The Experts below are selected from a list of 231 Experts worldwide ranked by ideXlab platform
Carmen S. Menoni - One of the best experts on this subject based on the ideXlab platform.
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Nanopatterning and Nanomachining with Table-top Extreme Ultraviolet Lasers
MRS Proceedings, 2011Co-Authors: M C Marconi, P. W. Wachulak, Carmen S. Menoni, M. G. Capeluto, Georgyi Vaschenko, Herman Bravo, Jorge J. Rocca, Erik H. Anderson, Weilun Chao, David T. AttwoodAbstract:Nanopatterning and nanomachining of PMMA coated wafers was performed using table top extreme Ultraviolet Lasers. Features below 100 nm were imprinted with short (50-60 s) exposure times.
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Extreme Ultraviolet Lasers demonstrate new nano-patterning schemes
2010 23rd Annual Meeting of the IEEE Photonics Society, PHOTINICS 2010, 2010Co-Authors: M C Marconi, Artak Isoyan, P. W. Wachulak, Yang-chun Cheng, Jean Paul Rocca, Fang Jiang, L Urbanski, Carmen S. Menoni, Franco CerrinaAbstract:Table-top extreme Ultraviolet Lasers at =46.9 allow compact photo-lithography systems utilizing coherent imaging techniques. Interferometric lithography, holographic lithography and Talbot lithography were demonstrated with sub-100 nm resolution in compact setups.
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Table top schemes for nano-patterning with extreme Ultraviolet Lasers
America, 2009Co-Authors: L Urbanski, Artak Isoyan, P. W. Wachulak, Yang-chun Cheng, Jean Paul Rocca, Fang Jiang, Carmen S. MenoniAbstract:We discuss different nanopatterning approaches using table top extreme Ultraviolet Lasers based on interferometric lithography, Talbot self imaging and holographic projection lithography.
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Table top Ultraviolet Lasers enable new nano-patterning schemes
Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, 2009Co-Authors: M C Marconi, Artak Isoyan, P. W. Wachulak, Yang-chun Cheng, Jean Paul Rocca, Fang Jiang, L Urbanski, Carmen S. Menoni, Franco CerrinaAbstract:We present results with different nanopatterning techniques using table top extreme Ultraviolet Lasers. The three approaches are interferometric lithography, Talbot self imaging and holographic projection lithography. © 2009 IEEE.
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Nanopatterning in a compact setup using table top extreme Ultraviolet Lasers
Opto-Electronics Review, 2008Co-Authors: P. W. Wachulak, Carmen S. Menoni, M. G. Capeluto, Jorge J. Rocca, M. C. MarconiAbstract:The recent development of table top extreme Ultraviolet (EUV) Lasers have enabled new applications that so far were restricted to the use of large facilities. These compact sources bring now to the laboratory environment the capabilities that will allow a broader application of techniques related to nanotechnology and nanofabrication. In this paper we review the advances in the utilization of EUV Lasers in nanopatterning. In particular we show results of the nanopatterning using a table-top capillary discharge laser producing 0.12-mJ laser pulses with 1.2-ns time duration at a wavelength λ = 46.9 nm. The nanopatterning was realized by interferometric lithography using a Lloyd’s mirror interferometer. Two standard photoresists were used in this work, polymethyl methacrylate (PMMA) and hydrogen silsesquioxane (HSQ). Pillars with a full width half maximum (FWHM) diameter of 60 nm and holes with FWHM diameter of 130 nm were obtained over areas in excess of 500×500 μm^2.
P. W. Wachulak - One of the best experts on this subject based on the ideXlab platform.
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Nanopatterning and Nanomachining with Table-top Extreme Ultraviolet Lasers
MRS Proceedings, 2011Co-Authors: M C Marconi, P. W. Wachulak, Carmen S. Menoni, M. G. Capeluto, Georgyi Vaschenko, Herman Bravo, Jorge J. Rocca, Erik H. Anderson, Weilun Chao, David T. AttwoodAbstract:Nanopatterning and nanomachining of PMMA coated wafers was performed using table top extreme Ultraviolet Lasers. Features below 100 nm were imprinted with short (50-60 s) exposure times.
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Extreme Ultraviolet Lasers demonstrate new nano-patterning schemes
2010 23rd Annual Meeting of the IEEE Photonics Society, PHOTINICS 2010, 2010Co-Authors: M C Marconi, Artak Isoyan, P. W. Wachulak, Yang-chun Cheng, Jean Paul Rocca, Fang Jiang, L Urbanski, Carmen S. Menoni, Franco CerrinaAbstract:Table-top extreme Ultraviolet Lasers at =46.9 allow compact photo-lithography systems utilizing coherent imaging techniques. Interferometric lithography, holographic lithography and Talbot lithography were demonstrated with sub-100 nm resolution in compact setups.
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Table top schemes for nano-patterning with extreme Ultraviolet Lasers
America, 2009Co-Authors: L Urbanski, Artak Isoyan, P. W. Wachulak, Yang-chun Cheng, Jean Paul Rocca, Fang Jiang, Carmen S. MenoniAbstract:We discuss different nanopatterning approaches using table top extreme Ultraviolet Lasers based on interferometric lithography, Talbot self imaging and holographic projection lithography.
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Table top Ultraviolet Lasers enable new nano-patterning schemes
Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, 2009Co-Authors: M C Marconi, Artak Isoyan, P. W. Wachulak, Yang-chun Cheng, Jean Paul Rocca, Fang Jiang, L Urbanski, Carmen S. Menoni, Franco CerrinaAbstract:We present results with different nanopatterning techniques using table top extreme Ultraviolet Lasers. The three approaches are interferometric lithography, Talbot self imaging and holographic projection lithography. © 2009 IEEE.
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Nanopatterning in a compact setup using table top extreme Ultraviolet Lasers
Opto-Electronics Review, 2008Co-Authors: P. W. Wachulak, Carmen S. Menoni, M. G. Capeluto, Jorge J. Rocca, M. C. MarconiAbstract:The recent development of table top extreme Ultraviolet (EUV) Lasers have enabled new applications that so far were restricted to the use of large facilities. These compact sources bring now to the laboratory environment the capabilities that will allow a broader application of techniques related to nanotechnology and nanofabrication. In this paper we review the advances in the utilization of EUV Lasers in nanopatterning. In particular we show results of the nanopatterning using a table-top capillary discharge laser producing 0.12-mJ laser pulses with 1.2-ns time duration at a wavelength λ = 46.9 nm. The nanopatterning was realized by interferometric lithography using a Lloyd’s mirror interferometer. Two standard photoresists were used in this work, polymethyl methacrylate (PMMA) and hydrogen silsesquioxane (HSQ). Pillars with a full width half maximum (FWHM) diameter of 60 nm and holes with FWHM diameter of 130 nm were obtained over areas in excess of 500×500 μm^2.
M C Marconi - One of the best experts on this subject based on the ideXlab platform.
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Nanopatterning and Nanomachining with Table-top Extreme Ultraviolet Lasers
MRS Proceedings, 2011Co-Authors: M C Marconi, P. W. Wachulak, Carmen S. Menoni, M. G. Capeluto, Georgyi Vaschenko, Herman Bravo, Jorge J. Rocca, Erik H. Anderson, Weilun Chao, David T. AttwoodAbstract:Nanopatterning and nanomachining of PMMA coated wafers was performed using table top extreme Ultraviolet Lasers. Features below 100 nm were imprinted with short (50-60 s) exposure times.
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Extreme Ultraviolet Lasers demonstrate new nano-patterning schemes
2010 23rd Annual Meeting of the IEEE Photonics Society, PHOTINICS 2010, 2010Co-Authors: M C Marconi, Artak Isoyan, P. W. Wachulak, Yang-chun Cheng, Jean Paul Rocca, Fang Jiang, L Urbanski, Carmen S. Menoni, Franco CerrinaAbstract:Table-top extreme Ultraviolet Lasers at =46.9 allow compact photo-lithography systems utilizing coherent imaging techniques. Interferometric lithography, holographic lithography and Talbot lithography were demonstrated with sub-100 nm resolution in compact setups.
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Table top Ultraviolet Lasers enable new nano-patterning schemes
Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS, 2009Co-Authors: M C Marconi, Artak Isoyan, P. W. Wachulak, Yang-chun Cheng, Jean Paul Rocca, Fang Jiang, L Urbanski, Carmen S. Menoni, Franco CerrinaAbstract:We present results with different nanopatterning techniques using table top extreme Ultraviolet Lasers. The three approaches are interferometric lithography, Talbot self imaging and holographic projection lithography. © 2009 IEEE.
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Nanoscale Resolution Microscopy and Ablation with Extreme Ultraviolet Lasers
LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings, 2007Co-Authors: Carmen S. Menoni, M C Marconi, Georgyi Vaschenko, Herman Bravo, Fernando Brizuela, C. Brewer, B. Langdon, Dale Martz, B. M. Luther, Jorge J. RoccaAbstract:We obtain a spatial resolution down to 38 nm with full field imaging and laser-ablation systems that exploit the short wavelength and high brightness output from compact extreme Ultraviolet Lasers in combination with zone plate optics.
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Nanometer-scale imaging and ablation with Extreme Ultraviolet Lasers
2007 Conference on Lasers and Electro-Optics (CLEO), 2007Co-Authors: Carmen S. Menoni, M C Marconi, Georgyi Vaschenko, Herman Bravo, Fernando Brizuela, C. Brewer, B. Langdon, Mark Berrill, Dale Martz, Jorge J. RoccaAbstract:The short wavelength and high brightness of compact extreme Ultraviolet Lasers is shown to enable the development of microscopes with spatial resolution of tens of nanometers and new types of nanoprobes.
S. Zhao - One of the best experts on this subject based on the ideXlab platform.
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algan nanowires path to electrically injected semiconductor deep Ultraviolet Lasers
IEEE Journal of Quantum Electronics, 2018Co-Authors: S. ZhaoAbstract:In this paper, we review the recent progress of AlGaN nanowire heterostructures and the demonstration of electrically pumped semiconductor deep Ultraviolet (UV) Lasers with such nanowires. Future prospects and challenges for nanowire deep UV Lasers are also presented.
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electrically injected algan nanowire deep Ultraviolet Lasers
IEEE Photonics Conference, 2016Co-Authors: S. Zhao, Xianhe Liu, S Y Woo, Matthieu Bugnet, G. BottonAbstract:We report on the demonstration of AlGaN nanowire Lasers in the Ultraviolet (UV)-B and UV-C bands. The AlGaN nanowires were grown directly on Si substrate and were characterized by the presence of quantum-dot-like nanostructures. At room temperature, the lasing threshold was measured to be ∼30 μA.
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three dimensional quantum confinement of charge carriers in self organized algan nanowires a viable route to electrically injected deep Ultraviolet Lasers
Nano Letters, 2015Co-Authors: S. Zhao, Xianhe Liu, S Y Woo, Matthieu Bugnet, Jidong Kang, G. BottonAbstract:We report on the molecular beam epitaxial growth and structural characterization of self-organized AlGaN nanowire arrays on Si substrate with high luminescence efficiency emission in the deep Ultraviolet (UV) wavelength range. It is found that, with increasing Al concentration, atomic-scale compositional modulations can be realized, leading to three-dimensional quantum confinement of charge carriers. By further exploiting the Anderson localization of light, we have demonstrated, for the first time, electrically injected AlGaN Lasers in the deep UV band operating at room temperature. The laser operates at ∼289 nm and exhibits a threshold of 300 A/cm2, which is significantly smaller compared to the previously reported electrically injected AlGaN multiple quantum well Lasers.
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AlGaN nanowire Ultraviolet Lasers on Si
2015 IEEE Summer Topicals Meeting Series (SUM), 2015Co-Authors: S. Zhao, K.-h. Li, G. Botton, Z. MiAbstract:In this work, we demonstrate electrically injected Ultraviolet Lasers by spontaneously formed AlGaN nanowires on Si. The optical cavity is formed due to the Anderson localization of light.
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ultralow threshold electrically injected algan nanowire Ultraviolet Lasers on si
Proceedings of SPIE, 2015Co-Authors: Xianhe Liu, S. Zhao, Qi WangAbstract:Ultraviolet (UV) Lasers are of paramount importance for applications in water purification, diagnosis and bio-agent detection. Here we report that, with the use of dislocation-free AlGaN nanowires formed directly on Si substrate, electrically injected UV emission in the wavelength range from 319 nm to 335 nm can be readily achieved, which is the shortest wavelength range ever reported for electrically injected semiconductor Lasers. In this work, catalyst-free AlGaN nanowire arrays are grown directly on Si substrate by radio frequency plasma-assisted molecular beam epitaxy (MBE). Our detailed calculation shows that such vertically aligned randomly distributed sub-wavelength scale nanowire array can sustain random lasing action. Various lasing peaks from 319 nm to 335 nm can be measured from such AlGaN nanowire samples under electrical injection. The threshold is measured to be in the range of tens of A/cm2 at cryogenic temperature, which is significantly smaller than the commonly reported GaN-based quantum well Lasers. The measured linewidth is as narrow as 0.2 nm.
Jorge J. Rocca - One of the best experts on this subject based on the ideXlab platform.
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Nanopatterning and Nanomachining with Table-top Extreme Ultraviolet Lasers
MRS Proceedings, 2011Co-Authors: M C Marconi, P. W. Wachulak, Carmen S. Menoni, M. G. Capeluto, Georgyi Vaschenko, Herman Bravo, Jorge J. Rocca, Erik H. Anderson, Weilun Chao, David T. AttwoodAbstract:Nanopatterning and nanomachining of PMMA coated wafers was performed using table top extreme Ultraviolet Lasers. Features below 100 nm were imprinted with short (50-60 s) exposure times.
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Nanopatterning in a compact setup using table top extreme Ultraviolet Lasers
Opto-Electronics Review, 2008Co-Authors: P. W. Wachulak, Carmen S. Menoni, M. G. Capeluto, Jorge J. Rocca, M. C. MarconiAbstract:The recent development of table top extreme Ultraviolet (EUV) Lasers have enabled new applications that so far were restricted to the use of large facilities. These compact sources bring now to the laboratory environment the capabilities that will allow a broader application of techniques related to nanotechnology and nanofabrication. In this paper we review the advances in the utilization of EUV Lasers in nanopatterning. In particular we show results of the nanopatterning using a table-top capillary discharge laser producing 0.12-mJ laser pulses with 1.2-ns time duration at a wavelength λ = 46.9 nm. The nanopatterning was realized by interferometric lithography using a Lloyd’s mirror interferometer. Two standard photoresists were used in this work, polymethyl methacrylate (PMMA) and hydrogen silsesquioxane (HSQ). Pillars with a full width half maximum (FWHM) diameter of 60 nm and holes with FWHM diameter of 130 nm were obtained over areas in excess of 500×500 μm^2.
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Nanoscale Resolution Microscopy and Ablation with Extreme Ultraviolet Lasers
LEOS 2007 - IEEE Lasers and Electro-Optics Society Annual Meeting Conference Proceedings, 2007Co-Authors: Carmen S. Menoni, M C Marconi, Georgyi Vaschenko, Herman Bravo, Fernando Brizuela, C. Brewer, B. Langdon, Dale Martz, B. M. Luther, Jorge J. RoccaAbstract:We obtain a spatial resolution down to 38 nm with full field imaging and laser-ablation systems that exploit the short wavelength and high brightness output from compact extreme Ultraviolet Lasers in combination with zone plate optics.
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Nanometer-scale imaging and ablation with Extreme Ultraviolet Lasers
2007 Conference on Lasers and Electro-Optics (CLEO), 2007Co-Authors: Carmen S. Menoni, M C Marconi, Georgyi Vaschenko, Herman Bravo, Fernando Brizuela, C. Brewer, B. Langdon, Mark Berrill, Dale Martz, Jorge J. RoccaAbstract:The short wavelength and high brightness of compact extreme Ultraviolet Lasers is shown to enable the development of microscopes with spatial resolution of tens of nanometers and new types of nanoprobes.
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Table top nanopatterning with extreme Ultraviolet laser illumination
Microelectronic Engineering, 2007Co-Authors: M. G. Capeluto, P. W. Wachulak, M C Marconi, Carmen S. Menoni, Jorge J. Rocca, Erik H. Anderson, Weilun Chao, Dinesh Patel, Claudio Iemmi, David AttwoodAbstract:Patterning with extreme Ultraviolet light generated by a compact, bright laser source operating at a wavelength of 46.9nm is demonstrated using two complementary approaches: multiple beam interferometric lithography and de-magnifying projection. Features with sizes ranging from 370nm to 60nm were printed in a few seconds in poly-methyl methacrylate resist. These proof-of-principle experiments demonstrate practical table-top nanopatterning tools based on extreme Ultraviolet Lasers for nanotechnology applications.