations that give physical insight on how to design high-performance SPADs.
Kevin P Chen - One of the best experts on this subject based on the ideXlab platform.
-
regenerated gratings in air hole microstructured fibers for high temperature pressure sensing
Optics Letters, 2011Co-Authors: Tong Chen, Rongzhang Chen, Charles Jewart, Botao Zhang, Kevin Cook, John Canning, Kevin P ChenAbstract:We present thermally regenerated fiber Bragg gratings in air-hole microstructured fibers for high-temperature, hydrostatic pressure measurements. High-temperature stable gratings were regenerated during an 800 °C annealing process from hydrogen-loaded Type I seed gratings. The wavelength shifts and separation of grating peaks were studied as functions of external hydrostatic pressure from 15 to 2400 psi, and temperature from 24 °C to 800 °C. This Letter demonstrates a multiplexible pressure and temperature Sensor Technology for high-temperature environments using a single optical fiber feedthrough.
-
ultrafast femtosecond laser induced fiber bragg gratings in air hole microstructured fibers for high temperature pressure sensing
Optics Letters, 2010Co-Authors: Charles Jewart, John Canning, Qingqing Wang, Dan Grobnic, Stephen J Mihailov, Kevin P ChenAbstract:We present fiber Bragg grating pressure Sensors in air-hole microstructured fibers for high-temperature operation above 800°C. An ultrafast laser was used to inscribe Type II grating in two-hole optical fibers. The fiber Bragg grating resonance wavelength shift and peak splits were studied as a function of external hydrostatic pressure from 15 psito2000 psi. The grating pressure Sensor shows stable and reproducible operation above 800°C. We demonstrate a multiplexible pressure Sensor Technology for a high-temperature environment using a single fiber and a single-fiber feedthrough.
